公开(公告)号：WO2012166121A1

公开(公告)日：2012-12-06

申请号：PCT/US2011/038610

申请日：2011-05-31

Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC ,  YAGER, Thomas A. ,  KRUGLICK, Ezekiel

Inventor： YAGER, Thomas A. ,  KRUGLICK, Ezekiel

IPC: C02F1/46 ,  A61L9/00 ,  C02F1/48

CPC classification number: C02F1/36 ,  C02F1/46114 ,  C02F2101/30 ,  C02F2305/023 ,  Y02W10/37

Abstract: The fluid purification disclosed herein provides the advantages of high-voltage purification without electrocution risks. In illustrative purifiers, a contaminated fluid, such as contaminated water, is aerated and passed through a cavity that contains highly porous piezoelectric material and an ultrasonic transducer. The transducer emits ultrasonic energy that causes the piezoelectric material to discharge a high-voltage field, which produces strong oxidizing agents that kill organisms and oxidize organic pollutants. Since the ultrasonic actuator operates at relatively low voltages ( e.g ., 20-110 V) and can be electrically isolated from the fluid, illustrative purification is safe, environmentally friendly, and scalable from small to large size applications.

Abstract translation: 本文公开的流体净化提供了高电压净化的优点，而没有触电危险。 在说明性净化器中，污染的流体，例如污染的水被充气并通过包含高度多孔的压电材料和超声换能器的空腔。 换能器发射超声波能量，导致压电材料放电高压场，产生强大的氧化剂，可杀死生物并氧化有机污染物。 由于超声波致动器在相对低的电压（例如20-110V）下操作并且可以与流体电隔离，因此说明性的净化是安全的，环境友好的，并且可从小尺寸应用到大尺寸应用。

公开(公告)号：WO2012044284A1

公开(公告)日：2012-04-05

申请号：PCT/US2010/050566

申请日：2010-09-28

Applicant: YAGER, Thomas, A. ,  EMPIRE TECHNOLOGY DEVELOPMENT LLC

Inventor： YAGER, Thomas, A.

IPC: C01B31/02 ,  C03B29/00 ,  C23C16/26 ,  H01L21/20

CPC classification number: H01L21/02527 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/186 ,  C01B2204/32 ,  C23C16/0281 ,  C23C16/26 ,  C23C16/52 ,  H01L21/02491 ,  H01L21/02658

Abstract: Processes and/or methods of forming substrates suitable for growing grapheme are generally described including forming a metal layer on a prepared substrate, forming a layer of dielectric material on the metal layer, and then directionally recrystallising the metal layer to form a recrystallized metal layer suitable for growing a grapheme monolayer having a length of about fifteen microns or greater.

Abstract translation: 通常描述形成适于生长图形的衬底的方法和/或方法，包括在所制备的衬底上形成金属层，在金属层上形成电介质材料层，然后定向重结晶金属层以形成适当的重结晶金属层 用于生长具有约十五微米或更大的长度的图形单层。

公开(公告)号：WO03096497A8

公开(公告)日：2004-12-29

申请号：PCT/US0312819

申请日：2003-04-23

Applicant: CYMER INC ,  YAGER THOMAS A ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  PAN XIAOJIANG ,  MELCHIOR JOHN T ,  ALGOTS JOHN M ,  BALL MATTHEW ,  ERSHOV ALEXANDER I ,  FLEUROV VLADIMIR ,  GILLESPIE WALTER D ,  GLATZEL HOLGER K ,  LUBLIN LEONARD ,  MARSH ELIZABETH ,  MORTON RICHARD G ,  UJAZDOWKI RICHARD C ,  WARKENTIN DAVID J ,  WEBB R KYLE

