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    DAMPING BASE FOR MODULAR SCANNING PROBE MICROSCOPE HEAD
    1.
    发明申请
    DAMPING BASE FOR MODULAR SCANNING PROBE MICROSCOPE HEAD 审中-公开

    公开(公告)号：WO2021226354A1

    公开(公告)日：2021-11-11

    申请号：PCT/US2021/031120

    申请日：2021-05-06

    Applicant: RUTGERS, THE STATE UNIVERSITY OF NEW JERSEY

    Inventor： COE, Angela ,  LI, Guohong ,  ANDREI, Eva Y.

    IPC: G01Q30/10 ,  G01Q30/16 ,  G01Q30/18

    Abstract: An apparatus, including a scanning probe microscope base (112) that includes a frame (130) configured to be secured to an end of an insert in a cryostat; a top (134) configured to be connected to a base of a scanning probe microscope head that is configured to be disposed inside the insert; and a damping system disposed between the frame and the top and comprising a bellows (150) that seals the end of the insert. This sealing separates an ultra-high vacuum (UHV) environment in the insert from a high vacuum (HV) environment surrounding the end of the insert and also positions an upper surface of the top in the UHV environment.

    FOCUSED ION BEAM SYSTEM
    2.
    发明申请
    FOCUSED ION BEAM SYSTEM 审中-公开
    聚焦离子束系统

    公开(公告)号：WO02033727A1

    公开(公告)日：2002-04-25

    申请号：PCT/US2001/032502

    申请日：2001-10-17

    IPC: H01J27/26 ,  G01Q30/16 ,  G01Q60/00 ,  H01J37/08 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J37/30 ,  H01J37/317 ,  H01J37/00

    CPC classification number: H01J37/3002 ,  H01J37/08 ,  H01J2237/1501 ,  H01J2237/304

    Abstract: An ion source (230) of a focusing ion beam system (200) includes a dielectric bushing (308) for supporting metallic optical elements (316, 320) and forming an ion gun vacuum chamber (304) in which are contained an emitter assembly (312) and other optical elements (314, 316).

    Abstract translation: 聚焦离子束系统（200）的离子源（230）包括用于支撑金属光学元件（316,320）并形成离子枪真空室（304）的电介质衬套（308），其中包含发射器组件 312）和其它光学元件（314,316）。

    PRECISION STAGE
    3.
    发明申请
    PRECISION STAGE 审中-公开
    精确的阶段

    公开(公告)号：WO0133232A3

    公开(公告)日：2001-09-27

    申请号：PCT/US0041887

    申请日：2000-11-03

    Applicant: ION DIAGNOSTICS INC

    Inventor： ANDEEN GERRY B ,  LEE MARTIN E

    IPC: F16D3/56 ,  G01Q10/00 ,  G01Q20/00 ,  G01Q30/16 ,  G03F7/20 ,  H01J37/20 ,  H01L21/00 ,  H01L21/027 ,  H01L21/68 ,  G01K5/24 ,  G01K15/00 ,  G01K41/00

    CPC classification number: G03F7/70716 ,  G03F7/70841 ,  G03F7/709 ,  H01J37/20 ,  H01L21/67259 ,  H01L21/682 ,  Y10T403/45

    Abstract: An ultra-high precision stage (200) incorporating a novel, legged design suitable for applications requiring high voltage and vacuum is disclosed herein. The stage comprises; a base (220); a frame attached to the base; a platform (240) with a bottom platform surface (250); at least three adjustable limbs coupled to the base and the bottom platform surface (250), each limb comprising a raising member (285) attached to the base, a first attachment member attached to the raising member, a leg (270), a bottom end of the leg attached to the raising member, a second attachment member attached to a top end of the leg and the second attachment member attached to the bottom platform surface; and platform movement members coupled to the platform and the frame, providing precise positioning and movement of the platform. The attachment members can be flexure joints; further, they can be flexural thrust joints. The platform can have six degrees of freedom of movement and accommodate wafers with diameters of 300 mm. The stage can weigh less than 100 lbs.

