METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE
    2.
    发明申请
    METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE 审中-公开
    方法,化学和设备在微电子工件上的高沉积速率焊接电镀

    公开(公告)号:WO0040779A8

    公开(公告)日:2001-02-22

    申请号:PCT/US9915850

    申请日:1999-07-12

    CPC classification number: C25D3/30 C25D3/34 C25D7/123 C25D17/001

    Abstract: The invention is directed to an electroplating apparatus for selectively depositing tin/lead solder bumps at a high deposition rate. The apparatus comprises a reactor bowl (35) containing an electroplating solution having free ions of tin and lead for plating onto a workpiece (25). A chemical delivery system is used to deliver the electroplating solution to the reactor bowl at a high flow rate. A workpiece support includes a contact assembly (85) for providing electroplating power to a surface at a side of the workpiece that is to be plated. The assembly contacts the workpiece at a large plurality of discrete flexure contacts (90) that are isolated from exposure to the electroplating solution. An anode (55) is spaced from the workpiece support within the reactor assembly (20) and is in contact with the electroplating solution. The electroplating solution comprises a concentration of a lead compound, a concentration of a tin compound, water and methane sulfonic acid.

    Abstract translation: 本发明涉及一种用于以高沉积速率选择性地沉积锡/铅焊料凸块的电镀设备。 该装置包括反应器碗(35),其包含具有游离离子的锡和用于电镀到工件(25)上的铅的电镀溶液。 化学输送系统用于以高流速将电镀溶液输送到反应釜。 工件支撑件包括用于向要被电镀的工件的一侧的表面提供电镀功率的接触组件(85)。 组件在与暴露于电镀溶液中分离的大量多个离散挠曲接触件(90)处接触工件。 阳极(55)与反应器组件(20)内的工件支撑件间隔开并与电镀溶液接触。 电镀溶液包含铅化合物的浓度,锡化合物的浓度,水和甲烷磺酸。

    METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE
    5.
    发明申请
    METHOD, CHEMISTRY, AND APPARATUS FOR HIGH DEPOSITION RATE SOLDER ELECTROPLATING ON A MICROELECTRONIC WORKPIECE 审中-公开
    方法,化学和设备在微电子工件上的高沉积速率焊接电镀

    公开(公告)号:WO00040779A1

    公开(公告)日:2000-07-13

    申请号:PCT/US1999/015850

    申请日:1999-07-12

    CPC classification number: C25D3/30 C25D3/34 C25D7/123 C25D17/001

    Abstract: The invention is directed to an electroplating apparatus for selectively depositing tin/lead solder bumps at a high deposition rate. The apparatus comprises a reactor bowl (35) containing an electroplating solution having free ions of tin and lead for plating onto a workpiece (25). A chemical delivery system is used to deliver the electroplating solution to the reactor bowl at a high flow rate. A workpiece support includes a contact assembly (85) for providing electroplating power to a surface at a side of the workpiece that is to be plated. The assembly contacts the workpiece at a large plurality of discrete flexure contacts (90) that are isolated from exposure to the electroplating solution. An anode (55) is spaced from the workpiece support within the reactor assembly (20) and is in contact with the electroplating solution. The electroplating solution comprises a concentration of a lead compound, a concentration of a tin compound, water and methane sulfonic acid.

    Abstract translation: 本发明涉及一种用于以高沉积速率选择性地沉积锡/铅焊料凸块的电镀设备。 该装置包括反应器碗(35),其包含具有游离离子的锡和用于电镀到工件(25)上的铅的电镀溶液。 化学输送系统用于以高流速将电镀溶液输送到反应釜。 工件支撑件包括用于向要被电镀的工件的一侧的表面提供电镀功率的接触组件(85)。 组件在与暴露于电镀溶液中分离的大量多个离散挠曲接触件(90)处接触工件。 阳极(55)与反应器组件(20)内的工件支撑件间隔开并与电镀溶液接触。 电镀溶液包含铅化合物的浓度,锡化合物的浓度,水和甲烷磺酸。

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