公开(公告)号：US06825477B2

公开(公告)日：2004-11-30

申请号：US10083647

申请日：2002-02-27

申请人： Jan Sunner ,  Sergey Alimpiev ,  Sergey Nikiforovl

发明人： Jan Sunner ,  Sergey Alimpiev ,  Sergey Nikiforovl

IPC分类号： H01J4900

CPC分类号： H01J49/0418

摘要： Adsorption, desorption and ionization methods and apparatuses are used to produce gas phase ions for subsequent analysis. Non-porous microscopically rough ionization surfaces are used to absorb analyte in situ for subsequent ionization by laser light and release of gas phase analyte ions.

摘要翻译： 吸附，解吸和离子化方法和装置用于产生气相离子用于随后的分析。 无孔显微粗糙电离表面用于原位吸收分析物，用于随后的激光电离和释放气相分析物离子。

公开(公告)号：US06825461B2

公开(公告)日：2004-11-30

申请号：US10221481

申请日：2002-09-13

申请人： Roger Guevremont ,  Randy Purves

发明人： Roger Guevremont ,  Randy Purves

IPC分类号： H01J4900

CPC分类号： H01J49/004 ,  G01N27/624

摘要： A method and an apparatus for selectively transmitting ions using a FAIMS analyzer is disclosed. An ion diverter is included within the FAIMS analyzer for affecting the trajectories of ions after separation to direct the ions in a known fashion. The ion diverter is optionally a gas flow source or an electrode for generating an electrical field to alter ion flow.

摘要翻译： 公开了一种使用FAIMS分析仪选择性地传输离子的方法和装置。 FAIMS分析仪中包含离子转移器，用于影响分离后离子的轨迹，以便以已知方式引导离子。 离子转移器可选地是气流源或用于产生电场以改变离子流的电极。

公开(公告)号：US06818886B2

公开(公告)日：2004-11-16

申请号：US10344186

申请日：2003-02-07

申请人： Kurt Tiefenthaler

发明人： Kurt Tiefenthaler

IPC分类号： H01J4900

CPC分类号： H01J49/164 ,  G01N21/552 ,  G01N21/7746

摘要： A method for detecting a substance or substances in a sample or in a matrix of samples combining detection methods that are, on the one hand, based on direct detection with integrated optical (bio)chemo-sensitive waveguide grating structures and, on the other hand, based on a mass-spectrometric detection effected by way of a desorption process. The method permits an increase in detection security and/or detection sensitivity.

摘要翻译： 一种用于检测样品或样品的基质中的物质的方法，其结合了一方面基于直接检测与集成的光学（生物）化学敏感波导光栅结构的检测方法，另一方面 ，基于通过解吸过程实现的质谱检测。 该方法允许增加检测安全性和/或检测灵敏度。

公开(公告)号：US06812458B2

公开(公告)日：2004-11-02

申请号：US10637234

申请日：2003-08-08

申请人： Matthew M. Gregori ,  Joseph F. Covington ,  Steven E. Hobbs

发明人： Matthew M. Gregori ,  Joseph F. Covington ,  Steven E. Hobbs

IPC分类号： H01J4900

CPC分类号： G01N30/466 ,  B01L3/5027 ,  G01N30/7266 ,  G01N30/84 ,  G01N2030/628 ,  G01N2030/8411 ,  H01J49/04

摘要： Systems and methods for collecting the output of multiple simultaneously operated chromatography columns and providing the outputs to a single mass spectrometer are provided. Such systems utilize predetermined lengths of microfluidic tubing that act as storage buffers for the substantially all of the output of each column, preserving all data and, because the storage buffers are microfluidic, there is minimal diffusion between sample bands and solvent and signal clarity is preserved.

摘要翻译： 提供了用于收集多个同时操作的色谱柱的输出并将输出提供给单个质谱仪的系统和方法。 这样的系统使用预定长度的微流体管，其用作用于每个柱的基本上所有输出的储存缓冲液，保留所有数据，并且由于存储缓冲液是微流体，所以在样品带和溶剂之间存在最小的扩散，并保持信号的清晰度 。

公开(公告)号：US06806467B1

公开(公告)日：2004-10-19

申请号：US10625935

申请日：2003-07-24

申请人： Herbert O. Funsten ,  William C. Feldman

发明人： Herbert O. Funsten ,  William C. Feldman

IPC分类号： H01J4900

CPC分类号： H01J49/40 ,  H01J49/025

摘要： A continuous time-of-flight mass spectrometer having an evacuated enclosure with means for generating an electric field located in the evacuated enclosure and means for injecting a sample material into the electric field. A source of continuous ionizing radiation injects ionizing radiation into the electric field to ionize atoms or molecules of the sample material, and timing means determine the time elapsed between arrival of a secondary electron out of said ionized atoms or molecules at a first predetermined location and arrival of a sample ion out of said ionized atoms or molecules at a second predetermined location.

