公开(公告)号：EP2003432A2

公开(公告)日：2008-12-17

申请号：EP07740460.6

申请日：2007-03-23

Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA

Inventor： TAKAGI, Atsushi, TOYOTA JIDOSHA KABUSHIKI KAISHA

IPC: G01J3/46

CPC classification number: G01J3/52 ,  G01J3/02 ,  G01J3/0267 ,  G01J3/027 ,  G01J3/0278 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/46 ,  G01J3/524 ,  G01J2003/468

Abstract: A reference-color measurement step of obtaining a reference-color measurement value by measuring a spectroscopic-radiation luminance of a light being emitted from a reference-color portion in a measurement direction, or a tristimulus value thereof, using a light-source-color measuring instrument 5, without irradiating the reference-color portion with a light source for measurement, in a predetermined measurement environment; an objective-portion measurement step of obtaining an objective-portion measurement value by measuring a spectroscopic-radiation luminance of a light being emitted from a measurement-objective portion in the measurement direction, or a tristimulus value thereof, using the light-source-color measuring instrument 5, without irradiating the measurement-objective portion with a light source for measurement, in the measurement environment; and a color identification step of finding a color of the measurement-objective portion by means of computation from a ratio of the objective-portion measurement value with respect to the reference-color measurement value are equipped. Even when measuring a color of such a body, like a body including a fluorescent material, whose reflectivity has changed depending on the type of light source, it is possible to measure the color of such a body accurately.

Abstract translation: 参考颜色测量步骤，通过使用光源颜色测量从测量方向上的参考颜色部分发射的光的分光辐射亮度或其三色刺激来获得参考颜色测量值 测量仪器5，在预定的测量环境中不用参考颜色部分照射用于测量的光源; 目标部分测量步骤，通过使用光源颜色测量从测量方向上的测量目标部分发射的光的分光辐射亮度或其三色值来获得目标部分测量值 测量仪器5，不在测量环境中用测量用光源照射测量对象部分; 并且配备根据目标部分测量值相对于基准颜色测量值的比率通过计算找到测量目标部分的颜色的颜色识别步骤。 即使在测量其反射率根据光源的类型而变化的诸如包括荧光材料的主体的颜色时，也可以精确地测量这样的主体的颜色。

公开(公告)号：EP1936337A1

公开(公告)日：2008-06-25

申请号：EP06126907.2

申请日：2006-12-21

Applicant: Gretag-Macbeth AG

Inventor： Ehbets, Peter ,  Kohlbrenner, Adrian

IPC: G01J3/02 ,  G01J3/50

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0213 ,  G01J3/024 ,  G01J3/027 ,  G01J3/0278 ,  G01J3/50 ,  G01J3/501 ,  H04N1/00005 ,  H04N1/00015 ,  H04N1/00023 ,  H04N1/00045 ,  H04N1/00047 ,  H04N1/0005 ,  H04N1/00058

Abstract: Eine Abtastvorrichtung umfasst eine Auflagefläche für das Messobjekt und eine Antriebseinrichtung zur Bewegung eines Farbmesskopfs über die Auflagefläche in wenigstens einer Dimension derselben und zur Höhenverstellung des Farbmesskopfs in Richtung senkrecht zur Auflagefläche sowie eine die Antriebseinrichtung ansteuernde und mit dem Farbmesskopf (MH) zusammenarbeitende Mess- und Antriebssteuerung. Der Farbmesskopf (MH) ist mit wenigstens einem Beleuchtungskanal (IC) und einem Sammelkanal (CC) ausgestattet ist. Der Beleuchtungskanal (IC) weist eine Lichtquelle (10) und optische Mittel (12-22) auf, um das Messobjekt (S) an einem Messort unter einem mittleren Einfallswinkel von 45° zu beleuchten. Der Sammelkanal (CC) besitzt optische Mittel (24-34), um vom Messobjekt am Messort ausgehendes Messlicht unter einem mittleren Sammelwinkel von 0° aufzufangen und in einen Lichtleiter (LF) einzukoppeln, welcher das aufgefangene Messlicht einem vorzugsweise als Spektrometer ausgebildeten wellenlängenselektiven lichtelektrischen Wandler zuführt, der es in eine Anzahl von Wellenlängenbereichen auflöst und für jeden Wellenlängenbereich ein korrespondierendes elektrisches Messsignal erzeugt. Die optischen Mittel im Beleuchtungslcanal (IC) umfassen eine Kollimationsoptik (12), eine Feldblende (16) und eine symmetrische telezentrische Abbildungsoptik (18). Die optischen Mittel im Sammelkanal (CC) umfassen eine Abbildungsoptik (28), eine Feldblende (32) und eine Einkoppcloptik (34). Die Kollimationsoptik (12) kollimiert das von der Lichtquelle (10) stammende Beleuchtungslicht und leuchtet damit die Fcldblende (16) des Beleuchtungskanals (IC) achsparallel homogen aus. Die telezentrische Abbildungsoptik (18) bildet die Feldblende (16) scharf in eine Messebene ab und erzeugt dabei einen Beleuchtungsfleck. Die Abbildungsoptik (28) im Sammelkanal (CC) bildet die Feldblende (32) scharf in die Messebene innerhalb des Beleuchtungsflecks (IS) ab und definiert durch das Abbild der Feldblende einen Messfleck, wobei der Sammelkanal (CC) nur aus dem Messfleck stammendes Messlicht auffängt und über die Einkoppeloptik (34) in den Lichtleiter (LF) einkoppelt.
Der Farbmesskopf ist aufgrund seiner spezifischen Ausbildung für die berührungslose, hochpräzise Messung auch von kleinsten Messfeldern geeignet.

