公开(公告)号：EP2827182A1

公开(公告)日：2015-01-21

申请号：EP14177044.6

申请日：2014-07-15

Applicant: Fujifilm Corporation

Inventor： Naono, Takayuki

IPC: G02B26/08 ,  B81B3/00 ,  H01L41/00 ,  G02B26/10

CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/04 ,  G02B26/105 ,  H01L41/0933 ,  H01L41/1876

Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

Abstract translation: 在镜驱动装置中，第一和第二致动器部分布置在支撑反射镜部分的镜支撑部分的两侧，以夹持反射镜支撑部分。 对应于谐振模式振动中的压电体中的主应力的应力分布进行第一致动器部和第二致动器部中的每一个的上下电极的分割，以及对应于第一和第三上电极部的位置的压电体部 并且对应于第二和第四上部电极部分的位置的压电体部分具有彼此相反方向的应力。 与上部电极类似地进行下部电极的切割，并且可以分别对由于分割布置而不同的压电体部分的上部和下部电极部分施加具有相同相位的驱动电压。

公开(公告)号：EP2808864A3

公开(公告)日：2014-12-24

申请号：EP14172423.7

申请日：2006-02-23

Applicant: Pixtronix, Inc.

Inventor： Hagood, Nesbitt, W. ,  Steyn, Jasper, Lodewyk

IPC: G09G3/34 ,  G02B26/04 ,  G02B26/02 ,  B81B3/00 ,  G02B26/08

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: An illumination device, comprising a reflective optical cavity (2104, 2116) including a plurality of light-transmissive regions (2108) through which light can escape the reflective optical cavity (2104, 2116); a light source (2118) arranged to introduce the light into the reflective optical cavity (2104, 2116); a plurality of light modulators (2102), each having at least first and second states, wherein, in the first state, a light modulator (2102) obstructs a corresponding light-transmissive region (2108) thereby preventing light introduced into the reflective optical cavity (2104, 2116) from illuminating an image pixel that corresponds to the light-transmissive region (2108), and in the second state, the light modulator (2102) allows light escaping the reflective optical cavity (2104, 2116) through the corresponding light-transmissive region (2108) to illuminate the image pixel corresponding to the light-transmissive region (2108).

公开(公告)号：EP2808864A2

公开(公告)日：2014-12-03

申请号：EP14172423.7

申请日：2006-02-23

Applicant: Pixtronix, Inc.

Inventor： Hagood, Nesbitt, W. ,  Steyn, Jasper, Lodewyk

IPC: G09G3/34 ,  G02B26/04 ,  G02B26/02

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: An illumination device, comprising a reflective optical cavity (2104, 2116) including a plurality of light-transmissive regions (2108) through which light can escape the reflective optical cavity (2104, 2116); a light source (2118) arranged to introduce the light into the reflective optical cavity (2104, 2116); a plurality of light modulators (2102), each having at least first and second states, wherein, in the first state, a light modulator (2102) obstructs a corresponding light-transmissive region (2108) thereby preventing light introduced into the reflective optical cavity (2104, 2116) from illuminating an image pixel that corresponds to the light-transmissive region (2108), and in the second state, the light modulator (2102) allows light escaping the reflective optical cavity (2104, 2116) through the corresponding light-transmissive region (2108) to illuminate the image pixel corresponding to the light-transmissive region (2108).

Abstract translation: 一种照明装置，包括：反射光学腔（2104,2166），其包括多个透光区（2108），光可以通过所述多个透光区（2108）逸出所述反射光学腔（2104,2116）; 光源（2118），其被布置成将光引入到所述反射光学腔（2104,2116）中; 多个光调制器（2102），每个光调制器至少具有第一状态和第二状态，其中，在第一状态下，光调制器（2102）阻挡对应的光透射区域（2108），从而防止引入到反射光学腔 （2104,2116）照射与透光区域（2108）相对应的图像像素，并且在第二状态下，光调制器（2102）允许通过相应的光透射反射光学腔（2104,2116）的光 - 透射区域（2108）以照射对应于透光区域（2108）的图像像素。

公开(公告)号：EP2538265A1

公开(公告)日：2012-12-26

申请号：EP12172598.0

申请日：2012-06-19

Applicant: Hitachi Displays, Ltd. ,  Pixtronix, Inc.

Inventor： Kaitoh, Takuo ,  Kuriyagawa, Takeshi ,  Sakata, Ryou ,  Karikome, Osamu ,  Brosnihan, Timothy J.