Inventor： YAGER THOMAS A ,  PARTLO WILLIAM N ,  SANDSTROM RICHARD L ,  PAN XIAOJIANG ,  MELCHIOR JOHN T ,  ALGOTS JOHN M ,  BALL MATTHEW ,  ERSHOV ALEXANDER I ,  FLEUROV VLADIMIR ,  GILLESPIE WALTER D ,  GLATZEL HOLGER K ,  LUBLIN LEONARD ,  MARSH ELIZABETH ,  MORTON RICHARD G ,  UJAZDOWKI RICHARD C ,  WARKENTIN DAVID J ,  WEBB R KYLE

IPC: H01S3/034 ,  G03F7/20 ,  H01S3/00 ,  H01S3/225 ,  H01S3/22

CPC classification number: G03F7/7055 ,  H01S3/005 ,  H01S3/225

Abstract: The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75x10 Watts/cm and with peak intensity or greater 3.5x10 Watts/cm for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.

Abstract translation: 本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。 本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案 。 实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。 本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

公开(公告)号：WO2006009852A3

公开(公告)日：2006-01-26

申请号：PCT/US2005/021475

申请日：2005-06-17

Applicant: CYMER, INC. ,  PARTLO, William, N. ,  BROWN, Daniel, J., W. ,  YAGER, Thomas, A. ,  ZHANG, Kevin, Weiman

Inventor： PARTLO, William, N. ,  BROWN, Daniel, J., W. ,  YAGER, Thomas, A. ,  ZHANG, Kevin, Weiman

IPC: B32B9/00 ,  B05D5/06

Abstract: An apparatus and method are disclosed for an optical element which may comprise a main optical body comprising a crystal containing halogen atoms; a reflectivity coating for changing the reflectivity of a surface of the main body; and, an intermediate protective layer comprising a material containing free halogen atoms. The crystal may comprise an alkaline earth metal and may comprise fluorine atoms, e.g., calcium fluoride or magnesium fluoride. The intermediate protective layer may comprises a material containing free fluorine atoms, e.g., a material doped with fluorine atoms, e.g., doped fused silica. The intermediate layer comprises an amorphous portion and a polycrystalline portion. The optical element may also comprise a main optical element body; a reflectivity coating comprising a metal halide on an exterior the a surface of the main optical body; and a thin layer of protective outer coating on the reflectivity coating comprising a dense non-porous material thin enough to be transparent to the light of a selected short wavelength. The reflectivity coating may comprise a plurality of layers with at least one layer comprising a metal fluoride and the protective outer coating may comprise a layer of silicon oxyfluoride.

公开(公告)号：WO2012144993A1

公开(公告)日：2012-10-26

申请号：PCT/US2011/033162

申请日：2011-04-20

Applicant: EMPIRE TECHNOLOGY DEVELOPMENT, LLC ,  YAGER, Thomas, A.

Inventor： YAGER, Thomas, A.

IPC: H01G9/052

CPC classification number: H01G11/36 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/186 ,  C01P2004/30 ,  C01P2006/12 ,  H01G11/24 ,  H01G11/46 ,  H01G11/86 ,  Y02E60/13

Abstract: Technologies are generally described for a porous graphene electrode material is described herein that may incorporate a three-dimensional open-cell graphene structure fabricated via chemical vapor deposition onto a metal foam. After the graphene is deposited, the metal foam may be dissolved, leaving a three-dimensional open-cell graphene structure that may include single or few layer graphene. Pseudo-capacitive materials, such as Ru02, Fe304, or Mn02, may be deposited within the pores of the a three-dimensional open-cell graphene structure to form the porous graphene electrode material. The porous graphene electrode material may have a specific capacitance comparable to chemically modified graphene (CMG) electrodes. The porous graphene electrode material may also have a conductivity greater than CMG electrodes of equivalent surface area. Use of the porous graphene electrode material in capacitors may result in siginificant improvements in specific power compared to CMG based capacitors.