Abstract translation: 扫描装置具有颜色测量头（MH），其中测色头在要测试的测量对象上线性移动。 彩色测量头设置有照明通道（IC）和收集通道（CC）。 照明通道具有光源（10）和光学单元。 测试对象（S）在中角45度的测量点被照射，并且收集通道具有另一个光学单元。

公开(公告)号：EP1737089A1

公开(公告)日：2006-12-27

申请号：EP06729350.6

申请日：2006-03-17

Applicant: Anritsu Corporation

Inventor： MORI, Hiroshi

IPC: H01S5/125 ,  H01S5/06

CPC classification number: H01S5/06256 ,  G01J3/027 ,  G01J3/10 ,  G01J3/42 ,  G01N21/39 ,  G01N2021/399 ,  H01L2224/48091 ,  H01S5/02208 ,  H01S5/02248 ,  H01S5/02415 ,  H01S5/02438 ,  H01S5/026 ,  H01S5/0425 ,  H01S5/0612 ,  H01S5/06258 ,  H01S5/1203 ,  H01S5/2231 ,  H01S5/227 ,  H01L2924/00014

Abstract: A tunable semiconductor laser device includes a wavelength control region that is formed to include an active layer formed above a semiconductor substrate in an optical waveguide which guides the light generated by the active layer and that includes in at least one portion a diffraction grating which selects light having a predetermined wavelength from the light generated by the active layer, a cladding layer, an insulation film formed above the cladding layer, a first driving electrode formed below the semiconductor substrate, a second driving electrode formed above the cladding layer, a heating portion that is formed above the insulation film and that is used to heat at least one portion of the wavelength control region, first and second heating terminals provided in the heating portion, and first and second connection lines that connect in series between the first and second driving electrodes through a power source. By tuning the current supplied from the power source to the first and second connection lines substantially connected in series through the heating portion, the tunable semiconductor laser device can be controlling the wavelength of the light derived to an outside from the optical waveguide.

Abstract translation: 甲可调半导体激光元件包括波长控制区域没有被形成为包括在光波导在上述的半导体衬底形成的活性层在其上引导由有源层产生的光，做了在至少一个部分包括一个衍射光栅，其选择光 包覆层上方具有从由所述活性层，包层，以绝缘中产生的光中的规定波长成膜，形成在半导体衬底下面的第一驱动电极，第二驱动电极形成的覆层的上方，加热部分做 绝缘膜的上方形成，也被用来加热所述波长控制区域，在该加热部设置第一和第二加热端子，以及第一和第二连接线中的至少一个部分并在第一和第二驱动电极之间串联连接 通过一个动力源。 通过调整从电源到经过加热部分基本上串联连接的第一和第二连接线供给的电流，所述可调半导体激光元件可以是控制从光波导衍生到外部的光的波长。

公开(公告)号：EP1726930A1

公开(公告)日：2006-11-29

申请号：EP06006507.5

申请日：2006-03-29

Applicant: Carl-Zeiss Jena GmbH

Inventor： Kerstan, Felix ,  Correns, Nico

IPC: G01J3/10 ,  G01J3/18 ,  G01J3/32 ,  G01J3/36

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/027 ,  G01J3/24 ,  G01J3/36 ,  G01J2003/1286

