公开(公告)号：US20250132117A1

公开(公告)日：2025-04-24

申请号：US18689842

申请日：2022-09-05

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073 ,  H01J37/244 ,  H01J37/28 ,  H01J37/285

Abstract: An object is to provide a creation method of detection data based on a novel principle. The creation method includes: an electron beam irradiation step of irradiating an irradiation region with an electron beam; a detection step of detecting an emission quantity data from the irradiation region and generating a detection signal; a quantity of light adjustment step of adjusting a quantity of light reaching a photocathode from a light source so that a signal intensity of the detection signal is a preset value; a step of repeating the electron beam irradiation step, the detection step, and the quantity of light adjustment step until the signal intensity of the detection signal becomes the preset value; and a detection data output step of outputting the quantity of light adjustment data where the signal intensity of the detection signal is the preset value as detection data on the irradiation region.

公开(公告)号：US20240212967A1

公开(公告)日：2024-06-27

申请号：US18556080

申请日：2022-03-25

Applicant: Photo electron Soul Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/0473 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/0835 ,  H01J2237/30483

Abstract: Provided is an electron gun that can have a setting to make it possible to irradiate a desired location on an irradiation target with an electron beam having a desired electron beam parameter by using only the component included in the electron gun. This object can be achieved by an electron gun including: a light source; a photocathode configured to generate releasable electrons in response to receiving light from the light source; an anode configured to generate an electric field between the photocathode and the anode, extract the releasable electrons by the generated electric field, and form an electron beam; and a control unit, and the control unit sets the number of emission times of the electron beam and sets an electron beam parameter for each emitting electron beam, or sets an emission duration of the electron beam and sets an electron beam parameter of an emitting electron beam in association with the emission duration.

公开(公告)号：US20230230794A1

公开(公告)日：2023-07-20

申请号：US17996215

申请日：2021-03-30

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Daiki Sato

IPC: H01J37/073

CPC classification number: H01J37/073 ,  H01J2237/06333 ,  H01J2237/0653 ,  H01J2237/30472

Abstract: An object is to provide an electron gun that can extend the lifetime of a photocathode. The object can be achieved by an electron gun including: a substrate having a photocathode film formed on a first face; a light source for irradiating the photocathode film with excitation light; an anode; a heater device for heating the photocathode film and/or the substrate; and an output adjustment device that adjusts a heating temperature of the heater device.

公开(公告)号：US12198889B2

公开(公告)日：2025-01-14

申请号：US17044850

申请日：2020-05-08

Applicant: Photo electron Soul Inc.

Inventor： Atsushi Koizumi ,  Hokuto Iijima

IPC: H01J37/073 ,  H01J37/063

Abstract: The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by an electron gun comprising a light source, a photocathode that emits an electron beam in response to receiving light from the light source, an anode, an electron-beam-shielding member with which it is possible to shield part of the electron beam, and a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.

公开(公告)号：US11417494B2

公开(公告)日：2022-08-16

申请号：US17055984

申请日：2019-05-14

Applicant: Photo electron Soul Inc.

Inventor： Reiki Watanabe ,  Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: H01J37/147 ,  H01J37/073 ,  H01J3/02 ,  H01J1/34

Abstract: The present invention addresses the problem of providing a method for automatically adjusting an electron beam emitted from an electron gun equipped with a photocathode to the incident axis of an electron optical system.
[Solution] An incident axis alignment method for an electron gun equipped with a photocathode, the electron gun being capable of emitting an electron beam in a first state due to the photocathode being irradiated with excitation light, and the method including at least an excitation light radiation step, a first excitation light irradiation position adjustment step for changing the irradiation position of the excitation light on the photocathode and adjusting the irradiation position of the excitation light, and an electron beam center detection step for detecting whether a center line of the electron beam in the first state coincides with an incident axis of an electron optical system.

公开(公告)号：US12033827B2

公开(公告)日：2024-07-09

申请号：US17604368

申请日：2020-07-31

Applicant: Photo electron Soul Inc.

Inventor： Haruka Shikano ,  Daiki Sato ,  Reiki Watanabe ,  Tomoaki Moriya ,  Hokuto Iijima

IPC: H01J1/34 ,  H01J37/073

CPC classification number: H01J1/34 ,  H01J37/073

Abstract: Provided is a photocathode kit that does not require adjustment of the distance between a photocathode film and a lens focusing on the photocathode film when the photocathode and the lens are installed inside an electron gun. The photocathode kit includes: a photocathode including a substrate in which a photocathode film is formed on a first surface; a lens; and a holder that holds the substrate and the lens, and the holder has a retaining member that retains the photocathode film and the lens to be spaced apart by a predetermined distance, and a first communication path that communicates between inside of the holder and outside of the holder.