Abstract translation: 一般描述了一种多孔石墨烯电极材料的技术，这里描述了可以将通过化学气相沉积制造的三维开孔石墨烯结构结合到金属泡沫上。 在沉积石墨烯之后，可以溶解金属泡沫，留下可以包括单层或几层石墨烯的三维开孔石墨烯结构。 诸如RuO 2，Fe 3 O 3或MnO 2的假电容性材料可以沉积在三维开孔细胞石墨烯结构的孔内，以形成多孔石墨烯电极材料。 多孔石墨烯电极材料可以具有与化学改性石墨烯（CMG）电极相当的比电容。 多孔石墨烯电极材料也可以具有大于等效表面积的CMG电极的导电率。 与基于CMG的电容器相比，在电容器中使用多孔石墨烯电极材料可能导致比功率的显着改善。

公开(公告)号：WO2012128745A1

公开(公告)日：2012-09-27

申请号：PCT/US2011/029064

申请日：2011-03-18

Applicant: EMPIRE TECHNOLOGY DEVELOPMENT LLC ,  YAGER, Thomas A.

Inventor： YAGER, Thomas A.

IPC: B03C7/00

CPC classification number: B03C7/003 ,  B03C3/016 ,  B03C7/04 ,  B03C7/08

Abstract: A method of separating material includes providing a mixture of a first material, such as a semiconductor, and a second material, such as an insulator or a different semiconductor. The mixture can be irradiated using a light source at a wavelength that causes the first material's conductivity to increase while leaving the second material's conductivity (substantially) unchanged. Placing the mixture in contact with a ground electrode discharges the first material but not the second material due the difference in their conductivities. Applying an electric field to the discharged mixture separates the discharged first material from the second material.

Abstract translation: 分离材料的方法包括提供诸如半导体的第一材料和诸如绝缘体或不同半导体的第二材料的混合物。 可以使用光源以使第一材料的导电性增加的波长照射混合物，同时保持第二材料的导电性（基本上）不变。 使混合物与接地电极接触，由于其电导率的差异而排出第一材料而不排放第二材料。 将电场施加到排出的混合物将排出的第一材料与第二材料分离。

公开(公告)号：WO2011112362A2

公开(公告)日：2011-09-15

申请号：PCT/US2011/026022

申请日：2011-02-24

Applicant: EMPIRE TECHNOLOGY DEVELOPMENT, LLC. ,  YAGER, Thomas, A.

Inventor： YAGER, Thomas, A.

IPC: A61N2/00

CPC classification number: A61N1/406

Abstract: Technologies are generally described for hyperthermia based treatment of diseased tissues using conductive particles. Conductive particles of known composition and size distribution may be implanted in diseased tissue and exposed to an alternating magnetic field, which may be tuned to the size of the metal particles to induce eddy currents producing heat in the implanted particles. As the temperature of the metal particles increases, their resistance also increases due to their positive temperature coefficient of resistivity. An antenna placed externally to the body near metal particles may be part of a tuned RF circuit and scanned for resonance. The change either in resonance frequency or circuit impedance may provide tuned feedback, which may be used to control the hyperthermia treatment.

Abstract translation: 技术通常描述为使用导电颗粒进行基于热疗的患病组织的治疗。 已知组成和尺寸分布的导电颗粒可以植入病变组织中并暴露于交变磁场，该交变磁场可调整到金属颗粒的尺寸以诱导在植入的颗粒中产生热的涡流。 随着金属颗粒的温度升高，它们的电阻也由于其电阻率的正温度系数而增加。 在金属颗粒附近放置在身体外部的天线可能是被调谐的RF电路的一部分，并被扫描以进行谐振。 谐振频率或电路阻抗的变化可能提供调谐反馈，可用于控制热疗治疗。