Abstract: Die vorliegende Erfindung betrifft ein Gitterspektrometersystem sowohl für polychromatische als auch für monochromatische Spektrometeranordnungen.
Das erfindungsgemäße Gitterspektrometersystem besteht dabei aus einer Lichtquelle zur Beleuchtung der zu untersuchenden Probe (6), einem Beugungsgitter (1), abbildenden optischen Elementen, einem in der Bildebene angeordneten Detektor und einer Steuer- und Regeleinheit (8). Als Lichtquelle werden Einzellichtquellen, vorzugsweise LEDs (7.1 bis 7.3) unterschiedlicher spektraler Charakteristik verwendet, deren Spektralbereich mehrere Beugungsordnungen in der Bildebene überstreichen. Von der Steuer- und Regeleinheit (8) werden nur die LEDs einzeln oder in Gruppen eingeschaltet, die in irgend einer Beugungsordnung nicht die selbe Stelle der in der Bildebene angeordneten Einzel-Detektoren (9.1, 9.2) beleuchten.
Die vorgeschlagene Lösung ist sowohl für polychromatische als auch für monochromatische Spektrometeranordnungen geeignet, wobei der Anwendungsbereich von der spektralen Empfindlichkeit des verwendeten Detektors bestimmt wird. Durch Ausnutzung mehrere Beugungsordnungen kann die Auflösung bei gleichbleibender Detektorgröße vergrößert bzw. die Detektorfläche bei gleicher Abbildungsqualität verkleinert werden.

Abstract translation: 该系统具有用于点亮要测试的样品（6）的光源，其中源具有不同光谱特性的单个光源。 源的光谱区覆盖了图像级别中的几个衍射级。 控制和调节单元（8）以任何布置方式单独地或分组地切换光源，其不会发出布置在图像级别中的检测器的相同位置。 还包括用于执行测量值记录的方法的独立权利要求。

公开(公告)号：EP1668313A1

公开(公告)日：2006-06-14

申请号：EP04784260.4

申请日：2004-09-15

Applicant: Cymer, Inc.

Inventor： RAO, Rajasekhar, M. ,  MELCHIOR, John, T. ,  GLATZEL, Hoger, K.

IPC: G01B9/02 ,  H01S3/13

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/027 ,  G01J9/0246

Abstract: A wavemeter and method for measuring bandwidth for a high repetition rate gas discharge laser having an output laser bean comprising a pulsed output of greater than or equal to 15 mJ per pulse, sub-nanometer bandwidth tuning range pulses having a femptometer bandwidth precision and tens of femptometers bandwidth accuracy range, for measuring bandwidth on a pulse to pulse basis at pulse repetition rates of 4000Hz and above, is disclosed which may comprise a focusing lens having a focal length; an optical interferometer creating an interference fringe pattern; an optical detection means positioned at the focal length from the focusing lens; and a bandwidth calculator calculating bandwidth from the position of interference fringes in the interference fringe pattern incident on the optical detection means, defining a DID and a DOD, the respective distances between a pair of first fringe borders and between a pair of second fringe borders in the interference pattern on an axis of the interference pattern, and according to the formula Δλ= λ0 [DOD2 _ DID2] / [8f2-D02] where λ0 is an assumed constant wavelength and D0 = (DOD - DID)2, and f is the focal length.

公开(公告)号：EP1649244A2

公开(公告)日：2006-04-26

申请号：EP04777419.5

申请日：2004-06-29

Applicant: Cymer, Inc.

Inventor： RAFAC, Robert, J.

IPC: G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser (12) is disclosed which may comprise: a first (30) and second (34) wavelength sensitive optical bandwidth etalon detectors providing, respectively, an output (32, 36) representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first anal second bandwidth detectors, and an actual bandwidth calculation apparatus (40) adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter (FWXM) or a second actual bandwidth parameter (EX).

公开(公告)号：EP1634061A2

公开(公告)日：2006-03-15

申请号：EP04730607.1

申请日：2004-04-30

Applicant: McGill University

Inventor： BURNS, David, H. ,  LAFRANCE, Denis ,  LANDS, Larry

IPC: G01N21/35

CPC classification number: G01N21/359 ,  A61B5/14532 ,  A61B5/14546 ,  A61B5/1455 ,  A61B5/6826 ,  A61B5/6838 ,  G01J3/02 ,  G01J3/027 ,  G01J3/427 ,  G01J3/44 ,  G01J3/453 ,  G01N21/4738 ,  G01N21/65 ,  G01N2021/3148 ,  G01N2021/3595 ,  G01N2201/0618 ,  G01N2201/0627 ,  G01N2201/0636 ,  G01N2201/129 ,  G01N2201/1293 ,  Y10T436/143333

Abstract: There is described a system and method for the in vivo determination of lactate levels in blood using Near-Infrared Spectroscopy (NIRS)and/or Near-infrared Raman Spectroscopy (NIR-RAMAN). The method teaches measuring lactate in vivo comprising: optically coupling a body part (14) with a light source (10) and a light detector (18) the body part having tissues comprising blood vessels; injecting near-infrared (NIR) light at one or a plurality of wavelengths in the body part; detecting, as a function of blood volume variations in the body part, light exiting the body part at at least the plurality of wavelengths to generate an optical signal (20); and processing the optical signal as a function of the blood volume variations to obtain a lactate level in blood.

