公开(公告)号：WO2013006205A2

公开(公告)日：2013-01-10

申请号：PCT/US2012000309

申请日：2012-07-03

Applicant: DUALITY REALITY ENERGY LLC

CPC classification number: H01H11/00 ,  B81B3/007 ,  B81B2203/0127 ,  H01H59/0009 ,  H01H2001/0063 ,  H01H2059/009 ,  H01H2229/034 ,  Y10T29/49105

Abstract: Apparatuses and method are described to create a reduced stiffness microstructure (RSM). A RSM is made by forming a first buckled membrane along a first buckling direction and forming a second buckled membrane along a second buckling direction. The second buckling direction is opposite to the first buckling direction and the first buckled membrane is in contact with the second buckled membrane over a contact area. Within an operating zone, a stiffness of the reduced stiffness microstructure spring is less than an absolute value of a stiffness of either the first buckled membrane or the second buckled membrane when the contact area translates along either one of the buckling directions. In the operating zone the stiffness can approach or equal zero.

Abstract translation: 描述设备和方法以产生减小的刚度微结构（RSM）。 RSM通过沿第一屈曲方向形成第一屈曲膜并沿第二屈曲方向形成第二屈曲膜而制成。 第二屈曲方向与第一屈曲方向相反，并且第一屈曲膜在接触区域上与第二屈曲膜接触。 在操作区域内，当接触面积沿着任一个屈曲方向平移时，减小刚度的微结构弹簧的刚度小于第一屈曲隔膜或第二屈曲隔膜的刚度的绝对值。 在操作区域，刚度可以接近或等于零。

公开(公告)号：WO2005078752A1

公开(公告)日：2005-08-25

申请号：PCT/EP2005/000430

申请日：2005-01-12

Applicant: CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement ,  DUBOIS, Marc-Alexandre

Inventor： DUBOIS, Marc-Alexandre

IPC: H01H1/00

CPC classification number: H01H59/0009 ,  H01H1/0036 ,  H01H2001/0063 ,  H01H2059/0036 ,  H01H2201/02

Abstract: Dispositif de type microsystème électromécanique (MEMS) ô film mince piézoélectrique 18 comportant un commutateur RF-MEMS 14 et un résonateur RF ô film mince piézoélectrique 10 ô ondes acoustiques de volume monté sur un substrat 12 pourvu d'un miroir acoustique 28. le résonateur comporte une portion 16 du film mince disposée entre les deux électrodes métalliques 20 et 24. Le commutateur 14 comporte une poutre bi-couche présentant une couche d'isolant 38 associée ô une autre portion 36 du film piézoélectrique 18 et portant un contact métalliques mobile 50 destiné ô venir en appui sur des contacts métalliques fixes 46, 48 par déformation de la poutre sous l'action d'une tension sur les électrodes de commande 40, 42.

Abstract translation: 一种压电薄膜机电微系统（MEMS）装置（18），包括RF-MEMS开关（14）和安装在设置有声反射镜的基板（12）上的体声波压电薄膜RF谐振器（10） 28）。 谐振器包括在两个金属电极（20,24）之间的薄膜部分（16）。 开关（14）包括具有与压电膜（18）的不同部分（36）组合的绝缘体层（38）的双层交叉臂，并且具有可与固定金属触头（46）接合的活动金属触头（50） ，48）当所述十字臂被所述控制电极（40,42）上的电压弯曲时。

公开(公告)号：WO03040338A3

公开(公告)日：2003-10-02

申请号：PCT/US0235988

申请日：2002-11-08

Applicant: COVENTOR INC ,  TURNSTONE SYSTEMS INC ,  SETT SUBHAM ,  CUNNINGHAM SHAWN J

Inventor： SETT SUBHAM ,  CUNNINGHAM SHAWN J

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00 ,  H01L21/46

CPC classification number: B81B3/0024 ,  B81B3/0051 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/0015 ,  B81C2201/0107 ,  B81C2201/0108 ,  B81C2201/0109 ,  H01H1/04 ,  H01H1/504 ,  H01H59/0009 ,  H01H61/04 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0089 ,  H01H2059/0072 ,  H01H2061/006 ,  H01L23/3735 ,  H01L23/522 ,  H01L27/1203 ,  H01L2924/0002 ,  H01L2924/09701 ,  H02N1/006 ,  H02N10/00 ,  Y10T29/49222 ,  H01L2924/00

Abstract: A micro-scale interconnect device with internal heat spreader and method for fabricating same. The device includes first and second arrays of generally coplanar electrical communication lines. The first array is disposed generally along a first plane, and the second array is disposed generally along a second plane spaced from the first plane. The arrays are electrically isolated from each other. Embedded within the interconnect device is a heat spreader element. The heat spreader element comprises a dielectric material disposed in thermal contact with at least one of the arrays and a layer of thermally conductive material embedded in the dielectric material. The device is fabricated by forming layers of electrically conductive, dielectric, and thermally conductive materials on a substrate. The layers are arranged to enable heat energy given off by current-carrying communciation lines to be transferred away from the communciation lines.

