公开(公告)号：EP4439010A1

公开(公告)日：2024-10-02

申请号：EP24162903.9

申请日：2024-03-12

申请人： STMicroelectronics International N.V.

发明人： CARULLI, Paola ,  FEDELI, Patrick ,  FALORNI, Luca Giuseppe ,  MORELLI, Federico

IPC分类号： G01C19/5719 ,  B81B3/00 ,  B81B7/00 ,  G01C19/5733 ,  G01C19/5755 ,  G01P15/097

CPC分类号： G01P15/097 ,  G01C19/5755 ,  G01C19/5719 ,  G01C19/5733 ,  B81B3/00 ,  B81B7/00

摘要： Microelectromechanical device (1) comprising a supporting body (2), containing semiconductor material and a movable mass (3), constrained to the supporting body with a relative degree of freedom with respect to at least one motion direction (D), within a range (I) of admissible positions. The device also comprises stopper elements (7), operable by the movable mass due to movements along the at least one motion direction and configured to apply stop forces (FC) to opposite sides of the movable mass, transversely to the at least one motion direction, when the movable mass reaches a respective endpoint (I1, I2) of the range of admissible positions, so as to prevent the movable mass from exceeding the respective endpoint.

公开(公告)号：EP4379319A1

公开(公告)日：2024-06-05

申请号：EP22863068.7

申请日：2022-08-11

申请人： Huawei Technologies Co., Ltd.

发明人： HU, Qifang ,  ZHENG, Yuanliao

IPC分类号： G01C19/5719 ,  G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5719 ,  G01C21/16

摘要： An inertial sensor (20) and an electronic device (100) are provided. Amass block (312 or 315) of the inertial sensor (20) for detecting a Y-axis is driven to have a displacement component in an X-axis direction. When the inertial sensor (20) is subject to an angular velocity component around a Z-axis, the mass block (312 or 315) for detecting the Y-axis may pull a mass block (313 or 316) for detecting the Z-axis, so that the mass block (313 or 316) for detecting the Z-axis can have a displacement component in a Y-axis direction. The inertial sensor (20) can implement principle decoupling between Y-axis detection and Z-axis detection, thereby helping to consider both a size and detection precision of the inertial sensor (20).

公开(公告)号：EP4045873A1

公开(公告)日：2022-08-24

申请号：EP20788841.3

申请日：2020-10-15

申请人： Safran Electronics & Defense

发明人： JEANROY, Alain ,  ONFROY, Philippe

IPC分类号： G01C19/5642 ,  G01C19/5656 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5705 ,  G01C19/5712

公开(公告)号：EP3855116A3

公开(公告)日：2021-11-24

申请号：EP21150495.6

申请日：2021-01-07

申请人： NXP USA, Inc.

发明人： SHAO, Peng ,  LIU, Lianjun

IPC分类号： G01C19/5719

摘要： A device includes a substrate, a first electrode formed on the substrate and a structural layer formed on the substrate. The structural layer includes a movable mass and a fixed portion, the movable mass being suspended above the substrate and the first electrode being interposed between the substrate and the movable mass. A second electrode is spaced apart from an upper surface of the movable mass by a gap and an anchor couples the second electrode to the fixed portion of the structural layer. A method entails integrating formation of the second electrode into a wafer process flow in which the first electrode and the structural layer are formed.

公开(公告)号：EP3737911A1

公开(公告)日：2020-11-18

申请号：EP18804167.7

申请日：2018-10-24

申请人： InvenSense, Inc.

发明人： THOMPSON, Matthew

IPC分类号： G01C19/5712 ,  G01C19/5719 ,  G01C19/5733 ,  G01C19/574 ,  G01P15/125

公开(公告)号：EP2856080B1

公开(公告)日：2017-02-22

申请号：EP12878367.7

申请日：2012-06-04

申请人： Systron Donner Inertial, Inc.

发明人： PAINTER, Chris

IPC分类号： G01C19/56 ,  G01C19/5607 ,  G01C19/5719 ,  G01C19/5642 ,  G01C19/5755

CPC分类号： G01C19/5607 ,  G01C19/56 ,  G01C19/5642 ,  G01C19/5719 ,  G01C19/5755 ,  Y10T74/1275

公开(公告)号：EP3063498A1

公开(公告)日：2016-09-07

申请号：EP14799548.4

申请日：2014-10-31

申请人： Murata Manufacturing Co., Ltd.

