公开(公告)号：WO2009029902A1

公开(公告)日：2009-03-05

申请号：PCT/US2008/074931

申请日：2008-08-29

Applicant: APPLIED MATERIALS, INC. ,  BACHRACH, Robert Z. ,  CHAE, Yong-Kee ,  CHOI, Soo Young ,  DE VRIES, Nicholas G. J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric A. ,  FREI, Michel R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James Craig ,  KANKANALA, Penchala N. ,  LI, Liwei ,  LO, Wing Hoo ,  LU, Danny Cam Toan ,  MEI, Fang ,  MURPHY, Stephen P. ,  PATEL, Srujal ,  SAUNDERS, Matthew J. B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John M. ,  WON, Tae K.

Inventor： BACHRACH, Robert Z. ,  CHAE, Yong-Kee ,  CHOI, Soo Young ,  DE VRIES, Nicholas G. J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric A. ,  FREI, Michel R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James Craig ,  KANKANALA, Penchala N. ,  LI, Liwei ,  LO, Wing Hoo ,  LU, Danny Cam Toan ,  MEI, Fang ,  MURPHY, Stephen P. ,  PATEL, Srujal ,  SAUNDERS, Matthew J. B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John M. ,  WON, Tae K.

IPC: G06F7/10 ,  H01L31/06 ,  H01L21/4763

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Abstract translation: 本发明涉及一种可用于使用处理模块来形成光伏器件的系统，所述处理模块适于在太阳能电池形成过程中执行步骤。自动化太阳能电池制造厂通常是自动化 处理模块和用于形成太阳能电池器件的自动化设备。 因此，自动化太阳能加工厂通常将包括适于接纳衬底的衬底接收模块，具有至少一个处理室的一个或多个吸收层沉积群集工具，该处理室适于在衬底的表面上沉积含硅层 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压灭菌器模块，自动化接线盒附接模块，以及一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：WO2008085665A1

公开(公告)日：2008-07-17

申请号：PCT/US2007/087587

申请日：2007-12-14

Applicant: APPLIED MATERIALS, INC. ,  HUDGENS, Jeffrey C. ,  CARLSON, Charles ,  KANKANALA, Penchala N. ,  RICE, Michael R.

Inventor： HUDGENS, Jeffrey C. ,  CARLSON, Charles ,  KANKANALA, Penchala N. ,  RICE, Michael R.

IPC: H01L21/677

CPC classification number: H01L21/67167 ,  H01L21/67196 ,  H01L21/67742 ,  H01L21/68707

Abstract: A method and apparatus for processing substrates using a multi-chamber processing system, or cluster tool, that has an increased system throughput, increased system reliability, improved device yield performance, a more repeatable wafer processing history (or wafer history), and a reduced footprint. The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system (e.g., a cluster tool) that has the capability of receiving and performing substrate processing steps in any substrate orientation. The various embodiments of the cluster tool may utilize one or more robots that are adapted to transfer substrates between the various processing chambers retained in the processing racks so that a desired processing sequence can be performed on the substrates.

Abstract translation: 一种使用多室处理系统或集群工具处理衬底的方法和装置，其具有增加的系统吞吐量，增加的系统可靠性，改进的器件产量性能，更可重复的晶片处理历史（或晶片历史）以及减少的 脚印。 本发明通常提供了一种用于在多腔室处理系统（例如，集群工具）中处理和转移衬底的装置和方法，其具有以任何衬底取向接收和执行衬底处理步骤的能力。 群集工具的各种实施例可以利用适于在保留在处理机架中的各种处理室之间传送衬底的一个或多个机器人，使得可以在衬底上执行期望的处理顺序。

公开(公告)号：WO2009029902A4

公开(公告)日：2009-08-06

申请号：PCT/US2008074931

申请日：2008-08-29

Applicant: APPLIED MATERIALS INC ,  BACHRACH ROBERT Z ,  CHAE YONG-KEE ,  CHOI SOO YOUNG ,  DE VRIES NICHOLAS G J ,  ELGAR YACOV ,  ENGLHARDT ERIC A ,  FREI MICHEL R ,  GAY CHARLES ,  HAWKINS PARRIS ,  HO CHOI ,  HUNTER JAMES CRAIG ,  KANKANALA PENCHALA N ,  LI LIWEI ,  LO WING HOO ,  LU DANNY CAM TOAN ,  MEI FANG ,  MURPHY STEPHEN P ,  PATEL SRUJAL ,  SAUNDERS MATTHEW J B ,  SCHLEZINGER ASAF ,  SHENG SHURAN ,  SU TZAY-FA ,  SULLIVAN JEFFREY S ,  TANNER DAVID ,  TROWBRIDGE TERESA ,  WALKER BRICE ,  WHITE JOHN M ,  WON TAE K

Inventor： BACHRACH ROBERT Z ,  CHAE YONG-KEE ,  CHOI SOO YOUNG ,  DE VRIES NICHOLAS G J ,  ELGAR YACOV ,  ENGLHARDT ERIC A ,  FREI MICHEL R ,  GAY CHARLES ,  HAWKINS PARRIS ,  HO CHOI ,  HUNTER JAMES CRAIG ,  KANKANALA PENCHALA N ,  LI LIWEI ,  LO WING HOO ,  LU DANNY CAM TOAN ,  MEI FANG ,  MURPHY STEPHEN P ,  PATEL SRUJAL ,  SAUNDERS MATTHEW J B ,  SCHLEZINGER ASAF ,  SHENG SHURAN ,  SU TZAY-FA ,  SULLIVAN JEFFREY S ,  TANNER DAVID ,  TROWBRIDGE TERESA ,  WALKER BRICE ,  WHITE JOHN M ,  WON TAE K

IPC: G06F7/10 ,  H01L21/4763 ,  H01L31/075

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention relates to a system that can be used to form a photovoltaic device using processing modules that are adapted to perform steps in the solar cell formation process The automated solar cell fab is generally an arrangement of automated processing modules and automation equipment that is used to form solar cell devices. The automated solar fab will thus generally comprise a substrate receiving module that is adapted to receive a substrate, one or more absorbing layer deposition cluster tools having at least one processing chamber that is adapted to deposit a silicon-containing layer on a surface of the substrate, one or more back contact deposition chambers, one or more material removal chambers, a solar cell encapsulation device, an autoclave module, an automated junction box attaching module, and one or more quality assurance modules that are adapted to test and qualify the completely formed solar cell device.

Abstract translation: 本发明涉及可用于使用适于在太阳能电池形成过程中执行步骤的处理模块形成光伏器件的系统。自动化太阳能电池制造厂通常是使用的自动化处理模块和自动化设备的布置 形成太阳能电池装置。 因此，自动化太阳能工厂将通常包括适于接收衬底的衬底接收模块，一个或多个吸收层沉积簇工具，其具有至少一个适于在衬底的表面上沉积含硅层的处理室 ，一个或多个背接触沉积室，一个或多个材料去除室，太阳能电池封装装置，高压釜模块，自动接线盒附接模块和一个或多个质量保证模块，其适于测试和限定完全形成 太阳能电池装置。

公开(公告)号：WO2009029901A1

公开(公告)日：2009-03-05

申请号：PCT/US2008/074930

申请日：2008-08-29

Applicant: APPLIED MATERIALS, INC. ,  BACHRACH, Robert, Z. ,  CHAE, Yong-Kee ,  CHOI, Soo, Young ,  DE VRIES, Nicholas, G., J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric, A. ,  FREI, Michel, R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James, Craig ,  KANKANALA, Penchala, N. ,  LI, Liwei ,  LO, Wing, Hoo ,  LU, Danny, Cam, Toan ,  MEI, Fang ,  MURPHY, Stephen, P. ,  PATEL, Srujal ,  SAUNDERS, Matthew, J., B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey, S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John, M. ,  WON, Tae, K.

Inventor： BACHRACH, Robert, Z. ,  CHAE, Yong-Kee ,  CHOI, Soo, Young ,  DE VRIES, Nicholas, G., J. ,  ELGAR, Yacov ,  ENGLHARDT, Eric, A. ,  FREI, Michel, R. ,  GAY, Charles ,  HAWKINS, Parris ,  HO, Choi ,  HUNTER, James, Craig ,  KANKANALA, Penchala, N. ,  LI, Liwei ,  LO, Wing, Hoo ,  LU, Danny, Cam, Toan ,  MEI, Fang ,  MURPHY, Stephen, P. ,  PATEL, Srujal ,  SAUNDERS, Matthew, J., B. ,  SCHLEZINGER, Asaf ,  SHENG, Shuran ,  SU, Tzay-Fa ,  SULLIVAN, Jeffrey, S. ,  TANNER, David ,  TROWBRIDGE, Teresa ,  WALKER, Brice ,  WHITE, John, M. ,  WON, Tae, K.

IPC: B26D3/06 ,  H01L21/00

CPC classification number: H01L21/67236 ,  B23K26/364 ,  B26F3/002 ,  B26F3/004 ,  B65G49/064 ,  B65G2249/02 ,  B65G2249/04 ,  C03B33/03 ,  C03B33/033 ,  H01L21/67132 ,  H01L21/67712 ,  H01L21/67715 ,  H01L21/67721 ,  H01L21/67727 ,  H01L21/6776 ,  H01L31/022425 ,  H01L31/03921 ,  H01L31/0504 ,  H01L31/075 ,  H02S50/00 ,  H02S50/10 ,  Y02E10/548 ,  Y02P40/57 ,  Y10T29/49002 ,  Y10T29/49355 ,  Y10T29/5196 ,  Y10T29/53113 ,  Y10T29/5313 ,  Y10T29/5317 ,  Y10T29/53187 ,  Y10T29/53365 ,  Y10T29/53417 ,  Y10T225/10 ,  Y10T225/325 ,  Y10T225/329

Abstract: The present invention generally relates to a sectioning module positioned within an automated solar cell device fabrication system. The solar cell device fabrication system is adapted to receive a single large substrate and form multiple silicon thin film solar cell devices from the single large substrate.

