公开(公告)号：WO00055689A1

公开(公告)日：2000-09-21

申请号：PCT/US2000/003588

申请日：2000-02-11

IPC: C03B19/14 ,  C03B20/00 ,  C03C3/06 ,  C03C4/00 ,  G03F1/00 ,  G03F7/20 ,  G03F1/14

CPC classification number: C03C4/0085 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B19/1469 ,  C03B19/1492 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/12 ,  C03B2201/21 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/66 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/21 ,  G03F1/60

Abstract: The invention includes methods of making lithography photomask blanks. The invention also includes lithography photomask blanks and preforms for producing lithography photomask. The method of making a lithography photomask blank includes providing a soot deposition surface, producing SiO2 soot particles and projecting the SiO2 soot particles toward the soot deposition surface. The method includes successively depositing layers of the SiO2 soot particle on the deposition surface to form a coherent SiO2 porous glass preform body comprised of successive layers of the SiO2 soot particles and dehydrating the coherent SiO2 glass preform body to remove OH from the preform body. The SiO2 is exposed to and reacted with a fluorine containing compound and consolidated into a nonporous silicon oxyfluoride glass body with parallel layers of striae. The method further includes forming the consolidated silicon oxyfluoride glass body into a photomask blank having a planar surface with the orientation of the striae layer parallel to the photomask blank planar surface.

Abstract translation: 本发明包括制造光刻光掩模坯料的方法。 本发明还包括光刻光掩模坯料和用于生产光刻光掩模的预成型件。 制造光刻光掩模坯料的方法包括提供烟灰沉积表面，产生SiO 2烟灰颗粒并将SiO 2烟灰颗粒投射到烟灰沉积表面。 该方法包括在沉积表面上依次沉积SiO 2烟灰颗粒层，以形成由SiO 2烟灰颗粒的连续层组成的粘结SiO 2多孔玻璃预制体，并使相干的SiO 2玻璃预制体脱水以从预成型体中去除OH。 将SiO 2暴露于含氟化合物并与其反应，并固化成具有平行的条纹层的无孔氟硅氧化物玻璃体。 该方法还包括将固化的氟氧化硅玻璃体形成为具有平坦表面的光掩模坯料，其中条纹层的取向平行于光掩模坯料平面。

公开(公告)号：WO99033755A1

公开(公告)日：1999-07-08

申请号：PCT/JP1998/005180

申请日：1998-11-18

IPC: C03B37/014 ,  C03B37/018

CPC classification number: C03B37/01413 ,  C03B37/0142 ,  C03B37/01486 ,  C03B2207/36 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/66 ,  C03B2207/70

Abstract: A method of manufacturing an optical fiber base material, comprising forming a soot body by spray-depositing fine glass particles, which are synthesized by a burner (2), onto an outer circumferential surface of a starting member (3), which is prepared by fusing a dummy rod to both end portions of a core base material, while moving the starting member (3) reciprocatingly in the axial direction thereof relatively with respect to the burner, characterized in that gauge marks (11, 12) are set in positions which are a predetermined distance away from interfaces of the core base material and dummy rod toward the dummy rod, the relative reciprocating movement of the starting member being made by reversing the direction of the relative movement at instants at which the burner (2) reaches turning points (15, 16) existing in end portions distant from the gauge marks (11, 12), a raw glass material being fed from a raw material supply unit (5) only when the burner (2) is positioned between the gauge marks (11, 12).

Abstract translation: 一种光纤基材的制造方法，其特征在于，包括通过将由燃烧器（2）合成的微细玻璃颗粒喷雾沉积在起始部件（3）的外周面上，形成烟炱体，所述外周面由 将模拟棒固定在芯基材的两端部，同时使起始构件（3）相对于燃烧器沿其轴向往复运动，其特征在于，将尺寸标记（11,12）设置在 距离芯基材和虚拟棒的界面相对于虚拟棒的预定距离，起始构件的相对往复运动通过在燃烧器（2）到达转折点的时刻反转相对运动的方向来制成 （11,16）的端部中存在的（16,16），原料玻璃材料仅在燃烧器（2）位于高温区域之间时从原料供给单元（5）供给 ge标记（11,12）。

公开(公告)号：WO99032413A1

公开(公告)日：1999-07-01

申请号：PCT/US1998/027418

申请日：1998-12-23

IPC: C03B37/014 ,  C03B37/018

CPC classification number: C03B37/0142 ,  C03B37/01446 ,  C03B37/01466 ,  C03B2201/02 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/54 ,  C03B2207/64 ,  C03B2207/87 ,  Y02P40/57

Abstract: Core soot material (62) is deposited via a stream (55) onto a target (34). At least one additional layer (64) is deposited on the core material (62). A cladding layer (65) is deposited on the previous layer (64). Then this item is dehydrated, sintered and formed into a plurality of fibers.

