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公开(公告)号:EP4423815A1
公开(公告)日:2024-09-04
申请号:EP22813379.9
申请日:2022-10-26
发明人: AGARWAL, Rahul , SWAMINATHAN, Raja
IPC分类号: H01L25/16 , H01L25/065
CPC分类号: H01L25/16 , H01L25/0652 , H01L2924/1904120130101 , H01L2924/1910420130101 , H01L2924/1904320130101 , H01L2924/1904220130101 , H01L2224/040120130101 , H01L2224/055720130101 , H01L2224/1626520130101 , H01L2224/1622720130101 , H01L2224/1302520130101 , H01L2224/1718120130101 , H01L2224/8100520130101 , H01L2224/8181520130101 , H01L2224/0826520130101 , H01L2224/8000620130101 , H01L2224/13120130101 , H01L2225/0651320130101 , H01L2225/0651720130101 , H01L2225/0654120130101 , H01L2224/0814620130101 , H01L2224/1614620130101 , H01L2924/1816120130101 , H01L2224/7325920130101 , H01L2224/9222420130101 , H01L2924/1910520130101 , H01L2924/1531120130101 , H01L24/20 , H01L24/73 , H01L24/92 , H01L24/08 , H01L24/80 , H01L2224/0822520130101 , H01L24/81 , H01L24/16 , H01L24/13 , H01L25/0657 , H01L23/481 , H01L23/562 , H01L23/3128 , H01L23/16 , H01L21/6835 , H01L2221/6832720130101 , H01L2221/6834520130101
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公开(公告)号:EP4401121A1
公开(公告)日:2024-07-17
申请号:EP24150760.7
申请日:2024-01-08
发明人: YOU, Wookyung , KIM, Yeonggil , KANG, Sangkoo , KANG, Minjae , RYU, Koungmin , SEO, Hoonseok , LEE, Woojin
IPC分类号: H01L21/768 , H01L23/48 , H01L23/485 , H01L23/528 , H01L25/065
CPC分类号: H01L21/76898 , H01L23/481 , H01L2224/8089620130101 , H01L2224/8089520130101 , H01L25/0657 , H01L24/08 , H01L2224/0814620130101 , H01L21/76895 , H01L23/485 , H01L2224/0556720130101 , H01L2224/055720130101 , H01L2224/0557320130101 , H01L2224/0618120130101 , H01L23/5286 , H01L25/50
摘要: A semiconductor device includes: a device structure including a first semiconductor substrate and having an active pattern extending in first direction, a conductive through-via electrically connected to a front wiring layer and penetrating through the first semiconductor substrate, wherein the first semiconductor substrate has a non-planarized lower surface in which a peripheral region around the conductive through-via curves downward, a first bonding structure having a planarized insulating layer disposed on the second surface of the first semiconductor substrate and having a planarized upper surface.
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公开(公告)号:EP3391409B1
公开(公告)日:2024-05-22
申请号:EP16876775.4
申请日:2016-12-16
IPC分类号: H01L23/485 , H01L21/48 , H01L21/60 , H01L25/065
CPC分类号: H01L25/0657 , H01L2225/0655520130101 , H01L25/50 , H01L2225/0651320130101 , H01L2225/0659320130101 , H01L2224/0823820130101 , H01L2224/0823720130101 , H01L24/05 , H01L24/08 , H01L24/80 , H01L2224/0554120130101 , H01L2224/0555120130101 , H01L2224/0555220130101 , H01L2224/0557120130101 , H01L2224/0557320130101 , H01L2224/0557820130101 , H01L2224/05620130101 , H01L2224/0563920130101 , H01L2224/0564420130101 , H01L2224/0564720130101 , H01L2224/0565520130101 , H01L2224/0568420130101 , H01L2224/080720130101 , H01L2224/0814620130101 , H01L2224/8089520130101 , H01L2224/8089620130101 , H01L2224/0811120130101 , H01L2224/0812120130101 , H01L2224/0814820130101 , H01L2224/8003520130101 , H01L2224/8093520130101 , H01L2224/0420130101 , H01L2224/0566420130101 , H01L2224/8001320130101 , H01L2224/0512420130101 , H01L2224/0507320130101 , H01L2224/8001120130101 , H01L2224/0560920130101 , H01L2224/0561120130101 , H01L2224/8081520130101 , H01L2224/0568720130101 , H01L2224/0568820130101 , H01L2224/0341620130101 , H01L2224/03520130101 , H01L24/03 , H01L2224/0360220130101 , H01L2224/0361620130101 , H01L2224/0346420130101 , H01L2224/0361220130101 , H01L2224/0515520130101 , H01L2924/38120130101 , H01L2924/351220130101 , H01L2224/0566920130101 , H01L2224/0514420130101 , H01L2224/803420130101 , H01L2224/8098620130101 , H01L2224/0556920130101 , H01L2224/0814520130101
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