公开(公告)号：WO2005104311A3

公开(公告)日：2007-03-22

申请号：PCT/US2005006932

申请日：2005-03-04

Applicant: CYMER INC ,  SANDSTROM RICHARD L ,  ALGOTS J MARTIN ,  BROWN JOSHUA C ,  CYBULSKY RAYMOND F ,  DUNLOP JOHN ,  HOWEY JAMES K ,  MORTON RICHARD G ,  PAN XIAOJIANG J ,  PARTLO WILLIAM N ,  PUTRIS FIRAS F ,  WATSON TOM A ,  YAGER THOMAS A

Inventor： SANDSTROM RICHARD L ,  ALGOTS J MARTIN ,  BROWN JOSHUA C ,  CYBULSKY RAYMOND F ,  DUNLOP JOHN ,  HOWEY JAMES K ,  MORTON RICHARD G ,  PAN XIAOJIANG J ,  PARTLO WILLIAM N ,  PUTRIS FIRAS F ,  WATSON TOM A ,  YAGER THOMAS A

IPC: H01S3/22 ,  G01B9/02 ,  G01J1/42 ,  G01J9/02 ,  G03F7/20 ,  H01S3/00 ,  H01S3/036 ,  H01S3/038 ,  H01S3/04 ,  H01S3/041 ,  H01S3/08 ,  H01S3/081 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/10 ,  H01S3/102 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/11 ,  H01S3/13 ,  H01S3/134 ,  H01S3/139 ,  H01S3/223 ,  H01S3/225 ,  H01S3/23

CPC classification number: H01S3/02 ,  G01J1/429 ,  G01J9/02 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/0057 ,  H01S3/0071 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0401 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2333 ,  H01S3/2366

Abstract: A high power narrow band, high repetition rate laser light source optical improvement apparatus and methods are disclosed with a fast angularly positionable mirror having a mirror mounting frame, a reflective optic with a coefficient different from that of the mounting frame, at least one flexure mount framed in the mounting frame that is flexible having flexure arm attached the flexture to the mounting frame. The apparatus may include a flexure force mechanism having an elongated rod. The force mechanism may prestress the flexure. The mirror maybe a grating which includes a substrate with metallic layer formed on the substrate, and a protective coating made of silica formed on the reflective metallic layer. The grating maybe actively tuned using an electro- or magneto- sensitive element. Oxides of the metal in the reflective layer may be removed by a hydrogen purge system exposed to deep ultraviolet radiation.

Abstract translation: 公开了一种高功率窄带，高重复率激光光源光学改进装置和方法，其具有快速可角度定位的反射镜，其具有镜安装框架，具有与安装框架系数不同的系数的反射光学元件，至少一个弯曲安装座 框架在柔性的安装框架中，挠性臂将挠性件连接到安装框架。 该装置可以包括具有细长杆的挠曲力机构。 力机构可以预应力挠曲。 镜子可以是包括在基板上形成有金属层的基板的光栅，以及形成在反射金属层上的由二氧化硅形成的保护涂层。 光栅可能会使用电磁感应元件或磁敏元件进行主动调谐。 可以通过暴露于深紫外线辐射的氢气清除系统来去除反射层中金属的氧化物。

公开(公告)号：WO2003096497A1

公开(公告)日：2003-11-20

申请号：PCT/US2003/012819

申请日：2003-04-23

Applicant: CYMER, INC. ,  YAGER, Thomas, A. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  PAN, Xiaojiang ,  MELCHIOR, John, T. ,  ALGOTS, John, M. ,  BALL, Matthew ,  ERSHOV, Alexander, I. ,  FLEUROV, Vladimir ,  GILLESPIE, Walter, D. ,  GLATZEL, Holger, K. ,  LUBLIN, Leonard ,  MARSH, Elizabeth ,  MORTON, Richard, D. ,  UJAZDOWKI, Richard, C. ,  WARKENTIN, David, J. ,  WEBB, R., Kyle

