摘要:
Es wird eine Verfahren zur Herstellung eines Nitrid-Verbindungshalbleiter-Bauelements beschrieben, mit den Schritten: - Bereitstellen eines Aufwachssubstrats (1), - Aufwachsen einer Nukleationsschicht (2) aus einem Aluminium enthaltenden Nitrid-Verbindungshalbleiter auf das Aufwachssubstrat (1), - Aufwachsen einer Verspannungsschichtstruktur (10) zur Erzeugung einer kompressiven Spannung, wobei die Verspannungsschichtstruktur (10) mindestens eine erste GaN-Halbleiterschicht (4) und eine zweite GaN-Halbleiterschicht (7) umfasst, und wobei zwischen der ersten GaN-Halbleiterschicht (4) und der zweiten GaN-Halbleiterschicht (7) eine AI(Ga)N-Zwischenschicht (5) zur Erzeugung der kompressiven Spannung angeordnet ist, und - Aufwachsen einer funktionellen Halbleiterschichtenfolge (14) des Nitrid-Verbindungshalbleiter-Bauelements auf die Verspannungsschichtstruktur (10), wobei - vor dem Aufwachsen der zweiten GaN-Halbleiterschicht (7) eine 3D-AlGaN-Schicht (6) auf der AI(Ga)N Zwischenschicht (5) derart aufgewachsen wird, dass sie nicht-planare Strukturen aufweist.
摘要:
A semiconductor heterostructure with reduced unintentional Calcium (Ca) impurity concentration of about 1 x 10 14 /cm 3 or less. A Calcium impurity reduction structure may comprise a single low temperature layer or a multilayer superlattice with alternating low temperature and high temperature layers, wherein the Calcium impurity reduction structure is sandwiched between high temperature layers. The semiconductor heterostructure is comprised of a III-nitride alloy.
摘要翻译:具有降低的非故意钙(Ca)杂质浓度降低约1×10 14 / cm 3或更小的半导体异质结构。 钙杂质还原结构可以包括具有交替的低温和高温层的单个低温层或多层超晶格,其中钙杂质还原结构夹在高温层之间。 半导体异质结构由III族氮化物合金组成。 p>
摘要:
Semiconductor devices having an antimony -containing nucleation layer between a dilute nitride material and an underlying substrate are disclosed. Dilute nitride-containing multijunction solar cells incorporating (Al)InGaPSb/Bi nucleation layers exhibit high efficiency.
摘要:
A semiconductor device and method for fabricating same is disclosed. Embodiments are directed to a semiconductor device and fabrication of same which include a flexible substrate and a buffer stack overlying the substrate. The buffer stack comprises at least one epitaxial buffer layer. An epitaxial doped layer comprised predominantly of silicon overlyies the at least one epitaxial buffer layer. Mobility of the device is greater than 100 cm 2 /V s and carrier concentration of the epitaxial doped layer is less than 10 16 cm -3 .
摘要翻译:公开了一种半导体器件及其制造方法。 实施例涉及一种半导体器件及其制造方法,其包括柔性衬底和覆盖衬底的缓冲堆叠。 缓冲堆叠包括至少一个外延缓冲层。 主要由硅构成的外延掺杂层覆盖所述至少一个外延缓冲层。 器件的迁移率大于100 cm 2 / Vs,外延掺杂层的载流子浓度小于10 16 cm -3, p>
摘要:
A photonic structure can include in one aspect one or more waveguides formed by patterning of waveguiding material adapted to propagate light energy. Such waveguiding material may include one or more of silicon (single-, poly-, or non-crystalline) and silicon nitride.
摘要:
L'invention concerne un procédé de fabrication d'un support pour la fabrication d'une structure semi-conductrice à base de nitrures d'éléments III caractérisé en ce que le procédé comprend les étapes de : -formation (100) d'une couche tampon (20) sur un substrat (10), ladite couche tampon comprenant une couche de surface supérieure à base de nitrures d'éléments III, -dépôt (200) d'une couche cristalline (30) sur la couche tampon, ladite couche cristalline étant déposée à partir d'atomes de siliciumde sorte à recouvrir la totalité de la surface de la couche supérieure à base de nitrures d'éléments III. L'invention concerne également un support obtenu par le procédé et une structure semi-conductrice basée sur le support et son procédé de fabrication.
摘要翻译:提供了可以制造具有优异特性的HEMT元件的13族氮化物外延基板。 该半导体元件用外延基板设置有:由SiC构成并具有(0001)面取向主面的接地基板; 成核层,形成在基底的一个主表面上,由AlN组成; 在成核层上形成的由组成为Al y Ga 1-y N(0≤y<1)的13族氮化物组成的电子传输层; 和形成在电子迁移层上并由组成为InzAl1-zN(0.13≤z≤0.23)或AlwGa1-wN(0.15≤w≤0.35)的组13氮化物组成的阻挡层。 接地衬底上的(0001)表面具有0.1°-0.5°的偏离角,并且在成核之间进一步提供由组成为Al x Ga 1-x N(0.01≤x≤0.4)的组13氮化物组成的中间层 层和电子转移层。
摘要:
A method of fabricating an ultraviolet (UV) light emitting device includes receiving a UV transmissive substrate, forming a first UV transmissive layer comprising aluminum nitride upon the UV transmissive substrate using a first deposition technique at a temperature less than about 800degrees Celsius or greater than about 1200 degrees Celsius, forming a second UV transmissive layer comprising aluminum nitride upon the first UV transmissive layer comprising aluminum nitride using a second deposition technique that is different from the first deposition technique, at a temperature within a range of about 800 degrees Celsius to about 1200 degrees Celsius, forming an n-type layer comprising aluminum gallium nitride layer upon the second UV transmissive layer, forming one or more quantum well structures comprising aluminum gallium nitride upon the n-type layer, and forming a p-type nitride layer upon the one or more quantum well structures.
摘要:
Novel materials, material deposition methods, and devices used to generate electrical power from thermal radiators based on thermophotovoltatic (TPV) operating principles using group IV-VI alloys and materials are disclosed. A semiconductor structure comprising (N) stacked junctions, each junction formed of a IV-VI semiconductor alloy and each of said N junctions having a bandgap, where N is an integer and N>1 is disclosed. The semiconductor structure is configured to capture electromagnetic radiation having wavelengths from about 1 μm to about 7 μm. TPV devices comprising the novel semiconductor structure and methods of making the novel structures and devices are also disclosed.
摘要:
Novel materials, material deposition methods, and devices used to generate electrical power from thermal radiators based on thermophotovoltatic (TPV) operating principles using group IV-VI alloys and materials are disclosed. A semiconductor structure comprising (N) stacked junctions, each junction formed of a IV-VI semiconductor alloy and each of said N junctions having a bandgap, where N is an integer and N>1 is disclosed. The semiconductor structure is configured to capture electromagnetic radiation having wavelengths from about 1 μm to about 7 μm. TPV devices comprising the novel semiconductor structure and methods of making the novel structures and devices are also disclosed.