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    Charged particle source with integrated energy filter
    21.
    发明公开
    Charged particle source with integrated energy filter 审中-公开
    Quellefürgeladene Teilchen mit integriertem Energiefilter

    公开(公告)号：EP2128885A1

    公开(公告)日：2009-12-02

    申请号：EP08156906.3

    申请日：2008-05-26

    Applicant: FEI COMPANY

    Inventor： Henstra, Alexander

    IPC: H01J37/05 ,  H01J37/09 ,  H01J37/147 ,  H01J37/153 ,  H01J37/04

    CPC classification number: H01J37/05 ,  H01J3/027 ,  H01J3/04 ,  H01J37/063 ,  H01J2237/045 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/15 ,  H01J2237/1534

    Abstract: The invention describes a particle source in which energy selection occurs. The energy selection occurs by sending a beam of electrically charged particles 103 eccentrically through a lens 107. As a result of this, energy dispersion will occur in an image formed by the lens. By projecting this image onto a slit 109 in an energy selecting diaphragm 108, it is possible to allow only particles in a limited portion of the energy spectrum to pass. Consequently, the passed beam 113 will have a reduced energy spread. Deflection unit 112 deflects the beam to the optical axis 101. One can also elect to deflect a beam 105 going through the middle of the lens toward the optical axis and having, for example, greater current.
    The energy dispersed spot is imaged on the slit by a deflector 111. When positioning the energy dispersed spot on the slit, central beam 105 is deflected from the axis to such an extent that it is stopped by the energy selecting diaphragm. Hereby reflections and contamination resulting from this beam in the region after the diaphragm are avoided. Also electron-electron interaction resulting from the electrons from the central beam interacting with the energy filtered beam in the area of deflector 112 is avoided.

    Abstract translation: 本发明描述了发生能量选择的粒子源。 通过透过透镜107偏心地发送带电粒子103的束来进行能量选择。其结果是，由透镜形成的图像中会发生能量分散。 通过将该图像投影到能量选择膜108中的狭缝109上，可以仅允许能量谱的有限部分中的粒子通过。 因此，通过的梁113将具有减小的能量扩展。 偏转单元112将光束偏转到光轴101.还可以选择将穿过透镜中间的光束105偏转到光轴并具有例如更大的电流。 能量分散点通过偏转器111在狭缝上成像。当将能量分散点定位在狭缝上时，中心光束105从轴线偏转到由能量选择膜片停止的程度。 因此避免了在隔膜之后的区域中由该光束产生的反射和污染。 避免了在偏转器112的区域中与来自中心光束的电子与能量过滤光束相互作用的电子 - 电子相互作用。

    CANON A ELECTRONS A GRILLE
    23.
    发明公开
    CANON A ELECTRONS A GRILLE 失效
    佳能电子格栅

    公开(公告)号：EP0824758A1

    公开(公告)日：1998-02-25

    申请号：EP96914252.0

    申请日：1996-04-26

    Applicant: THOMSON TUBES ELECTRONIQUES

    Inventor： CLERC,Guy, Thomson-CSF SCPI

    IPC: H01J1 ,  H01J3 ,  H01J23

    CPC classification number: H01J25/04 ,  H01J1/20 ,  H01J3/027 ,  H01J23/07

    Abstract: The present invention relates to a grid electron tube whose cathode is comprised of an emissive part (12) which delimits a substantially central recess (11). Said cathode reduces considerably the emission of spurious electrons of the grid by contributing to its cooling. Application particularly to electronic tubes known as IOT.

    Abstract translation: 格栅电子管本发明涉及一种格栅电子管，其阴极由发射部分（12）组成，该发射部分限定了基本中心的凹陷（11）。 所述阴极通过对其冷却作出贡献而大大减小了电网的寄生电子的发射。 特别适用于称为IOT的电子管。

    Cathod assembly for mounting in an electron gun
    24.
    发明公开
    Cathod assembly for mounting in an electron gun 失效
    电子枪组装

    公开(公告)号：EP0323898A3

    公开(公告)日：1991-05-29

    申请号：EP89300058.8

    申请日：1989-01-05

    Applicant: Atomic Energy of Canada Limited L'Energie Atomique du Canada Limitée

    Inventor： Kolpin, Hans Joachim,

    IPC: H01J3/02 ,  H01J3/38

    CPC classification number: H01J3/027

    Abstract: An electron gun which is rugged, provides good thermal decoupling of the cathode, permits precise alignment of the electrodes to be achieved easily and allows geometric changes to be carried out with ease is described. In the cathode assembly three set screws (18) and a split ring (20) of insulating material are used to secure the cathode. Alignment is achieved by suitably adjusting the set screws and because contact can be limited to the three set screws thermal coupling is reduced. Similarly a Whenelt electrode (32) is secured and aligned by a further group of set screws (35). Finally, the anode (42) is secured to replaceable stand-offs (2) by means of screws (48) passing through oversized holes in an anode plate. The oversized holes permit easy alignment and the use of stand-offs permits the spacing between anode and cathode to be changed as desired by replacing the stand-offs.