公开(公告)号：US20240222062A1

公开(公告)日：2024-07-04

申请号：US18556076

申请日：2022-03-25

Applicant: Photo electron Soul, Inc.

Inventor： Tomohiro NISHITANI

IPC: H01J37/147 ,  H01J1/34 ,  H01J37/073

CPC classification number: H01J37/1471 ,  H01J1/34 ,  H01J37/073 ,  H01J2201/3423 ,  H01J2237/0203

Abstract: Provided are an electron gun that can extend the lifetime of a photocathode, an electron beam applicator on which the electron gun is mounted, and an irradiation position moving method. This object can be achieved by an electron gun including: a light source; a photocathode that emits an electron beam in response to receiving light from the light source; an anode; a motion device that moves excitation light irradiating the photocathode; and a control unit, the control unit controls the motion device to move an irradiation position of the excitation light from a position Rn (n is a natural number) on the photocathode to a position Rn+1 outside an excitation light irradiation-caused deteriorated range associated with the position Rn, the excitation light irradiation-caused deteriorated range is a range where the photocathode is deteriorated due to irradiation with the excitation light, and the distance between the center of a spot of the excitation light at the position Rn and the center of a spot of the excitation light at the position Rn+1 is at least three or more times a spot diameter of the excitation light on the photocathode.

公开(公告)号：US20230131413A1

公开(公告)日：2023-04-27

申请号：US17044850

申请日：2020-05-08

Applicant: Photo electron Soul Inc.

Inventor： Atsushi KOIZUMI ,  Hokuto IIJIMA

IPC: H01J37/073 ,  H01J37/063

Abstract: The present disclosure addresses the problem of providing an electron gun that can directly monitor an intensity of an electron beam emitted from a photocathode using only the configuration provided to the electron gun, an electron beam applicator equipped with an electron gun, and a method for controlling an electron gun.
The aforementioned problem can be solved by an electron gun comprising a light source, a photocathode that emits an electron beam in response to receiving light from the light source, an anode, an electron-beam-shielding member with which it is possible to shield part of the electron beam, and a measurement unit that measures the intensity of the electron beam emitted from the photocathode using a measurement electron beam shielded by the electron-beam-shielding member.

公开(公告)号：US20200080949A1

公开(公告)日：2020-03-12

申请号：US16609728

申请日：2018-12-20

Applicant: PHOTO ELECTRON SOUL INC.

Inventor： Tomohiro Nishitani ,  Atsushi Koizumi ,  Haruka Shikano

IPC: G01N23/2251 ,  H01J37/073 ,  H01J37/244

Abstract: The present invention addresses the problem of providing a sample inspection device and a sample inspection method, whereby noise is removed from a detection signal, and a generated electron beam is utilized effectively for inspection. A sample inspection device according to the present invention is provided with a light source for emitting frequency-modulated light, a photocathode for emitting an electron beam in response to receiving the frequency-modulated light, a detector for detecting electrons emitted from a sample irradiated by the electron beam and generating a detection signal, and a signal extractor for extracting a signal having a frequency corresponding to a modulation frequency of the frequency-modulated light from within the detection signal.

公开(公告)号：US12080507B2

公开(公告)日：2024-09-03

申请号：US17763186

申请日：2020-09-04

Applicant: Photo electron Soul Inc.

Inventor： Hokuto Iijima

IPC: H01J3/02 ,  H01J1/34 ,  H01J1/52 ,  H01J3/10 ,  H01J37/073

CPC classification number: H01J3/021 ,  H01J1/34 ,  H01J1/52 ,  H01J3/10 ,  H01J37/073 ,  H01J2237/06333

Abstract: An object is to provide an electron gun that makes it possible to verify whether or not an electron beam emitted form a photocathode is misaligned from a designed emission center axis. The object can be achieved by an electron gun including: a light source; a photocathode; and an anode. The electron gun includes an intermediate electrode arranged between the photocathode and the anode, an electron beam shielding member configured to block a part of an electron beam, a measurement unit configured to measure an intensity of an electron beam blocked by the electron beam shielding member, and an electron beam emission direction deflector arranged between the anode and the electron beam shielding member and configured to change a position where an electron beam that passed through the anode reaches the electron beam shielding member. The intermediate electrode has an electron beam passage hole and a drift space.