公开(公告)号：US20240266231A1

公开(公告)日：2024-08-08

申请号：US18431909

申请日：2024-02-02

申请人： Applied Materials, Inc.

发明人： Wonjae Lee ,  Pradeep Kumar Subrahmanyan ,  D. Jeffrey Lischer ,  Frank Sinclair

IPC分类号： H01L21/66 ,  C23C14/54 ,  G01B9/02 ,  G01B11/16 ,  H01L23/00

CPC分类号： H01L22/12 ,  C23C14/547 ,  G01B9/02095 ,  G01B11/162 ,  H01L23/562

摘要： Disclosed systems and techniques are directed to correct an out-of-plane deformation (OPD) of a substrate. The techniques include obtaining, using optical inspection data, an OPD profile of the substrate and obtaining a polynomial representation of the OPD profile to determine a plurality of polynomial coefficients characterizing respective elemental deformation shapes of the substrate. The techniques further include identifying one or more cylindric decompositions of a quadratic part of the OPD profile and computing, using a selected cylindric decomposition of the one or more cylindric decompositions, one or more characteristics of a stress-compensation layer (SCL) for the substrate. The techniques further include causing the SCL to be deposited on the substrate and the SCL to be exposed to a stress-mitigation beam.

公开(公告)号：US20190186897A1

公开(公告)日：2019-06-20

申请号：US15848157

申请日：2017-12-20

申请人： TEXAS INSTRUMENTS INCORPORATED

发明人： Hung-Yu CHOU ,  Chien-Hao WANG ,  Tse-Tsun CHIU ,  Fu-Kang LEE ,  Liang-Kang SU

IPC分类号： G01B11/06 ,  G01B11/16 ,  G01B11/28 ,  G01B11/30

CPC分类号： G01B11/0625 ,  G01B11/162 ,  G01B11/285 ,  G01B11/303 ,  G01N21/00

摘要： A method for evaluating a leadframe surface includes positioning a leadframe on a measurement apparatus at a first predetermined distance relative to an end portion of a light source of an optical sensor; irradiating a predetermined area on a surface of the leadframe with light having a single predetermined wavelength from the light source; receiving, with a light receiver of the optical sensor, reflected light from the predetermined area on the surface of the leadframe, and converting the reflected light into an electric signal; determining a reflection intensity value of the predetermined area on the surface of the leadframe based on the electric signal; and calculating a reflection ratio of the predetermined area on the surface of the leadframe based on the reflection intensity value and a predetermined reference reflection intensity value associated with the light source.

公开(公告)号：US20180372603A1

公开(公告)日：2018-12-27

申请号：US15629673

申请日：2017-06-21

申请人： The Boeing Company

发明人： Morteza SAFAI ,  Xiaoxi WANG

IPC分类号： G01N3/24

CPC分类号： G01N3/24 ,  G01B11/162 ,  G01N3/32 ,  G01N3/60 ,  G01N19/04 ,  G01N2203/0007 ,  G01N2203/0208 ,  G01N2203/0417

摘要： A vacuum system and method for inspecting a workpiece that can include use the vacuum system, where the vacuum system can include a housing defining at least a portion of a vacuum chamber, a piston within the housing that oscillates to vary a volume of the vacuum chamber, a first valve and a second valve in fluid communication with the vacuum chamber, and a hood in fluid communication with the second valve and the vacuum chamber. The vacuum system can include high-speed valves that enable vacuum system cycling and thus vacuum pressure cycling at a rapid frequency.

公开(公告)号：US09816807B2

公开(公告)日：2017-11-14

申请号：US14915470

申请日：2014-08-27

申请人： Vestas Wind Systems A/S

发明人： Georg Herborg Enevoldsen ,  Henning Schroder ,  Kaj Morbech Halling

IPC分类号： G01B11/02 ,  G01B11/16 ,  G06T11/20 ,  F03D17/00

CPC分类号： G01B11/162 ,  F03D17/00 ,  G06T11/206

摘要： The present invention relates to a method of analyzing a laminated object and to a system for analyzing a laminated object. Illustrative embodiments herein relate to optical interferometry techniques for non-destructively analyzing laminated objects with large surface utilized to obtain data relating to the topography of an object under examination and to further process the obtained topographical data so as to identify type and/or severity and/or position of surface defects.