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B7/007 ,  B81B2201/045 ,  B81C2201/0132 ,  B81C2201/016

Abstract: The MEMS shutter (210) includes a shutter (210) having an aperture part (213, 214), a first spring connected to the shutter (210), a first anchor (232, 234, 238, 240) connected to the first spring (216, 218, 220, 222), a second spring (224, 226, 228, 230) and a second anchor (236, 242) connected to the second spring (224, 226, 228, 230), an insulation film (210c) on a surface of the shutter (210), the first spring (216, 218, 220, 222), the second spring (224, 226, 228, 230), the first anchor (232, 234, 238, 240) and the second anchor (236, 242), the surfaces being in a perpendicular direction to a surface of a substrate (102), and the insulation film (210c) is not present on a surface of the plurality of terminals (104), and a surface of the shutter (210), the first spring (216, 218, 220, 222), the second spring (224, 226, 228, 230), the first anchor (232, 234, 238, 240) and the second anchor (236, 242), the surfaces being in a parallel direction to a surface of the substrate (102) and on the opposite side of the side facing the substrate (102).

Abstract translation: MEMS快门（210）包括具有开口部分（213,214）的快门（210），连接到活门（210）的第一弹簧，连接到第一弹簧的第一锚定件（232,234,238,240） （216,218,220,222），第二弹簧（224,226,228,230）和连接到第二弹簧（224,226,228,230）的第二锚固件（236,242），绝缘膜（ 所述第一弹簧（216,218,220,222），所述第二弹簧（224,226,228,230），所述第一锚定件（232,234,238,240） 和所述第二锚定部（236,242），所述表面与基板（102）的表面垂直，所述绝缘膜（210c）不存在于所述多个端子（104）的表面，并且 所述挡板（210）的表面，所述第一弹簧（216,218,220,222），所述第二弹簧（224,226,228,230），所述第一锚定件（232,234,238,240）和所述第二弹簧 锚固件（236,242），所述表面处于与所述基板（102）的表面平行的方向上 在面向衬底（102）的一侧的相对侧。

公开(公告)号：EP2530509A1

公开(公告)日：2012-12-05

申请号：EP12170724.4

申请日：2012-06-04

Applicant: Hitachi Displays, Ltd.

Inventor： Nitta, Hidekazu ,  Ohkura, Makoto ,  Kaitoh, Takuo ,  Matsumoto, Katsumi

IPC: G02B26/08 ,  B81B3/00 ,  G09G3/34 ,  B81C1/00

CPC classification number: G02B26/085 ,  B81B3/0072 ,  B81B2201/045 ,  B81C2201/0167

Abstract: In a movable shutter-system display device, a movable shutter includes an amorphous silicon film material which has a low residual stress and thus is stable. A display device includes a display panel comprising a first substrate and a second substrate. The display panel includes a plurality of pixels; each of the plurality of pixels includes a movable shutter including amorphous silicon and a driving circuit for driving the movable shutter; and the amorphous silicon included in the movable shutter is formed of at least two amorphous silicon films, and where any two amorphous silicon films adjacent to each other among the at least two amorphous silicon films are a first amorphous silicon film and a second amorphous silicon film stacked on the first amorphous silicon film, the first amorphous silicon film and the second amorphous silicon film have different characteristic values.

Abstract translation: 在可移动的快门系统显示装置中，可移动快门包括具有低残余应力并因此是稳定的非晶硅膜材料。 显示装置包括显示面板，其包括第一基板和第二基板。 显示面板包括多个像素; 所述多个像素中的每一个包括可移动快门，其包括非晶硅和用于驱动所述活动快门的驱动电路; 并且包括在可移动快门中的非晶硅由至少两个非晶硅膜形成，并且其中在至少两个非晶硅膜中彼此相邻的两个非晶硅膜是第一非晶硅膜和第二非晶硅膜 堆叠在第一非晶硅膜上，第一非晶硅膜和第二非晶硅膜具有不同的特性值。

公开(公告)号：EP2287110A3

公开(公告)日：2012-06-13

申请号：EP10176478.5

申请日：2006-02-23

Applicant: Pixtronix Inc.

Inventor： Hagood, Nesbitt W. ,  Steyn, Jasper Lodewyk

IPC: G02B26/02 ,  G09G3/22 ,  B81B7/04 ,  G09G3/34 ,  G02B26/08 ,  B81B3/00

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: A display apparatus comprises a modulator for selectively interacting with light in an optical path to form an image on the display apparatus. A controllable first electrostatic actuator provides a first mechanical support for the modulator, the first mechanical support providing a supportive connection from a first location on the modulator to a surface over which the modulator is supported. A second mechanical support provides a supportive connection from a second location on the modulator to the surface. The first electrostatic actuator drives the modulator in a plane substantially parallel to the surface.

