公开(公告)号：US20100090579A1

公开(公告)日：2010-04-15

申请号：US12449919

申请日：2008-02-28

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： H01J1/50 ,  H01J9/00

CPC分类号： H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

摘要： The invention relates to an apparatus and a method for production of a device for thermally induced field emission of particles for particle optical devices such as in particular electron or ion microscopes,having at least one particle emitter (3) arranged in or pointing into a vacuum space (2) with at least one field emitter tip (4) for the emission of the particles,and having a magnetic field generator (6) attributed to the particle emitter (3) for focussing of the emitted particle beam (5),with the particle emitter (3) with its field emitter tip (4) is built by emitter structures (9) positioned on the surface (7) of a substrate (8) which is turned away from the magnetic field generator (6),and the substrate (8) formed as separating wall between vacuum space (2) and the atmospheric space (10) situated outside the vacuum space (2) at the side (14) of the substrate (8) which is turned away from the emitter structures (9).

摘要翻译： 本发明涉及一种用于制造用于颗粒光学器件（例如电子或离子显微镜）的颗粒光学器件的热感应场发射装置的装置和方法，所述装置和方法具有布置在或指向真空中的至少一个粒子发射器（3） 具有用于发射颗粒的至少一个场发射器尖端（4）的空间（2），并且具有归因于用于聚焦发射的粒子束（5）的粒子发射体（3）的磁场发生器（6），与 具有其场发射极尖端（4）的粒子发射器（3）由位于离开磁场发生器（6）的衬底（8）的表面（7）上的发射器结构（9）构成，并且 基板（8），其形成为位于真空空间（2）和位于真空空间（2）外侧的大气空间（10）之间的分离壁，所述空间（2）位于离开发射器结构的基板（8）的侧面（14） 9）。

公开(公告)号：US20090314937A1

公开(公告)日：2009-12-24

申请号：US12309047

申请日：2007-06-22

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： G01N23/00 ,  G21K1/08

CPC分类号： H01J37/28 ,  H01J37/073 ,  H01J37/244 ,  H01J37/265 ,  H01J37/3005 ,  H01J37/3045 ,  H01J2237/06341 ,  H01J2237/24495 ,  H01J2237/2826 ,  H01J2237/30455

摘要： The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is scanned by the object (5). The aim of the invention is to provide a method and a device for producing an image of an object (5) by means of a particle beam that can be used with a cold field emitter (2) in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object (5) is rescanned preferably with the corrected parameter. The inventive device (1) comprises the corresponding means (4, 6, 7) therefor.

摘要翻译： 本发明涉及一种用于通过粒子束产生物体（5）的图像的装置（1）。 根据该方法和在装置（1）中，粒子束被物体（5）扫描。 本发明的目的是提供一种用于通过可与冷场发射器（2）一起使用的粒子束来产生物体（5）的图像的方法和装置，使得良好的图像质量 不断得到保证。 所述目的通过以下事实实现：根据本发明，当改变辐射参数时，优选地用修正的参数来重新对准物体（5）。 本发明的装置（1）包括相应的装置（4,6,7）。

公开(公告)号：US20070023672A1

公开(公告)日：2007-02-01

申请号：US10552296

申请日：2004-03-29

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： H01J3/14

CPC分类号： H01J37/243 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3023 ,  H01J37/3174 ,  H01J2237/06341 ,  H01J2237/31774 ,  H01J2237/31796

摘要： An apparatus for producing a beam of charged particles is provided, which comprises an emitter (1, 2) and a switching device (3) adapted to switch between first, second and third beam current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample, the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and the beam current at said third current level is lower than the beam current at the second current level. Furthermore, a method of controlling the beam current of a charged particle beam is provided, comprising the steps of switching the beam current of said charged particle beam between first and second current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample and the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and switching the beam current to a third voltage level, wherein the beam current at said third current level is lower than the beam current at the second current level.

