公开(公告)号：US06661637B2

公开(公告)日：2003-12-09

申请号：US09954670

申请日：2001-09-18

Applicant: Robert B. McIntosh ,  Steven R. Patterson

Inventor： Robert B. McIntosh ,  Steven R. Patterson

IPC: H02H2300

CPC classification number: G01L9/0072 ,  G01D5/2417 ,  G01L9/0075 ,  G01L9/12 ,  G01L11/008 ,  G01P15/125 ,  G01P15/131

Abstract: A micro-opto-electro-mechanical transducer in which an optical element is angularly positioned by electrical field coupling. Movable electrodes of two orthogonally disposed, differential variable capacitors are coupled to the optical element constrained by structural means to angular displacement around two free-axes of rotation. Cooperating stationary capacitor electrodes with surface contoured regions facing the movable electrodes are affixed to the structural means. A thin dielectric layer of high permittivity material provides a region of fixed spacing between the capacitor electrodes. The surface contoured regions constrain the approach of the movable electrodes with angular displacement of the optical element. Both the open-loop gain and the equilibrium voltage-angle response of the transducer is largely independent of displacement. Electrostatic force feedback maintains the optical element at voltage programmed positions of static equilibrium over a wide angular range of tip and tilt. In simpler embodiments, the optical element is angularly positioned in one direction around one axis of rotation. A preferred method of control allows an electrode of each variable capacitor to be electrically grounded.

公开(公告)号：US06646779B2

公开(公告)日：2003-11-11

申请号：US10002408

申请日：2001-11-15

Applicant: Peter B. Mumola ,  Flemming Tinker ,  Steven R. Patterson

Inventor： Peter B. Mumola ,  Flemming Tinker ,  Steven R. Patterson

IPC: G02B2600

CPC classification number: G02B26/0833

Abstract: A strain-isolated mirror is made from a substrate having first and second body portions. First and second connecting portions extend across a gap between the first body portion and the second body portion. A first flexural hinge on the first second connecting portion couples the second connecting portion to the first body portion.

公开(公告)号：US06206966B1

公开(公告)日：2001-03-27

申请号：US09164414

申请日：1998-09-30

Applicant: Layton C. Hale ,  Terry N. Malsbury ,  Steven R. Patterson

Inventor： Layton C. Hale ,  Terry N. Malsbury ,  Steven R. Patterson

IPC: B05C1300

CPC classification number: G02B7/00 ,  G02B1/10 ,  G02B7/008 ,  G03F7/70825

Abstract: A pedestal optical substrate that simultaneously provides high substrate dynamic stiffness, provides low surface figure sensitivity to mechanical mounting hardware inputs, and constrains surface figure changes caused by optical coatings to be primarily spherical in nature. The pedestal optical substrate includes a disk-like optic or substrate section having a top surface that is coated, a disk-like base section that provides location at which the substrate can be mounted, and a connecting cylindrical section between the base and optics or substrate sections. The connecting cylindrical section may be attached via three spaced legs or members. However, the pedestal optical substrate can be manufactured from a solid piece of material to form a monolith, thus avoiding joints between the sections, or the disk-like base can be formed separately and connected to the connecting section. By way of example, the pedestal optical substrate may be utilized in the fabrication of optics for an extreme ultraviolet (EUV) lithography imaging system, or in any optical system requiring coated optics and substrates with reduced sensitivity to mechanical mounts.

Abstract translation: 同时提供高基板动态刚度的基座光学基板，为机械安装硬件输入提供低的表面图灵敏度，并且将由光学涂层引起的表面图形变化限制为主要是球形的。 基座光学基板包括具有被涂覆的顶表面的盘状光学元件或基板部分，提供可安装基板的位置的盘状基部部分和基部与光学元件或基板之间的连接圆柱形部分 部分。 连接圆柱形部分可以通过三个间隔开的腿或构件附接。 然而，基座光学基板可以由固体材料制成以形成整料，从而避免了两部分之间的接合，或者可以单独地形成盘状基底并连接到连接部分。 作为示例，基座光学基板可以用于制造用于极紫外（EUV）光刻成像系统的光学器件，或者可用于需要涂覆的光学器件和对机械安装件的灵敏度降低的基板的任何光学系统中。

公开(公告)号：US6151967A

公开(公告)日：2000-11-28

申请号：US37733

申请日：1998-03-10

Applicant: Robert B. McIntosh ,  Philip E. Mauger ,  Steven R. Patterson ,  Gene A. Goodman

Inventor： Robert B. McIntosh ,  Philip E. Mauger ,  Steven R. Patterson ,  Gene A. Goodman