Abstract translation: 本发明一般涉及一种位于自动化太阳能电池器件制造系统内的切片模块。 太阳能电池器件制造系统适于接收单个大型衬底并从单个大衬底形成多个硅薄膜太阳能电池器件。

公开(公告)号：WO2008085681A3

公开(公告)日：2008-10-09

申请号：PCT/US2007088138

申请日：2007-12-19

Applicant: APPLIED MATERIALS INC ,  LESTER PAUL E ,  MEYER SCOTT ,  ATKINS WYLAND L ,  RICHARDS DOUGLAS ,  PREDOAICA CONSTANTIN ,  HUDGENS JEFFREY C ,  CARLSON CHARLES ,  KANKANALA PENCHALA N ,  RICE MICHAEL R ,  PAPANU JAMES S ,  BAIYA EVANSON G ,  ROSATO JOHN J

Inventor： LESTER PAUL E ,  MEYER SCOTT ,  ATKINS WYLAND L ,  RICHARDS DOUGLAS ,  PREDOAICA CONSTANTIN ,  HUDGENS JEFFREY C ,  CARLSON CHARLES ,  KANKANALA PENCHALA N ,  RICE MICHAEL R ,  PAPANU JAMES S ,  BAIYA EVANSON G ,  ROSATO JOHN J

IPC: B08B3/00

CPC classification number: H01L21/67766 ,  H01L21/67051 ,  H01L21/68707 ,  Y10S134/902

Abstract: The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.

Abstract translation: 本发明通常提供了一种在多室处理系统中处理和传送基板的装置和方法，该多室处理系统具有在使用批处理的许多有利方面的同时并行执行的单个基板处理步骤的能力。 本文描述的本发明的实施例适用于最大化系统吞吐量，降低系统成本，在处理期间降低每个基板的成本，增加系统可靠性，提高处理的基板上的装置产量，并减少系统占用面积。 在一个实施例中，群集工具适于执行湿/清洁处理序列，其中在群集工具中的基板上执行各种基板清洁处理。

公开(公告)号：WO2008085681A2

公开(公告)日：2008-07-17

申请号：PCT/US2007/088138

申请日：2007-12-19

Applicant: APPLIED MATERIALS, INC. ,  LESTER, Paul E. ,  MEYER, Scott ,  ATKINS, Wyland L. ,  RICHARDS, Douglas ,  PREDOAICA, Constantin ,  HUDGENS, Jeffrey C. ,  CARLSON, Charles ,  KANKANALA, Penchala N. ,  RICE, Michael R. ,  PAPANU, James S. ,  BAIYA, Evanson G. ,  ROSATO, John J.

Inventor： LESTER, Paul E. ,  MEYER, Scott ,  ATKINS, Wyland L. ,  RICHARDS, Douglas ,  PREDOAICA, Constantin ,  HUDGENS, Jeffrey C. ,  CARLSON, Charles ,  KANKANALA, Penchala N. ,  RICE, Michael R. ,  PAPANU, James S. ,  BAIYA, Evanson G. ,  ROSATO, John J.

IPC: H01L21/67

CPC classification number: H01L21/67766 ,  H01L21/67051 ,  H01L21/68707 ,  Y10S134/902

Abstract: The present invention generally provides an apparatus and method for processing and transferring substrates in a multi-chamber processing system that has the capability of receiving and performing single substrate processing steps performed in parallel, while using the many favorable aspects of batch processing. Embodiments of the invention described herein are adapted to maximize system throughput, reduce system cost, reduce cost per substrate during processing, increase system reliability, improve the device yield on the processed substrates, and reduce system footprint. In one embodiment, the cluster tool is adapted to perform a wet/clean process sequence in which various substrate cleaning processes are performed on a substrate in the cluster tool.

Abstract translation: 本发明总体上提供了一种用于在多腔室处理系统中处理和传送基板的设备和方法，该系统具有接收并执行并行执行的单个基板处理步骤的能力，同时使用多个有利的 批处理方面。 本文描述的本发明的实施例适合于最大化系统吞吐量，降低系统成本，降低处理期间每个衬底的成本，增加系统可靠性，改进处理衬底上的器件产量，并减少系统占板面积。 在一个实施例中，群集工具适于执行湿/清洁处理序列，其中在群集工具中的衬底上执行各种衬底清洁处理。