Abstract translation: 一种具有内部散热器的微型互连装置及其制造方法。 该装置包括大致共面的电通信线路的第一和第二阵列。 第一阵列大致沿着第一平面布置，并且第二阵列大体沿着与第一平面间隔开的第二平面布置。 阵列彼此电隔离。 嵌入在互连装置内的是散热器元件。 散热器元件包括设置成与至少一个阵列热接触的介电材料和嵌入介电材料中的导热材料层。 该器件通过在衬底上形成导电，电介质和导热材料层来制造。 这些层被布置成使得由载流通信线发出的热能能够从通信线路传递出去。

公开(公告)号：WO03041133A3

公开(公告)日：2003-09-12

申请号：PCT/US0236009

申请日：2002-11-08

Applicant: CONVENTOR INC ,  CUNNINGHAM SHAWN J

Inventor： CUNNINGHAM SHAWN J

IPC: B81B3/00 ,  B81B7/00 ,  H01H1/04 ,  H01H1/50 ,  H01H59/00 ,  H01H61/04 ,  H01L21/302 ,  H01L23/373 ,  H01L23/522 ,  H01L27/12 ,  H01L29/86 ,  H02N1/00 ,  H02N10/00 ,  H01L21/00

CPC classification number: B81B3/0024 ,  B81B3/0051 ,  B81B2201/014 ,  B81B2201/018 ,  B81B2203/0118 ,  B81B2203/04 ,  B81B2207/07 ,  B81C1/0015 ,  B81C2201/0107 ,  B81C2201/0108 ,  B81C2201/0109 ,  H01H1/04 ,  H01H1/504 ,  H01H59/0009 ,  H01H61/04 ,  H01H2001/0042 ,  H01H2001/0063 ,  H01H2001/0089 ,  H01H2059/0072 ,  H01H2061/006 ,  H01L23/3735 ,  H01L23/522 ,  H01L27/1203 ,  H01L2924/0002 ,  H01L2924/09701 ,  H02N1/006 ,  H02N10/00 ,  Y10T29/49222 ,  H01L2924/00

Abstract: Electrothermal Self-Latching MEMS Switch and Method. According to one embodiment, a microscale switch (100) having a movable microcomponent (108) is provided and includes a substrate (102) having a stationary contact (104). The switch (100) can also include a structural layer (112) having a movable contact (108) positioned for contacting the stationary contact (104) when the structural layer (112) moves toward the substrate (102). Electrothermal latch (126) attached to the structural layer (112) and having electrical communication (114, 116) with the movable contact (108) to provide current flow between the electrothermal latch (126) and the stationary contact (104) when the movable contact (108) contacts the stationary contact (104) for maintaining the movable contact (108) in contact with the stationary contact (104).

Abstract translation: 电热自锁式MEMS开关及方法。 根据一个实施例，提供具有可移动微组件（108）的微型开关（100），并且包括具有固定触点（104）的基板（102）。 开关（100）还可以包括结构层（112），当结构层（112）向衬底（102）移动时，结构层（112）具有定位成用于接触固定触点（104）的可动触头（108）。 电热闩锁（126），其连接到所述结构层（112）并且具有与所述可动触头（108）的电连通（114,116），以在所述电热闩锁（126）和所述固定触点（104）之间提供电流， 触点（108）接触固定触点（104），用于保持可动触点（108）与固定触点（104）接触。

公开(公告)号：WO2000067063A1

公开(公告)日：2000-11-09

申请号：PCT/US2000/008903

申请日：2000-04-04

Applicant: CRONOS INTEGRATED MICROSYSTEMS, INC. ,  DHULER, Vijayakumar, R. ,  WALTERS, Mark, David ,  HILL, Edward, A. ,  COWEN, Allen, Bruce

Inventor： DHULER, Vijayakumar, R. ,  WALTERS, Mark, David ,  HILL, Edward, A. ,  COWEN, Allen, Bruce

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  G02B6/357 ,  G02B6/358 ,  H01H2001/0047 ,  H01H2001/0063

