公开(公告)号：WO2006062766A2

公开(公告)日：2006-06-15

申请号：PCT/US2005/043112

申请日：2005-11-29

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

Inventor： CUTLER, Donald, R. ,  BAIRD, Brian, W. ,  HARRIS, Richard, S. ,  HEMENWAY, David, M. ,  LO, Ho Wai ,  NILSEN, Brady, E. ,  OSAKO, Yasu ,  SUN, Lei ,  SUN, Yunlong ,  UNRATH, Mark, A.

IPC: H01S3/10 ,  H01S3/08

CPC classification number: B23K26/0673 ,  B23K26/0622 ,  B23K26/067 ,  B23K26/082

Abstract: A laser beam switching system (50) employs a laser (52) coupled to a beam switching device (58) that causes a laser beam to switch between first and second beam positioning heads such that while the first beam positioning head (60) is directing the laser beam to process a workpiece target location, the second beam positioning head (62) is moving to another target location and vice versa. A preferred beam switching device includes first and second AOMs. When RF is applied to the first AOM (72), the laser beam is diffracted toward the first beam positioning head, and when RF is applied to the second AOM (74), the laser beam is diffracted toward the second beam positioning head. A workpiece processing system (120) employs a common modular imaged optics assembly (122) and an optional variable beam expander (94) for optically processing multiple laser beams.

Abstract translation: 激光束切换系统（50）采用耦合到光束切换装置（58）的激光器（52），该激光器使激光束在第一和第二光束定位头之间切换，使得当第一 射束定位头（60）引导激光束来处理工件目标位置，第二射束定位头（62）移动到另一个目标位置，反之亦然。 优选的射束切换装置包括第一和第二AOM。 当RF施加到第一AOM（72）时，激光束被朝向第一光束定位头衍射，并且当RF被施加到第二AOM（74）时，激光束被衍射向第二光束定位头。 工件处理系统（120）采用共同的模块化成像光学组件（122）和可选的可变光束扩展器（94），用于光学处理多个激光束。

公开(公告)号：WO1996029634A1

公开(公告)日：1996-09-26

申请号：PCT/US1996003805

申请日：1996-03-19

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.

Inventor： ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  CUTLER, Donald, R. ,  PAILTHORP, Robert, M. ,  UNRATH, Mark, A.

IPC: G05B19/19

CPC classification number: B23K26/083 ,  B23K26/082 ,  B23K26/0876 ,  G05B19/39 ,  G05B2219/34047 ,  G05B2219/34391 ,  G05B2219/36029 ,  G05B2219/41331 ,  G05B2219/41457 ,  G05B2219/42209 ,  G05B2219/42219 ,  G05B2219/45041 ,  G05B2219/45139 ,  H05K3/0008 ,  H05K3/0017 ,  H05K3/0038 ,  H05K2203/0165 ,  H05K2203/108

Abstract: A multi-rate positioner system (50) receives unpanelized positioning commands from a database storage subsystem (64), profiles the commands (72) into a half-sine positioning signal, and further processes the signal into a low-frequency positioning signal (LFP) and a high-frequency positioning signal (HFP) for actuating respective slow (56, 58) and fast (54) positioners to target locations on a workpiece (62). The slow and fast positioners move without necessarily stopping in response to a stream of positioning command data while coordinating their individually moving positions to produce temporarily stationary tool positions (140) over target locations defined by the database. The multi-rate positioning system reduces the fast positioner movement range requirement while providing significantly increased tool processing throughput.

Abstract translation: 多速率定位器系统（50）从数据库存储子系统（64）接收未通用的定位命令，将命令（72）分配成半正弦定位信号，并进一步将该信号处理成低频定位信号（LFP ）和用于致动相应的缓慢（56,58）和快速（54）定位器的目标位置的高频定位信号（HFP）。 响应于定位指令数据流而缓慢且快速的定位器移动而不必停止，同时协调其单独移动的位置，以在由数据库定义的目标位置上产生临时固定的工具位置（140）。 多速率定位系统降低了快速定位器移动范围的要求，同时提供了显着增加的刀具处理吞吐量。

公开(公告)号：WO2004076117A1

公开(公告)日：2004-09-10

申请号：PCT/US2003/032973

申请日：2003-10-17

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  BARRETT, Spencer, B. ,  UNRATH, Mark, A. ,  CUTLER, Donald, R.

