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    Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone
    26.
    发明公开
    Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone 有权
    灵活的MEMS传感器和其制备方法，以及灵活的MEMS麦克风

    公开(公告)号：EP1403212A3

    公开(公告)日：2005-07-13

    申请号：EP03256049.2

    申请日：2003-09-25

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Nam, Yun-woo ,  Lee, Suk-han

    IPC: B81B3/00 ,  B81C1/00

    CPC classification number: H01L41/45 ,  B81B2201/0257 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81C1/00182 ,  H01L41/094 ,  H01L41/0973 ,  H04R1/406 ,  H04R17/02 ,  H04R2420/07

    Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

    Electrostatic bimorph actuator
    27.
    发明公开
    Electrostatic bimorph actuator 有权
    静电双晶片致动

    公开(公告)号：EP1350758A3

    公开(公告)日：2004-12-15

    申请号：EP03002122.4

    申请日：2003-01-30

    Applicant: MICROSOFT CORPORATION

    Inventor： Sinclair, Michael J.

    IPC: B81B3/00 ,  G02B26/08

    CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

    Abstract: An electrostatic bimorph actuator includes a cantilevered flexible bimorph arm that is secured and insulated at one end to a planar substrate. In an electrostatically activated state the bimorph arm is generally parallel to the planar substrate. In a relaxed state, residual stress in the bimorph arm causes its free end to extend out-of-plane from the planar substrate. The actuator includes a substrate electrode that is secured to and insulated from the substrate and positioned under and in alignment with the bimorph arm. An electrical potential difference applied between the bimorph arm and the substrate electrode imparts electrostatic attraction between the bimorph arm and the substrate electrode to activate the actuator. As an exemplary application in which such actuators could be used, a microelectrical mechanical optical display system is described.

    Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone
    28.
    发明公开
    Flexible mems transducer and manufacturing method thereof, and flexible mems wireless microphone 有权
    灵活的MEMS Wandler und Verfahren zu ihrer Herstellung，und flexible MEMS Mikrophone

    公开(公告)号：EP1403212A2

    公开(公告)日：2004-03-31

    申请号：EP03256049.2

    申请日：2003-09-25

    Applicant: Samsung Electronics Co., Ltd.

    Inventor： Nam, Yun-woo ,  Lee, Suk-han

    IPC: B81B3/00 ,  B81C1/00

    CPC classification number: H01L41/45 ,  B81B2201/0257 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/0127 ,  B81C1/00182 ,  H01L41/094 ,  H01L41/0973 ,  H04R1/406 ,  H04R17/02 ,  H04R2420/07

    Abstract: A flexible wireless MEMS microphone includes a substrate of a flexible polymeric material, a flexible MEMS transducer structure formed on the substrate by PECVD, an antenna printed on the substrate for communicating with an outside source, a wire and interface circuit embedded in the substrate to electrically connect the flexible MEMS transducer and the antenna, a flexible battery layer electrically connected to the substrate for supplying power to the MEMS transducer, and a flexible bluetooth module layer electrically connected to the battery layer. The flexible MEMS transducer includes a flexible substrate, a membrane layer deposited on the substrate, a lower electrode layer formed on the membrane layer, an active layer formed by depositing a piezopolymer on the lower electrode layer, an upper electrode layer formed on the active layer, and a first and a second connecting pad electrically connected to the lower and upper electrode layers, respectively.

    Abstract translation: 柔性微机电系统（MEMS）换能器包括柔性基板（100）; 膜层（220）沉积在衬底上并且已经升高了预定长度的一部分; 由导电材料形成的下电极层和上电极层（230,250）; 活性层（240），其通过在所述电极之间沉积压电聚合物而形成; 以及各自连接到各个电极层的连接焊盘（271,272）。 还包括独立权利要求：（a）通过在衬底上形成牺牲层来制造上述MEMS换能器; 通过等离子体增强化学气相沉积（PECVD）在牺牲层上沉积膜层，然后进行图案化; 在膜层上沉积下电极层并图形化下电极; 依次沉积有源层和上电极，并对其进行构图; 形成要连接到下电极层的第一连接部分和与上电极层连接的第二连接焊盘; 并去除牺牲层; （b）柔性无线MEMS麦克风，其包括柔性基板; 通过PECVD在基板上形成柔性的MEMS换能器结构; 打印在所述基板上用于与外部源连通的天线; 嵌入基板中的电线和接口电路，以连接柔性MEMS换能器和天线; 连接到基板的柔性电池层; 和蓝牙（RTM）模块层。