    Cathod assembly for mounting in an electron gun
    25.
    发明公开
    Cathod assembly for mounting in an electron gun 失效
    Elektronenkanonenstrukturen。

    公开(公告)号：EP0323898A2

    公开(公告)日：1989-07-12

    申请号：EP89300058.8

    申请日：1989-01-05

    Applicant: Atomic Energy of Canada Limited L'Energie Atomique du Canada Limitée

    Inventor： Kolpin, Hans Joachim,

    IPC: H01J3/02 ,  H01J3/38

    CPC classification number: H01J3/027

    Abstract: An electron gun which is rugged, provides good thermal decoupling of the cathode, permits precise alignment of the electrodes to be achieved easily and allows geometric changes to be carried out with ease is described. In the cathode assembly three set screws (18) and a split ring (20) of insulating material are used to secure the cathode. Alignment is achieved by suitably adjusting the set screws and because contact can be limited to the three set screws thermal coupling is reduced. Similarly a Whenelt electrode (32) is secured and aligned by a further group of set screws (35). Finally, the anode (42) is secured to replaceable stand-offs (2) by means of screws (48) passing through oversized holes in an anode plate. The oversized holes permit easy alignment and the use of stand-offs permits the spacing between anode and cathode to be changed as desired by replacing the stand-offs.

    Abstract translation: 具有坚固耐用性的电子枪提供了良好的阴极热解耦，可以容易地实现电极的精确对准，并容易进行几何变化。 在阴极组件中，使用三个固定螺钉（18）和绝缘材料的开口环（20）固定阴极。 通过适当地调整固定螺钉来实现对准，并且由于可以限制三个固定螺钉的接触，热耦合被减少。 类似地，通过另一组定位螺钉（35）固定并对准有丝电极（32）。 最后，阳极（42）通过穿过阳极板中的大尺寸孔的螺钉（48）固定到可更换的支座（2）上。 尺寸过大的孔允许轻松对准，并且使用支架允许通过更换支架来改变阳极和阴极之间的间距。

    Electron tube device
    28.
    发明公开
    Electron tube device 审中-公开
    Elektronenröhrenvorrichtung

    公开(公告)号：EP3007199A1

    公开(公告)日：2016-04-13

    申请号：EP14003487.7

    申请日：2014-10-10

    Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V.

    Inventor： Mannhart, Jochen ,  Stephanos, Cyril

    IPC: H01J3/02 ,  H01J29/46 ,  H01J29/48

    CPC classification number: H01J3/027 ,  H01J29/46 ,  H01J29/485 ,  H01J2203/0232

    Abstract: An electron tube device (100) comprises an electron emitter (10), which is adapted for a release of electrons, an electron collector (20), which is adapted for a collection of the electrons, wherein the electron collector (20) and the electron emitter (10) are spaced from each other by a gap (1), and a gate electrode (30), which is arranged between the electron emitter (10) and the electron collector (20), wherein the gate electrode (30) is adapted for subjecting the electrons in the gap (1) to an electrical potential, wherein the gate electrode (30) comprises at least one membrane-shaped, electrically conductive or semiconductive electrode layer (31), which is at least partially transparent for the electrons, and the at least one electrode layer (31) has at least one of a plurality of through-holes and at least one electron absorption reducing dopant. Furthermore, methods of using the electron tube device (100) are disclosed.

    Abstract translation: 电子管装置（100）包括适于释放电子的电子发射器（10），适于收集电子的电子收集器（20），其中电子收集器（20）和 电子发射器（10）通过间隙（1）彼此间隔开，并且设置在电子发射器（10）和电子收集器（20）之间的栅电极（30），其中栅电极（30） 适于使间隙（1）中的电子受到电位，其中栅电极（30）包括至少一个膜状的导电或半导电电极层（31），其至少部分地为 电子，并且所述至少一个电极层（31）具有多个通孔和至少一个电子吸收减少掺杂剂中的至少一个。 此外，公开了使用电子管装置（100）的方法。

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