摘要翻译： 具有抽真空外壳的连续飞行时间质谱仪，其具有用于产生位于抽真空外壳中的电场的装置和用于将样品材料注入电场的装置。 连续电离辐射源将电离辐射注入到电场中以离子化样品材料的原子或分子，并且定时装置确定在第一预定位置和到达时二次电子到达所述电离原子或分子之间经过的时间 在第二预定位置处的离子化原子或分子中的样品离子。

公开(公告)号：US06784423B2

公开(公告)日：2004-08-31

申请号：US10251352

申请日：2002-09-20

申请人： William David Reents, Jr. ,  Michael J Schabel

发明人： William David Reents, Jr. ,  Michael J Schabel

IPC分类号： H01J4900

CPC分类号： H01J49/161 ,  H01J49/40

摘要： A method for determining the shape and size of particles and their constituent elements is disclosed. Particle ions are accelerated through a mass spectrometer useful in identifying the source particle of the resulting ions. By measuring the time-varying intensity of the identified ions as they strike a detector, a plot of the intensity of the ions over time is obtained for each ionized particle. The size of each ionized particle is determined by measuring a time span corresponding to the width of the peak of this plot. If the detector is a phosphor detector, the shape of the particle may be determined by using a high-speed camera to capture cross-section images of the ion-induced light pattern at closely-spaced successive moments in time. Alternatively, the intensity of ions striking the detector along at least one lateral dimension may be detected. By combining the multiple cross section images or the multiple lateral direction intensity profiles that are thus captured, an actual image of the shape of the original particle can be obtained.

摘要翻译： 公开了一种用于确定颗粒及其构成元件的形状和尺寸的方法。 通过可用于鉴定所得离子的源粒子的质谱仪加速粒子离子。 通过测量所鉴定的离子随着检测器的时变强度，每个电离粒子获得离子强度随时间的变化图。 通过测量对应于该图的峰的宽度的时间跨度来确定每个电离粒子的尺寸。 如果检测器是磷光体检测器，则可以通过使用高速摄像机来确定颗粒的形状，以在紧密间隔的连续时刻捕获离子诱导的光图案的横截面图像。 或者，可以检测沿着至少一个横向尺寸撞击检测器的离子的强度。 通过组合由此捕获的多个横截面图像或多个横向强度分布，可以获得原始粒子的形状的实际图像。

公开(公告)号：US06770868B1

公开(公告)日：2004-08-03

申请号：US10440826

申请日：2003-05-19

申请人： Christopher F. Bevis ,  David E. Clapper

发明人： Christopher F. Bevis ,  David E. Clapper

IPC分类号： H01J4900

CPC分类号： G01B15/04 ,  H01J2237/2815 ,  H01J2237/2826

摘要： A system for determining an actual measurement of a structure on a sample using a measurement tool with a calibration standard having measurement sites. A previously measured site on the calibration standard with a first known metric is measured with the measurement tool to produce a first measurement. A newly measured site on the calibration standard, also with a second known metric is measured with the measurement tool to produce a second measurement. A calibration factor for the measurement tool is computed by comparing the first measurement to the first known metric and the second measurement to the second known metric. The structure on the sample is then measured using the measurement tool to produce a precursor measurement. This precursor measurement is adjusted with the calibration factor to produce an intermediate measurement. Then the intermediate measurement is adjusted with the sample composition data to produce the actual measurement.

摘要翻译： 一种用于使用具有具有测量点的校准标准的测量工具来确定样品上的结构的实际测量的系统。 使用测量工具测量具有第一已知度量的校准标准上的先前测量的位置以产生第一测量。 使用测量工具测量校准标准上的新测量位置以及第二已知度量以产生第二测量值。 通过将第一测量与第一已知度量和第二测量值比较为第二已知度量来计算测量工具的校准因子。 然后使用测量工具测量样品上的结构，以产生前体测量。 用校准因子调整前体测量值以产生中间测量值。 然后用样品组成数据调整中间测量值以产生实际测量值。

