Micromixer, micromixer element and method for producing the same
    133.
    发明专利
    Micromixer, micromixer element and method for producing the same 有权
    MICROMIXER,MICROMIXERELEMENT AND METHOD FOR PRODUCE THE SAME

    公开(公告)号:JP2013119064A

    公开(公告)日:2013-06-17

    申请号:JP2011268280

    申请日:2011-12-07

    Abstract: PROBLEM TO BE SOLVED: To provide a micromixer, a micromixer element and a method for producing the same, wherein branch passages can be further microminiaturized and can be smoothed.SOLUTION: The micromixer element 20 incorporated in this micromixer and forming alternately disposed branch passages includes a first plate material 21, a second plate material 22, and an intermediate plate material 23 sandwiched between the first plate material 21 and the second plate material 22. The first plate material 21, the second plate material 22 and the intermediate plate material 23 are respectively formed with prescribed-depth grooves 21B, 22B, 23B continuing from the front surfaces of the respective plate materials to the rear surfaces in main end surfaces 21A, 22A, 23A, the grooves 21B of the first plate material 21 are communicated with every other groove 23B of the intermediate plate material 23, and the grooves 22B of the second plate material 22 are communicated with the grooves with which the grooves 21B of the first plate material 21 do not communicate out of the grooves 23B of the intermediate plate material 23.

    Abstract translation: 要解决的问题:为了提供微混合器,微混合器元件及其制造方法,其中分支通道可以进一步微小化并且可以被平滑化。 解决方案:结合在该微型混合器中并形成交替设置的分支通道的微混合器元件20包括夹在第一板材21和第二板材之间的第一板材21,第二板材22和中间板材23 第一板材21,第二板材22和中间板材23分别形成有从各板材的前表面延伸到主端面的后表面的规定深度的槽21B,22B,23B 如图21A,22A,23A所示,第一板材21的槽21B与中间板材23的每隔一个的槽23B连通,第二板材22的槽22B与槽21B 第一板材21不与中间板材23的槽23B连通。版权所有(C)2013,JPO&INPIT

    Production method of ferroelectric material layer, thin film transistor and piezoelectric ink jet head
    138.
    发明专利
    Production method of ferroelectric material layer, thin film transistor and piezoelectric ink jet head 有权
    电磁材料层,薄膜晶体管和压电喷嘴头的生产方法

    公开(公告)号:JP2013093586A

    公开(公告)日:2013-05-16

    申请号:JP2012265998

    申请日:2012-12-05

    Abstract: PROBLEM TO BE SOLVED: To provide a production method of a ferroelectric material layer the electrical characteristics of which can be enhanced furthermore.SOLUTION: The production method of a ferroelectric material layer includes a ferroelectric material precursor layer formation step for forming the precursor layer of a ferroelectric material by coating a substrate with a sol-gel solution, a drying step for drying the precursor layer at a first temperature in the range of 120°C-250°C, a type push step for performing type push processing of the precursor layer while heating to a second temperature higher than the first temperature and in the range of 150°C-300°C, and a ferroelectric material layer formation step for forming the ferroelectric material layer from the precursor layer.

    Abstract translation: 要解决的问题:为了提供可以进一步提高其电特性的铁电材料层的制造方法。 解决方案:铁电材料层的制造方法包括铁电材料前体层形成工序,用于通过用溶胶 - 凝胶溶液涂布基板来形成铁电体的前体层,干燥步骤,用于干燥前体层 在120℃-250℃的范围内的第一温度,用于在加热到高于第一温度的第二温度并且在150℃-300℃的范围内进行前体层的类型推动加工的型式推进步骤 以及从前驱体层形成铁电体材料层的铁电体层形成工序。 版权所有(C)2013,JPO&INPIT

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