ANGLE INDEPENDENT OPTICAL SURFACE INSPECTOR

    公开(公告)号:US20220187218A1

    公开(公告)日:2022-06-16

    申请号:US17685679

    申请日:2022-03-03

    摘要: An angle independent optical surface inspector capable of generating a light beam, directing the light beam to a sample, and de-scanning a reflected light beam that is reflected from the sample, thereby generating a first de-scanned light beam. The de-scanning is performed at approximately one focal length of a de-scanning lens from an irradiation location where the light beam irradiates the sample. The optical inspector also capable of focusing the first de-scanned light beam, thereby generating a focused light beam, and measuring the location of the focused light beam. The measuring of the location is performed at approximately one focal length of a focusing lens from the focusing lens. The incident angle of the light beam is within ten degrees of Brewster's angle. The focusing is performed by an achromatic lens.

    Floating optical sensor mount
    3.
    发明授权
    Floating optical sensor mount 有权
    浮动光学传感器座

    公开(公告)号:US09422950B2

    公开(公告)日:2016-08-23

    申请号:US14000351

    申请日:2012-02-21

    IPC分类号: F01B25/26 F15B15/00 F15B15/28

    摘要: A piston-cylinder actuator includes a unique mount for an absolute-position sensor. The mount is made from a bearing material provides a flexible connection between the sensor mount and the cylinder housing. This flexible connection allows the piston rod to deflect naturally, under its own weight or under other laterally-directed forces, while maintaining the distance and perpendicularity between the sensor and the rod surface, within acceptable limits. The sensor mount is made from a bearing material that will allow it to float directly on the rod surface without scuffing or otherwise damaging the rod surface, particularly the markings or other indicia on that surface. Due to the flexible connection between the sensor mount and the cylinder housing, the proper distance between the sensor and the rod surface can be maintained at all times.

    摘要翻译: 活塞气缸致动器包括用于绝对位置传感器的独特安装。 安装座由轴承材料制成,在传感器支架和气缸壳体之间提供灵活的连接。 这种柔性连接允许活塞杆在其自身重量下或在其它侧向力下自然偏转,同时保持传感器和杆表面之间的距离和垂直度在可接受的限度内。 传感器支架由轴承材料制成,可使其直接在杆表面上浮动,而不会磨损或以其他方式损坏杆表面,特别是该表面上的标记或其他标记。 由于传感器支架和气缸壳体之间的灵活连接,传感器和杆表面之间的适当距离可以始终保持。

    Optical sensor and mounting interface
    4.
    发明授权
    Optical sensor and mounting interface 有权
    光学传感器和安装界面

    公开(公告)号:US09335207B2

    公开(公告)日:2016-05-10

    申请号:US14000149

    申请日:2012-02-21

    IPC分类号: G01J1/02 G01D5/26 G01D11/24

    摘要: A sensor includes an enclosure having a housing and a lower cassette that cooperate to provide a sealed volume in which an optical sensor assembly is enclosed and protected. The optical sensor assembly includes a circuit board with a light source and a light detector. The sensor assembly further includes a light pipe that guides light from the sensor onto a target and a lens guides reflected light from the target onto the light detector. Lower ends of the light pipe and the lens are supported by a recess in the lower cassette. Upper ends of the light pipe and the lens are supported by an upper cassette. The upper cassette is positively located and mounted to the circuit board and received in an internal receptacle in the lower cassette. Mounting the lower cassette to the housing encloses the optical sensor assembly in the proper alignment.

    摘要翻译: 传感器包括具有壳体和下部盒的壳体,所述壳体和下部盒体协作以提供封闭和保护光学传感器组件的密封容积。 光学传感器组件包括具有光源和光检测器的电路板。 传感器组件还包括将来自传感器的光引导到目标上的光管,并且透镜将来自目标的反射光引导到光检测器上。 光管和透镜的下端由下盒中的凹部支撑。 光管和透镜的上端由上部盒支撑。 上盒正确地定位并安装到电路板上,并被接收在下盒中的内部插座中。 将下盒安装到外壳上将光学传感器组件以适当的对准方式包围。

    System And Method For Monitoring LED Chip Surface Roughening Process
    5.
    发明申请
    System And Method For Monitoring LED Chip Surface Roughening Process 有权
    LED芯片表面粗糙化处理系统及方法

    公开(公告)号:US20120327414A1

    公开(公告)日:2012-12-27

    申请号:US13494949

    申请日:2012-06-12

    IPC分类号: G01J3/42 G01J3/447

    摘要: A measurement system for monitoring an LED chip surface roughening process is described. A reflective illuminator can run reflectance measurements. A vertical positioning means can adjust a distance between an objective lens and an industrial sample. A horizontal positioning means can move objects in XY plane, and is specifically configured to hold the industrial sample and a reference sample. An optical sensor can acquire images of the industrial sample. A spectrometer can acquire reflectance spectrums of the industrial sample and the reference sample. A processor can control these components. The processor can perform deskew, and calculate an average reflectance and an oscillation amplitude from the reflectance spectrums of the industrial sample.

    摘要翻译: 描述了一种用于监测LED芯片表面粗糙化工艺的测量系统。 反射照明器可以进行反射测量。 垂直定位装置可以调节物镜和工业样品之间的距离。 水平定位装置可以在XY平面中移动物体,并且被特别地配置成保持工业样品和参考样品。 光学传感器可以获取工业样品的图像。 光谱仪可以获得工业样品和参考样品的反射光谱。 处理器可以控制这些组件。 处理器可以进行偏斜校正,并从工业样品的反射光谱计算平均反射率和振荡幅度。