公开(公告)号：EP2461200A1

公开(公告)日：2012-06-06

申请号：EP12001382.6

申请日：2005-12-28

Applicant: Nippon Telegraph And Telephone Corporation

Inventor： Shimokawa, Fusao ,  Uchiyama, Shingo ,  Yamaguchi, Johji ,  Sato, Makoto ,  Sasakura, Kunihiko ,  Morita, Hirofumi ,  Inagaki, Shuichiro ,  Machida, Katsuyuki ,  Ishii, Hiromi

IPC: G02B26/08 ,  B81B3/00

CPC classification number: B81B3/004 ,  B81B3/0086 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/3584 ,  G02B26/0841 ,  Y10T29/49885 ,  Y10T156/10

Abstract: Mirror device comprising a mirror which is supported to be pivotable with respect to a mirror substrate, a driving electrode which is formed on an electrode substrate facing said mirror substrate, and a control circuit which applies a voltage to said driving electrode, wherein said driving electrode comprises a plurality of driving electrodes formed on said electrode substrate, and said control circuit controls pivotal movement of said mirror by applying a single bias voltage to said plurality of driving electrodes, and simultaneously, individually applying, to each of said plurality of driving electrodes, a driving voltage necessary for making said mirror pivot.

Abstract translation: 一种反射镜装置，其特征在于，具有：反射镜，其被支承为能够相对于反射镜基板转动;驱动电极，其形成在与所述反射镜基板相对的电极基板上;以及控制电路，其对所述驱动电极施加电压， 包括形成在所述电极基板上的多个驱动电极，并且所述控制电路通过向所述多个驱动电极施加单个偏压并且同时单独施加到所述多个驱动电极中的每一个来控制所述反射镜的枢转运动， 使所述镜子枢转所需的驱动电压。

公开(公告)号：EP2336081A3

公开(公告)日：2012-04-25

申请号：EP10177217.6

申请日：2006-02-23

Applicant: Pixtronix Inc.

Inventor： Hagood, NESBITT W. ,  Steyn, JASPER LODEWYK

IPC: B81B3/00 ,  G02B26/04 ,  G09G3/22 ,  B81B7/04 ,  G02B26/08

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: A microelectromechanical device comprises a first component defining a plane and a beam including at least one amorphous silicon layer suspended over the first component. A dimension of the beam normal to the defined plane is at least 1.4 times at least one dimension of the beam within the defined plane.

Abstract translation: 微机电装置包括限定平面的第一部件和包括悬挂在第一部件上的至少一个非晶硅层的梁。 垂直于限定平面的光束的尺寸至少是限定平面内光束的至少一个尺寸的1.4倍。

公开(公告)号：EP2336081A2

公开(公告)日：2011-06-22

申请号：EP10177217.6

申请日：2006-02-23

Applicant: Pixtronix Inc.

Inventor： Hagood, NESBITT W. ,  Steyn, JASPER LODEWYK

IPC: B81B3/00 ,  G02B26/04 ,  G09G3/22 ,  B81B7/04 ,  G02B26/08

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262

Abstract: A microelectromechanical device comprises a first component defining a plane and a beam including at least one amorphous silicon layer suspended over the first component. A dimension of the beam normal to the defined plane is at least 1.4 times at least one dimension of the beam within the defined plane.

Abstract translation: 微机电装置包括限定平面的第一部件和包括悬挂在第一部件上的至少一个非晶硅层的梁。 垂直于限定平面的光束的尺寸至少是在限定平面内的光束的至少一个维度的1.4倍。

公开(公告)号：EP1509946A4

公开(公告)日：2010-08-18

申请号：EP03756181

申请日：2003-05-14

Applicant: SILICON LIGHT MACHINES CORP

Inventor： HUNTER JAMES A

IPC: B81C1/00 ,  G02B5/18 ,  G02B26/00 ,  G02B26/08 ,  G02F1/00 ,  G02F1/03 ,  G02F1/07 ,  G02F1/13 ,  G02F1/1368 ,  H01L21/00 ,  H01L21/28 ,  H01L21/302 ,  H01L21/82 ,  H01L21/8234 ,  H01L27/06 ,  H01L29/423 ,  H01L29/49 ,  H01L31/153

CPC classification number: G02B26/0808 ,  B81B2201/045 ,  B81B2207/015 ,  B81B2207/07 ,  B81C1/00246 ,  B81C2201/016 ,  B81C2203/0735 ,  B81C2203/0778 ,  H01L27/0611