SPECTROSCOPIC MODULE
    32.
    发明公开
    SPECTROSCOPIC MODULE 审中-公开
    光谱模块

    公开(公告)号:EP2075555A1

    公开(公告)日:2009-07-01

    申请号:EP08765192.3

    申请日:2008-06-05

    Abstract: The spectroscopy module 1 is provided with a body portion 2 for transmitting light L1, L2, a spectroscopic portion 3 for dispersing light L1 made incident from the front plane 2a of the body portion 2 into the body portion 2 to reflect the light on the front plane 2a, a lisht detecting element 4 having a lisht detecting portion 41 for detecting the light L2 dispersed and reflected by the spectroscopic portion 3 and electrically connected to a wiring 9 formed on the front plane 2a of the body portion 2 by face-down bonding, and an underfill material 12 filled in the body portion 2 side of the lisht detecting element 4 to transmit the light L1, L2. The lisht detecting element 4 is provided with a light-passing hole 42 through which the light L1 advancing into the spectroscopic portion 3 passes, and a raised portion 43 in a rectangular annular shape is formed on a rear plane 4a of the body portion 2 side in the lisht detecting element 4 so as to enclose a light outgoing opening 42b of the light-passing hole 42.

    Abstract translation: 分光模块1具备使光L1,L2透过的主体部2,将从主体部2的前面2a入射的光L1分散到主体部2内,使前面的光反射的分光部3 平面2a,具有检测由分光部分3分散和反射的光L2并且通过倒装键合与形成在主体部分2的前平面2a上的布线9电连接的检测部分41的检测元件4 以及填充在检测元件4的主体部分2侧以传输光L1,L2的底部填充材料12。 在检体检测元件4上设置有进入分光部3的光L1通过的通光孔42,在主体部2侧的背面4a上形成有矩形环状的凸部43 在检测元件4中以包围光通过孔42的光出射口42b。

    METHOD AND APPARATUS FOR PEAK COMPENSATION IN AN OPTICAL FILTER
    33.
    发明公开
    METHOD AND APPARATUS FOR PEAK COMPENSATION IN AN OPTICAL FILTER 审中-公开
    方法和设备TOP补偿的光学滤色

    公开(公告)号:EP1766347A4

    公开(公告)日:2008-12-10

    申请号:EP05748197

    申请日:2005-05-06

    Applicant: CHEMIMAGE CORP

    CPC classification number: G01J3/28 G01J3/0227 G01J3/027 G01J3/0286 G01J3/44

    Abstract: In one embodiment the disclosure relates to a method and a system for determining the corrected wavelength of a photon scattered by a sample. The method includes the steps of determining a wavelength of a photon scattered from a sample exposed to illuminating photons and passed through a tunable filter and correcting the determined wavelength of the photon as a function of the temperature of the tunable filter and as a function of the bandpass set point of the tunable filter. The step of correcting the determined wavelength can further include determining an offset and adding the offset to the determined wavelength of the photon.

    TWO F-NUMBER, TWO-COLOR SENSOR SYSTEM
    34.
    发明公开
    TWO F-NUMBER, TWO-COLOR SENSOR SYSTEM 有权
    两个F-数字,双色传感器系统

    公开(公告)号:EP1915781A1

    公开(公告)日:2008-04-30

    申请号:EP06739317.3

    申请日:2006-03-23

    Abstract: A sensor system (20) senses a scene (22) and includes a dual-band imaging infrared detector (34) lying on a beam path (28), wherein the infrared detector (34) detects infrared images in a first infrared wavelength band and in a second infrared wavelength band; and a two-color cold-shield filter (38) lying on the beam path (28) between the infrared detector (34) and the scene (22). The cold-shield filter (38) defines a first aperture size for infrared light of the first infrared wavelength band, and a second aperture size larger than the first aperture size for infrared light of the second infrared wavelength band. The first infrared wavelength band has wavelengths less than wavelengths of the second infrared wavelength band.

    Abstract translation: 传感器系统(20)感测场景(22)并且包括位于光束路径(28)上的双频带成像红外检测器(34),其中红外检测器(34)检测第一红外波段中的红外图像,以及 在第二红外波段中; 和位于红外探测器(34)和场景(22)之间的光束路径(28)上的双色冷遮蔽滤波器(38)。 冷屏蔽滤波器(38)为第一红外波段的红外光确定第一孔径尺寸,并且为第二红外波段的红外光确定大于第一孔径尺寸的第二孔径尺寸。 第一红外波长带的波长小于第二红外波长带的波长。

    EUV light spectrum measuring apparatus and calculating method of EUV light intensity
    40.
    发明公开
    EUV light spectrum measuring apparatus and calculating method of EUV light intensity 审中-公开
    EUV-Spektrometer und Methode zur Berechnung der EUVIntensität

    公开(公告)号:EP1566663A2

    公开(公告)日:2005-08-24

    申请号:EP05003409.9

    申请日:2005-02-17

    Abstract: A measuring apparatus for measuring a spectrum of extreme ultraviolet light that diverges from a divergent center point (1-c) of an extreme ultraviolet light source, includes a spectrum measuring unit that includes a spectrometer (3-a,b,..g) and a detector (3-h) that has a spatial resolution in a spectrum forming direction of the spectrometer, and a drive mechanism (4,5,6) that makes the spectrum measuring unit movable relative to the divergent center point.

    Abstract translation: 一种用于测量从极紫外光源的发散中心点(1-c)分叉的极紫外光谱的测量装置,包括包括光谱仪(3-a,b,... g)的光谱测量单元, 以及在光谱仪的光谱形成方向上具有空间分辨率的检测器(3-h)和使得光谱测量单元相对于发散中心点可移动的驱动机构(4,5,6)。

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