摘要翻译： 提供一种用于产生带电粒子束的装置，其包括适于在第一，第二和第三束电流水平之间切换的发射极（1,2）和开关装置（3），其中所述第一电流电平 适合于在样品的表面上写入图像的像素，所述第二电流水平的束电流适于不在所述样品的表面上写入像素，并且所述第三电流水平的束电流低于 在第二电流电平的光束电流。 此外，提供了一种控制带电粒子束的束流的方法，包括以下步骤：将所述带电粒子束的束电流切换在第一和第二电流水平之间，其中所述第一电流水平的束电流适于写入 在样品表面上的图像的像素和在所述第二电流电平处的束电流适合于不在所述样品的表面上写入像素，并且将束电流切换到第三电压电平，其中， 所述第三电流水平低于在第二电流水平的束电流。

公开(公告)号：US20050230621A1

公开(公告)日：2005-10-20

申请号：US11106368

申请日：2005-04-14

申请人： Klaus Edinger ,  Josef Sellmair ,  Thorsten Hofmann

发明人： Klaus Edinger ,  Josef Sellmair ,  Thorsten Hofmann

IPC分类号： G01N23/00 ,  G01N23/227 ,  H01J37/02 ,  H01J37/28

CPC分类号： H01J37/026 ,  G01N23/2273 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0044 ,  H01J2237/026

摘要： An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.

摘要翻译： 提供了一种用于研究和/或修饰具有带电粒子的样品的装置，特别是扫描电子显微镜。 该设备包括带电粒子的束（1,2），具有用于带电粒子束通过的开口（30）的屏蔽元件（10），其中开口（30）足够小并且屏蔽元件 10）足够紧密地定位于样品的表面（20），以减少带电粒子束上的表面处的电荷累积效应的影响。

公开(公告)号：US08242674B2

公开(公告)日：2012-08-14

申请号：US12449919

申请日：2008-02-28

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： H01J1/50

CPC分类号： H01J37/073 ,  H01J37/063 ,  H01J37/08 ,  H01J37/141 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/06341 ,  H01J2237/06375 ,  H01J2237/0807 ,  H01J2237/0815 ,  H01J2237/142

摘要： The invention relates to an apparatus and a method for production of a device for thermally induced field emission of particles for particle optical devices such as in particular electron or ion microscopes, having at least one particle emitter (3) arranged in or pointing into a vacuum space (2) with at least one field emitter tip (4) for the emission of the particles, and having a magnetic field generator (6) attributed to the particle emitter (3) for focussing of the emitted particle beam (5), with the particle emitter (3) with its field emitter tip (4) is built by emitter structures (9) positioned on the surface (7) of a substrate (8) which is turned away from the magnetic field generator (6), and the substrate (8) formed as separating wall between vacuum space (2) and the atmospheric space (10) situated outside the vacuum space (2) at the side (14) of the substrate (8) which is turned away from the emitter structures (9).

摘要翻译： 本发明涉及一种用于制造用于颗粒光学器件（例如电子或离子显微镜）的颗粒光学器件的热感应场发射装置的装置和方法，所述装置和方法具有布置在或指向真空中的至少一个粒子发射器（3） 具有用于发射颗粒的至少一个场发射器尖端（4）的空间（2），并且具有归因于用于聚焦发射的粒子束（5）的粒子发射器（3）的磁场发生器（6），与 具有其场发射极尖端（4）的粒子发射器（3）由位于离开磁场发生器（6）的衬底（8）的表面（7）上的发射器结构（9）构成，并且 基板（8），其形成为位于真空空间（2）和位于真空空间（2）外侧的大气空间（10）之间的分离壁，所述空间（2）位于离开发射器结构的基板（8）的侧面（14） 9）。

公开(公告)号：US08076641B2

公开(公告)日：2011-12-13

申请号：US12309047

申请日：2007-06-22

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： H01J37/26 ,  H01J37/28

CPC分类号： H01J37/28 ,  H01J37/073 ,  H01J37/244 ,  H01J37/265 ,  H01J37/3005 ,  H01J37/3045 ,  H01J2237/06341 ,  H01J2237/24495 ,  H01J2237/2826 ,  H01J2237/30455

摘要： The invention relates to a method and to a device (1) for producing an image of an object (5) by means of a particle beam. According to the method and in the device (1), the particle beam is scanned by the object (5). The aim of the invention is to provide a method and a device for producing an image of an object (5) by means of a particle beam that can be used with a cold field emitter (2) in such a manner that a good image quality is constantly ensured. Said aim is achieved by virtue of the fact that, according to the invention, when a radiation parameter is altered, the object (5) is rescanned preferably with the corrected parameter. The inventive device (1) comprises the corresponding means (4, 6, 7) therefor.

