Abstract:
A filter includes an inlet side, an outlet side, and a body. The body includes a first substrate that includes an array of inlet holes passing through the first substrate, and a second substrate that includes an array of outlet holes passing through the second substrate. The body further includes an intermediate region that includes a plurality of channels extending along a plane that is transverse or at an angle to a main axis of the filter. Each channel communicates directly or indirectly with at least one of the inlet holes and at least one of the outlet holes. The filter provides a plurality of fluid flow paths through the body from the inlet side to the outlet side.
Abstract:
The invention provides methods for making porous devices from substantially monodisperse populations of substantially spherical particles of polyarylketone polymers or of thio-analogues of such polymers, of selected sizes. The porous devices allow greater control of porosity than previously available porous devices. In some embodiments, the porous devices are frits, filters, membranes or monoliths.
Abstract:
Apparatus, packaging, and methods of manufacture of an integrated circuit are provided. The integrated circuit includes a component of a first type fabricated on a first substrate containing a first material, and a component of a second type fabricated on a second substrate containing a second material. The first material has better compatibility than the second material with fabrication and/or performance of the component of the first type, while the second material has better compatibility than the first material with fabrication and/or performance of the component of the second type. Also described, is a method of making the above-mentioned integrated circuit, the method including, among other steps, the step of disposing the first and second substrates opposite one another, and the step of establishing an electrical connection between the components.
Abstract:
A microfabricated device (15) has a first substrate (21), a second substrate, a film bulk acoustic resonator (FBAR) device (50), and a circuit (52). The second substrate is bonded to the first substrate to define a chamber (44). The FBAR device is located on a surface of the first substrate and inside the chamber. The circuit is located on a surface of the second substrate and inside the chamber. An electrical connection (27, 56, 59) connects the circuit and the FBAR device.
Abstract:
A device comprises a first substrate (21), a second substrate (24) and a compliant element (27, 42). The compliant element is composed of a first, compliant material between the first substrate and the second substrate and has a side surface coated at least in part with a layer (33, 47) of a second material. The compliant element exhibits deformation consistent with the first substrate and a second side having been pressed together. In some embodiments, the second material is electrically conductive such that the compliant element provides a reliable electrical connection between the substrates. In other embodiments, the second material increases the hermeticity of the compliant element such that the compliant element provides a better hermetic seal between the substrates.