发明人： BLOMQVIST, Anssi ,  RYTKÖNEN, Ville-Pekka ,  PIIRAINEN, Tommi

IPC分类号： G01C19/5719

CPC分类号： G01C19/5719 ,  G01C19/56 ,  G01C19/5726

摘要： A microelectromechanical sensor device that comprises a seismic mass, and a spring structure that defines for the seismic mass a drive direction, and a sense direction that is perpendicular to the drive direction. A capacitive transducer structure includes a stator to be anchored to a static support structure, and a rotor mechanically connected to the seismic mass. The capacitive transducer structure is arranged into a slanted orientation where a non-zero angle is formed between the drive direction and a tangent of the stator surface. The slated capacitive transducer structure creates an electrostatic force to decrease quadrature error of the linear oscillation.

公开(公告)号：EP2965094A1

公开(公告)日：2016-01-13

申请号：EP13814297.1

申请日：2013-12-02

申请人： Robert Bosch GmbH ,  Feyh, Ando

发明人： FEYH, Ando ,  CHEN, Po-Jui

IPC分类号： G01P15/08 ,  B81B5/00 ,  B81C1/00 ,  G01C19/5719 ,  G01P15/12 ,  G01P15/18

CPC分类号： G01P15/08 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2207/015 ,  G01C19/5783 ,  G01P15/0802 ,  G01P15/105 ,  G01P15/124 ,  G01P15/18 ,  G01P2015/0865

摘要： A sensor device includes a first CMOS chip and a second CMOS chip with a first moving-gate transducer formed in the first CMOS chip for implementing a first 3-axis inertial sensor and a second moving-gate transducer formed in the second CMOS chip for implementing a second 3-axis inertial sensor. An ASIC for evaluating the outputs of the first 3-axis inertial sensor and the second 3-axis inertial sensor is distributed between the first CMOS chip and the second CMOS chip.

公开(公告)号：EP2435789B1

公开(公告)日：2015-04-08

申请号：EP10732533.4

申请日：2010-05-27

申请人： King Abdullah University Of Science And Technology

发明人： AZIZ, Ahmed Kamal Said Abdel ,  SHARAF, Abdel Hamid ,  SHERRY, Mohamed ,  SEDKY, Sherif

IPC分类号： G01C19/5719 ,  G01P15/08 ,  G01P15/18 ,  G01P15/125 ,  B81B3/00

CPC分类号： G01C19/5719 ,  B81B3/0062 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

摘要： MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.

摘要翻译： 公开了使用平面外（或垂直）悬浮方案的MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计），其中悬架与校验物质垂直。 这种平面外悬架方案有助于这种MEMS质量弹簧阻尼器系统实现惯性等级性能。 还公开了在MEMS质量弹簧阻尼器系统（包括MEMS陀螺仪和加速度计）中制造平面外悬架的方法。

公开(公告)号：EP2811260A1

公开(公告)日：2014-12-10

申请号：EP14171673.8

申请日：2014-06-09

申请人： MCube, Inc.

发明人： Yoneoka, Shingo ,  Sridharamurthy, Sudheer ,  Zhang, Wenhua ,  Lee, Te-Hsi

IPC分类号： G01C19/5719 ,  G01P15/125

CPC分类号： G01P15/131 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/5762 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/084 ,  G01P2015/0865

摘要： An integrated MEMS inertial sensor device is described. The device includes a MEMS inertial sensor overlying a CMOS substrate. The MEMS inertial sensor includes a drive frame coupled to the surface region via at least one drive spring, a sense mass coupled to the drive frame via at least a sense spring, and a sense electrode disposed underlying the sense mass. The device also includes at least one pair of quadrature cancellation electrodes disposed within a vicinity of the sense electrode, wherein each pair includes an N-electrode and a P-electrode.

摘要翻译： 一种集成MEMS惯性传感器装置进行说明。 该装置包括一个MEMS惯性传感器上覆于CMOS衬底。 所述MEMS惯性传感器包括经由至少一个驱动弹簧，经由至少一个感弹簧质量耦合到所述驱动器框架上的意义上，和设置在感测质量块下方的传感电极耦合到所述表面区域上的驱动器框架。 因此，该装置包括至少一对感测电极的附近内设置正交取消电极，worin每一对包括N电极和p电极。