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公开(公告)号:EP2650906B1
公开(公告)日:2024-10-09
申请号:EP13003427.5
申请日:2005-06-02
IPC分类号: H01L21/308 , H01L21/208 , H01L21/326 , H01L21/4763 , H01L23/48 , H01L27/01 , H01L29/06 , H01L29/08 , H01L23/00 , H01L29/786 , H01L27/12 , H01L31/18 , H01L21/683
CPC分类号: B81C2201/018520130101 , B82Y10/00 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L29/068 , H01L29/78603 , H01L29/78681 , H01L29/78696 , H01L31/0392 , H01L31/1804 , H01L2924/1204120130101 , Y10S977/724 , Y10S977/707 , Y02E10/547 , H01L2224/8300520130101 , H01L2224/0361420130101 , H01L2224/8086220130101 , H01L24/03 , H01L24/05 , H01L24/08 , H01L24/29 , H01L24/32 , H01L21/6835 , H01L24/80 , H01L24/83 , H01L24/94 , H01L24/97 , H01L2221/6836820130101 , H01L2221/6838120130101 , H01L2224/033220130101 , H01L2224/034520130101 , H01L2224/036220130101 , H01L2224/0507320130101 , H01L2224/0508220130101 , H01L2224/0512420130101 , H01L2224/0514420130101 , H01L2224/0515520130101 , H01L2224/0516620130101 , H01L2224/0555220130101 , H01L2224/0555320130101 , H01L2224/0555420130101 , H01L2224/0555520130101 , H01L2224/0564420130101 , H01L2224/0566620130101 , H01L2224/0822520130101 , H01L2224/291920130101 , H01L2224/3222520130101 , H01L2224/8000620130101 , H01L2224/8012120130101 , H01L2224/8089520130101 , H01L2224/8312120130101 , H01L2224/8319220130101 , H01L2224/8319320130101 , H01L2224/838520130101 , H01L2224/8386220130101 , H01L2224/920220130101 , H01L2224/9420130101 , H01L2224/9720130101 , H01L2924/1025320130101 , H01L2924/1032920130101 , H01L2924/1515920130101 , H01L2924/1516220130101 , H01L2924/157920130101 , H01L27/1285 , H01L27/1292 , H01L2924/1309120130101 , H01L2924/130620130101 , H01L2924/146120130101 , H01L21/02628 , H01L2924/130520130101 , H01L2924/1203220130101 , H01L2924/1578820130101 , H01L31/03926 , H01L31/1864 , H01L31/1896 , H01L2924/1204220130101 , H01L2924/1204420130101 , H01L2924/1203620130101 , H01L2924/1204320130101 , H01L2224/9520130101 , H01L2924/1306320130101 , H01L2924/1420130101 , H01L2924/1305520130101 , H01L21/02603 , Y02P70/50
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公开(公告)号:EP4411843A2
公开(公告)日:2024-08-07
申请号:EP24169398.5
申请日:2018-05-07
IPC分类号: H01L33/20
CPC分类号: H01L33/0075 , H01L33/20 , H01S5/0217 , H01S5/34333 , H01S2304/1220130101 , H01L33/0093 , H01L21/02389 , H01L21/0254 , H01L21/02647 , H01L21/02458 , H01L2224/3224520130101 , H01L2224/8319220130101 , H01L2224/8389520130101 , H01L2224/3222520130101 , H01L2224/8344420130101 , H01L2224/8320320130101 , H01L2224/0561120130101 , H01L2224/0564420130101 , H01L2924/1574720130101 , H01L2924/103320130101 , H01L2224/0402620130101 , H01L24/05 , H01L24/29 , H01L24/32 , H01L2224/8380520130101 , H01L24/83 , H01L2224/8301320130101 , H01L2224/8302220130101 , H01L2224/2911120130101 , H01L2224/2914420130101 , H01L2224/8344720130101 , H01L2224/8044420130101 , H01L2224/8001320130101 , H01L2224/8020320130101 , H01L2224/8089520130101 , H01L24/80 , H01L2224/0824520130101 , H01L2224/0822520130101 , H01L24/08 , H01L2224/0420130101 , H01L2224/034520130101 , H01L24/03 , H01L2224/8000620130101 , H01L2224/8300520130101 , H01L2224/0823820130101 , H01L2224/0825820130101 , H01L2224/0555820130101 , H01L21/6835 , H01L24/06 , H01L2224/0618120130101 , H01L2924/1204220130101 , H01L2224/920220130101 , H01L2224/9420130101 , H01L24/94 , H01L24/92 , H01L2224/9214220130101 , H01L2224/921220130101 , H01L2221/6838120130101 , H01L2221/6831820130101 , H01L2221/683520130101 , H01L2221/6836320130101 , H01L2224/80420130101 , H01L2224/804920130101 , H01L2224/051820130101 , H01L2224/0514420130101 , H01L2224/0566920130101 , H01L2224/0518420130101 , H01L2224/0513920130101 , H01L2224/0566420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0516420130101 , H01L2224/0516620130101 , H01L2224/0516920130101 , H01L2224/056820130101 , H01L2224/0568420130101 , H01L2224/0566620130101 , H01L2224/0515520130101 , H01S5/0203 , H01L2224/29120130101
摘要: A method of removing a substrate, comprising: forming a growth restrict mask with a plurality of striped opening areas directly or indirectly upon a GaN-based substrate; and growing a plurality of semiconductor layers upon the GaN-based substrate using the growth restrict mask, such that the growth extends in a direction parallel to the striped opening areas of the growth restrict mask, and growth is stopped before the semiconductor layers coalesce, thereby resulting in island-like semiconductor layers. A device is processed for each of the island-like semiconductor layers. Etching is performed until at least a part of the growth restrict mask is exposed. The devices are then bonded to a support substrate. The GaN-based substrate is removed from the devices by a wet etching technique that at least partially dissolves the growth restrict mask. The GaN substrate that is removed then can be recycled.
