METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL
    2.
    发明申请
    METHOD AND APPARATUS TO HELP PROMOTE CONTACT OF GAS WITH VAPORIZED MATERIAL 审中-公开
    方法和装置帮助促进与气体材料接触的气体

    公开(公告)号:US20170029946A1

    公开(公告)日:2017-02-02

    申请号:US15295662

    申请日:2016-10-17

    申请人: Entegris, Inc.

    摘要: Vaporizable material is supported within a vessel to promote contact of an introduced gas with the vaporizable material, and produce a product gas including vaporized material. A heating element supplies heat to a wall of the vessel to heat vaporizable material disposed therein. The vessel may comprise an ampoule having a removable top. Multiple containers defining multiple material support surfaces may be stacked disposed within a vessel in thermal communication with the vessel. A tube may be disposed within the vessel and coupled to a gas inlet. Filters, flow meters, and level sensors may be further provided. Product gas resulting from contact of introduced gas with vaporized material may be delivered to atomic layer deposition (ALD) or similar process equipment. At least a portion of source material including a solid may be dissolved in a solvent, followed by removal of solvent to yield source material (e.g., a metal complex) disposed within the vaporizer.

    摘要翻译: 可汽化材料支撑在容器内以促进引入的气体与可蒸发材料的接触,并产生包括蒸发材料的产物气体。 加热元件向容器的壁提供热量以加热设置在其中的可蒸发材料。 容器可以包括具有可移除顶部的安瓿。 限定多个材料支撑表面的多个容器可以堆放在与容器热连通的容器内。 管可以设置在容器内并且联接到气体入口。 可以进一步提供过滤器,流量计和液位传感器。 由引入的气体与汽化材料的接触产生的产物气体可以被输送到原子层沉积(ALD)或类似的工艺设备。 包含固体的源材料的至少一部分可以溶解在溶剂中,然后除去溶剂以产生设置在蒸发器内的源材料(例如,金属络合物)。

    Reservoir management system
    6.
    发明授权
    Reservoir management system 失效
    水库管理系统

    公开(公告)号:US06818124B1

    公开(公告)日:2004-11-16

    申请号:US09951183

    申请日:2001-09-13

    申请人: Brent Simmons

    发明人: Brent Simmons

    IPC分类号: C02F100

    摘要: A system, method, and apparatus for managing a water supply in a water tank are presented herein. A submersible pump is placed inside the water tank. The thrust of the pump causes a considerable increase in water circulation about the water tank, thereby resulting in a more consistent water supply. Chemical disinfectants are added directly in front of the pump, thereby resulting in better mixing. Additionally an outlet from the pump provides a testable sample for measurement of the concentration of the chemical disinfectant. The measurements of the concentration of the chemical disinfectant are provided to a programmable logic controller which makes real time adjustments to the chemical disinfectants that are added.

    摘要翻译: 本文提供了一种用于管理水箱中的供水的系统,方法和装置。 潜水泵放置在水箱内。 泵的推力导致水箱周围水循环的显着增加,从而导致更一致的供水。 化学消毒剂直接加入泵的前面,从而形成更好的混合。 此外,泵的出口提供了可测试的样品,用于测量化学消毒剂的浓度。 将化学消毒剂的浓度测量值提供给可编程逻辑控制器,可对添加的化学消毒剂进行实时调整。

    Chiller tank system and method for chilling liquids
    7.
    发明授权
    Chiller tank system and method for chilling liquids 失效
    冷水箱系统和冷却液体的方法

    公开(公告)号:US06477855B1

    公开(公告)日:2002-11-12

    申请号:US10134857

    申请日:2002-04-29

    IPC分类号: F25D1702

    摘要: A chiller tank system for containment of chilled liquids comprises a first tank and a second tank position within the first tank. The first tank is spaced apart from the second tank so that insulation material can be positioned between them The second tank defines a chamber for receiving the liquid to be chilled. A straight-lined, chiller barrel is positioned vertically within the chamber, the chiller barrel defining a bore connected to a flexible, dual hose. The straight-lined chiller barrel extends downward into the tank thereby evenly chilling the liquid to avoid thermal stratification that causes vaporization by creating warm spots within the liquid. A refrigeration unit supplies inert refrigerant to the tank. The dual hose circulates refrigerant between the refrigeration unit and the chiller barrel, the dual hose comprising an inner hose within an outer hose, the outer hose concentric to and spaced apart from the inner hose thereby creating two channels, one for transporting the refrigerant to the chiller barrel and the other for transporting the refrigerant away from the chiller barrel.

    摘要翻译: 用于容纳冷冻液体的冷却箱系统包括在第一罐内的第一罐和第二罐位置。 第一个储罐与第二个储罐隔开,以便绝缘材料可以位于它们之间。第二个罐限定一个容纳待冷却液体的室。 直排式制冷机筒垂直放置在室内,冷水机筒限定了连接到柔性双软管的孔。 直线冷却器筒向下延伸到罐中,从而均匀地冷却液体,以避免热分层,通过在液体内产生温热点而引起汽化。 制冷单元向罐提供惰性制冷剂。 双软管在制冷单元和冷却器筒之间循环制冷剂,双软管包括外软管内的内软管,外软管与内软管同心并间隔开,从而形成两个通道,一个用于将制冷剂输送到 冷却器桶,另一个用于将制冷剂从冷却器筒输送。

    Large water reservoir management system
    8.
    发明申请
    Large water reservoir management system 失效
    大型水库管理体系

    公开(公告)号:US20020162802A1

    公开(公告)日:2002-11-07

    申请号:US10131677

    申请日:2002-04-24

    发明人: Brent Simmons

    IPC分类号: C02F001/00

    摘要: A method and apparatus for controlling water impurity level and temperature uniformity within large water-containing reservoirs including a pump located in the body of water, the pump ejecting a jet of water therefrom and ingesting water at a point remote from said ejecting and an eductor positioned in the jet of water for pulling in low pressure water and flowing a stream of water therefrom providing mixing and circulation of water within the reservoir to remove temperature gradients. Water purity is controlled by a controller.

    摘要翻译: 一种用于控制大型含水容器内的水分杂质水平和温度均匀性的方法和装置,包括位于水体内的泵,泵从其中喷出水流,并在远离所述喷射的位置摄取水,并将喷射器定位 在用于拉低压力水并从其中流出水流的水射流中,从而提供储存器内的水的混合和循环以去除温度梯度。 水的纯度由控制器控制。