SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME
    43.
    发明申请
    SILICON CARBIDE/GRAPHITE COMPOSITE AND ARTICLES AND ASSEMBLIES COMPRISING SAME 审中-公开
    碳化硅/石墨复合材料和文章以及包含它们的组件

    公开(公告)号:WO2017031304A1

    公开(公告)日:2017-02-23

    申请号:PCT/US2016/047533

    申请日:2016-08-18

    Applicant: ENTEGRIS, INC.

    Abstract: A silicon carbide -graphite composite is described, including (i) interior bulk graphite material and (ii) exterior silicon carbide matrix material, wherein the interior bulk graphite material and exterior silicon carbide matrix material inter-penetrate one another at an interfacial region therebetween, and wherein graphite is present in inclusions in the exterior silicon carbide matrix material. Such material may be formed by contacting a precursor graphite article with silicon monoxide (SiO) gas under chemical reaction conditions that are effective to convert an exterior portion of the precursor graphite article to a silicon carbide matrix material in which graphite is present in inclusions therein, and wherein the silicon carbide matrix material and interior bulk graphite material interpenetrate one another at an interfacial region therebetween. Such silicon carbide -graphite composite is usefully employed in applications such as implant hard masks in manufacturing solar cells or other optical, optoelectronic, photonic, semiconductor and microelectronic products, as well as in ion implantation system materials, components, and assemblies, such as beam line assemblies, beam steering lenses, ionization chamber liners, beam stops, and ion source chambers.

    Abstract translation: 描述了碳化硅片复合材料,其包括(i)内部块状石墨材料和(ii)外部碳化硅基体材料,其中内部块状石墨材料和外部碳化硅基体材料在其间的界面区域彼此相互渗透, 并且其中石墨存在于外部碳化硅基体材料中的夹杂物中。 这种材料可以通过使化学反应条件下的前体石墨制品与一氧化硅(SiO)气体接触而形成,所述化学反应条件有效地将前体石墨制品的外部部分转化成碳化硅基体材料,其中石墨存在于其中的夹杂物中, 并且其中所述碳化硅基体材料和所述内部块状石墨材料在它们之间的界面区域彼此渗透。 这种碳化硅片复合材料有用地用于制造太阳能电池或其他光学,光电子,光子,半导体和微电子产品中的植入硬掩模以及离子注入系统材料,部件和组件中的诸如光束 线组件,光束转向透镜,电离室衬垫,光束挡块和离子源室。

Patent Agency Ranking