公开(公告)号：US08797515B2

公开(公告)日：2014-08-05

申请号：US13114238

申请日：2011-05-24

申请人： Takashi Sugimoto

发明人： Takashi Sugimoto

IPC分类号： G01L1/24 ,  G01B11/24 ,  G01B11/30 ,  G01B11/02 ,  G01B9/02 ,  G01B11/16

CPC分类号： G01B9/02095 ,  G01B9/02032 ,  G01B9/02084 ,  G01B9/02096 ,  G01B11/162 ,  G01B2290/35 ,  G01N21/45 ,  G01N21/4788 ,  G01N2021/479

摘要： An apparatus and a method capable of measuring large deformation with a high accuracy and dynamically, using speckle interference, utilizes an optical path where one laser beam out of two laser beams becomes non-collimated light and a plane parallel transparent plate, and can form carrier fringes. More specifically, the transparent plate is arranged on the optical path where the non-collimated light is formed, or is removed from the optical path, or a refractive index, or a thickness of the transparent plate arranged on the optical path, or a tilt angle relative to an optical axis is changed. The phase analysis can be performed from fringe images corresponding to the deformation, by performing repetitively the above-described processing and acquisition of the speckle interference pattern.

摘要翻译： 能够以高精度和动态地使用斑点干涉来测量大变形的装置和方法利用光路，其中两个激光束中的一个激光束成为非准直光和平面平行的透明板，并且可以形成载体 边缘。 更具体地，透明板被布置在光路上，其中形成非准直光，或者从光路中去除，或者折射率，或布置在光路上的透明板的厚度，或倾斜 相对于光轴的角度发生变化。 相位分析可以从对应于变形的条纹图像中进行，通过重复执行上述的斑点干涉图案的处理和获取。

公开(公告)号：US20130141712A1

公开(公告)日：2013-06-06

申请号：US13693674

申请日：2012-12-04

申请人： Pascal Blain ,  Yvon Renotte ,  Serge Habraken ,  Pascal Waroux

发明人： Pascal Blain ,  Yvon Renotte ,  Serge Habraken ,  Pascal Waroux

IPC分类号： G01B11/16

CPC分类号： G01B11/162 ,  G01B9/0203 ,  G01B9/02095 ,  G01B9/02098 ,  G01B11/2527 ,  G01B2290/70

摘要： The present invention relates to a portable industrial instrument for performing, in an integrated and two-way manner, an interferometric fringe projection and shearography, on a object to be tested, so that, when the two-way interferometer (1) is associated with the coherent or quasi-coherent projection device (2), the instrument is able to measure the 3D shape of the object by interferometric fringe projection, also known as moiré method, and, when the two-way interferometer (1) is associated with the recording or imaging device (4), the instrument is able to perform shearographic measurements on the object, the direction of the traversing light beam in the interferometer (1) being reversed when shifting from one measurement configuration to the other one.

摘要翻译： 本发明涉及一种便携式工业仪器，用于以综合和双向的方式在待测物体上进行干涉条纹投射和剪切，从而当双向干涉仪（1）与 相干或准相干投影设备（2），仪器能够通过干涉条纹投影（也称为莫尔法）测量物体的3D形状，并且当双向干涉仪（1）与 记录或成像装置（4），仪器能够对物体执行剪切测量，当从一个测量配置转移到另一个测量配置时，干涉仪（1）中的横穿光束的方向被反转。

公开(公告)号：US08400494B2

公开(公告)日：2013-03-19

申请号：US11991994

申请日：2006-03-14

申请人： Zeev Zalevsky ,  Alexander Shpunt ,  Aviad Malzels ,  Javier Garcia

发明人： Zeev Zalevsky ,  Alexander Shpunt ,  Aviad Malzels ,  Javier Garcia

IPC分类号： H04N13/02

CPC分类号： H01L27/11524 ,  G01B11/162 ,  G01B11/2441 ,  G01B11/2513 ,  G06T7/521 ,  G06T2207/10012 ,  G06T2207/20056 ,  H01L23/528 ,  H01L23/535 ,  H01L27/11519 ,  H01L29/0688 ,  H01L29/42328 ,  H01L29/788 ,  H01L2924/0002 ,  H04N13/20 ,  H04N13/254

摘要： A system and method are presented for use in the object reconstruction. The system comprises an illuminating unit, and an imaging unit (see FIG. 1). The illuminating unit comprises a coherent light source and a generator of a random speckle pattern accommodated in the optical path of illuminating light propagating from the light source towards an object, thereby projecting onto the object a coherent random speckle pattern. The imaging unit is configured for detecting a light response of an illuminated region and generating image data. The image data is indicative of the object with the projected speckles pattern and thus indicative of a shift of the pattern in the image of the object relative to a reference image of said pattern. This enables real-time reconstruction of a three-dimensional map of the object.

