PRODUCTION METHOD FOR NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE
    1.
    发明申请
    PRODUCTION METHOD FOR NITRIDE SEMICONDUCTOR LIGHT EMITTING DEVICE 审中-公开
    氮化物半导体发光装置的生产方法

    公开(公告)号:WO2007032546A8

    公开(公告)日:2008-04-03

    申请号:PCT/JP2006318658

    申请日:2006-09-14

    CPC classification number: H01L33/0079 H01L33/007

    Abstract: The present invention provides a production method for a nitride semiconductor light emitting device, which warps less after removing the substrate, and which can emit light from the side thereof; specifically, the present invention provides a production method for a nitride semiconductor light emitting device comprising: forming stacked layers by stacking at least an n-type semiconductor layer, a light emitting layer, and a p-type semiconductor layer on a substrate in this order; forming grooves which divide the stacked layers so as to correspond to nitride semiconductor light emitting devices to be produced; filling the grooves with a sacrifice layer; and forming a plate layer on the p-type semiconductor layer and the sacrifice layer by plating.

    Abstract translation: 本发明提供了一种氮化物半导体发光器件的制造方法,其在去除衬底之后变得较小,从侧面发光; 具体而言,本发明提供了一种氮化物半导体发光器件的制造方法,其特征在于,具有以下顺序,在基板上依次层叠至少n型半导体层,发光层和p型半导体层来形成堆叠层 ; 形成凹槽,其分隔堆叠的层以对应于待生产的氮化物半导体发光器件; 用牺牲层填充凹槽; 以及通过电镀在p型半导体层和牺牲层上形成平板层。

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