-
公开(公告)号：EP3619748B1
公开(公告)日：2024-04-17
申请号：EP18794585.2
申请日：2018-05-07
IPC分类号： H01L21/683 , H01L23/00 , H01L33/00 , H01S5/02 , H01L21/02 , H01S5/343 , H01L33/46 , H01L33/32 , H01L33/20
CPC分类号： H01L33/0075 , H01L33/20 , H01S5/0217 , H01S5/34333 , H01S2304/1220130101 , H01L33/0093 , H01L21/02389 , H01L21/0254 , H01L21/02647 , H01L21/02458 , H01L2224/3224520130101 , H01L2224/8319220130101 , H01L2224/8389520130101 , H01L2224/3222520130101 , H01L2224/8344420130101 , H01L2224/8320320130101 , H01L2224/0561120130101 , H01L2224/0564420130101 , H01L2924/1574720130101 , H01L2924/103320130101 , H01L2224/0402620130101 , H01L24/05 , H01L24/29 , H01L24/32 , H01L2224/8380520130101 , H01L24/83 , H01L2224/8301320130101 , H01L2224/8302220130101 , H01L2224/2911120130101 , H01L2224/2914420130101 , H01L2224/8344720130101 , H01L2224/8044420130101 , H01L2224/8001320130101 , H01L2224/8020320130101 , H01L2224/8089520130101 , H01L24/80 , H01L2224/0824520130101 , H01L2224/0822520130101 , H01L24/08 , H01L2224/0420130101 , H01L2224/034520130101 , H01L24/03 , H01L2224/8000620130101 , H01L2224/8300520130101 , H01L2224/0823820130101 , H01L2224/0825820130101 , H01L2224/0555820130101 , H01L21/6835 , H01L24/06 , H01L2224/0618120130101 , H01L2924/1204220130101 , H01L2224/920220130101 , H01L2224/9420130101 , H01L24/94 , H01L24/92 , H01L2224/9214220130101 , H01L2224/921220130101 , H01L2221/6838120130101 , H01L2221/6831820130101 , H01L2221/683520130101 , H01L2221/6836320130101 , H01L2224/80420130101 , H01L2224/804920130101 , H01L2224/051820130101 , H01L2224/0514420130101 , H01L2224/0566920130101 , H01L2224/0518420130101 , H01L2224/0513920130101 , H01L2224/0566420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0516420130101 , H01L2224/0516620130101 , H01L2224/0516920130101 , H01L2224/056820130101 , H01L2224/0568420130101 , H01L2224/0566620130101 , H01L2224/0515520130101 , H01S5/0203 , H01L2224/29120130101
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公开(公告)号：EP4393011A1
公开(公告)日：2024-07-03
申请号：EP22768338.0
申请日：2022-08-19
IPC分类号： H01L23/498 , H01L23/538 , H01L23/00
CPC分类号： H01L23/4985 , H01L23/5387 , H01L23/49827 , H01L23/5384 , H01L24/29 , H01L2224/2901920130101 , H01L2224/291920130101 , H01L2224/3222520130101 , H01L2224/040120130101 , H01L24/73 , H01L24/13 , H01L2224/2919120130101 , H01L2224/1319320130101 , H01L2224/1301920130101 , H01L2224/7310420130101 , H01L2224/2733420130101 , H01L2224/2907620130101 , H01L2224/2907820130101 , H01L2224/2919320130101 , H01L2224/0402620130101 , H01L2224/27120130101 , H01L24/27 , H01L24/11 , H01L2224/1133420130101 , H01L2224/11120130101 , H01L2224/1622720130101 , H01L24/32 , H01L24/16 , H01L24/81 , H01L24/83 , H01L2224/8320120130101 , H01L2224/8120120130101 , H01L2224/320720130101 , H01L2224/8334520130101 , H01L2224/8134520130101 , H01L2224/160720130101 , H01L2924/351220130101 , H01L2224/8144720130101 , H01L2224/0564420130101 , H01L2224/0566920130101 , H01L2224/8148420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/1329120130101 , H01L2224/8146620130101 , H01L2224/0562420130101 , H01L2224/0564720130101 , H01L2224/8147620130101 , H01L2224/13120130101 , H01L2224/8144420130101 , H01L2224/834920130101 , H01L2224/8145520130101 , H01L2224/2929120130101 , H01L2224/132920130101 , H01L2224/1339320130101 , H01L2224/8146920130101 , H01L2224/292920130101 , H01L2224/0563820130101 , H01L2224/29120130101 , H01L2224/0567620130101 , H01L2224/8143920130101 , H01L2224/0568420130101 , H01L2224/0566620130101 , H01L2224/8142420130101 , H01L2224/2939320130101 , H01L2224/29320130101 , H01L2224/13320130101
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公开(公告)号：EP4141924B1