Abstract: Microelectromechanical structures (MEMS) are provided that are adapted to controllably move mirrors in response to selective thermal actuation. In one embodiment, the MEMS moveable mirror structure includes a thermally actuated microactuator adapted to controllably move along a predetermined path substantially parallel to the first major surface of an underlying microelectronic substrate. A mirror (20) is adapted to move accordingly with the microactuator (30) between a non-actuated and an actuated position. In all positions, the mirror has a mirrored surface disposed out of plane relative to the first major surface of the microelectronic substrate. The microactuator provided herein can include various thermal arched beam actuators (35), thermally actuated composite beam actuators, arrayed actuators, and combinations thereof. The MEMS moveable mirror structure can also include a mechanical latch (70) and/or an electrostatic latch for controllably clamping the mirror in position. A MEMS moveable mirror array is also provided which permits individualized control of each individual MEMS moveable mirror structure within the array.

Abstract translation: 提供微机电结构（MEMS），其适于响应于选择性热致动而可控地移动反射镜。 在一个实施例中，MEMS可移动镜结构包括热致动微致动器，其适于可控制地沿着基本平行于下面的微电子衬底的第一主表面的预定路径移动。 反射镜（20）适于随着微致动器（30）在非致动位置和致动位置之间相应地移动。 在所有位置，反射镜具有相对于微电子衬底的第一主表面设置在平面外的镜面。 本文提供的微致动器可以包括各种热弓形梁致动器（35），热致动复合梁致动器，排列致动器及其组合。 MEMS可移动镜结构还可以包括用于将镜子可控地夹持就位的机械闩锁（70）和/或静电闩锁。 还提供了MEMS移动反射镜阵列，其允许对阵列内的每个单独的MEMS可移动镜像结构进行个性化的控制。

公开(公告)号：WO2013091189A1

公开(公告)日：2013-06-27

申请号：PCT/CN2011/084346

申请日：2011-12-21

Applicant: SIEMENS AKTIENGESELLSCHAFT ,  Li, Ming ,  Schaertl, Günther

Inventor： Li, Ming ,  Schaertl, Günther

IPC: H01H53/02

CPC classification number: H01H53/02 ,  H01G5/145 ,  H01H50/32 ,  H01H50/42 ,  H01H50/546 ,  H01H51/10 ,  H01H2001/0063

Abstract: A contactor (5) includes a contact portion (501-504) and an actuation portion (505-508). The contactor further includes a keeping portion. The keeping portion includes a capacitor structure and uses an electrostatic force between opposite plates (509,510) of the capacitor structure to keep the contact portion in a contact state or a disconnection state. The electrostatic force generated by an electrostatic latch is used to keep the contactor in a switched-to static state. The contactor has reduced energy consumption in the static state, is convenient to manufacture, and has a low cost.

Abstract translation: 接触器（5）包括接触部分（501-504）和致动部分（505-508）。 接触器还包括保持部。 保持部分包括电容器结构，并且使用电容器结构的相对板（509,510）之间的静电力将接触部分保持在接触状态或断开状态。 静电锁定产生的静电力用于保持接触器处于转换静止状态。 接触器在静态下降低能耗，制造方便，成本低。

公开(公告)号：WO2003093165A2

公开(公告)日：2003-11-13

申请号：PCT/US2003/011876

申请日：2003-04-17

Applicant: ADC TELECOMMUNICATIONS, INC.

Inventor： BROMLEY, Susan, C. ,  NELSON, Bradley, J. ,  VOLLMERS, Karl ,  SUBRAMANIAN, Arunkumar ,  ENIKOV, Eniko, T. ,  MOTHILAL, Kamal, Deep

IPC: B81B3/00

CPC classification number: H01H61/04 ,  B81B3/0024 ,  B81B2201/031 ,  F01B29/10 ,  F02G1/043 ,  F02G2250/31 ,  F03G7/06 ,  H01H2001/0063 ,  H01H2061/006 ,  H01H2061/008 ,  H02N10/00

Abstract: A thermal microactuator is provided that can be deflected in multiple positions. The actuator has a hot arm and a cold arm coupled together at their distal ends suspended above a reference plane of a substrate. A potential difference is applied across the hot arm so that a current circulates through the hot arm but not the cold arm.