    Abstract translation: 本文公开了一种结合了适用于需要高电压和真空的应用的新型腿式设计的超高精度平台（200）。 舞台包括; 一个基座（220）; 一个连接在底座上的框架; 具有底部平台表面（250）的平台（240）; 至少三个连接到底座和底部平台表面（250）的可调节臂，每个肢体包括连接到底座的提升构件（285），连接到提升构件的第一连接构件，腿（270），底部 附接到所述提升构件的所述腿的端部，附接到所述腿的顶端的第二附接构件和附接到所述底部平台表面的所述第二附接构件; 以及耦合到平台和框架的平台移动构件，从而提供平台的精确定位和移动。 附件可以是挠性接头; 此外，它们可以是弯曲的推力关节。 该平台可以具有六个运动自由度，并可容纳直径为300毫米的晶圆。 舞台可以重量小于100磅。

    VORRICHTUNG UND VERFAHREN ZUM TRANSFERIEREN EINES PROBENHALTERS VON EINER TRANSPORTVORRICHTUNG ZU EINER SCANVORRICHTUNG
    4.
    发明申请
    VORRICHTUNG UND VERFAHREN ZUM TRANSFERIEREN EINES PROBENHALTERS VON EINER TRANSPORTVORRICHTUNG ZU EINER SCANVORRICHTUNG 审中-公开
    DEVICE AND METHOD FOR转运的样品架，以扫描装置转移

    公开(公告)号：WO2014056879A1

    公开(公告)日：2014-04-17

    申请号：PCT/EP2013/070894

    申请日：2013-10-08

    Applicant: EBERHARD KARLS UNIVERSITÄT TÜBINGEN

    Inventor： BRECHT, Marc ,  HUSSELS, Martin

    IPC: G01Q30/10 ,  G01Q30/16 ,  G01N21/01 ,  G02B21/26

    CPC classification number: G01Q30/10 ,  G01Q30/16 ,  G02B21/26

    Abstract: Die Erfindung betrifft eine Vorrichtung zum Transferieren eines Probenhalters von einer Transportvorrichtung zu einer Scanvorrichtung, bei der an der Transportvorrichtung und/oder am Probenhalter wenigstens ein erster Magnet vorgesehen ist, um den Probenhalter mittels des wenigstens einen ersten Magneten an der Transportvorrichtung zu halten, und bei der an der Scanvorrichtung und/oder am Probenhalter wenigstens ein zweiter Magnet vorgesehen ist, um den Probenhalter mittels des wenigstens einen zweiten Magneten an der Scanvorrichtung zu halten.

    Abstract translation: 本发明涉及一种用于运输装置的样品架传送到一扫描装置，其中是所述传送装置上和/或样品保持器的至少一个第一磁体由至少所述传送装置上的第一磁体，以及其中的手段提供给保持所述样品架 第二磁体的被设置在扫描装置的样品夹持器上和/或至少由所述至少一个第二磁体，以扫描装置的装置，以保持所述样品架。

    PARTICLE-OPTICAL APPARATUS INCLUDING A LOW-TEMPERATURE SPECIMEN HOLDER
    5.
    发明申请
    PARTICLE-OPTICAL APPARATUS INCLUDING A LOW-TEMPERATURE SPECIMEN HOLDER 审中-公开
    颗粒光学仪器，包括一个低温样品架

    公开(公告)号：WO9828776A3

    公开(公告)日：1998-09-17

    申请号：PCT/IB9701539

    申请日：1997-12-08

    Applicant: PHILIPS ELECTRONICS NV ,  PHILIPS NORDEN AB

    Inventor： BORMANS BERNARDUS JACOBUS MARI ,  DE JONG ALAN FRANK ,  VAN DER MAST KAREL DIEDERICK ,  WAGNER RAYMOND ,  ASSELBERGS PETER EMILE STEPHAN

    IPC: G01Q30/10 ,  G01Q30/16 ,  G01Q30/20 ,  H01J37/20

    CPC classification number: H01J37/20 ,  H01J2237/2001

    Abstract: In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end ( 20 ) of the specimen holder (7) by means of a separate transport unit (13, 36) so that it is not necessary to remove the specimen holder (7) in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source (22, 28) can take place via a flexible cooling conduit ( 30 ) which extends directly to the end ( 20 ) to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations. 00000

    Abstract translation: 在电子显微镜中，有时重要的是可以在非常低的温度下（例如液态氦）进行研究。 在已知的试样支架的情况下，通过在试样支架中的孔供给冷却介质来冷却试样; 这样每次当样品被更换时，都会导致移除的标本夹持器的热漂移，并且与连接到样本架的杜瓦瓶也存在声耦合（即振动的传递）。 根据本发明，试样通过单独的运输单元（13,36）布置在试样保持器（7）的端部（20）上，使得不需要移除 样品保持器（7），以便更换样品，结果是样品架不被加热。 此外，与冷源（22,28）的耦合可以通过直接延伸到端部（20）的柔性冷却导管（30）进行冷却 并且可以永久地连接到其上，从而避免了振动的传递。 00000