公开(公告)号：EP1417462A1

公开(公告)日：2004-05-12

申请号：EP02752594.8

申请日：2002-07-25

Applicant: Cymer, Inc.

Inventor： HAAS, Steven ,  SANDSTROM, Richard, L. ,  HOFMANN, Thomas ,  ERSHOV, Alexander, I.

IPC: G01J3/18

CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/027 ,  G01J3/12 ,  G01J3/1809 ,  G01J3/22 ,  G01J3/28 ,  G01J9/02

Abstract: A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between 'twice a measured laser bandwidth' and a corresponding 'doubly convolved bandwidth.' This method provides an excellent estimate of the true laser bandwidth because 'twice the measured laser bandwidth' represents two laser bandwidths and two spectrometer slit function bandwidths and the 'doubly convolved bandwidth' represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

公开(公告)号：EP1238249B1

公开(公告)日：2004-03-31

申请号：EP00986478.6

申请日：2000-12-15

Applicant: PPG Industries Ohio, Inc.

Inventor： CORRIGAN, Victor, G. ,  MABREY, Bernard, L. ,  LEWIS, Mark, David

IPC: G01J3/46

CPC classification number: G01J3/02 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/46 ,  G01J3/463 ,  Y10S707/99933 ,  Y10S707/99936

Abstract: A computer implemented method for matching paint on a vehicle, having the steps of receiving in a central computer, from a remote terminal, vehicle identifying information relating to a specific vehicle and a first set of paint color data from a portion of the body of the vehicle. The central computer includes a database with vehicle identifying information for a plurality of vehicles, associated with paint color data and their paint formulations. A first process determines a first best match paint formulation which relates submitted vehicle identifying information and submitted paint data to a paint formulation. The latter is transmitted to the remote terminal. The central computer receives a second set of paint color data from the remote terminal representing a surface of the specific vehicle painted with the first best paint formulation and compares by a second process the second paint color data to the first paint color data so as to establish accuracy data. The accuracy data is applied to the first process so as to be implemented in subsequent paint formulation identifications.

公开(公告)号：EP1339519A2

公开(公告)日：2003-09-03

申请号：EP01975156.9

申请日：2001-05-23

Applicant: Cymer, Inc.

Inventor： NEWMAN, Peter, C. ,  DUFFEY, Thomas, P. ,  PARTLO, William, N. ,  SANDSTROM, Richard, L. ,  MECHER, Paul, C. ,  JOHNS, David, M. ,  SAETHRE, Robert, B. ,  FLEUROV, Vladimir, B. ,  NESS, Richard, M. ,  RETTIG, Curtis, L. ,  SHANNON, Robert, A. ,  UJAZDOWSKI, Richard, C. ,  ROKNI, Shahryar ,  PAN, Xiaojiang, J. ,  KULGEYKO, Vladimir ,  SMITH, Scott, T. ,  ANDERSON, Stuart, L. ,  ALGOTS, John, M. ,  SPANGLER, Ronald, L. ,  Fomenkov, Igor V.

IPC: B23H1/00

CPC classification number: H01S3/225 ,  G01J1/4257 ,  G01J3/027 ,  G01J9/0246 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70483 ,  G03F7/70575 ,  G03F7/70933 ,  H01S3/02 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0387 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/097 ,  H01S3/09702 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/137 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258 ,  H01S3/2308

Abstract: The present invention provides an excimer laser capable of producing a high quality pulsed laser beam at pulse rates of about 4,000 Hz at pulse energies of about 5mJ or greater. A preferred embodiments is an ArF excimer laser specifically designed as a light source for integrated circuit lithography. An improved wavemeter with special software monitors output beam parameters and controls a very fast PZT driven tuning mirror and the pulse power charging voltage to maintain wavelength and pulse energy within desired limits. In a preferred embodiment two fan motors drive a single tangential fan which provides sufficient gas flow to clear discharge debris from the discharge region during the approximately 0.25 milliseconds between pulses.