METHOD FOR MANUFACTURING METAL MICROSTRUCTURE
    4.
    发明公开
    METHOD FOR MANUFACTURING METAL MICROSTRUCTURE 审中-公开
    VERFAHREN ZUR HERSTELLUNG VON METALLMIKROSTURKTUREN

    公开(公告)号:EP1440931A4

    公开(公告)日:2008-03-26

    申请号:EP02777967

    申请日:2002-10-25

    Abstract: A method for manufacturing a metal microstructure 1 comprising a resin mold 13. For setting a mild manufacturing condition with little damage of the resin mold 13, and for mass-producing a high- precision metal microstructure 1 by uniform casting, this method is characterized by having the step of forming a resin mold laminate by fixing on a conductive substrate 11 a resin mold 13 having a vacancy penetrating in the thickness direction via a photosensitive polymer 12 the chemical composition of which is varied by an electron ray, ultraviolet ray, or a visible ray, the step of exposing the resin type laminate 2 to the electron ray, ultraviolet ray, or visible ray, the step of removing a photosensitized polymer 12c present in the vacancy of the resin mold 13, and the step of filling the vacant section of the resin type laminate 2 with a metal 14 by casting.

    Abstract translation: 用于制造包括树脂模具13的金属微结构1的方法。为了设定温和的制造条件而对树脂模具13损坏很小,并且为了通过均匀铸造来批量生产高精度金属微结构1,该方法的特征在于: 具有通过在导电性基体11上固定经由感光性聚合物12而具有在厚度方向上贯通的空隙的树脂模具13来形成树脂模制层叠体的工序,该感光性聚合物12的化学组成根据电子射线,紫外线或 可见光,将树脂型层压体2暴露于电子射线,紫外线或可见光线的步骤,去除存在于树脂模具13的空隙中的光敏聚合物12c的步骤,以及填充空白部分 通过铸造将树脂型层叠体2与金属14接合。

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