    TIME-OF-FLIGHT MASS SPECTROMETER ARRAY INSTRUMENT
    8.
    发明申请
    TIME-OF-FLIGHT MASS SPECTROMETER ARRAY INSTRUMENT 审中-公开
    飞行时间质谱仪阵列仪器

    公开(公告)号：WO0201599A3

    公开(公告)日：2003-01-03

    申请号：PCT/US0119570

    申请日：2001-06-19

    Applicant: UNIV JOHNS HOPKINS ,  CORNISH TIMOTHY J

    Inventor： CORNISH TIMOTHY J

    IPC: G01N27/62 ,  G01Q30/04 ,  G01Q30/16 ,  G01Q70/06 ,  H01J49/06 ,  H01J49/10 ,  H01J49/40

    CPC classification number: H01J49/009 ,  H01J49/40

    Abstract: A time-of-flight mass spectrometer (TOF-MS) array instrument is provided. Each TOF-MS of the array instrument includes (1) a gridless, focusing ionization extraction device allowing for the use of very high extraction energies in a maintenance-free design, (2) a fiberglass-clad flexible circuit-board reflector using rolled flexible circuit-board material, and (3) a low-noise, center-hole microchannel plate detector assembly that significantly reduces the noise (or "ringing") inherent in the coaxial design. The miniature TOF-MS array allows for the bundling of a plurality of mass analyzers, e.g., a plurality of TOF-MSs, into a single array working in parallel fashion to greatly enhance the throughput of each TOF-MS in the array by multiplexing the data collection process. A preferred embodiment of the TOF-MS array instrument incorporates 16 TOF-MS units that are arranged in mirror-image clusters of eight units.

    Abstract translation: 提供飞行时间质谱仪（TOF-MS）阵列仪。 阵列仪器的每个TOF-MS包括（1）无电镀聚焦电离提取装置，允许在免维护设计中使用非常高的提取能量，（2）使用滚动柔性的玻璃纤维包覆柔性电路板反射器 电路板材料，以及（3）低噪声中心孔微通道板检测器组件，其显着地减少了同轴设计中固有的噪声（或“振铃”）。 微型TOF-MS阵列允许将多个质量分析器（例如，多个TOF-MS）捆绑成并行工作的单个阵列，以通过多路复用来大大增强阵列中每个TOF-MS的吞吐量 数据收集过程。 TOF-MS阵列仪器的优选实施例包括布置在八个单元的镜像簇中的16个TOF-MS单元。

    SINGLE MOLECULE ARRAY ON SILICON SUBSTRATE FOR QUANTUM COMPUTER
    9.
    发明申请
    SINGLE MOLECULE ARRAY ON SILICON SUBSTRATE FOR QUANTUM COMPUTER 审中-公开
    用于量子计算机的硅基板上的单分子阵列

    公开(公告)号：WO02018266A1

    公开(公告)日：2002-03-07

    申请号：PCT/AU2001/001057

    申请日：2001-08-24

    IPC: B82B1/00 ,  B82B3/00 ,  G01Q30/16 ,  G01Q60/00 ,  G01Q70/14 ,  G01Q80/00 ,  G06N99/00 ,  H01L21/306 ,  H01L29/66 ,  H01L21/3213 ,  G06N1/00

    CPC classification number: G06N99/002 ,  G01Q80/00 ,  H01L21/306

    Abstract: Individual hydrogen atoms are desorbed from a hydrogen termination layer on a silicon substrate, using an STM tip, to form a pattern of exposed regions. A single donor-bearing molecule (such as phosphine) is adsorbed onto each exposed region, to form an array of donor atoms (such as phosphorous atoms). The spins of the donor atoms may be used as qubits in a solid state quantum computer.

    Abstract translation: 使用STM尖端将单个氢原子从硅衬底上的氢终端层解吸，形成暴露区域的图案。 单个给体分子（例如磷化氢）被吸附到每个暴露区域上，以形成供体原子（例如磷原子）的阵列。 供体原子的自旋可以用作固态量子计算机中的量子位。

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