摘要翻译： 本发明涉及一种用于通过粒子束产生物体（5）的图像的装置（1）。 根据该方法和在装置（1）中，粒子束被物体（5）扫描。 本发明的目的是提供一种用于通过可与冷场发射器（2）一起使用的粒子束来产生物体（5）的图像的方法和装置，使得良好的图像质量 不断得到保证。 所述目的通过以下事实来实现：根据本发明，当改变辐射参数时，优选地用修正的参数对对象（5）进行重新扫描。 本发明的装置（1）包括相应的装置（4,6,7）。

公开(公告)号：US07345436B2

公开(公告)日：2008-03-18

申请号：US10552296

申请日：2004-03-29

申请人： Josef Sellmair

发明人： Josef Sellmair

IPC分类号： H01J3/14 ,  H01J3/02 ,  H01J49/08

CPC分类号： H01J37/243 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3023 ,  H01J37/3174 ,  H01J2237/06341 ,  H01J2237/31774 ,  H01J2237/31796

摘要： An apparatus for producing a beam of charged particles is provided, which comprises an emitter (1, 2) and a switching device (3) adapted to switch between first, second and third beam current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample, the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and the beam current at said third current level is lower than the beam current at the second current level. Furthermore, a method of controlling the beam current of a charged particle beam is provided, comprising the steps of switching the beam current of said charged particle beam between first and second current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample and the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and switching the beam current to a third voltage level, wherein the beam current at said third current level is lower than the beam current at the second current level.

摘要翻译： 提供一种用于产生带电粒子束的装置，其包括适于在第一，第二和第三束电流水平之间切换的发射极（1,2）和开关装置（3），其中所述第一电流电平 适合于在样品的表面上写入图像的像素，所述第二电流水平的束电流适于不在所述样品的表面上写入像素，并且所述第三电流水平的束电流低于 在第二电流电平的光束电流。 此外，提供了一种控制带电粒子束的束流的方法，包括以下步骤：将所述带电粒子束的束电流切换在第一和第二电流水平之间，其中所述第一电流水平的束电流适于写入 在样品表面上的图像的像素和在所述第二电流电平处的束电流适合于不在所述样品的表面上写入像素，并且将束电流切换到第三电压电平，其中， 所述第三电流水平低于在第二电流水平的束电流。

公开(公告)号：US07232997B2

公开(公告)日：2007-06-19

申请号：US11106368

申请日：2005-04-14

申请人： Klaus Edinger ,  Josef Sellmair ,  Thorsten Hofmann

发明人： Klaus Edinger ,  Josef Sellmair ,  Thorsten Hofmann

IPC分类号： G01N23/00

CPC分类号： H01J37/026 ,  G01N23/2273 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/0044 ,  H01J2237/026

摘要： An apparatus for investigating and/or modifying a sample with charged particles, in particular a scanning electron microscope, is provided. The apparatus comprises a beam (1, 2) of charged particles, a shielding element (10) having an opening (30) for the beam of charged particles to pass through, wherein the opening (30) is sufficiently small and the shielding element (10) sufficiently closely positioned to the surface (20) of the sample to reduce the influence of charge accumulation effects at the surface on the beam of charged particles.

摘要翻译： 提供了一种用于研究和/或修饰具有带电粒子的样品的装置，特别是扫描电子显微镜。 该设备包括带电粒子的束（1,2），具有用于带电粒子束通过的开口（30）的屏蔽元件（10），其中开口（30）足够小并且屏蔽元件 10）足够紧密地定位于样品的表面（20），以减少带电粒子束上的表面处的电荷累积效应的影响。