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公开(公告)号：EP3047520B1
公开(公告)日：2019-11-06
申请号：EP14843577.9
申请日：2014-09-15
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公开(公告)号：EP2959503A1
公开(公告)日：2015-12-30
申请号：EP14753960.5
申请日：2014-02-21
发明人： BRADY, Gregory , SHCHEGROV, Andrei V. , ROTTER, Lawrence D. , SHAUGHNESSY, Derrick , SHCEMELININ, Anatoly , BEZEL, Ilya , ARAIN, Muzammil , VASILIEV, Anatoly , ALLEN, James , SHULEPOV, Oleg , HILL, Andrew , BACHAR, Ohad , MARKOWITZ, Moshe , ISH-SHALOM, Yaron , SELA, Ilan , MANASSEN, Amnon , SVIZHER, Alexander , KHOKHLOV, Maxim , ABRAMOV, Avi , TSIBULEVSKY, Oleg , KANDEL, Daniel , GHINOVKER, Mark
IPC分类号： H01L21/66
CPC分类号： G01J3/10 , F21V13/00 , F21V13/08 , F21V13/12 , G01J3/0218 , G01J3/12 , G02B6/29332 , G02B6/29362 , G02B6/29388 , G02B6/29395 , G02B6/3508 , G02B6/353 , H01J65/04
摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
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公开(公告)号：EP3624174A2
公开(公告)日：2020-03-18
申请号：EP19207085.2
申请日：2014-09-15
发明人： WANG, David Y. , FLOCK, Klaus , ROTTER, Lawrence D. , KRISHNAN, Shankar , DE VEER, Johannes D. , FILIP, Catalin , BRADY, Gregory , ARAIN, Muzammil , SHCHEGROV, Andrei
摘要： An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
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公开(公告)号：EP2583300B1
公开(公告)日：2018-05-23
申请号：EP11796320.7
申请日：2011-06-14
发明人： HILL, Andrew V. , MANASSEN, Amnon , KANDEL, Daniel , LEVINSKI, Vladimir , SELIGSON, Joel , SVIZHER, Alexander , WANG, David Y. , ROTTER, Lawrence D. , DE VEER, Johannes D.
CPC分类号： G02B27/141 , G01N21/474 , G01N21/4788 , G01N2021/4792 , G02B27/145 , G03F7/70633
摘要： Systems and methods for discrete polarization scatterometry are provided.
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公开(公告)号：EP2583300A2
公开(公告)日：2013-04-24
申请号：EP11796320.7
申请日：2011-06-14
发明人： HILL, Andrew V. , MANASSEN, Amnon , KANDEL, Daniel , LEVINSKI, Vladimir , SELIGSON, Joel , SVIZHER, Alexander , WANG, David Y. , ROTTER, Lawrence D. , DE VEER, Johannes D.
IPC分类号： H01L21/027 , H01L21/66
CPC分类号： G02B27/141 , G01N21/474 , G01N21/4788 , G01N2021/4792 , G02B27/145 , G03F7/70633
摘要： Systems and methods for discrete polarization scatterometry are provided. One embodiment relates to an optical subsystem of a scatterometer. The optical subsystem includes one or more light sources configured to produce light having different polarizations. The optical subsystem also includes a polarizing beam splitter configured to separate the light into two different light beams having orthogonal and mutually exclusive polarizations. The optical subsystem further includes one or more second optical elements configured to control which one of the two different light beams illuminates the wafer during measurements. The optical subsystem also includes a detection subsystem configured to separately detect two different scattered light beams resulting from illumination of the wafer. The two different scattered light beams have orthogonal and mutually exclusive polarizations. All optical surfaces of the optical subsystem used for the measurements are stationary during the measurements.
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公开(公告)号：EP2959503B1
公开(公告)日：2018-05-30
申请号：EP14753960.5
申请日：2014-02-21
发明人： BRADY, Gregory , SHCHEGROV, Andrei V. , ROTTER, Lawrence D. , SHAUGHNESSY, Derrick , SHCEMELININ, Anatoly , BEZEL, Ilya , ARAIN, Muzammil , VASILIEV, Anatoly , ALLEN, James , SHULEPOV, Oleg , HILL, Andrew , BACHAR, Ohad , MARKOWITZ, Moshe , ISH-SHALOM, Yaron , SELA, Ilan , MANASSEN, Amnon , SVIZHER, Alexander , KHOKHLOV, Maxim , ABRAMOV, Avi , TSIBULEVSKY, Oleg , KANDEL, Daniel , GHINOVKER, Mark
IPC分类号： G01J3/10 , G01J3/12 , H01J65/04 , G01J3/02 , G02B6/35 , F21V13/00 , F21V13/08 , F21V13/12 , G02B6/293
CPC分类号： G01J3/10 , F21V13/00 , F21V13/08 , F21V13/12 , G01J3/0218 , G01J3/12 , G02B6/29332 , G02B6/29362 , G02B6/29388 , G02B6/29395 , G02B6/3508 , G02B6/353 , H01J65/04
摘要： The disclosure is directed to systems for providing illumination to a measurement head for optical metrology. In some embodiments of the disclosure, illumination beams from a plurality of illumination sources are combined to deliver illumination at one or more selected wavelengths to the measurement head. In some embodiments of the disclosure, intensity and/or spatial coherence of illumination delivered to the measurement head is controlled. In some embodiments of the disclosure, illumination at one or more selected wavelengths is delivered from a broadband illumination source configured for providing illumination at a continuous range of wavelengths.
