ANISOTROPIC CONDUCTIVE SHEET
    1.
    发明公开
    ANISOTROPIC CONDUCTIVE SHEET 审中-公开
    各向异性导电膜

    公开(公告)号:EP1732168A4

    公开(公告)日:2008-04-02

    申请号:EP05728754

    申请日:2005-03-30

    IPC分类号: H01R11/01 H01B5/16 H01R13/24

    摘要: An anisotropic conductive sheet which does not damage a wafer nor the electrode terminals of a conduction measuring instrument due to loading when the wafer is to be inspected, and ensures a good conductivity. The anisotropic conductive sheet (1) comprises porous resin layers formed by foaming and electron-beam-crosslinking fluororubber or tetrafluoroethylene-propylene copolymer rubber having an open cell structure and provided on the inner walls of a plurality of through holes (3) pierced in the thickness direction of an electrically-insulating porous sheet (2) made of foamed fluororubber or the like, characterized in that the skeleton surface of the porous resin is coated with metal. In addition, it is especially preferable for porous resin.