Inventor： YAGER, Thomas, A. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  PAN, Xiaojiang ,  MELCHIOR, John, T. ,  ALGOTS, John, M. ,  BALL, Matthew ,  ERSHOV, Alexander, I. ,  FLEUROV, Vladimir ,  GILLESPIE, Walter, D. ,  GLATZEL, Holger, K. ,  LUBLIN, Leonard ,  MARSH, Elizabeth ,  MORTON, Richard, D. ,  UJAZDOWKI, Richard, C. ,  WARKENTIN, David, J. ,  WEBB, R., Kyle

IPC: H01S3/22

CPC classification number: G03F7/7055 ,  H01S3/005 ,  H01S3/225

Abstract: The present invention provides long life optics for a modular, high repetition rate, ultraviolet gas discharge laser systems (Fig. 1B) producing a high repetition rate high power output beam (38). The invention includes solutions to a surface damage problem discovered by Applicants on CaF 2 optics (4260) (422)(424)(426) located in high pulse intensity sections (10)(26) of the output beam (14C) of prototype laser systems. Embodiments include an enclosed (4) and purged beam path (14C) with beam pointing control (40A) (40B)(6) for beam delivery of billions of output laser pulses (38). Optical components and modules described herein are capable of controlling ultraviolet laser output pulses (14A) with wavelength less than 200nm with average output pulse intensities greater than 1.75×10 6 Watts/cm 2 and with peak intensity or greater 3.5×10 6 Watts/cm 2 for many billions of pulses (14A) as compared to prior art components and modules which failed after only a few minutes in these pulse intensities.

Abstract translation: 本发明提供了用于产生高重复率高功率输出光束（38）的模块化高重复率紫外线气体放电激光系统（图1B）的长寿命光学器件。 本发明包括由原始激光系统的输出光束（14C）的高脉冲强度部分（10）（26）中的CaF2光学器件（4260）（422）（424）（426）发现的由申请人发现的表面损伤问题的解决方案 。 实施例包括具有用于束输送数十亿个输出激光脉冲（38）的光束指向控制（40A）（40B）（6））的封闭（4）和净化光束路径（14C）。 本文所述的光学部件和模块能够控制波长小于200nm的紫外激光输出脉冲（14A），平均输出脉冲强度大于1.75×10 6瓦/ cm 2，峰值强度或更大的3.5×10 6 与现有技术的元件和模块相比，在这些脉冲强度仅在几分钟之后就失败了，数十亿脉冲（14A）的功率>瓦特/平方厘米（2）。

公开(公告)号：WO2011112362A3

公开(公告)日：2016-04-07

申请号：PCT/US2011026022

申请日：2011-02-24

Applicant: EMPIRE TECHNOLOGY DEV LLC ,  YAGER THOMAS A

Inventor： YAGER THOMAS A

IPC: A61N2/00 ,  A61B18/18

CPC classification number: A61N1/406

Abstract: Technologies are generally described for hyperthermia based treatment of diseased tissues using conductive particles. Conductive particles of known composition and size distribution may be implanted in diseased tissue and exposed to an alternating magnetic field, which may be tuned to the size of the metal particles to induce eddy currents producing heat in the implanted particles. As the temperature of the metal particles increases, their resistance also increases due to their positive temperature coefficient of resistivity. An antenna placed externally to the body near metal particles may be part of a tuned RF circuit and scanned for resonance. The change either in resonance frequency or circuit impedance may provide tuned feedback, which may be used to control the hyperthermia treatment.

Abstract translation: 技术通常描述为使用导电颗粒进行基于热疗的患病组织治疗。 已知组成和尺寸分布的导电颗粒可以植入病变组织中并暴露于交变磁场，该交变磁场可调整到金属颗粒的尺寸以诱导在植入的颗粒中产生热的涡流。 随着金属颗粒的温度升高，它们的电阻也由于其正电温度系数而增加。 放置在金属颗粒附近的身体外部的天线可能是被调谐的RF电路的一部分，并被扫描以进行谐振。 谐振频率或电路阻抗的改变可以提供调节反馈，其可以用于控制热疗治疗。