公开(公告)日：2024-07-24
申请号：EP22193090.2
申请日：2022-08-31
IPC分类号： H01L23/488 , H01L21/60 , H01L23/00 , B23K35/26 , B23K35/28
CPC分类号： H01L24/32 , H01L24/83 , H01L24/29 , H01L2224/8382520130101 , H01L2224/838120130101 , H01L2224/3250720130101 , H01L2224/8390720130101 , H01L2224/8306520130101 , H01L2224/8321120130101 , H01L2224/2901720130101 , H01L2224/8301120130101 , H01L2224/8302220130101 , H01L2224/8310120130101 , H01L2224/2901920130101 , H01L2224/9520130101 , H01L2224/3222720130101 , H01L2224/3224520130101 , H01L2224/0402620130101 , H01L2224/271120130101 , H01L2224/29120130101 , H01L24/27 , H01L24/95 , H01L2224/3205720130101 , B23K35/26 , B23K35/262 , B23K35/264 , B23K35/266 , B23K35/282 , H01L24/05 , H01L2224/0517220130101 , H01L2224/2910120130101 , H01L2224/2913920130101 , H01L2224/2911820130101 , H01L2224/0564420130101 , H01L2224/8345520130101 , H01L2224/0513820130101 , H01L2224/0566920130101 , H01L2224/2910520130101 , H01L2224/8344420130101 , H01L2224/8347220130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0567220130101 , H01L2224/2910920130101 , H01L2224/8346420130101 , H01L2224/0515520130101 , H01L2224/0564720130101 , H01L2224/8343920130101 , H01L2224/8346920130101 , H01L2224/0566420130101 , H01L2224/2914720130101 , H01L2224/0516420130101 , H01L2224/8344720130101 , H01L2224/2911320130101 , H01L2224/291220130101 , H01L2224/2911120130101 , H01L2224/2914420130101
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公开(公告)号：EP3819059B1
公开(公告)日：2024-05-29
申请号：EP20205579.4
申请日：2020-11-04
IPC分类号： B23K1/00 , B23K1/19 , B23K1/20 , B23K20/02 , B23K20/16 , B23K20/233 , B23K101/42
CPC分类号： B23K1/0016 , B23K1/19 , B23K1/20 , B23K20/026 , B23K20/16 , B23K20/233 , B23K2101/4220180801 , H01L24/83 , H01L24/29 , H01L2224/8382520130101 , H01L2224/838120130101 , H01L24/32 , H01L2224/3250320130101 , H01L2224/3250720130101 , H01L2224/8381520130101 , H01L25/50 , H01L2224/8319220130101 , H01L2224/2733420130101 , H01L24/27 , H01L2224/8390720130101 , H01L2224/3201220130101 , H01L2224/3318120130101 , H01L2224/7326320130101 , H01L2224/8319120130101 , H01L2924/143120130101 , H01L2924/1220130101 , H01L2224/8306520130101 , H01L2224/832120130101 , H01L2224/2929420130101 , H01L2224/9520130101 , H01L24/95 , H01L2224/9420130101 , H01L2224/756520130101 , H01L24/05 , H01L2224/0402620130101 , H01L2224/2900620130101 , H01L2224/2900720130101 , H01L2224/32120130101 , H01L2224/3222720130101 , H01L23/49811 , H01L2224/3201320130101 , H01L25/0657 , H01L25/18 , H01L2224/8319320130101 , H01L2224/4022720130101 , H01L2224/4009520130101 , H01L2224/8482520130101 , H01L2224/8481520130101 , H01L2224/4049920130101 , H01L2224/3224520130101 , H01L24/33 , H01L2224/330120130101 , H01L2224/3350520130101 , H01L24/40 , H01L24/75 , H01L24/84 , H01L2224/0516420130101 , H01L2224/2743620130101 , H01L23/49524 , H01L2224/8343820130101 , H01L2224/0517220130101 , H01L2224/2910120130101 , H01L2224/2913920130101 , H01L2224/2911820130101 , H01L2224/0564420130101 , H01L2224/8345520130101 , H01L2224/0513820130101 , H01L2224/0566920130101 , H01L2224/2910520130101 , H01L2224/8347220130101 , H01L2224/8344420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0567220130101 , H01L2224/2910920130101 , H01L2224/8346420130101 , H01L2224/0515520130101 , H01L2224/0564720130101 , H01L2224/8343920130101 , H01L2224/8346920130101 , H01L2224/0566420130101 , H01L2224/2914720130101 , H01L2224/8344720130101 , H01L2224/2911320130101 , H01L2224/291220130101 , H01L2224/0563820130101 , H01L2224/2911120130101 , H01L2224/2914420130101
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公开(公告)号：EP3925007B1
