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    Sample micromotion mechanism, method of using the same, and charged particle device
    72.
    发明公开
    Sample micromotion mechanism, method of using the same, and charged particle device 有权
    PROBEKLEINSTBEWEGUNGSMECHANISMUS，VERFAHREN ZUR VERWENDUNG DAVON UND LADUNGSTEILCHENVORRICHTUNG

    公开(公告)号：EP2916341A1

    公开(公告)日：2015-09-09

    申请号：EP15000626.0

    申请日：2015-03-04

    申请人： Hitachi, Ltd.

    发明人： Watanabe, Naruo ,  Takahashi, Yoshio

    IPC分类号： H01J37/20 ,  H01J37/244

    CPC分类号： H01J37/20 ,  G01L1/2262 ,  H01J37/261 ,  H01J2237/15 ,  H01J2237/2002 ,  H01J2237/2007 ,  H01J2237/202 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/24578 ,  H01J2237/24585 ,  H01J2237/2602

    摘要： Provided is a sample micromotion mechanism adapted to minimize an influence of a disturbance and adjust a sample drift rapidly and with high accuracy, and designed so as to be a compact, easy-to-place sample micromotion mechanism of a side-entry type that suppresses the occurrence of the sample drift and generates/displays high-resolution monitoring images and precisely drawn patterns. A charged particle device employing the sample micromotion mechanism is also provided.
    In the charged particle device, the sample micromotion mechanism operates followed by deformation which causes a strain. A strain measuring unit measures such strain. The sample micromotion mechanism imparts micromotion so as to reduce the strain in accordance with the measured strain value, thereby reducing deformation of the sample micromotion mechanism.

    摘要翻译： 提供了一种适用于最小化干扰影响并且快速且高准确地调整样品漂移的样品微动作机构，并被设计成为侧入型的紧凑，易于放置的样品微运动机制，其抑制 样品漂移的发生并产生/显示高分辨率监测图像和精确绘制的图案。 还提供了采用样品微动机构的带电粒子装置。 在带电粒子装置中，样品微运动机构运行，随后变形，引起应变。 应变测量单元测量这种应变。 样品微运动机制赋予微动作，以根据测量的应变值来减小应变，从而减少样品微动机构的变形。

    SAMPLE HOLDER AND METHOD FOR OBSERVING ELECTRON MICROSCOPIC IMAGE
    74.
    发明公开
    SAMPLE HOLDER AND METHOD FOR OBSERVING ELECTRON MICROSCOPIC IMAGE 审中-公开
    维生素BURBONHALTER ZUR BEOBACHTUNG EINES ELEKTRONENKKOSOSPOPENCHEN BILDES

    公开(公告)号：EP2876665A1

    公开(公告)日：2015-05-27

    申请号：EP13823532.0

    申请日：2013-06-12

    申请人： National Institute of Advanced Industrial Science and Technology ,  Lifesem Inc.

    发明人： OGURA, Toshihiko

    IPC分类号： H01J37/20

    CPC分类号： H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

    摘要： In an upper main body (21) of a sample holder (20), a laminate of an insulative thin film (11) and a secondary electron emission protective thin film (12) is provided. An electron beam (41) emitted from an electron gun (40) enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film (11) is a sample adhesion surface, where a sample (30) to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film (12) is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film (12) is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

    摘要翻译： 在样品保持器（20）的上主体（21）中，设置绝缘薄膜（11）和二次电子发射保护薄膜（12）的叠层体。 从电子枪（40）发射的电子束（41）进入二次电子发射保护薄膜侧。 绝缘性薄膜（11）的下表面是通过吸附等保持作为观察对象物的样品（30）的样品粘合面。 二次电子发射保护薄膜（12）由二次电子发射系数低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜（12）也是导电的。 因此，用电子束照射的部位的电荷水平具有低电荷水平。

    Method of using an environmental transmission electron microscope
    77.
    发明公开
    Method of using an environmental transmission electron microscope 审中-公开
    韦尔法罕zur Verwendung eines环境TEM（Transmissionselektronenmikroskop）

