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公开(公告)号：US20150144800A1
公开(公告)日：2015-05-28
申请号：US14412754
申请日：2013-03-12
CPC分类号： H01J29/70 , H01J3/30 , H01J29/04 , H01J29/48 , H01J31/00 , H01J37/06 , H01J37/147 , H01J37/15 , H01J37/305 , H01J2237/0213 , H01J2237/061 , H01J2237/06308
摘要： The invention relates to a device (20) for producing an electron beam (4), which comprises a hot cathode (1), a cathode electrode (2), an anode electrode (3) having an opening (6) through which an electron beam (4) produced by the device can pass, wherein during the operation of the device (20) a voltage for accelerating the electrons exiting from the hot cathode (1) is applied between the cathode electrode (2) and the anode electrode (3), and further comprising deflection means that can deflect the electron beam (4) that has passed through the opening of the anode electrode (3), wherein the deflection means comprise at least one deflection electrode (8, 12), which can reflect the electron beam (4) and/or which comprises a deflection surface (9) that is inclined towards the propagation direction of the electron beam (4).
摘要翻译： 本发明涉及一种用于制造电子束（4）的装置（20），其包括热阴极（1），阴极电极（2），具有开口（6）的阳极电极（3） 由器件产生的光束（4）可以通过，其中在器件（20）的操作期间，在阴极电极（2）和阳极电极（3）之间施加用于加速从热阴极（1）出射的电子的电压 ），并且还包括偏转装置，其可以偏转已经通过阳极电极（3）的开口的电子束（4），其中偏转装置包括至少一个偏转电极（8,12），其可以反映 电子束（4）和/或包括朝向电子束（4）的传播方向倾斜的偏转表面（9）。
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公开(公告)号：US08835848B2
公开(公告)日：2014-09-16
申请号：US14180350
申请日：2014-02-13
发明人： Tae Sik Oh , Ho Seob Kim , Dae Wook Kim , Seung-Joon Ahn
CPC分类号： H01J3/26 , H01J3/021 , H01J3/12 , H01J3/14 , H01J3/18 , H01J3/30 , H01J37/04 , H01J2237/1205
摘要： An ultra-miniaturized electron optical microcolumn is provided. The electron optical microcolumn includes an electron-emitting source emitting electrons using a field emission principle, an extraction electrode causing the emission of electrons from the electron-emitting source, a focusing electrode to which voltage is flexibly applied in response to a working distance to a target for regulating a focusing force of electron beams emitted from the electron-emitting source, an acceleration electrode accelerating electrons emitted by the extraction electrode, a limit electrode regulating an amount and a size of electron beams using electrons accelerated by the acceleration electrode, and a deflector deflecting electron beams towards the target.
摘要翻译： 提供超小型电子光学微柱。 电子光学微柱包括使用场致发射原理发射电子的电子发射源，引起来自电子发射源的电子的引出电极，响应于工作距离而被柔性施加电压的聚焦电极 用于调节从电子发射源发射的电子束的聚焦力的目标，加速由引出电极发射的电子的加速电极，限制电极使用由加速电极加速的电子来调节电子束的量和尺寸，以及 偏转器偏转电子束朝向目标。
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公开(公告)号：US09300185B2
公开(公告)日：2016-03-29
申请号：US13798565
申请日：2013-03-13
摘要： In one embodiment, a flywheel power generating facility includes a flywheel power generator including a flywheel for storing rotational energy, and configured to convert the rotational energy into electric power to supply the electric power to a test facility. The generating facility further includes a driving motor configured to rotate the flywheel, and a power supply device configured to supply electric power to the driving motor. The generating facility further includes a detector configured to output a signal related to the rotation of the flywheel, and a controller configured to control operation of the driving motor, based on the outputted signal. The controller controls the operation of the driving motor so that the driving motor provides accelerating torque to the flywheel while the supply of the electric power to the test facility is stopped and while the electric power is supplied to the test facility.
摘要翻译： 在一个实施例中，飞轮发电设备包括飞轮发电机，其包括用于存储旋转能量的飞轮，并且被配置为将旋转能量转换成电力以将电力提供给测试设备。 发电设备还包括驱动电动机，其构造成使飞轮旋转;以及电源装置，其被配置为向驱动电动机供电。 发电设备还包括检测器，其被配置为输出与飞轮的旋转有关的信号;以及控制器，其被配置为基于输出的信号来控制驱动电动机的操作。 控制器控制驱动电动机的操作，使得驱动电机向飞轮提供加速转矩，同时停止向测试设备供电，同时向测试设备供电。
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公开(公告)号：US20140224997A1
公开(公告)日：2014-08-14
申请号：US14180350
申请日：2014-02-13
发明人： Tae Sik OH , Ho Seob KIM , Dae Wook KIM , Seung Joon AHN
CPC分类号： H01J3/26 , H01J3/021 , H01J3/12 , H01J3/14 , H01J3/18 , H01J3/30 , H01J37/04 , H01J2237/1205
摘要： An ultra-miniaturized electron optical microcolumn is provided. The electron optical microcolumn includes an electron-emitting source emitting electrons using a field emission principle, an extraction electrode causing the emission of electrons from the electron-emitting source, a focusing electrode to which voltage is flexibly applied in response to a working distance to a target for regulating a focusing force of electron beams emitted from the electron-emitting source, an acceleration electrode accelerating electrons emitted by the extraction electrode, a limit electrode regulating an amount and a size of electron beams using electrons accelerated by the acceleration electrode, and a deflector deflecting electron beams towards the target.