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7.发明公开SYSTEM AND METHOD FOR PERFORMING PHOTOTHERMAL MEASUREMENTS AND RELAXATION COMPENSATION 审中-公开系统和方法进行光热测量和ENTSPANNUNGSKOMPENSIERUNG
公开(公告)号：EP2449366A2
公开(公告)日：2012-05-09
申请号：EP10800259.3
申请日：2010-06-25
CPC分类号： G01N21/1717 , G01N2021/1731 , G01N2021/1761
摘要： A device and methods for performing a photothermal measurement and relaxation compensation of a sample are disclosed. The device may include a probe beam source, a pump beam source, a sample, and a detector array. A method may include adjusting an intensity modulated pump beam power, adjusting a probe beam power to increase a response measurement location temperature and increase a modulated optical reflectance signal, directing the intensity modulated pump beam and the probe beam along a measurement path to a response measurement location on a sample for periodically exciting a region on the sample, detecting a reflected portion of the probe beam, and calculating an implantation dose.
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公开(公告)号：EP3971950A1
公开(公告)日：2022-03-23
申请号：EP21199265.6
申请日：2014-09-15
发明人： WANG, David Y. , FLOCK, Klaus , ROTTER, Lawrence D. , KRISHNAN, Shankar , DE VEER, Johannes D. , FILIP, Catalin , BRADY, Gregory , ARAIN, Muzammil , SHCHEGROV, Andrei
摘要： An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
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公开(公告)号：EP3624174A3
公开(公告)日：2020-06-03
申请号：EP19207085.2
申请日：2014-09-15
发明人： WANG, David Y. , FLOCK, Klaus , ROTTER, Lawrence D. , KRISHNAN, Shankar , DE VEER, Johannes D. , FILIP, Catalin , BRADY, Gregory , ARAIN, Muzammil , SHCHEGROV, Andrei
摘要： An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
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公开(公告)号：EP3047520A1
公开(公告)日：2016-07-27
申请号：EP14843577.9
申请日：2014-09-15
发明人： WANG, David Y. , FLOCK, Klaus , ROTTER, Lawrence D. , KRISHNAN, Shankar , DE VEER, Johannes D. , FILIP, Catalin , BRADY, Gregory , ARAIN, Muzammil , SHCHEGROV, Andrei
IPC分类号： H01L21/66
摘要： An apparatus includes (i) a bright light source for providing an illumination beam at multiple wavelengths selectable with a range from a deep ultraviolet wavelength to an infrared wavelength, (ii) illumination optics for directing the illumination beam towards a sample at selectable sets of angles of incidence (AOI's) or azimuth angles (AZ's) and polarization states to provide spectroscopic ellipsometry, wherein the illumination optics include an apodizer for controlling a spot size of the illumination beam on the sample at each of the selectable AOI/AZ sets, (iii) collection optics for directing an output beam from the sample in response to the illumination beam at each of the selectable AOI/AZ sets and polarization states towards a detector that generates an output signal or image based on the output beam, and (v) a controller for characterizing a feature of the sample based on the output signal or image.
摘要翻译： 一种装置包括（i）用于提供在从深紫外线波长到红外波长的范围内可选择的多个波长的照明光束的明亮光源，（ii）照明光学器件，用于将照明光束以可选择的角度集合 （AOI）或方位角（AZ）和极化状态以提供光谱椭偏仪，其中照明光学器件包括用于控制每个可选AOI / AZ组上样品上的照明光束的光斑尺寸的变迹器，（iii ）收集光学器件，用于响应于在每个可选择的AOI / AZ集合处的照明光束和来自基于输出光束产生输出信号或图像的检测器的偏振态引导来自样品的输出光束，以及（v） 控制器，用于基于输出信号或图像来表征样本的特征。
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