公开(公告)日：2024-10-02
申请号：EP20701715.3
申请日：2020-01-20
IPC分类号： B82Y10/00 , G06N10/00 , H01L23/538 , H01L23/00 , H10N69/00 , H01L23/498
CPC分类号： G06N10/00 , B82Y10/00 , H01L24/81 , H01L23/49811 , H01L2224/8119220130101 , H01L2924/1532120130101 , H01L2924/1615220130101 , H01L2924/1625120130101 , H01L2224/8119320130101 , H01L2224/1301920130101 , H01L2224/1622720130101 , H01L2224/113420130101 , H01L2224/8109920130101 , H01L2224/8180120130101 , H01L2224/160120130101 , H01L24/13 , H01L24/16 , H01L2224/0564720130101 , H01L2224/1310920130101 , H01L2224/0564420130101 , H01L2224/0566920130101 , H01L2224/0566420130101 , H01L2224/1311120130101 , H01L2224/1314420130101 , H01L2224/0563920130101 , H01L2224/1316920130101 , H01L2224/1311620130101 , H01L2224/1311320130101 , H01L2224/0566620130101 , H01L2224/1364420130101 , H10N69/00
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公开(公告)号：EP4411843A2
公开(公告)日：2024-08-07
申请号：EP24169398.5
申请日：2018-05-07
IPC分类号： H01L33/20
CPC分类号： H01L33/0075 , H01L33/20 , H01S5/0217 , H01S5/34333 , H01S2304/1220130101 , H01L33/0093 , H01L21/02389 , H01L21/0254 , H01L21/02647 , H01L21/02458 , H01L2224/3224520130101 , H01L2224/8319220130101 , H01L2224/8389520130101 , H01L2224/3222520130101 , H01L2224/8344420130101 , H01L2224/8320320130101 , H01L2224/0561120130101 , H01L2224/0564420130101 , H01L2924/1574720130101 , H01L2924/103320130101 , H01L2224/0402620130101 , H01L24/05 , H01L24/29 , H01L24/32 , H01L2224/8380520130101 , H01L24/83 , H01L2224/8301320130101 , H01L2224/8302220130101 , H01L2224/2911120130101 , H01L2224/2914420130101 , H01L2224/8344720130101 , H01L2224/8044420130101 , H01L2224/8001320130101 , H01L2224/8020320130101 , H01L2224/8089520130101 , H01L24/80 , H01L2224/0824520130101 , H01L2224/0822520130101 , H01L24/08 , H01L2224/0420130101 , H01L2224/034520130101 , H01L24/03 , H01L2224/8000620130101 , H01L2224/8300520130101 , H01L2224/0823820130101 , H01L2224/0825820130101 , H01L2224/0555820130101 , H01L21/6835 , H01L24/06 , H01L2224/0618120130101 , H01L2924/1204220130101 , H01L2224/920220130101 , H01L2224/9420130101 , H01L24/94 , H01L24/92 , H01L2224/9214220130101 , H01L2224/921220130101 , H01L2221/6838120130101 , H01L2221/6831820130101 , H01L2221/683520130101 , H01L2221/6836320130101 , H01L2224/80420130101 , H01L2224/804920130101 , H01L2224/051820130101 , H01L2224/0514420130101 , H01L2224/0566920130101 , H01L2224/0518420130101 , H01L2224/0513920130101 , H01L2224/0566420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0516420130101 , H01L2224/0516620130101 , H01L2224/0516920130101 , H01L2224/056820130101 , H01L2224/0568420130101 , H01L2224/0566620130101 , H01L2224/0515520130101 , H01S5/0203 , H01L2224/29120130101
摘要： A method of removing a substrate, comprising: forming a growth restrict mask with a plurality of striped opening areas directly or indirectly upon a GaN-based substrate; and growing a plurality of semiconductor layers upon the GaN-based substrate using the growth restrict mask, such that the growth extends in a direction parallel to the striped opening areas of the growth restrict mask, and growth is stopped before the semiconductor layers coalesce, thereby resulting in island-like semiconductor layers. A device is processed for each of the island-like semiconductor layers. Etching is performed until at least a part of the growth restrict mask is exposed. The devices are then bonded to a support substrate. The GaN-based substrate is removed from the devices by a wet etching technique that at least partially dissolves the growth restrict mask. The GaN substrate that is removed then can be recycled.
