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公开(公告)号：EP1613969B1
公开(公告)日：2009-07-29
申请号：EP03720476.5
申请日：2003-04-15
CPC分类号： G01C19/5642 , G02B26/0833 , G02B26/0841 , H02N1/006 , H03H9/02409 , H03H9/2457 , H03H2009/02511
摘要： A micromechanical component comprises an oscillating system, which has an oscillating body (12) and an elastic suspension (11) by means of which the oscillating body (12) is suspended in a manner that enables it to oscillate. The micromechanical component also comprises a device for setting the resonance frequency of the oscillating system by applying a voltage difference (12) between at least one part of the oscillating body and at least one stationary electrode (20a, 20b).
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公开(公告)号：EP1410047B1
公开(公告)日：2007-02-28
申请号：EP01971787.5
申请日：2001-07-26
发明人： SCHENK, Harald
CPC分类号： G02B26/101 , B81B3/0021 , B81B3/004 , B81B2201/0235 , B81B2201/0242 , B81B2201/042 , B81B2203/0109 , B81B2203/04 , B81B2203/058 , G01P15/0802 , G01P15/0888 , G01P15/125 , G01P15/18 , G02B6/3512 , G02B6/357 , G02B26/0841 , G02B2006/12104
摘要： The invention relates to a micromechanical component comprising a substrate (12) and a structural element (2) that is placed on the substrate (12) in a manner that permits it to be displaced. The structural element (2) has a first electrode (24) and a second electrode (26) that is electrically insulated from the first electrode (24). The substrate (12) has a third electrode (28) that is at least partially situated opposite the first electrode (24) and the second electrode (26).
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公开(公告)号：EP3568595A1
公开(公告)日：2019-11-20
申请号：EP18701116.8
申请日：2018-01-09
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公开(公告)号：EP1474666B1
公开(公告)日：2007-08-08
申请号：EP02701275.6
申请日：2002-02-13
发明人： SCHENK, Harald , GRUEGER, Heinrich
IPC分类号： G01J3/06
CPC分类号： G01J3/06
摘要： The invention relates to a spectrometer, which comprises a suspension mechanism (3) for its dispersive element (2), said suspension element pretensioning the spectrometer in an idle position, in addition to a deflecting device, which retains the dispersive element (2) in a deflected position, in such a way that a balance of forces occurs between the retaining force and the pretensioning force. This permits the dispersive element (2) to constantly return to the position defined by the retaining force after impacts or vibrations. An inventive spectrometer therefore comprises a dispersive element (2) and a suspension mechanism (3) for bearing the dispersive element (2) and for pretensioning the latter in an idle position using a pretensioning force, if the dispersive element (2) is in a deflected position. A control device (7) controls a retaining device (6a, 6b), to vary the deflected position, so that different spectral components can be recorded by a detector (9) of the spectrometer.
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5.发明公开
公开(公告)号：EP3612493A1
公开(公告)日：2020-02-26
申请号：EP18718833.9
申请日：2018-04-20
发明人： SCHENK, Harald , CONRAD, Holger
IPC分类号： B81B3/00
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6.发明公开MEMS-WANDLER ZUM INTERAGIEREN MIT EINEM VOLUMENSTROM EINES FLUIDS UND VERFAHREN ZUM HERSTELLEN DESSELBEN 审中-公开用于与流体的体积流量相互作用的MEMS转换器及其制造方法
公开(公告)号：EP3308555A2
公开(公告)日：2018-04-18
申请号：EP16729884.3
申请日：2016-06-14
发明人： SCHENK, Harald , CONRAD, Holger , GAUDET, Matthieu , SCHIMMANZ, Klaus , LANGA, Sergiu , KAISER, Bert
CPC分类号： B81B3/0021 , B81B2201/0257 , B81B2201/036 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/0136 , B81B2203/019 , B81B2203/051 , B81C1/00142 , B81C1/0015 , B81C1/00158 , H04R1/023 , H04R1/08 , H04R9/02 , H04R15/00 , H04R17/00 , H04R19/005 , H04R23/002 , H04R2201/003 , H04R2499/11
摘要： The invention relates to a MEMS transducer for interacting with a volume flow of a fluid, comprising a substrate having a cavity, and an electromechanical transducer which is connected to the substrate in the cavity and has an element which can be deformed along a lateral movement direction. A deformation of the deformable element along the lateral movement direction and the volume flow of the fluid are causally related.
