A MULTI-INPUT, MULTI-OUTPUT ACTUATOR AND ASSEMBLIES USING SAME

    公开(公告)号:WO2020117826A1

    公开(公告)日:2020-06-11

    申请号:PCT/US2019/064263

    申请日:2019-12-03

    Abstract: An exemplary actuator includes a motor, a transmission, and a support structure. The motor includes two torque sources that apply respective input torques to a rotor, which rotates about a rotation axis in response to a net input torque. The torque sources are arranged such that the input torques are additive, resulting in a vector-summated torque output. The torque sources also generate corresponding reactive torques that are applied to the first stator and the second stator. The transmission couples and constrains the first stator and the second stator such that rotational motion of one stator causes counter rotation of the other stator. Thus, the reactive torques are subtractive resulting a differential torque output. In some applications, the differential torque output is used to actuate a suspension of a vehicle. The actuator is also coupled to the vehicle via the support structure, which also reflects a reaction force or torque to actuate other subsystems (e.g., anti-dive, anti-squat).

    LINEAR ELECTROMAGNETIC ACTUATOR WITH REDUCED DETEND FORCE
    4.
    发明申请
    LINEAR ELECTROMAGNETIC ACTUATOR WITH REDUCED DETEND FORCE 审中-公开
    线性电磁致动器具有减少的力量

    公开(公告)号:WO2008089311A1

    公开(公告)日:2008-07-24

    申请号:PCT/US2008/051278

    申请日:2008-01-17

    CPC classification number: H02K41/031 H02K1/148 H02K29/03

    Abstract: An apparatus comprises a linear electromagnetic actuator (200) which has a series of ferromagnetic poles (206), coils (302), and a series of permanent magnets (204) to interact with the poles to induce movement of the actuator along a path. The poles have non-uniform configurations.

    Abstract translation: 一种装置包括线性电磁致动器(200),其具有一系列铁磁极(206),线圈(302)和一系列永磁体(204),以与极相互作用以引导致动器沿着路径的运动。 电极具有不均匀的结构。

    LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL
    10.
    发明申请
    LITHOGRAPHY LASER WITH BEAM DELIVERY AND BEAM POINTING CONTROL 审中-公开
    光束激光与光束输送和光束点控制

    公开(公告)号:WO2003100826A2

    公开(公告)日:2003-12-04

    申请号:PCT/US2003/014387

    申请日:2003-05-05

    IPC: H01L

    Abstract: The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source with a beam delivery to a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. Preferred embodiments include equipment for beam attenuation, equipment for automatic feedback beam alignment and equipment for accurate optics module positioning at installation and during maintenance. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.

    Abstract translation: 本发明提供了一种向生产线机器输送光束的模块化高重复率紫外线气体放电激光光源。 该系统包括具有光束指向控制的封闭和清除的光束路径,用于将激光束传送到期望的位置,例如生产线机器的入口。 优选实施例包括用于光束衰减的设备,用于自动反馈光束对准的设备和用于在安装和维护期间精确的光学模块定位的设备。 在优选实施例中,生产线机器是光刻机,并且提供两个单独的放电室,其中之一是主振荡器的一部分,其产生在第二放电室中放大的非常窄的带状晶体束。 该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。 与现有技术的激光系统相比,脉冲放大器使输出脉冲长度加倍,导致脉冲功率(mJ / ns)的降低。 该优选实施例能够在光刻系统晶片平面处提供照明,其在光刻系统的整个使用寿命期间大致恒定,尽管光学部件的实质性劣化。

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