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公开(公告)号：EP3391409B1
公开(公告)日：2024-05-22
申请号：EP16876775.4
申请日：2016-12-16
IPC分类号： H01L23/485 , H01L21/48 , H01L21/60 , H01L25/065
CPC分类号： H01L25/0657 , H01L2225/0655520130101 , H01L25/50 , H01L2225/0651320130101 , H01L2225/0659320130101 , H01L2224/0823820130101 , H01L2224/0823720130101 , H01L24/05 , H01L24/08 , H01L24/80 , H01L2224/0554120130101 , H01L2224/0555120130101 , H01L2224/0555220130101 , H01L2224/0557120130101 , H01L2224/0557320130101 , H01L2224/0557820130101 , H01L2224/05620130101 , H01L2224/0563920130101 , H01L2224/0564420130101 , H01L2224/0564720130101 , H01L2224/0565520130101 , H01L2224/0568420130101 , H01L2224/080720130101 , H01L2224/0814620130101 , H01L2224/8089520130101 , H01L2224/8089620130101 , H01L2224/0811120130101 , H01L2224/0812120130101 , H01L2224/0814820130101 , H01L2224/8003520130101 , H01L2224/8093520130101 , H01L2224/0420130101 , H01L2224/0566420130101 , H01L2224/8001320130101 , H01L2224/0512420130101 , H01L2224/0507320130101 , H01L2224/8001120130101 , H01L2224/0560920130101 , H01L2224/0561120130101 , H01L2224/8081520130101 , H01L2224/0568720130101 , H01L2224/0568820130101 , H01L2224/0341620130101 , H01L2224/03520130101 , H01L24/03 , H01L2224/0360220130101 , H01L2224/0361620130101 , H01L2224/0346420130101 , H01L2224/0361220130101 , H01L2224/0515520130101 , H01L2924/38120130101 , H01L2924/351220130101 , H01L2224/0566920130101 , H01L2224/0514420130101 , H01L2224/803420130101 , H01L2224/8098620130101 , H01L2224/0556920130101 , H01L2224/0814520130101
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公开(公告)号：EP3853914B1
公开(公告)日：2024-05-01
申请号：EP19773043.5
申请日：2019-09-18
CPC分类号： H01L24/13 , H01L24/05 , H01L24/11 , H01L2224/034520130101 , H01L2224/0362220130101 , H01L2224/036120130101 , H01L2224/114720130101 , H01L2224/1131220130101 , H01L24/03 , H01L2224/040120130101 , H01L2224/0557820130101 , H01L2224/0558220130101 , H01L2224/0558320130101 , H01L2224/0557620130101 , H01L2224/0555220130101 , H01L2224/8119120130101 , H01L2224/1623820130101 , H01L2224/1650320130101 , H01L24/16 , H01L2224/1605820130101 , H01L2224/8181520130101 , H01L2224/0555720130101 , H01L2224/8119320130101 , H01L2224/113420130101 , H01L24/81 , H01L2224/0518320130101 , H01L2224/8148620130101 , H01L2224/0518120130101 , H01L2224/8146920130101 , H01L2224/0516620130101 , H01L2224/8140920130101 , H01L2224/0564420130101 , H01L2224/8148420130101 , H01L2224/1314720130101 , H01L2224/0517920130101 , H01L2224/0566620130101 , H01L2224/8144720130101 , H01L2224/0568420130101 , H01L2224/0566920130101 , H01L2224/0519320130101 , H01L2224/8148120130101 , H01L2224/1310920130101 , H01L2224/0512420130101 , H01L2224/8145520130101 , H01L2224/0566420130101 , H01L2224/0518420130101 , H01L2224/0560920130101 , H01L2224/0562420130101 , H01L2224/0518620130101 , H01L2224/0561120130101 , H01L2224/0568620130101 , H01L2224/8146620130101 , H01L2224/1314420130101 , H01L2224/0568120130101 , H01L2224/1311120130101 , H01L2224/8144420130101 , H01L2224/8141120130101 , H01L2224/1311320130101 , H01L2224/1311620130101 , H01L2224/0564720130101 , H01L2224/8146420130101 , H01L2224/0565520130101 , H10N60/80 , H10N60/85 , H10N60/01
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搜索结果
8 条记录 (耗时 0.009 秒)
