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公开(公告)号：EP4376046A1
公开(公告)日：2024-05-29
申请号：EP22209458.3
申请日：2022-11-24
CPC分类号： H01J37/28 , H01J37/04 , H01J2237/045320130101 , H01J2237/120520130101 , H01J2237/150120130101 , H01J2237/282620130101
摘要： The present disclosure relates to electron-optical elements and methods for assessing electron-optical elements. In one arrangement, an electron-optical element comprises a substrate defining at least one aperture extending through the substrate between two planar surfaces. At least one of the planar surfaces comprises a plurality of marks formed on or in the planar surface. A distance between centers of at least one pair of adjacent marks is: equal to or less than half of a largest dimension of one of the at least one aperture; and/or equal to or less than half of a distance between centers of at least one pair of adjacent apertures, in a case where the at least one aperture comprises a plurality of apertures.
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公开(公告)号：EP4421843A1
公开(公告)日：2024-08-28
申请号：EP23158846.8
申请日：2023-02-27
发明人： VAN ENGELEN, Jorn, Paul , SAHIN, Ezgi , AKBULUT, Duygu , PELLEMANS, Henricus, Petrus, Maria , WIELAND, Marco, Jan-Jaco , SLOT, Erwin , KUIPER, Vincent, Sylvester
IPC分类号： H01J37/317 , H01J37/22
CPC分类号： H01J2237/2459220130101 , H01J37/3177 , H01J37/226 , H01J2237/004720130101 , H01J2237/3177420130101 , H01J2237/063520130101 , H01J2237/045320130101
摘要： An electron-optical projection device for projecting a plurality of charged particle beams towards a sample, the device comprising:
a stack of plates comprising beam directing elements configured to project the plurality of charged particle beams towards a sample location on the sample,
wherein at least one plate of the stack comprises a planar optical member configured to direct stimulation light towards the sample location so that the stimulation light is coincident with the plurality of charged particle beams, desirably coincident with the paths of the plurality of charged particle beams towards the sample location, desirably in the at least one plate comprising an optical member is defined a plurality of apertures for respective paths of a plurality charged particle beams.-
公开(公告)号：EP4385053A1
公开(公告)日：2024-06-19
申请号：EP22733868.8
申请日：2022-05-25
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公开(公告)号：EP4390464A1
公开(公告)日：2024-06-26
申请号：EP22216582.1
申请日：2022-12-23
发明人： NIHTIANOV, Stoyan
IPC分类号： G01T1/24 , H01L31/115 , H01L31/028
CPC分类号： H01J37/04 , H01J37/12 , H01J2237/045320130101 , H01J2237/120520130101 , H01J2237/153420130101 , H01L31/115 , H01L31/028 , G01T1/242 , G01T1/244
摘要： A detector for detecting radiation is disclosed. In one arrangement, the detector has a sensing element that comprises a semiconducting sensor substrate (402) and is configured such that impingement of target radiation generates charge carriers in the sensor substrate. Readout circuitry provides an output responsive to charge carriers generated in the sensor substrate. The sensor substrate comprises a low bandgap layer (408) and a high bandgap portion (409).
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公开(公告)号：EP4376048A1
公开(公告)日：2024-05-29
申请号：EP22209068.0
申请日：2022-11-23
发明人： URBANUS, Willem, Henk , DE LANGEN, Johannes, Cornelis, Jacobus , WIELAND, Marco, Jan-Jaco , DEL TIN, Laura , KONING, Johan, Joost
CPC分类号： H01J37/18 , H01J37/26 , H01J37/04 , H01J2237/043520130101 , H01J2237/045320130101 , H01J2237/049220130101 , H01J2237/18820130101
摘要： The present disclosure relates to charged particle devices for projecting charged particles towards a sample and methods of assessing a sample using charged particles. A charged particle optical element directs beams of charged particles towards a sample. The charged particle optical element comprising a plate in which is defined beam apertures and a plurality of vent apertures. A beam tube defines an inner tube volume comprising paths up-beam of the plate of charged particles of the beams, and an outer tube region that is outside of the beam tube. The beam apertures are for passage towards the sample of charged particles of the beams, from the inner tube volume to a down-beam volume on an opposite side of the plate to the inner tube volume. Vent apertures fluidically connect the down-beam volume to the outer tube region.