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公开(公告)号:EP3391409B1
公开(公告)日:2024-05-22
申请号:EP16876775.4
申请日:2016-12-16
IPC分类号: H01L23/485 , H01L21/48 , H01L21/60 , H01L25/065
CPC分类号: H01L25/0657 , H01L2225/0655520130101 , H01L25/50 , H01L2225/0651320130101 , H01L2225/0659320130101 , H01L2224/0823820130101 , H01L2224/0823720130101 , H01L24/05 , H01L24/08 , H01L24/80 , H01L2224/0554120130101 , H01L2224/0555120130101 , H01L2224/0555220130101 , H01L2224/0557120130101 , H01L2224/0557320130101 , H01L2224/0557820130101 , H01L2224/05620130101 , H01L2224/0563920130101 , H01L2224/0564420130101 , H01L2224/0564720130101 , H01L2224/0565520130101 , H01L2224/0568420130101 , H01L2224/080720130101 , H01L2224/0814620130101 , H01L2224/8089520130101 , H01L2224/8089620130101 , H01L2224/0811120130101 , H01L2224/0812120130101 , H01L2224/0814820130101 , H01L2224/8003520130101 , H01L2224/8093520130101 , H01L2224/0420130101 , H01L2224/0566420130101 , H01L2224/8001320130101 , H01L2224/0512420130101 , H01L2224/0507320130101 , H01L2224/8001120130101 , H01L2224/0560920130101 , H01L2224/0561120130101 , H01L2224/8081520130101 , H01L2224/0568720130101 , H01L2224/0568820130101 , H01L2224/0341620130101 , H01L2224/03520130101 , H01L24/03 , H01L2224/0360220130101 , H01L2224/0361620130101 , H01L2224/0346420130101 , H01L2224/0361220130101 , H01L2224/0515520130101 , H01L2924/38120130101 , H01L2924/351220130101 , H01L2224/0566920130101 , H01L2224/0514420130101 , H01L2224/803420130101 , H01L2224/8098620130101 , H01L2224/0556920130101 , H01L2224/0814520130101
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公开(公告)号:EP3706161B1
公开(公告)日:2024-10-09
申请号:EP18873077.4
申请日:2018-10-30
IPC分类号: H01L23/488 , H01L23/482 , H01L21/60 , B23K35/26 , C22C13/02 , B23K1/20
CPC分类号: B23K1/008 , C22C13/02 , H01L24/29 , H01L24/32 , H01L24/83 , H01L2224/8381520130101 , H01L2224/838120130101 , H01L2224/3250320130101 , H01L2924/35120130101 , H01L2924/351220130101 , H01L24/05 , H01L2224/0402620130101 , H01L23/4827 , H01L2224/0508320130101 , H01L2224/034520130101 , H01L2224/034620130101 , H01L2224/3222720130101 , H01L2224/3224520130101 , H01L2224/8320420130101 , H01L2224/8321120130101 , H01L2224/8307520130101 , H01L2224/8306520130101 , H01L2224/8302220130101 , H01L2224/8302420130101 , H01L2224/8304820130101 , H01L2224/29320130101 , H01L2224/29120130101 , H01L2224/2929420130101 , H01L2224/8310120130101 , H01L2224/2911120130101 , H01L2224/8345520130101 , H01L2224/0507320130101 , H01L2224/0508220130101 , H01L2224/0508420130101 , H01L2224/0564420130101 , H01L2224/0563920130101 , H01L2224/0565520130101 , H01L2224/0516620130101 , H01L2224/0512420130101 , H01L2224/0515520130101 , H01L2224/0513920130101 , H01L2224/0514720130101 , H01L2224/0511120130101 , H01L2224/3250720130101 , H01L24/03 , B23K1/0016 , B23K2101/3620180801 , B23K1/203 , B23K1/206 , B23K35/262 , C22C19/03 , B23K35/025 , H01L2224/0564720130101 , H01L2224/0517220130101 , H01L2224/0517120130101 , H01L2224/0561120130101 , H01L2224/0514420130101
