CHEMICALLY AMPLIFIED RESIST MATERIAL AND PATTERN FORMATION METHOD USING THE SAME
    4.
    发明申请
    CHEMICALLY AMPLIFIED RESIST MATERIAL AND PATTERN FORMATION METHOD USING THE SAME 审中-公开
    使用相同的化学放大电阻材料和图案形成方法

    公开(公告)号:US20120009795A1

    公开(公告)日:2012-01-12

    申请号:US13237657

    申请日:2011-09-20

    CPC classification number: C08F8/00 C08F220/28 G03F7/0392

    Abstract: A resist film (102) made of a chemically amplified resist material including a polymer containing an acid leaving group and a group in which a lactone is replaced with hydrogen in an OH group of phenol is formed on a substrate (101). The resist film (102) is then selectively irradiated with exposure light, thereby performing pattern exposure. After the pattern exposure, the resist film (102) is heated, and then developed, thereby forming a resist pattern (102a) out of the resist film (102).

    Abstract translation: 在基板(101)上形成抗蚀剂膜(102),其由化学放大抗蚀剂材料制成,该抗蚀剂材料包含含有酸离去基团的聚合物和其中内酯被苯酚OH基团中的氢取代的基团。 然后用曝光光选择性地照射抗蚀剂膜(102),从而进行图案曝光。 在图案曝光之后,将抗蚀剂膜(102)加热,然后显影,从而在抗蚀剂膜(102)中形成抗蚀剂图案(102a)。

    Liquid crystal polymers
    5.
    发明授权
    Liquid crystal polymers 失效
    液晶聚合物

    公开(公告)号:US5632929A

    公开(公告)日:1997-05-27

    申请号:US347373

    申请日:1994-12-06

    CPC classification number: C08F120/30 C08F120/36 C09K19/3895

    Abstract: A novel LCP material based on forked side chain acrylates is disclosed having a general formula I; ##STR1## wherein W=H, CH.sub.3, Cl R.sub.1 and R.sub.2 may or may not be the same but have the following general structure: ##STR2## p=2 to 14; q=0 or 1;r=1 or 2;s=1 or 2;X=O, CO.sub.2, O.sub.2 C, CH.sub.2 ;Y=C.sub.2 H.sub.4, O, CO.sub.2, O.sub.2 C;Z=CN, halogen, R, CO.sub.2 R, OR, O.sub.2 CR, wherein R=chiral or achiral.

    Abstract translation: PCT No.PCT / GB93 / 01017 Sec。 371日期1994年12月6日第 102(e)日期1994年12月6日PCT提交1993年5月19日PCT公布。 公开号WO93 / 25633 日本1993年12月23日公开了一种基于叉状侧链丙烯酸酯的新型LCP材料,其具有通式I; 其中W = H,CH 3,Cl R 1和R 2可以相同也可以不相同,但具有以下通用结构:p = 2〜14; q = 0或1; r = 1或2; s = 1或2; X = O,CO 2,O 2 C,CH 2; Y = C2H4,O,CO2,O2C; Z = CN,卤素,R,CO 2 R,OR,O 2 CR,其中R =手性或非手性。

    Hydroxy group containing diesters of acrylic acids and their use in
dental material
    7.
    发明授权
    Hydroxy group containing diesters of acrylic acids and their use in dental material 失效
    含羟基的丙烯酸二酯及其在牙科材料中的应用

    公开(公告)号:US4115346A

    公开(公告)日:1978-09-19

    申请号:US698560

    申请日:1976-06-22

    Abstract: Polymerizable hydrox-group-containing diesters of acrylic acids for dental material are prepared by reacting 3-(3,4-epoxycyclohexyl)-8,9-epoxy-2,4-dioxaspiro(5,5) undecane or a bis-epoxide of formula (A) ##STR1## or a bis-epoxide of formula (B) ##STR2## with a hydroxyalkylacrylate or hydroxyalkylmethacrylate containing 2 to 10 carbon atoms in the alkyl portion, n being 0 or 1 in formula (A) with the proviso that whenn in 0, X is --O-- and R.sup.1 is --H; and whenn is 1, X is selected from the group of alkylene with 1 to 10 carbon atoms, C.sub.1-3 -alkyl substituted alkylene with 1 to 10 carbon atoms, --O--(CH.sub.2).sub.m --O-- where m is 1 to 10, --CH.sub.2 --OCO--(CH.sub.2).sub.p --COO--CH.sub.2 where p is 1 to 6, and --CH.sub.2 --OCO--, and R.sup.1 is --H or --CH.sub.3,and in formula (B) ##STR3## OR TRICYCLO-[5,2,1,0.sup.2,6 ]-DECYLENE.

    Abstract translation: 通过使3-(3,4-环氧环己基)-8,9-环氧-2,4-二氧杂螺[(5,5)十一烷)或双环氧化物的双 - 环氧化物反应制备用于牙科材料的丙烯酸的可聚合羟基的二酯 式(A)的化合物(A)或式(B)的双环氧化物(B)与烷基部分中含有2至10个碳原子的丙烯酸羟烷基酯或甲基丙烯酸羟烷基酯,式(1)中的n为0或1 A),条件是当N IN 0时,X为-O-且R 1为-H; 并且当N IS 1时,X选自具有1-10个碳原子的亚烷基,具有1-10个碳原子的C1-3烷基取代的亚烷基,-O-(CH2)mO-,其中m是1-10, -CH 2 -OCO-(CH 2)p -COO-CH 2,其中p为1至6,-CH 2 -OCO-,并且R 1为-H或-CH 3,并且在式(B)中, ,2,1,02,6] -DECYLENE。

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