Semiconductor device and method of manufacturing the same
    1.
    发明专利
    Semiconductor device and method of manufacturing the same 审中-公开
    半导体器件及其制造方法

    公开(公告)号:JP2012064899A

    公开(公告)日:2012-03-29

    申请号:JP2010210134

    申请日:2010-09-17

    IPC分类号: H01L29/78 H01L29/06

    摘要: PROBLEM TO BE SOLVED: To provide a semiconductor device capable of preventing avalanche breakdown in a lower portion of a gate electrode pad and capable of utilizing a region under the gate electrode pad as a current channel.SOLUTION: A semiconductor device 100 comprises: main electrodes 12 electrically connected to a first semiconductor region 2 of a first conductive type and second semiconductor regions 3 selectively provided on a surface of the first semiconductor region; control electrodes 7 provided on the second semiconductor regions via a first insulating film; lead-out electrodes 13 electrically connected to the control electrodes; a second insulating film 15 provided on the main electrodes and the lead-out electrodes; and a plurality of contact electrodes 21 that are provided in a plurality of contact holes 15a formed in the second insulating film and are electrically connected to the lead-out electrodes. Control terminals, which are electrically insulated from the main electrodes by the second insulating film, are electrically connected to the plurality of contact electrodes.

    摘要翻译: 解决的问题:提供能够防止栅极电极焊盘的下部的雪崩击穿并且能够利用栅极电极焊盘下方的区域作为电流通道的半导体器件。 解决方案:半导体器件100包括:电连接到第一导电类型的第一半导体区域2和选择性地设置在第一半导体区域的表面上的第二半导体区域3的主电极12; 通过第一绝缘膜设置在第二半导体区上的控制电极7; 电连接到控制电极的引出电极13; 设置在主电极和引出电极上的第二绝缘膜15; 以及多个接触电极21,其设置在形成在第二绝缘膜中并与引出电极电连接的多个接触孔15a中。 通过第二绝缘膜与主电极电绝缘的控制端子电连接到多个接触电极。 版权所有(C)2012,JPO&INPIT