Abstract translation: 核心烟炱材料（62）经由流（55）沉积到靶（34）上。 至少一个附加层（64）沉积在芯材料（62）上。 覆层（65）沉积在先前的层（64）上。 然后将该物品脱水，烧结并形成多根纤维。

公开(公告)号：WO2016008287A1

公开(公告)日：2016-01-21

申请号：PCT/CN2015/070557

申请日：2015-01-12

Applicant: 江苏亨通光电股份有限公司

Inventor： 肖华 ,  赵奉阔 ,  田国才 ,  王友兵 ,  屠建宾 ,  李晓东

IPC: C03B37/018

CPC classification number: C03B37/018 ,  C03B37/0142 ,  C03B37/0148 ,  C03B2207/54

Abstract: 一种烤灯、沉积装置以及提高光纤预制棒疏松体密度的方法。该沉积装置包括烤灯和两个沉积喷灯，两个沉积喷灯位于同一竖直平面内，第二沉积喷灯位于第一沉积喷灯上方，烤灯不在该竖直平面内且沿光纤预制棒疏松体的旋转方向安装在第二沉积喷灯的斜上方。烤灯和两个沉积喷灯满足0≤(c-b)≤(b-a)，a、b、c分别为第一沉积喷灯的沉积点、第二沉积喷灯的沉积点、烤灯的灼烧点距离光纤预制棒疏松体底端的高度。应用该沉积装置能够提高光纤预制棒疏松体密度。

公开(公告)号：WO2004014812A1

公开(公告)日：2004-02-19

申请号：PCT/KR2003/001612

申请日：2003-08-11

Applicant: LG CABLE LTD. ,  SEOUL NATIONAL UNIVERSITY INSTITUTE OF ADVANCED MACHINERY AND DESIGN ,  SHIN, Hyung-soo ,  CHOI, Man-soo ,  PARK, Chan-yong ,  LEE, Bong-hun

Inventor： SHIN, Hyung-soo ,  CHOI, Man-soo ,  PARK, Chan-yong ,  LEE, Bong-hun

IPC: C03B37/018

CPC classification number: C03B37/0146 ,  C03B37/0142 ,  C03B2207/06 ,  C03B2207/42 ,  C03B2207/54 ,  Y02P40/57

Abstract: Disclosed is a method and apparatus for manufacturing an optical fiber preform, using an outside vapor deposition (OVD) process, in which deposition and sintering processes can be continuously carried out in an OVD apparatus. The manufacturing apparatus includes a vertically-extending carriage, and a sintering unit installed at the upper end of the carriage, and adapted to sinter a clad deposited on a circular target rod. The sintering unit is a hydrogen/oxygen flame burner or a furnace using a heating source that doesn’t generate H 2 O or hydroxyl groups (OH) during a heating operation thereof. The manufacturing method includes a deposition step of depositing a clad on the circular target rod while reciprocating a deposition burner, and a sintering step of sintering the clad while reciprocating the sintering unit in a state in which the circular target rod deposited with the clad extends through the sintering unit.

Abstract translation: 公开了一种使用外部气相沉积（OVD）工艺制造光纤预制棒的方法和装置，其中可以在OVD装置中连续进行沉积和烧结工艺。 制造装置包括垂直延伸的托架和安装在托架的上端的烧结单元，并且适于烧结沉积在圆形靶棒上的包层。 烧结单元是氢/氧焰燃烧器或使用在其加热操作期间不产生H 2 O或羟基（OH））的加热源的炉。 该制造方法包括沉积步骤，在圆形靶棒上沉积包层，同时往复沉积燃烧器;以及烧结步骤，在沉积有包层的圆形靶棒延伸穿过的状态下使烧结单元往复运动 烧结单元。

公开(公告)号：WO1998003440A1

公开(公告)日：1998-01-29

申请号：PCT/EP1997003818

申请日：1997-07-17

Applicant: HERAEUS QUARZGLAS GMBH ,  SCHAPER, Hartwig ,  RUPPERT, Klaus

Inventor： HERAEUS QUARZGLAS GMBH

IPC: C03B37/014

CPC classification number: C03B37/0142 ,  C03B19/1423 ,  C03B37/01413 ,  C03B37/01486 ,  C03B2207/36 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/62 ,  C03B2207/66 ,  C03B2207/70

Abstract: The invention concerns a method of producing quartz glass bodies by depositing SiO2 particles on the cylindrical generated surface of a cylindrical carrier rotating about its longitudinal axis, an elongate porous preform being produced. The SiO2 particles are formed in a plurality of precipitating burners which are disposed in at least one row extending parallel to the longitudinal axis of the carrier, the row of burners being moved at a predetermined translation speed in a reciprocating manner between turning points at which their direction of movement is reversed, and the resultant preform being sintered. According to the invention, the basic value of the surface temperature of the preform in the process of forming is maintained at between 1050 DEG C and 1350 DEG C, the average peripheral speed of the preform is maintained at between 8 m/min and 15 m/min, and the average translation speed of the burner row is maintained at between 300 mm/min and 800 mm/min.