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公开(公告)号:EP4352785A1
公开(公告)日:2024-04-17
申请号:EP22738516.8
申请日:2022-05-26
发明人: BARTER, Margaret , BOLES, Timothy
IPC分类号: H01L23/544
CPC分类号: H01L23/544 , H01L2223/5443320130101 , H01L2223/544220130101 , H01L2223/5440620130101 , H01L2223/5448620130101 , H01L2224/0618120130101 , H01L2224/0404220130101 , H01L2224/0566420130101 , H01L2224/0565520130101 , H01L2224/0514420130101 , H01L2924/3512120130101 , H01L2224/4501420130101 , H01L24/05 , H01L2224/0513920130101 , H01L2224/0512420130101 , H01L2224/0514720130101 , H01L2224/034520130101 , H01L2224/034620130101 , H01L2224/0556720130101 , H01L2924/120320130101 , H01L2924/130420130101 , H01L2924/130520130101 , H01L2924/130620130101 , H01L2924/130120130101 , H01L2924/1305520130101 , H01L2924/1025320130101 , H01L24/03 , H01L2224/0566620130101
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公开(公告)号:EP3619748B1
公开(公告)日:2024-04-17
申请号:EP18794585.2
申请日:2018-05-07
IPC分类号: H01L21/683 , H01L23/00 , H01L33/00 , H01S5/02 , H01L21/02 , H01S5/343 , H01L33/46 , H01L33/32 , H01L33/20
CPC分类号: H01L33/0075 , H01L33/20 , H01S5/0217 , H01S5/34333 , H01S2304/1220130101 , H01L33/0093 , H01L21/02389 , H01L21/0254 , H01L21/02647 , H01L21/02458 , H01L2224/3224520130101 , H01L2224/8319220130101 , H01L2224/8389520130101 , H01L2224/3222520130101 , H01L2224/8344420130101 , H01L2224/8320320130101 , H01L2224/0561120130101 , H01L2224/0564420130101 , H01L2924/1574720130101 , H01L2924/103320130101 , H01L2224/0402620130101 , H01L24/05 , H01L24/29 , H01L24/32 , H01L2224/8380520130101 , H01L24/83 , H01L2224/8301320130101 , H01L2224/8302220130101 , H01L2224/2911120130101 , H01L2224/2914420130101 , H01L2224/8344720130101 , H01L2224/8044420130101 , H01L2224/8001320130101 , H01L2224/8020320130101 , H01L2224/8089520130101 , H01L24/80 , H01L2224/0824520130101 , H01L2224/0822520130101 , H01L24/08 , H01L2224/0420130101 , H01L2224/034520130101 , H01L24/03 , H01L2224/8000620130101 , H01L2224/8300520130101 , H01L2224/0823820130101 , H01L2224/0825820130101 , H01L2224/0555820130101 , H01L21/6835 , H01L24/06 , H01L2224/0618120130101 , H01L2924/1204220130101 , H01L2224/920220130101 , H01L2224/9420130101 , H01L24/94 , H01L24/92 , H01L2224/9214220130101 , H01L2224/921220130101 , H01L2221/6838120130101 , H01L2221/6831820130101 , H01L2221/683520130101 , H01L2221/6836320130101 , H01L2224/80420130101 , H01L2224/804920130101 , H01L2224/051820130101 , H01L2224/0514420130101 , H01L2224/0566920130101 , H01L2224/0518420130101 , H01L2224/0513920130101 , H01L2224/0566420130101 , H01L2224/0565520130101 , H01L2224/0563920130101 , H01L2224/0516420130101 , H01L2224/0516620130101 , H01L2224/0516920130101 , H01L2224/056820130101 , H01L2224/0568420130101 , H01L2224/0566620130101 , H01L2224/0515520130101 , H01S5/0203 , H01L2224/29120130101
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