公开(公告)号：US06744047B2

公开(公告)日：2004-06-01

申请号：US10164724

申请日：2002-06-07

申请人： Craig M. Whitehouse ,  Erol Gulcicek

发明人： Craig M. Whitehouse ,  Erol Gulcicek

IPC分类号： H01J4900

CPC分类号： B01D59/44 ,  H01J49/0481 ,  H01J49/063

摘要： A multipole ion guide which begins in one pumping stage and extends continuously into one or more subsequent pumping stages has been incorporated into an atmospheric pressure ion source mass spectrometer system. Ions delivered into vacuum from an Electrospray, Atmospheric Pressure Chemical Ionization or Inductively Coupled Plasma ion source are guided and focused into a mass analyzer with high efficiency using the multipole ion guide. The background pressure over a portion of the multipole ion guide length is high enough to cause kinetic energy cooling of ions traversing the ion guide length due to ion collisions with neutral background gas molecules. This ion kinetic energy cooling lowers energy spread of ions traversing the multipole ion guide length. The multipole ion guide DC offset potential can be used to adjust the mean ion energy and the ion guide an and qn values can be set to reduce or expand the range of ion mass to charge which will be transmitted through the ion guide. These features of multipole ion guides and multiple pumping stage multipole ion guides are used to improve performance and lower the cost of Atmospheric Pressure Ion source mass spectrometer instruments.

摘要翻译： 在一个泵送阶段开始并连续延伸到一个或多个后续泵送阶段的多极离子导向器已经被并入到大气压离子源质谱仪系统中。 从电喷雾，大气压化学电离或电感耦合等离子体离子源进入真空的离子被引导并且使用多极离子导向器以高效率聚焦到质量分析器中。 多极离子导向器长度的一部分上的背景压力足够高，由于与中性背景气体分子的离子碰撞而导致横过离子导向器长度的离子的动能冷却。 这种离子动能冷却降低了穿过多极离子导向器长度的离子的能量扩散。 多极离子导向DC补偿电位可用于调整平均离子能量和离子导向器a和qn值可以设置为减小或扩大将通过离子导向器传输的离子质量到充电的范围。 多极离子导向器和多泵级多极离子导向器的这些特性用于提高大气压离子源质谱仪器的性能和降低成本。

公开(公告)号：US06727494B2

公开(公告)日：2004-04-27

申请号：US09837124

申请日：2001-04-18

申请人： Ying-Chuan Lin

发明人： Ying-Chuan Lin

IPC分类号： H01J4900

CPC分类号： G01N1/40 ,  G01N1/32 ,  G01N1/4044 ,  G01N2033/0095 ,  Y10T436/11 ,  Y10T436/113332 ,  Y10T436/117497

摘要： A method and an apparatus for detecting contaminating species such as metal particles on a wafer edge from a semiconductor fabrication process are disclosed. In the method, a wafer is suspended and rotated in a container with a volume of solvent at a bottom portion of the container such that only an edge portion of the wafer is exposed to the solvent. After the wafer is turned in the solvent such that the entire edge portion of the wafer has been exposed to the solvent, the solvent may be removed for analyzing in an electronic instrument for detecting the species of contaminating particles. The apparatus further includes a wafer mounting device for supporting the wafer which can be adjusted in height to suit wafers of different diameters.

摘要翻译： 公开了一种用于从半导体制造工艺检测晶片边缘上的污染物质如金属颗粒的方法和装置。 在该方法中，将晶片悬挂并在具有容器体积的溶剂的容器中旋转，使得只有晶片的边缘部分暴露于溶剂。 在溶剂中转动晶片使得晶片的整个边缘部分已经暴露于溶剂之后，可以在用于检测污染颗粒的种类的电子仪器中去除溶剂用于分析。 该装置还包括用于支撑可以调节高度以适应不同直径的晶片的晶片的晶片安装装置。

公开(公告)号：US06683302B1

公开(公告)日：2004-01-27

申请号：US10148717

申请日：2002-08-28

申请人： Johan Eriksson

发明人： Johan Eriksson

IPC分类号： H01J4900

CPC分类号： H01J49/165 ,  G01N30/7266 ,  H01J49/0468 ,  H05B6/802

摘要： The present invention relates to electrospray device and a method for heating a liquid in said electrospray device. The device comprising a liquid source (3), a mass analyser (5), and inlet plate (17) with an inlet orifice (19), liquid inlet means such as a capillary tube (9) having a spray tip (11) for emitting liquid from said liquid source (3) and it further comprises microwave energy emitting means (21) between said spray tip (11) and said mass analyser (5) for heating said liquid.

摘要翻译： 本发明涉及电喷雾装置和用于加热所述电喷雾装置中的液体的方法。 该装置包括液体源（3），质量分析器（5）和具有入口孔（19）的入口板（17），液体入口装置例如具有喷嘴（11）的毛细管（9） 从所述液体源（3）发射液体，并且还包括在所述喷嘴（11）和所述质量分析器（5）之间的用于加热所述液体的微波能量发射装置（21）。