公开(公告)号：US07456973B2

公开(公告)日：2008-11-25

申请号：US10833243

申请日：2004-04-27

申请人： Hans Steinbichler ,  Roman Berger ,  Thomas Mayer

发明人： Hans Steinbichler ,  Roman Berger ,  Thomas Mayer

IPC分类号： G01B9/021

CPC分类号： G01M17/027 ,  G01B11/162 ,  G01B11/2441

摘要： The invention serves for the contour measurement and/or deformation measurement of an object, particularly a tire or a structural component of a composite material. The object is irradiated with light, particularly structured light, that is emitted by a radiation source and consists, in particular, of coherent light or partially coherent light, especially laser light. The light reflected by the object is picked up by a camera with an imaging sensor. In order to improve the image quality, a first image is produced with a first adjustment of the camera and/or the radiation source which is adapted to a first image region (13). In addition, a second image is produced with a second adjustment of the camera and/or the radiation source which is adapted to a second image region (12). Both images are combined (FIG. 5).

摘要翻译： 本发明用于对象，特别是轮胎或复合材料的结构部件的轮廓测量和/或变形测量。 物体被由辐射源发射的特别结构化的光照射，特别是由相干光或部分相干光，特别是激光组成。 被物体反射的光由具有成像传感器的照相机拾取。 为了提高图像质量，通过适应于第一图像区域（13）的照相机和/或辐射源的第一调整产生第一图像。 另外，通过适应于第二图像区域（12）的相机和/或辐射源的第二调整产生第二图像。 两个图像组合（图5）。

公开(公告)号：US20080055583A1

公开(公告)日：2008-03-06

申请号：US11596725

申请日：2005-11-23

申请人： Jean-Claude Lecomte ,  Romain Fayolle

发明人： Jean-Claude Lecomte ,  Romain Fayolle

IPC分类号： G01L1/24 ,  G01B11/16

CPC分类号： G01B11/162

摘要： The device enables strains of at least one surface (1) of a sample (2) to be measured versus temperature. Strains in a direction perpendicular to a predetermined plane, for example the plane of the surface (1), are measured by composite images. Strains in said plane are measured by image correlation. The measurements by image correlation and by composite images use a common visible light detection camera (3). The sample (2) is arranged in an enclosure (6) transparent at least locally to visible light (L). At least one infrared emitter (9) enables an infrared light to be created in a spectral band for a large part not detected by the camera (3).

摘要翻译： 该装置使样品（2）的至少一个表面（1）的应变能够相对于温度进行测量。 通过合成图像来测量与预定平面垂直的方向，例如表面（1）的平面。 通过图像相关度来测量所述平面中的菌株。 通过图像相关和合成图像的测量使用公共的可见光检测相机（3）。 样品（2）布置在至少局部可见光（L）透明的外壳（6）中。 至少一个红外发射器（9）使得能够在光谱带中创建不被照相机（3）检测到的大部分的红外光。

公开(公告)号：US20070005269A1

公开(公告)日：2007-01-04

申请号：US11173700

申请日：2005-06-30

申请人： Michael Mitchell

发明人： Michael Mitchell

IPC分类号： G01B5/28

CPC分类号： G01B11/162 ,  G01N29/11 ,  G01N29/4418 ,  G01N2291/015

摘要： Methods, systems, and articles of manufacture consistent with the present invention identify a flaw in a structure by comparing a first interference pattern resulting from a first wave signal and a second wave signal propagating through the structure to a second interference pattern resulting from the first wave signal and the second wave signal propagating through the structure. The second interference pattern is obtained after obtaining the first interference pattern. It is determined whether there is a flaw in the structure by determining whether the first interference pattern deviates from the second interference pattern by a predetermined variance.