Inventor： BARRETT, Spencer, B. ,  UNRATH, Mark, A. ,  CUTLER, Donald, R.

IPC: B23K26/08

CPC classification number: B23K26/0876 ,  B23K26/02 ,  B23K26/042 ,  B23K26/08 ,  B23K26/082 ,  B23K26/083 ,  B23K26/351 ,  B23K26/389 ,  B23K2201/40

Abstract: A tertiary positioner system (80) of this invention employs X- and Y-axis translation stages (86, 88), galvanometer-driven mirrors (64, 66), and a fast steering mirror ("FSM") (120) to direct a laser beam (90) to target locations (121) on a workpiece (92). A positioning signal is received by a low-pass filter (103) that produces filtered position data for driving the X- and Y-axis translation stages. The actual positions of the X- and Y-axis translation stages are subtracted from the unfiltered positioning data to produce an X-Y position error signal for driving the galvanometer-driven X- and Y- axis mirrors. The actual mirror positions are subtracted from the actual positions of the X- and Y-axis translation stages to generate a positional error signal representing the difference between the commanded and actual positions of the laser beam. The positional error signal drives the FSM to rapidly correct any positional errors.

Abstract translation: 本发明的三次定位器系统（80）采用X轴和Y轴平移台（86,88），电流计驱动反射镜（64,66）和快速转向镜（“FSM”）（120） 激光束（90）到工件（92）上的目标位置（121）。 定位信号由低通滤波器（103）接收，该低通滤波器产生用于驱动X轴和Y轴平移级的滤波位置数据。 从未滤波的定位数据中减去X轴和Y轴平移台的实际位置，以产生用于驱动电流计驱动的X轴和Y轴镜的X-Y位置误差信号。 从X轴和Y轴平移台的实际位置减去实际的镜头位置，以产生表示激光束的指令位置和实际位置之间的差的位置误差信号。 位置误差信号驱动FSM快速校正任何位置误差。

公开(公告)号：WO2003059568A1

公开(公告)日：2003-07-24

申请号：PCT/US2003/000686

申请日：2003-01-10

Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC. ,  CUTLER, Donald, R.

Inventor： CUTLER, Donald, R.

IPC: B23K26/38

CPC classification number: B23K26/08 ,  B23K26/083 ,  B23K26/382 ,  B23K26/389 ,  B23K26/40 ,  B23K2201/42 ,  B23K2203/12 ,  B23K2203/42 ,  B23K2203/50 ,  B23K2203/52 ,  H05K3/0026

Abstract: An fast steering mirror (30) , such as a PMN actuated mirror, is positioned in a beam path (18) of a stage-based positioning system (40) to continuously move a laser beam (46) in a high speed prescribed pattern about a nominal target position (60) to spatially separate focused laser spots (48) generated at a high laser repetition rate and thereby create geometric features having dimensions greater than those of the focused laser spot (48). A series of laser spots (48) at a given repetition rate appear as a series of larger diameter laser spots at a lower pulse rate without beam quality problems associated with working out of focus.

Abstract translation: 诸如PMN致动反射镜的快速转向反射镜（30）位于基于平台的定位系统（40）的光束路径（18）中，以以高速规定的图案连续地移动激光束（46） 空间上分离以高激光重复率产生的聚焦激光光斑（48）的标称目标位置（60），从而产生尺寸大于聚焦激光光斑（48）的尺寸的几何特征。 以给定重复率的一系列激光斑点（48）以较低的脉率显示为一系列较大直径的激光斑点，而没有与失焦对焦相关的光束质量问题。