Abstract translation: 一种用于生产的SiO石英玻璃体的过程的一个绕其纵向轴线旋转的筒状支撑件的横向圆柱体表面上2个颗粒以形成一个细长的多孔预成型件，其中，在多个沉积燃烧器所形成的SiO 2颗粒的，其平行于所述支撑体中的至少一个纵向轴线延伸 烧拐点处扭转其运动方向，返回到预定平移速度往复移动，被布置，并且其中所产生的预制件的烧结之间范围内。 成形预成型体的表面温度的基准值是在1050℃，1350℃的之间的范围内，该预成型件的平均圆周速度为8米/分钟和15米/分钟和燃烧器行的平均平移速度之间的范围是范围在300毫米/ 分钟和800毫米/分钟被保持。

公开(公告)号：WO2012136678A1

公开(公告)日：2012-10-11

申请号：PCT/EP2012/056113

申请日：2012-04-03

Applicant: HERAEUS QUARTZ UK LIMITED ,  MUNDY, Alan ,  SAYCE, Ian, George

Inventor： MUNDY, Alan ,  SAYCE, Ian, George

IPC: C03B37/014 ,  C03B19/14

CPC classification number: C03B37/014 ,  C03B19/1492 ,  C03B37/01493 ,  C03B2207/36 ,  C03B2207/52 ,  C03B2207/54 ,  C03B2207/70 ,  Y10T428/131

Abstract: Processes for the manufacture of a hollow cylindrical porous body of synthetic vitreous silica soot by outside vapour deposition on a mandrel are described, in which the temperature of the mandrel is controlled to be substantially constant throughout the deposition process. In preferred embodiments, the mandrel is composed of metal or metal alloy. Hollow ingots of pure or doped synthetic vitreous silica glass manufactured by such processes are also described.

Abstract translation: 描述了通过心轴上的外部气相沉积来制造合成玻璃态石墨烟炱的中空圆柱形多孔体的方法，其中心轴的温度在整个沉积过程中被控制为基本恒定。 在优选实施例中，心轴由金属或金属合金构成。 还描述了通过这种方法制造的纯的或掺杂的合成玻璃石英玻璃的中空锭。

公开(公告)号：WO01083388A2

公开(公告)日：2001-11-08

申请号：PCT/US2001/012472

申请日：2001-04-17

IPC: C03B37/018 ,  C03B19/14 ,  C03B37/012 ,  C03B37/014 ,  C03C3/06 ,  F23D14/22 ,  F23D14/32 ,  G03F1/00 ,  G03F7/20

CPC classification number: G03F7/70216 ,  C03B19/1407 ,  C03B19/1415 ,  C03B19/1423 ,  C03B19/1453 ,  C03B37/01202 ,  C03B37/01406 ,  C03B37/01413 ,  C03B37/0142 ,  C03B37/0146 ,  C03B2201/12 ,  C03B2203/22 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/30 ,  C03B2207/38 ,  C03B2207/40 ,  C03B2207/42 ,  C03B2207/46 ,  C03B2207/54 ,  C03B2207/70 ,  C03B2207/81 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/20 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  F23D14/22 ,  F23D14/32 ,  G03F1/60 ,  G03F7/70958

Abstract: The methods and apparatus make substantially water-free fused silica preforms or glass by removing water as a reaction product, from the atmosphere, removing water from the transport process, or combinations thereof. Substantially water-free soot, preforms or glass are achieved by using a hydrogen-free fuel, such as carbon monoxide, in the deposition process. Alternatively, a soot producing burner has parameters that enable operation on a substantially hydrogen-free fuel. End burners, which minimize water production, are also described. Such water-free methods are useful in depositing fluorine-doped soot efficiently. Glassy barrier layer methods and apparatus are also described for minimizing dopant migration, especially fluorine and laser and induction methods and apparatus for forming the barrier layer. A chlorine, fluorine and silica precursor, such as chlorofluorosilane, may be used. One embodiment is directed to combustion enhancing additives to the substantially hydrogen-free fuels. The methods and apparatus are useful for producing photomask substrates and optical fiber preforms.