摘要翻译： 提供超小型电子光学微柱。 电子光学微柱包括使用场致发射原理发射电子的电子发射源，引起来自电子发射源的电子的引出电极，响应于工作距离而被柔性施加电压的聚焦电极 用于调节从电子发射源发射的电子束的聚焦力的目标，加速由引出电极发射的电子的加速电极，限制电极使用由加速电极加速的电子来调节电子束的量和尺寸，以及 偏转器偏转电子束朝向目标。
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公开(公告)号：US4737644A
公开(公告)日：1988-04-12
申请号：US793046
申请日：1985-10-30
IPC分类号： B41J2/085 , H01J3/30 , H01J29/74 , H01J37/147 , H01J3/14
CPC分类号： H01J37/1477 , B41J2/085 , H01J3/30
摘要： An electrostatic deflection plate for charged particle beam systems is formed of a planar semiconductive substrate having a conductive region at the substrate surface. The conductive region is diffused or implanted into the body of the substrate, or one or more conductive layers are deposited upon the substrate surface. The substrate material is preferably silicon and the diffused or implanted region is formed of a nonmagnetic, nonoxidizable metal such as gold or platinum. The deposited conductive region may be formed of a single layer of these or similar metals, one or more conductive underlayers with a nonmagnetic, nonoxidizable overlayer, a single or multilayer structure with a conductive oxide on the outermost layer, or a metallo-organic compound which forms a conductive layer during following heat treatment. The deflection plates are fabricated using conventional semiconductor processes and form durable structures which minimize eddy current effects.
摘要翻译： 用于带电粒子束系统的静电偏转板由在基板表面具有导电区域的平面半导体基板形成。 导电区域被扩散或注入到衬底的主体中，或者一个或多个导电层沉积在衬底表面上。 基底材料优选为硅，并且扩散或注入的区域由非磁性，不可氧化的金属如金或铂形成。 沉积的导电区域可以由这些或类似金属的单层形成，一个或多个具有非磁性，不可氧化覆盖层的导电底层，在最外层具有导电氧化物的单层或多层结构或金属有机化合物， 在随后的热处理期间形成导电层。 偏转板使用传统的半导体工艺制造，并形成耐久结构，使涡流效应最小化。
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公开(公告)号：US20130193788A1
公开(公告)日：2013-08-01
申请号：US13798565
申请日：2013-03-13
摘要： In one embodiment, a flywheel power generating facility includes a flywheel power generator including a flywheel for storing rotational energy, and configured to convert the rotational energy into electric power to supply the electric power to a test facility. The generating facility further includes a driving motor configured to rotate the flywheel, and a power supply device configured to supply electric power to the driving motor. The generating facility further includes a detector configured to output a signal related to the rotation of the flywheel, and a controller configured to control operation of the driving motor, based on the outputted signal. The controller controls the operation of the driving motor so that the driving motor provides accelerating torque to the flywheel while the supply of the electric power to the test facility is stopped and while the electric power is supplied to the test facility.
摘要翻译： 在一个实施例中，飞轮发电设备包括飞轮发电机，其包括用于存储旋转能量的飞轮，并且被配置为将旋转能量转换成电力以将电力提供给测试设备。 发电设备还包括驱动电动机，其构造成使飞轮旋转;以及电源装置，其被配置为向驱动电动机供电。 发电设备还包括检测器，其被配置为输出与飞轮的旋转有关的信号;以及控制器，其被配置为基于输出的信号来控制驱动电动机的操作。 控制器控制驱动电动机的操作，使得驱动电机向飞轮提供加速转矩，同时停止向测试设备供电，同时向测试设备供电。
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7.发明申请公开(公告)号：US20030111948A1
公开(公告)日：2003-06-19
申请号：US09809509
申请日：2001-03-15
发明人： Michael W. Retsky
IPC分类号： H01J029/00
CPC分类号： H01J29/701 , H01J3/30 , H01J29/74 , H01J37/147 , H01J37/153 , H01J49/28
摘要： A method and apparatus is disclosed for electrostatic deflection and focusing of a charged particle stream. The apparatus can include plural vertical and horizontal deflection plates, although a single vertical and a single horizontal deflection plate each with a reference potential plane are preferred. Both orthogonal and preferably tilted display screens are employed to receive the deflected beam. The particle stream is injected offset from a centered position and the stream is deflected asymmetrically relative to the attracting deflection plate. Two alternately preferred computer programs are employable to calculate an offset position. A preferred external quadrupole is employed to correct any residual astigmatism in the particle stream. In one embodiment, the apparatus is disposed in a cathode ray tube. A reduced footprint CRT is also disclosed. Methods and apparatuses for an energy filtered electron beam, a mass spectrometer and a mass separator are also disclosed.