Abstract translation: 提供可以在多个位置偏转的热微致动器。 致动器具有一个热臂和一个冷臂，它们在其远端悬挂在衬底的参考平面上方。 在热臂上施加电位差，使得电流通过热臂而不是冷臂循环。

公开(公告)号：WO01074706A1

公开(公告)日：2001-10-11

申请号：PCT/IB2001/000541

申请日：2001-04-02

IPC: B81B3/00 ,  B81B7/02 ,  H01H1/00 ,  H01H61/00 ,  H01C7/00

CPC classification number: H01H61/00 ,  H01G5/18 ,  H01H1/0036 ,  H01H2001/0063 ,  H01H2061/006

Abstract: Resistor Networks, digital potentiometers and microelectromechanical structures that include a plurality of resistors selectable by a plurality of microelectromechanical acquators are provided. More particularly, a thermal relay type of actuator is provided as a switch which may selectively control which of the plurality of resistors is connected. In one particularly advantageous embodiment, the heater for the thermal relay and the plurality of resistors are formed from a common layer of the integrated circuit structure, such as a doped polysilicon layer, which may simplify the manufacturing process. Preferably, a thermal arched beam acuator is utilized in combination with film resistors to provide an integrated circuit device suitable for applicaitons such as digital potentiometers.

Abstract translation: 提供了包括可由多个微机电收集器选择的多个电阻器的电阻器网络，数字电位计和微机电结构。 更具体地，提供了一种热继电器类型的致动器作为开关，其可以选择性地控制多个电阻器中的哪一个被连接。 在一个特别有利的实施例中，用于热继电器和多个电阻器的加热器由诸如掺杂多晶硅层的集成电路结构的公共层形成，这可以简化制造工艺。 优选地，热弯曲光束引导器与薄膜电阻器组合使用，以提供适合于诸如数字电位计的应用的集成电路器件。

公开(公告)号：WO99022390A1

公开(公告)日：1999-05-06

申请号：PCT/SE1998/001971

申请日：1998-10-29

IPC: H01H1/00 ,  H01H1/50 ,  H01H37/52 ,  H01H61/00 ,  H01H9/20

CPC classification number: H01H1/0036 ,  H01H1/50 ,  H01H37/52 ,  H01H61/00 ,  H01H2001/0047 ,  H01H2001/0057 ,  H01H2001/0063 ,  H01H2037/008 ,  H01H2061/006

Abstract: The invention refers to a micromechanical switching device including at least two contact elements (11, 12, 31, 32), which are provided at least partly movable relative each other and via thermal actuation can be closed and opened, whereby the contact elements (11, 12, 31, 32) at least partly are comprised of at least two materials (14, 15, 16, 17, 34-37) with essentially different thermal expansion coefficients. The contact elements (11, 12, 31, 32) at excitation are arranged to displace essentially in same level and in different directions.

Abstract translation: 本发明涉及一种微机电开关装置，其包括至少两个接触元件（11,12,31,32），所述至少两个接触元件（11,12,21,32,32）可相对于彼此至少部分地可移动并经由热致动而被封闭和打开，由此接触元件（11 ，12,31,32）至少部分地由具有基本上不同的热膨胀系数的至少两种材料（14,15,16,17,44-37）组成。 激励时的接触元件（11,12,31,32）被布置成基本上在相同的水平位置和不同的方向上移位。

公开(公告)号：WO98033195A1

公开(公告)日：1998-07-30

申请号：PCT/IB1998/000344

申请日：1998-01-20

IPC: H01H1/00 ,  H01H61/02 ,  H01H61/06

CPC classification number: H01H1/0036 ,  H01H61/02 ,  H01H2001/0047 ,  H01H2001/0063 ,  H01H2061/006

Abstract: A cantilever microstructure includes a cantilever arm with a proximal end connected to a substrate and a freely movable distal end. The cantilever arm comprises first and second sections and includes a continuous layer which exhibits a first thermal co-efficient of expansion (TCE). In one embodiment, an electrical contact is positioned at the distal end of the cantilever arm. A first layer is positioned on a surface of the continuous layer and along the first section thereof. The first layer exhibits a second TCE which is different from the first TCE of the continuous layer. A second layer is positioned on a surface of the continuous layer and along the second section thereof. The second layer exhibits a third TCE which is different from the first TCE of the continuous layer. Electrical control circuitry selectively applies signals to the first and second layers to cause a heating thereof and a flexure of the cantilever arm so as to bring the distal end thereof into contact with a conductive substrate.

Abstract translation: 悬臂微结构包括悬臂，其基端连接到基底和可自由移动的远端。 悬臂包括第一和第二部分，并且包括呈现第一热效率膨胀（TCE）的连续层。 在一个实施例中，电触点位于悬臂的远端。 第一层位于连续层的表面上并沿其第一部分。 第一层表现出与连续层的第一TCE不同的第二TCE。 第二层位于连续层的表面上并沿其第二部分。 第二层表现出与连续层的第一TCE不同的第三TCE。 电气控制电路选择性地向第一和第二层施加信号以引起其加热和悬臂的挠曲，以使其远端与导电基底接触。