    THERMAL ISOLATION USING VERTICAL STRUCTURES
    29.
    发明公开
    THERMAL ISOLATION USING VERTICAL STRUCTURES 审中-公开
    采用立式结构保温

    公开(公告)号：EP1203208A1

    公开(公告)日：2002-05-08

    申请号：EP00953738.2

    申请日：2000-07-28

    Applicant: Xactix, Inc.

    Inventor： LEBOUITZ, Kyle

    IPC: G01J5/40

    CPC classification number: G01J5/40 ,  B81B3/0081 ,  B81B2201/0278 ,  B81B2201/032 ,  B81B2203/0118 ,  G01J5/02 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/06

    Abstract: This invention relates to the construction of microfabricated devices and, in particular, to types of microfabricated devices requiring thermal isolation from the substrates upon which they are built. This invention discloses vertical thermal isolators and methods of fabricating the vertical thermal isolators. Vertical thermal isolators offer an advantage over thermal isolators of the prior art, which were substantially horizontal in nature, in that less wafer real estate is required for the use of the vertical thermal isolators, thereby allowing a greater density per unit area of the microfabricated devices.

    NANOTWEEZERS AND NANOMANIPULATOR
    30.
    发明公开
    NANOTWEEZERS AND NANOMANIPULATOR 审中-公开
    Nanopinzette和Nanomanipulator

    公开(公告)号：EP1193216A1

    公开(公告)日：2002-04-03

    申请号：EP01912179.7

    申请日：2001-03-08

    Applicant: Daiken Chemical Co. Ltd. ,  Nakayama, Yoshikazu

    Inventor： NAKAYAMA, Yoshikazu ,  AKITA, Seiji ,  HARADA, Akio c/o Daiken Chemical Co., Ltd. ,  OKAWA, Takashi c/o Daiken Chemical Co., Ltd.

    IPC: B82B1/00

    CPC classification number: B25J7/00 ,  B81B2201/032 ,  B81B2201/12 ,  B81B2203/0118 ,  B81C99/002 ,  B82B3/00 ,  G01Q80/00 ,  Y10S977/732 ,  Y10S977/734 ,  Y10S977/742 ,  Y10S977/778 ,  Y10S977/78 ,  Y10S977/837 ,  Y10S977/842 ,  Y10S977/858 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/876 ,  Y10S977/89 ,  Y10S977/901 ,  Y10S977/962

    Abstract: To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes.
    Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc.

    Abstract translation: 为了提供纳米扫描器和纳米管操纵器，其允许部件的极小化，并且能够夹持各种类型的纳米物质，例如绝缘体，半导体和导体，并且夹持各种形状的纳米物质。 静电纳米针筒2的特征在于，纳米针筒2由多个纳米管组成，其基端部固定在支架6上，使得纳米管从保持件6突出，涂覆膜绝缘并覆盖纳米管的表面， 引线10,10连接到两个纳米管8,9; 并且通过在这些引线上施加电压而产生的静电吸引力自由地打开和闭合两个纳米管的末端。 此外，通过在纳米管9的表面形成压电膜32，通过使压电膜膨胀收缩自由地开闭封闭纳米管的顶端，能够使任意的纳米物质 无论纳米物质是绝缘体，半导体还是导体，都要被处理。 此外，如果通过设计三个纳米管以通过静电系统自由地打开和关闭，则可以使用诸如球形，棒状等各种形状的纳米物质。

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