摘要翻译： 公开了一种用于带电粒子流的静电偏转和聚焦的方法和装置。 该装置可以包括多个垂直和水平偏转板，尽管单个垂直和单个水平偏转板各自具有参考电位平面。 采用正交和优选倾斜显示屏幕来接收偏转光束。 颗粒流被注入偏离中心位置，并且流相对于吸引偏转板不对称地偏转。 两个交替优选的计算机程序可用于计算偏移位置。 使用优选的外部四极杆来校正颗粒物流中的任何残余散光。 在一个实施例中，该装置设置在阴极射线管中。 还公开了减少占位面积的CRT。 还公开了能量过滤电子束，质谱仪和质量分离器的方法和装置。
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公开(公告)号：US4614872A
公开(公告)日：1986-09-30
申请号：US605831
申请日：1984-05-01
申请人： Anthony W. Sloman
发明人： Anthony W. Sloman
IPC分类号： H01J3/30 , H01J37/04 , H01J37/147 , G21K1/08 , H01J3/14
CPC分类号： H01J37/045 , H01J3/30 , H01J37/1472
摘要： An electron beam or similar charged particles may be deflected by passing through an electrostatic field produced in a deflecting structure. The degree of deflection is controlled by rotating the deflecting structure and path relative to one another. The beam may be rotated relative to the structure by a magnetic beam deflector which compensates for a range of electron energies within the beam so that all electrons are deflected in the electrostatic field by an equal amount.
摘要翻译： 电子束或类似的带电粒子可能通过穿过偏转结构中产生的静电场而偏转。 通过相对于彼此旋转偏转结构和路径来控制偏转度。 光束可以通过磁束偏转器相对于结构旋转，该磁束偏转器补偿光束内的电子能量范围，使得所有电子在静电场中偏转相等的量。
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公开(公告)号：US09773635B2
公开(公告)日：2017-09-26
申请号：US14412754
申请日：2013-03-12
IPC分类号： H01J29/70 , H01J37/06 , H01J37/147 , H01J37/15 , H01J37/305 , H01J3/30 , H01J29/04 , H01J29/48 , H01J31/00
CPC分类号： H01J29/70 , H01J3/30 , H01J29/04 , H01J29/48 , H01J31/00 , H01J37/06 , H01J37/147 , H01J37/15 , H01J37/305 , H01J2237/0213 , H01J2237/061 , H01J2237/06308
摘要： The invention relates to a device (20) for producing an electron beam (4), which comprises a hot cathode (1), a cathode electrode (2), an anode electrode (3) having an opening (6) through which an electron beam (4) produced by the device can pass, wherein during the operation of the device (20) a voltage for accelerating the electrons exiting from the hot cathode (1) is applied between the cathode electrode (2) and the anode electrode (3), and further comprising deflection means that can deflect the electron beam (4) that has passed through the opening of the anode electrode (3), wherein the deflection means comprise at least one deflection electrode (8, 12), which can reflect the electron beam (4) and/or which comprises a deflection surface (9) that is inclined towards the propagation direction of the electron beam (4).
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公开(公告)号：US20110001057A1
公开(公告)日：2011-01-06
申请号：US12831193
申请日：2010-07-06
申请人： Richard Stresau , Wayne Sheils , Kevin Hunter
发明人： Richard Stresau , Wayne Sheils , Kevin Hunter
IPC分类号： H01J3/30
CPC分类号： H01J3/30 , H01J37/09 , H01J49/061 , H01J2237/1514
摘要： An apparatus 10 for manipulating the trajectories of moving charged particles. The apparatus includes a grid 14 of laterally spaced side by side elongate elements 16 and means 18 defining a path for charged particles to traverse the grid. The grid is supported and configured for application of a voltage gradient between and/or along the elongate elements, whereby to manipulate the trajectories of charged particles that traverse the grid. A method of manipulating the trajectories of moving charged particles is also disclosed.
摘要翻译： 一种用于操纵带电粒子移动轨迹的装置10。 该装置包括横向间隔开的细长元件16的格栅14和限定带电粒子穿过网格的路径的装置18。 电网被支撑和配置用于在细长元件之间和/或沿着细长元件施加电压梯度，从而操纵穿过电网的带电粒子的轨迹。 还公开了一种操纵带电粒子移动轨迹的方法。
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