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公开(公告)号：EP2513715A1
公开(公告)日：2012-10-24
申请号：EP10703650.1
申请日：2010-02-11
CPC分类号： G02F1/035 , G02F1/0316 , G02F1/313 , G02F2201/122
摘要： Provided is a concept for variably guiding optical waves by using a layer-stack (110; 210) comprising an electro-optic core layer (112) of electro-optic material for guiding light and an electrode arrangement with at least a first electrode layer (114; 114-1) in proximity to the electro-optic core layer (112), wherein the electrode arrangement is configured to activate an electro-optic effect in a region (116) of the electro-optic core layer (112) by an electric field generated by means of the electrode arrangement, such that a propagation of the light is manipulated in the region of the activated electro-optic effect.
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8.发明公开
公开(公告)号：EP1652377A1
公开(公告)日：2006-05-03
申请号：EP03817916.4
申请日：2003-08-06
发明人： SCHENK, Harald
CPC分类号： H04N5/7416 , Y10S359/90
摘要： The invention relates to an apparatus and a method for projecting images and/or processing materials. Said apparatus comprises a deflection device (3) for variably deflecting a light beam (2) emanating from a light source (1) onto a projection area or processing area (7), a device (4) for modulating an intensity of the light beam (2), and a control unit (5) which is connected to the modulating device (4) and by means of which the modulating device (4) can be triggered so as to modulate the intensity of the light beam (2) according to input data. A shading element (6) is disposed between the deflection device (3) and the projection area or processing area (7). Said shading element (6) hides the light beam (2) during one or several time segments within several predefined intervals into which the total projection time and/or processing time can be subdivided. The control unit (5) controls the modulating device (4) during said time segments in such a way that an at least approximately constant mean intensity of the light beam (2) is obtained within said intervals. The inventive apparatus and the associated method make it possible to obtain a temporally constant temperature of the deflection element of the deflection device during processing and/or projection.
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公开(公告)号：EP1608988A1
公开(公告)日：2005-12-28
申请号：EP03816502.3
申请日：2003-04-01
发明人： DRABE, Christian , SCHENK, Harald
IPC分类号： G01P15/10
CPC分类号： G01P15/097 , G01P15/00
摘要： The invention relates to an acceleration sensor comprising a mass (101) that can be deviated in a first direction and in a second direction opposing the first direction, a driver unit (103) that is used to displace the mass (101) in an oscillatory motion, a detection unit (105) for detecting times at which the mass passes a pre-determined position in the event of an acceleration, and an evaluation unit (107). The time intervals during which the mass is brought to one side or the other of the reference position change according to an acceleration which is generated parallel to the direction of oscillation.
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10.发明公开
公开(公告)号：EP3878804A1
公开(公告)日：2021-09-15
申请号：EP21168756.1
申请日：2016-06-14
发明人： SCHENK, Harald , CONRAD, Holger , GAUDET, Matthieu , SCHIMMANZ, Klaus , LANGA, Sergiu , KAISER, Bert
摘要： Ein MEMS-Wandler zum Interagieren mit einem Volumenstrom eines Fluids umfasst ein Substrat, das eine Kavität aufweist; und einen elektromechanischen Wandler, der mit dem Substrat in der Kavität verbunden ist und ein sich entlang einer lateralen Bewegungsrichtung verformbares Element aufweist, wobei eine Verformung des verformbaren Elements in-plane entlang der lateralen Bewegungsrichtung und der Volumenstrom des Fluids kausal zusammenhängen. Das Substrat weist ein Substratfederelement benachbart zu einem Bereich aufweist an dem der elektromechanische Wandler mit dem Substrat verbunden ist.
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