摘要:
Matching means (2) is arranged in a power source unit (5) which is provided with an RF power source (1), so that output impedance (Zo) of the RF power source (1) matches with an impedance (Z L ) of a laser tube (4) that is connected thereto via power transmission means (3). The electric power of radio frequencies generated by the RF power source (1) is effectively supplied to the laser tube (4) arranged in a laser emitting unit (6), and a laser beam is stably emitted from the laser tube 14) maintaining high efficiency.
摘要:
Laser apparatus includes a plurality of metal segments 2 distributed along a tube 1, the end electrodes 2a and 2b being connected to respective plates of a capacitor 9, and the segment 2c adjacent to one of the end segments being arranged to act as a control electrode. During operation, the control electrode is held at a fixed bias potential and a large potential difference is applied between electrodes 2a and 2b. When it is desired to trigger a discharge within the tube 1, a trigger potential is applied to the control electrode 2c. Power dissipated in repetitive discharges so formed vaporises or dissociates material 6 located within the tube 1 and provides pumping power whereby laser action is achieved. In another embodiment (not shown) an electron beam is introduced within the tube to trigger the discharge.
摘要:
Improved laser power supply designed to provide the high electric field required for starting a laser. This invention has the capability of automatically readjusting after laser action is initiated to provide an optimum impedance match for high efficiency energy transfer. As shown in (Fig. 1), the invention includes variable means (21) for matching the impedance of a laser cavity (14) with a source of RF energy (12). In addition, means (16) are provided for sensing a change in the impedance of the laser cavity. The additional circuitry (32-46) utilizes the sensed change to vary the impedance of the matching elements (50 & 52) to provide and maintain an optimal coupling between the laser cavity (14) and the RF source (12).
摘要:
The invention relates to a device for the excitation of a gas medium (10) contained in a casing (12), said device being coupled to the casing (12) and disposed outside same and comprising an applicator that can generate lateral excitation inside the casing (12) over at least a portion thereof. The device is characterised in that the casing (12) is a hollow-core photonic dielectric structure (16), in which the core has a diameter smaller than 300 μm, and in that the applicator is of the microwave type and can be used to generate a surface wave that can create and confine a micro-plasma from the gaseous medium contained in the casing (12).
摘要:
Fast wavelenght correction equipment for an electric discharge laser includes at least one piezoelectic drive (80) and a fast wavelength measurement system and a fast feedback response time. In a preferred embodiment equipment is provided to control wavelength on a slow, intermediate amd fast time scales, which vary in range from several milliseconds to a few microseconds respectively. Techniques include a combination of a relatively slow stepper motor (82) and a very fast piezoelectric drive (80) for tuning the laser wavelength using a tuning mirror (14).
摘要:
A laser waveguide (1), where the laser waveguide (1) can be formed by electrodes (2 and 4) and at least one sidewall (3a-d) in a manner allowing a more compact structure than previously provided. Protrusions in the electrodes (2 and 4) allow easier laser starts, and sectional sidewall(s) allow easier fabrication of sidewall(s), decreasing manufacturing costs.
摘要:
An integrated circuit lithograohy technique (pectral engineering) for bandwidth control of an electric discharge laser. A computer models lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism (104) adjusts the center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks to produce improved pattern resolution in photo resits film. Line narrowing equipment (106) is provided having at least one piezoelectric drive and a fast banwidth detection control system having a time response of less than about 2.0 millisecond. A wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser.