METAL BONDING APPARATUS
    3.
    发明申请
    METAL BONDING APPARATUS 审中-公开
    金属接合装置

    公开(公告)号:US20130284794A1

    公开(公告)日:2013-10-31

    申请号:US13772208

    申请日:2013-02-20

    IPC分类号: B23K20/24 B23K20/02

    摘要: The metal bonding apparatus comprises: a solution supply unit configured to supply a solution which is able to elute an oxide with copper oxide as a principal component, to at least one of a first bonding portion and a second bonding portion; a pressing unit configured to apply pressure to the first bonding portion and the second bonding portion so as to sandwich the solution between the first bonding portion and the second bonding portion, and in a direction in which a distance between the first bonding portion and the second bonding portion is reduced; and a heating unit configured to heat the first bonding portion and the second bonding portion, wherein the first bonding portion and the second bonding portion are bonded by the pressure applied by the pressing unit and the heat from the heating unit.

    摘要翻译: 金属接合装置包括:溶液供给单元,被配置为将能够以氧化铜作为主要成分洗脱氧化物的溶液供给到第一接合部和第二接合部中的至少一个; 压力单元,其构造成对所述第一接合部和所述第二接合部施加压力,以将所述溶液夹在所述第一接合部和所述第二接合部之间,并且在所述第一接合部和所述第二接合部之间的距离 结合部分减少; 以及加热单元,其构造成加热所述第一接合部和所述第二接合部,其中,所述第一接合部和所述第二接合部通过由所述加压单元施加的压力和来自所述加热单元的热而接合。