Abstract:
Valve structures (100) formed in elastomer material (108) are electrostatically actuated by applying voltage to a flexible, electrically conductive wire pattern. An actuation force generated between the patterned wire structure and an electrode (112) result in closure of a flow channel (102) formed in elastomer material (108) underlying the wire. In one embodiment of a valve structure (100) in accordance with the present invention, the wire structure is patterned by lithography and etching of a copper/polyimide laminate, with an underlying gold plate (114) positioned on the opposite side of the flow channel (102) serving as an electrode (112). In an alternative embodiment (400), application of an actuation force between the first (418) and second (428) patterned strips closes the control channel (422) and an associated flow channel (406) underlying the control channel (422).
Abstract:
A circuit switching switch (60) having a drive device (10), comprising ceramic pumps (18a) and (18b), wherein a conductive movable body (110) is moved in a flow passage (13a) by alternately pressurizing and depressurizing, by the pumps, working fluid (100) in the flow passage (13a) on the right and left sides of the movable body (110) to electrically conduct either of switching electrodes (62a) and (62b) to a common electrode (61), the movable body is surely moved since fine flow passages (16a) and (16b) provides a large flow passage resistance when the pressure of the working fluid is rapidly raised and lowered by the pumps to prevent the pressure inside the passages from reliving into an inner pressure damping chamber (15a), whereas, since the fine passages provide a small flow passage resistance against a gentle pressure rise due to the thermal expansion of the working fluid, the fine flow passages lead the expanded amount of the working fluid into the inner pressure damping chamber to suppress the rise of pressure of the working fluid, whereby a drive device capable of preventing a pump chamber or seals from being damaged even if the working fluid is thermally expanded can be provided.
Abstract:
A microvalve device for controlling fluid flow in a fluid circuit (10). The microvalve device comprises a body (12) having a cavity formed therein. The body further has first (20) and second (22) pilot ports placed in fluid communication with the cavity. The body also has first (28) and second (30) primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve (36) supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator (38) is operably coupled to the pilot valve for moving the pilot valve. A microvalve (40) is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end (40a) and a second end (40b). The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.
Abstract:
A device for sensing fluid movement within a microfluidic channel which uses feedback to control its operation. The device measures electric parameters to interpret fluidic parameters such as flow speed, and the presence or absence of fluid within the channel.
Abstract:
A pneumatic support system and controller combination including pressurizable expandable chambers (1); a source of pressure and an exhaust characterized by: a unitary manifold assembly (14) including a circuit board (25); a manifold (27) and one or more microvalves (24) having a silicon based valve actuator responsive to a signal for controlling flow from said manifold with respect to one or more expandable chambers.
Abstract:
The present invention provides a proportional microvalve (10) having a first (12), second (14) and third layer (16), and having high aspect ratio geometries. The first layer (12) defines a cavity (24) with inlet (20) and outlet (22) ports. The second layer (14), doped to have a low resistivity and bonded between the first (12) and third (16) layers, defines a cavity (24) having a flow area to permit fluid flow between the inlet (20) and outlet (22) ports. The second layer (14) further defines an actuatable displaceable member (26), and one or more thermal actuators (28, 30) for actuating the displaceable member (26) to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer (16) provides one wall of the cavity (24) and provides electrical contacts (32a, 32b, 34a, 34b) for electrically heating the thermally expandable actuators (28, 30). The thermal actuators (28, 30) and the displaceable member (26) have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer (14) while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member (26) are in the plane of the layer.
Abstract:
A MEMS actuator is provided that produces significant forces and displacements while consumming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause futher arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
Abstract:
An optical waveguide comprises multiple layers of solid-state material disposed on a substrate. One of the layers is a lifting-gate valve made of a high refractive index material. The device provides for better optical confinement in microfluidic channels, and has the capability to integrate both optical signals and fluid sample processing. The optical paths on the chip are reconfigurable because of the use of a movable microvalve that guides light in one of its positions.
Abstract:
An assay apparatus for determining properties of a sample. The apparatus has first and second chambers for receiving a sample. The first and second chambers are linked by a conduit along which at least part of the sample may travel so that the sample can move from the first chamber to the second chamber in series. The apparatus also has a slot extending from the conduit and a valve body comprising magnetic or magnetically susceptible material which is housed at least substantially within the slot. The valve body is movable between a first position in which the valve body is arranged at least substantially outside the conduit and a second position in which the valve body extends across the conduit thereby restricting a sample from travelling along the conduit from the first chamber to the second chamber. The valve body is slidably movable between the two positions by an external magnetic field.
Abstract:
A microvalve device is disclosed for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a bore formed therein. A pilot- operated main valve spool supported by the body is movably disposed in the bore for opening and closing ports formed in the body. A pilot microvalve is operable for controlling movement of the pilot-operated main valve. The pilot microvalve may include a movable valve element that controls the cross-sectional area of two variable orifices in series. When the pilot microvalve is at rest, one orifice is closed and the other is open. Upon actuating the pilot microvalve, the closed orifice may begin to open and the open orifice may begin to close. Pressure between the orifices is used as a command pressure, which is utilized to position the pressure control valve to control load pressure. A method of operating a microvalve device is also disclosed.