DIAPHRAGM VALVE AND FLOW RATE CONTROL DEVICE

    公开(公告)号:US20240229941A1

    公开(公告)日:2024-07-11

    申请号:US18576172

    申请日:2022-06-08

    IPC分类号: F16K7/16 F16K27/02

    CPC分类号: F16K7/16 F16K27/02

    摘要: A diaphragm valve, which is miniaturized while ensuring a required flow rate and has improved assemble workability and maintainability, includes a body defining a flow path; a diaphragm provided on a bottom surface of an accommodation recess; a fixing ring screwed with a screw portion formed on an inner peripheral surface of the accommodation recess to fix the diaphragm to the body; a stacked piezoelectric actuator; a support plate supporting the stacked piezoelectric actuator; a cylindrical actuator cover holding a diaphragm presser and configured to transmit the piezoelectric displacement of the stacked piezoelectric actuator while accommodating the stacked piezoelectric actuator inside; and a fixing member screwed with the common screw portion and cooperating with the fixing ring to fix the position of the support plate in the accommodation recess.

    Diaphragm valve, flow control device, fluid control device, and semiconductor manufacturing device

    公开(公告)号:US11892100B2

    公开(公告)日:2024-02-06

    申请号:US17782769

    申请日:2020-12-07

    IPC分类号: F16K7/16 F16K31/00 C23C16/455

    摘要: A diaphragm valve including: a valve body having a flow path formed therein and a valve chamber recessed from an upper surface of the valve body; a diaphragm that is disposed in the valve chamber and elastically deformable to open and close the flow path and adjust an opening degree of the flow path; a stem for pressing the diaphragm to elastically deform the diaphragm; an actuator for driving the stem; a support mechanism that is fixed to the valve body and supports the stem and the actuator; wherein the stem includes a first stem member connected to the actuator via a displacement transmitting member, and a second stem member held by the support mechanism so as to be movable in the axial direction via a sleeve, the second stem member has an upper end portion which abuts against a lower end portion of the first stem member.

    Valve cavity cap arrangements
    5.
    发明授权

    公开(公告)号:US11796077B2

    公开(公告)日:2023-10-24

    申请号:US17518173

    申请日:2021-11-03

    申请人: Swagelok Company

    IPC分类号: F16K27/02 F16K7/16

    CPC分类号: F16K27/0236 F16K7/16

    摘要: A valve cavity cap arrangement including an insert and a threaded cap is provided in combination with a valve body defining a valve cavity, a central passage, and at least one offset passage. The insert is received in the valve cavity and includes an inner annular sealing surface sized to seal against a portion of the recessed surface surrounding the central passage, an outer annular sealing surface sized to seal against an outer periphery of the recessed surface, surrounding the offset passage(s), and a solid web portion extending between the inner and outer annular sealing surfaces. The threaded cap includes an outer threaded portion threadably engaged with an internal threaded portion of the valve cavity, a central end portion configured to apply a first sealing force to the inner annular sealing surface, and an outer end portion configured to apply a second sealing force to the outer annular sealing surface.

    Valve device
    6.
    发明授权

    公开(公告)号:US11713819B2

    公开(公告)日:2023-08-01

    申请号:US17704564

    申请日:2022-03-25

    IPC分类号: F16K7/17 F16K7/16 F16K27/02

    CPC分类号: F16K7/17 F16K7/16 F16K27/02

    摘要: A valve device includes: a body formed with a valve chamber, a first inflow passage, a second inflow passage, an outflow passage, and an annular groove and provided with a valve seat; and a diaphragm configured to communicate with and interrupt the second inflow passage and the outflow passage. An end portion of the second inflow passage is open to the valve chamber. The valve seat is provided on a peripheral edge of a location where the valve chamber and the second inflow passage communicate with each other. The annular groove is open to the valve chamber and is formed around the second inflow passage. An end portion of the outflow passage is open to the annular groove. The first inflow passage has a plurality of flow passages including an inflow port and a plurality of outflow ports, and each outflow port is open to the annular groove.

    MANUALLY-OPERATED DIAPHRAGM VALVE

    公开(公告)号:US20230070374A1

    公开(公告)日:2023-03-09

    申请号:US17793488

    申请日:2021-02-08

    发明人: Hisanobu IIZUKA

    IPC分类号: F16K7/16 F16K31/60 F16K35/00

    摘要: A manually-operated diaphragm valve in which the open/close range of a valve disk can be set while compactness is maintained with a simple structure, and a sufficient flow rate at the time of full open is ensured. A valve main body (1) includes a valve disk (12) attached inside a body (10) and a spindle (13) screw-fastened to the body so as to be able to ascend and descend to cause the valve disk to make contact with and go away from a valve seat (14). A handle for manually performing rotating operation of the spindle is mounted above the valve main body. A full-open position adjustment mechanism (20) which limits rotation of the handle on a valve-opening operation side at full open and sets an upper limit of a flow rate when the valve disk is fully open is provided near an upper portion of the valve main body.

    Valve
    9.
    发明授权
    Valve 有权

    公开(公告)号:US11560954B2

    公开(公告)日:2023-01-24

    申请号:US17349392

    申请日:2021-06-16

    申请人: Festo SE & Co. KG

    IPC分类号: F16K7/16 F16K7/17 F16K11/052

    摘要: A valve for controlling a fluid flow, including a valve housing, which is provided with a first fluid connection, a fluid channel and a second fluid connection, further including a valve member which is pivotally mounted in the fluid channel, and a drive for introducing a movement onto the valve member, the valve member having a rigid carrier and a flexible membrane with a sealing region which is provided for a sealing abutment against a valve seat and which is fixed to the carrier and to the valve housing by a circumferentially formed fastening region, wherein a deformation region of the flexible membrane is located between the sealing region and the fastening region and is arranged between a first deformation plane and a second deformation plane, the first deformation plane and the second deformation plane each being aligned parallel to a pivot axis determined by the pivot pin and delimiting a deformation space, and wherein the pivot pin is accommodated at least partially in the deformation space.

    Valve device, method for replacing valve body unit of valve device, and valve device assembly method

    公开(公告)号:US11506294B2

    公开(公告)日:2022-11-22

    申请号:US17213882

    申请日:2021-03-26

    IPC分类号: F16K7/16 F16K1/04 F16K43/00

    摘要: A valve body unit is configured to be disengaged from a stem by moving the stem and the valve body unit to a valve seat side in a state where a bonnet is separated from the valve seat, thereby pushing a replacement ring such that the replacement ring moves through the bonnet while decreasing in diameter and then drops down onto a ring dropping portion in the free state, then moving the stem, the valve body unit, and the replacement ring to an opposite side to the valve seat side such that a first surface comes into contact with a second surface and the ring dropping portion comes into contact with the replacement ring, and in this state, moving only the stem to the opposite side to the valve seat side such that the connection formed by a connecting mechanism between the stem connection portion and the stem is released.