Abstract translation: 所述方法和装置通过从大气中除去水作为反应产物，从运输过程中除去水或其组合，使得基本上无水的熔融二氧化硅预制件或玻璃。 在沉积过程中，通过使用无氢燃料，例如一氧化碳，可实现基本无水的烟灰，预型体或玻璃。 或者，产生烟灰的燃烧器具有能够在基本上无氢燃料上操作的参数。 还描述了最小化水的生产的终端燃烧器。 这种无水方法可有效地沉积氟掺杂烟灰。 还描述了用于最小化掺杂剂迁移的玻璃状阻挡层方法和装置，特别是氟和激光以及用于形成阻挡层的感应方法和装置。 可以使用氯，氟和二氧化硅前体，例如氯氟硅烷。 一个实施方案涉及对基本上无氢燃料的燃烧增强添加剂。 所述方法和装置可用于制造光掩模基板和光纤预制件。

公开(公告)号：WO01068539A1

公开(公告)日：2001-09-20

申请号：PCT/US2001/006216

申请日：2001-02-27

IPC: C03B8/04 ,  C03B37/014 ,  F23D14/22 ,  F23D14/32 ,  C03B20/00 ,  C03B8/02

CPC classification number: C03B37/0142 ,  C03B37/0148 ,  C03B2201/34 ,  C03B2201/50 ,  C03B2201/54 ,  C03B2207/02 ,  C03B2207/06 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/34 ,  C03B2207/46 ,  C03B2207/54 ,  C03B2207/62 ,  C03B2207/64 ,  F23D14/22 ,  F23D14/32

Abstract: An apparatus (10) for producing a glass soot in a flame (51) and depositing the soot onto a bait rod (52) includes a first burner (12) having a droplet-emitting first region (14), a gas-emitting second region (16) surrounding the first region, and a gas-emitting third region (18) surrounding the second region. The first region emits a glass-forming mixture (20) from a source (21), the second region emits an inert gas (22) from a source (23), and the third region emits a combination of oxygen and a combustible gas from a source (25). A conversion area (26) has a first section (27) proximate the first burner and a second section (29) distal from the first burner. At least one secondary burner (28 and 30) has a fourth (32) region emitting oxygen from a source (36) and fifth (34) region emitting a combustible gas from a source (38) into a flame (31) communicating with the second section (29) of the conversion area.

Abstract translation: 一种用于在火焰（51）中产生玻璃烟炱并将烟炱沉积到诱饵杆（52）上的装置（10）包括具有液滴发射第一区域（14）的第一燃烧器（12），气体发射第二区域 围绕第一区域的区域（16）和围绕第二区域的气体发射第三区域（18）。 第一区域从源极（21）发射玻璃形成混合物（20），第二区域从源极（23）发射惰性气体（22），并且第三区域从氧气和可燃气体组合发射氧气 来源（25）。 转换区域（26）具有靠近第一燃烧器的第一部分（27）和远离第一燃烧器的第二部分（29）。 至少一个二次燃烧器（28和30）具有从源（36）和第五（34）区域发射氧气的第四（32）区域，其将来自源（38）的可燃气体发射到与 第二部分（29）的转换区域。

公开(公告)号：WO2013014258A3

公开(公告)日：2013-04-04

申请号：PCT/EP2012064748

申请日：2012-07-26

Applicant: HERAEUS QUARZGLAS ,  SCHULTHEIS ANDREAS ,  BRAEUER KARSTEN ,  SCHMIDT RICHARD

Inventor： SCHULTHEIS ANDREAS ,  BRAEUER KARSTEN ,  SCHMIDT RICHARD

IPC: C03B37/014

CPC classification number: C03B37/0148 ,  C03B37/01426 ,  C03B2201/12 ,  C03B2207/46 ,  C03B2207/54 ,  C03B2207/66

Abstract: In plasma deposition processes for producing an optical preform according to the POD method, a cladding glass layer composed of fluorine-doped quartz glass is produced by means of a plasma torch on a cylindrical substrate body composed of quartz glass, said substrate body rotating about the longitudinal axis thereof. In this case, the plasma torch performs a reversing relative movement between two turning points (A; B) along the substrate body. In order, proceeding therefrom, to achieve a high fluorine doping in conjunction with a dopant distribution that is as uniform as possible axially, the invention proposes that a heat element has a heating effect on the region of one turning point (A; B) when the plasma torch is situated in the region of the other turning point (B; A).

Abstract translation: 在用于制造根据POD方法的光学预型件的等离子体沉积工艺中，对所生成的关于由石英玻璃..的在这种情况下它的纵向轴线旋转的圆筒形基体通过等离子体焰炬而掺氟的石英玻璃构成的包层玻璃层，等离子体焰炬取两个转折点之间的反转相对移动（; B）沿所述基板本体。 为了此基础上实现在轴向尽可能均匀掺杂剂的高的氟掺杂，本发明提出在一个转折点的区域（A; B）变暖作用的热元件，当在其它转折点的区域中的等离子体炬（B; A）是 ，