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公开(公告)号：EP4374410A1
公开(公告)日：2024-05-29
申请号：EP22743738.1
申请日：2022-07-05
发明人： STORECK, Gero , KIEREY, Holger
IPC分类号： H01J37/09 , H01J37/244 , H01J37/28
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公开(公告)号：EP4439621A1
公开(公告)日：2024-10-02
申请号：EP23165343.7
申请日：2023-03-30
发明人： KONING, Johan, Joost
CPC分类号： H01J37/09 , H01J2237/026220130101 , H01J2237/045320130101 , H01J2237/1220130101 , H01J2237/2820130101 , H01J37/026
摘要： A charged particle-optical module for a charged particle-optical device configured to direct a charged particle beam along a beam path towards a sample location, the charged particle-optical module comprising: a stack comprising charged particle-optical plates arranged across the beam path and configured to operate on the charged particle beam; and a shield arrangement comprising an upbeam electrostatic shield arranged across the beam path upbeam of the charged particle-optical plates; and a downbeam electrostatic shield arranged across the beam path downbeam of the charged particle-optical plates, wherein the shield arrangement is configured to deter electrical breakdown between the charged particle-optical module and a component external to the charged particle-optical module and/or to confine an electrostatic field within the charged particle-optical module, the electrostatic field for example generated in operation of the charged particle-optical plates on the charged particle beam along the beam path.
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8.发明公开
公开(公告)号：EP4383308A1
公开(公告)日：2024-06-12
申请号：EP22211495.1
申请日：2022-12-05
发明人： DE LANGEN, Johannes, Cornelis, Jacobus , LOOMAN, Bram, Albertus , MUDRETSOV, Dmitry , DEL TIN, laura
CPC分类号： H01J37/04 , H01J37/12 , H01J2237/045320130101 , H01J2237/120520130101 , H01J2237/153420130101
摘要： The present disclosure relates to an electron-optical stack for manipulating one or more charged particle beams and associated apparatus and methods. In one arrangement, a plurality of electron-optical plates have major surfaces on opposite sides of the plates. The plates define a set of channels configured to be aligned along a beam path of a charged particle beam to allow the charged particle beam to pass through the plates via the channels. Each channel defines apertures in the two major surfaces of the plate that defines the channel. The apertures have different shapes from each other in the sense that one aperture has a nominal shape and the other aperture has a perturbed shape, i.e., a perturbed version of the nominal shape. The plates are oriented such that the apertures comprise one or more matching aperture pairs along the beam path. The or each matching aperture pair consists of apertures having the same shape defined in adjacent major surfaces of adjacent plates, i.e., they have both either a nominal shape or a perturbed shape.
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公开(公告)号：EP4374411A1
公开(公告)日：2024-05-29
申请号：EP22743739.9
申请日：2022-07-06
发明人： MUELLER, Ingo , KAUFMANN, Nicolas , BEHNKE, Michael , FRITZ, Hans
IPC分类号： H01J37/09 , H01J37/244 , H01J37/28
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公开(公告)号：EP4354483A1
公开(公告)日：2024-04-17
申请号：EP22200582.9
申请日：2022-10-10
发明人： DE LANGEN, Johannes, Cornelis, Jacobus , KONING, Johan, Joost , SCHEFFERS, Paul, IJmert , DEL TIN, Laura , STEUNEBRINK, Martin
CPC分类号： H01J37/04 , H01J37/09 , H01J2237/045320130101
摘要： A stack of planar elements for a charged particle-optical module configured to project charged particles along a beam path, the stack comprising: a pair of adjoining planar elements arranged across the beam path, wherein one of the planar elements comprises an alignment fiducial and the other of the planar elements comprises a monitoring aperture; wherein the pair of planar elements are positioned relative to each other such that the alignment fiducial and the monitoring aperture are aligned with each other in a direction substantially perpendicular to a plane of the planar elements.
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