摘要:
Isolation of magnetic layers in the magnetoresistive stack is achieved by passivation of sidewalls of the magnetic layers or deposition of a thin film of non-magnetic dielectric material on the sidewalls prior to subsequent etching steps. Etching the magnetic layers using a non-reactive gas further prevents degradation of the sidewalls.
摘要:
An MRAM cell may include a magnetic tunneling junction (MTJ). The MTJ includes a pin layer, a barrier layer, a free layer, and a capping layer. The MRAM cell further includes a bidirectional diode selector, directly coupled to an electrode of the MTJ, to enable access to the MTJ.
摘要:
An embodiment includes a C-element logic gate implemented as a spin logic device that provides a compact and low-power implementation of asynchronous logic by implementing a C-element with spintronic technology. An embodiment includes a first nanopillar including a first contact and a first fixed magnetic layer; a second nanopillar including a second contact and a second fixed magnetic layer; and a third nanopillar including a third contact, a tunnel barrier, and a third fixed magnetic layer; wherein (a) the first, second, and third nanopillars are all formed over a free magnetic layer, and (b) the third fixed magnetic layer, the tunnel barrier, and the free magnetic layer form a magnetic tunnel junction (MTJ). Other embodiments are described herein.
摘要:
Techniques are disclosed for fabricating a self-aligned spin-transfer torque memory (STTM) device with a dot-contacted free magnetic layer. In some embodiments, the disclosed STTM device includes a first dielectric spacer covering sidewalls of an electrically conductive hardmask layer that is patterned to provide an electronic contact for the STTM's free magnetic layer. The hardmask contact can be narrower than the free magnetic layer. The first dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer. In some embodiments, the STTM further includes an optional second dielectric spacer covering sidewalls of its free magnetic layer. The second dielectric spacer can be utilized in patterning the STTM's fixed magnetic layer and may serve, at least in part, to protect the sidewalls of the free magnetic layer from redepositing of etch byproducts during such patterning, thereby preventing electrical shorting between the fixed magnetic layer and the free magnetic layer.
摘要:
A magnetic tunnel junction (MTJ) and methods for fabricating a MTJ are described. An MTJ (200) includes a fixed layer (114) and a barrier layer (116) on the fixed layer (114). Such an MTJ (200) also includes a free layer (118) interfacing with the barrier layer (116). The free layer (118) has a crystal structure in accordance with the barrier layer (116). The MTJ (200) further includes an amorphous capping layer (120) interfacing with the free layer (118).
摘要:
Spin-transport elements using semiconductors have had the problem of higher element resistance than conventional GMR elements and TMR elements, making it difficult to obtain high magnetoresistance ratios. A magnetoresistive element including a semiconductor channel layer (3); a first ferromagnetic layer (12A) disposed on the semiconductor channel layer (3); a second ferromagnetic layer (12B) disposed away from the first ferromagnetic layer (12A); and a non-magnetic first reference electrode (20) disposed away from the first ferromagnetic layer (12A) and the second ferromagnetic layer (12B), wherein current is input from the second ferromagnetic layer (12B) to the first ferromagnetic layer (12A) through the semiconductor channel layer (3), a voltage between the second ferromagnetic layer (12B) and the first reference electrode (20) is output.