    公开(公告)号：EP2838108A1

    公开(公告)日：2015-02-18

    申请号：EP13180022.9

    申请日：2013-08-12

    申请人： FEI COMPANY

    发明人： Tiemeijer, Peter ,  Henstra, Alexander ,  Konings, Stan

    IPC分类号： H01J37/26

    CPC分类号： H01J37/261 ,  H01J37/147 ,  H01J37/22 ,  H01J37/26 ,  H01J37/263 ,  H01J2237/006 ,  H01J2237/2605 ,  H01J2237/262

    摘要： An Environmental Transmission Electron Microscope suffers from gas-induced resolution deterioration. It is found that this deterioration was not a function of the current density on the sample, but of the total current of the beam of electrons. Inventors conclude that the deterioration is due to ionization of gas in the sample chamber of the ETEM, and propose to use an electric field in the sample chamber to remove the ionized gas, thereby diminishing the gas-induced resolution deterioration. The electric field need not be a strong field, and can be caused by, for example, biasing the sample 114 with respect to the sample chamber 138. A bias voltage of 100 V applied via voltage source 144 is sufficient for a marked improvement the gas-induced resolution deterioration. Polarization is not important. Alternatively an electric field perpendicular to the optical axis 104 can be used, for example by placing an electrically biased wire or gauze 154 off-axis in the sample chamber.

    摘要翻译： 环境透射电子显微镜遭受气体分解降解。 发现这种劣化不是样品上的电流密度，而是电子束的总电流的函数。 发明人得出结论，劣化是由于ETEM的样品室中的气体的离子化，并且建议在样品室中使用电场来去除电离气体，从而减少气体诱导的分辨率劣化。 电场不需要是强场，并且可以由例如相对于样品室138偏置样品114引起。经由电压源144施加的100V的偏置电压足以显着改善气体 引起分辨率恶化。 极化并不重要。 或者，可以使用垂直于光轴104的电场，例如通过将偏置电线或纱布154离轴放置在样品室中。

    Charged-particle microscope with Raman spectroscopy capability
    78.
    发明公开
    Charged-particle microscope with Raman spectroscopy capability 有权
    MIKROSKOPIE MIT GELADENEN TEILCHEN KOMBINIERT MIT RAMAN-SPEKTROSKOPIE

    公开(公告)号：EP2824445A1

    公开(公告)日：2015-01-14

    申请号：EP13180398.3

    申请日：2013-08-14

    申请人： FEI COMPANY

    发明人： Mulders, Johannes ,  Kuipers, Laurens

    IPC分类号： G01N21/65 ,  H01J37/22 ,  H01J37/28

    CPC分类号： H01J37/261 ,  G01N21/65 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/31745

    摘要： A method of examining a sample using a combined charged-particle microscope (4) and Raman spectroscope (6) , whereby:
    - Said microscope irradiates a sample (S) with a beam of charged particles so as to image a region of the sample;
    - Said spectroscope employs a light spot of width D to radiatively stimulate and spectroscopically analyze a portion of the sample,

    which method comprises the following steps:
    - Using the charged-particle microscope to identify a feature of interest in said region;
    - Choosing said portion that is analyzed by the Raman spectroscope to comprise this feature,

    wherein:
    - Said feature has at least one lateral dimension smaller than D;
    - Prior to analysis of said feature using the Raman spectroscope, an in situ surface modification technique is used to cause positive discrimination of an expected Raman signal from said feature relative to an expected Raman signal from said portion other than said feature.

    摘要翻译： 使用组合的带电粒子显微镜（4）和拉曼光谱仪（6）检查样品的方法，其中： - 所述显微镜用带电粒子束照射样品（S），以对样品的区域进行成像; - 所述分光镜采用宽度为D的光斑来辐射刺激并光谱分析样品的一部分，该方法包括以下步骤： - 使用带电粒子显微镜鉴定所述区域中的感兴趣特征; - 选择由拉曼光谱仪分析的所述部分以构成该特征，其中： - 所述特征具有至少一个小于D的横向尺寸; - 在使用拉曼光谱仪分析所述特征之前，使用原位表面修饰技术来从所述特征相对于来自除所述特征之外的所述部分的预期拉曼信号引起来自所述特征的预期拉曼信号的正面鉴别。