IPC: G01D5/241 ,  G01L9/00 ,  G01L9/12 ,  G01L11/00 ,  G01P15/125 ,  G01P15/13

CPC classification number: B81B3/0086 ,  G01D5/2417 ,  G01L11/008 ,  G01L9/0072 ,  G01L9/0075 ,  G01L9/12 ,  G01P15/125 ,  G01P15/131 ,  B81B2201/0264 ,  B81B2203/0392

Abstract: A variable area capacitor with a flexible electrode responsive to a physical effect and a rigid electrode with a predetermined surface contour. The surface contour is dimensioned to provide a specific change in capacitance with deflection of the flexible electrode. A thin dielectric layer maintains a substantially fixed spacing between the two electrodes. Preferred embodiments include a pressure sensor, microphone and accelerometer. A differential transconductance amplifier detects changes of the variable capacitor in a low-impedance, bridge-like circuit and feeds back current to balance the bridge. The voltage that controls the feedback current is proportional to capacitance over a wide dynamic range.

Abstract translation: 具有响应于物理效应的柔性电极的可变面积电容器和具有预定表面轮廓的刚性电极。 表面轮廓的尺寸被设计为提供柔性电极的电容的特定变化。 薄的电介质层在两个电极之间保持基本上固定的间隔。 优选实施例包括压力传感器，麦克风和加速度计。 差分跨导放大器检测低阻抗桥式电路中的可变电容器的变化，并反馈电流以平衡桥。 控制反馈电流的电压与宽动态范围内的电容成正比。

公开(公告)号：US07426039B2

公开(公告)日：2008-09-16

申请号：US11338127

申请日：2006-01-23

Applicant: Vivek G Badami ,  Steven R Patterson

Inventor： Vivek G Badami ,  Steven R Patterson

IPC: G01B9/02

CPC classification number: G01B9/02003 ,  G01B9/02021 ,  G01B9/02057 ,  G01B11/161 ,  G01B2290/70 ,  G01N25/16

Abstract: An instrument for measuring dimensional changes in materials, such as ultra-low thermal expansion materials, contains an optically balanced measuring loop. Both an object beam and a loop beam propagate around the measuring loop. The object beam encounters both opposite side surfaces of the test object and the loop beam encounters remaining components of the measuring loop in common with the object beam. The object and loop beams can be separately compared to reference beams for producing heterodyne signal beams.

Abstract translation: 用于测量诸如超低热膨胀材料的材料尺寸变化的仪器包含光学平衡的测量回路。 物体光束和环形光束都在测量环路周围传播。 物体光束遇到测试对象的两个相对侧面，并且环形光束遇到与物体光束相同的测量回路的剩余部分。 对象和环路光束可以分别与用于产生外差信号光束的参考光束进行比较。

公开(公告)号：US06556417B2

公开(公告)日：2003-04-29

申请号：US09834691

申请日：2001-04-13

Applicant: Robert B. McIntosh ,  Philip E. Mauger ,  Steven R. Patterson

Inventor： Robert B. McIntosh ,  Philip E. Mauger ,  Steven R. Patterson

IPC: H01G501

CPC classification number: G01D5/2417 ,  B81B3/0086 ,  B81B2201/0264 ,  B81B2203/0392 ,  G01L9/0072 ,  G01L9/0075 ,  G01L9/12 ,  G01L11/008 ,  G01P15/125 ,  G01P15/131 ,  G01R27/2605 ,  Y10T29/43

Abstract: A method to construct a capacitive transducers comprising the steps of forming over and in a planar surface of a substrate at least one rigid electrode of a variable-area capacitor electrically connected to a location on said substrate reserved for electrode attachment; providing a cooperating flexible electrode with a dielectric layer; and bonding said flexible electrode to said substrate in a surface region surrounding said rigid electrode.

Abstract translation: 一种构造电容换能器的方法，包括以下步骤：在基板的平面表面上形成至少一个电连接到所述基板上用于电极附着的基板上的位置的可变面积电容器的刚性电极; 提供具有电介质层的配合的柔性电极; 以及在围绕所述刚性电极的表面区域中将所述柔性电极接合到所述衬底。

公开(公告)号：US08797548B2

公开(公告)日：2014-08-05

申请号：US13398333

申请日：2012-02-16

Applicant: Carl M. Edwards ,  Dustin W. Carr ,  Steven R. Patterson

Inventor： Carl M. Edwards ,  Dustin W. Carr ,  Steven R. Patterson

IPC: G01B11/02

CPC classification number: G01V8/02

Abstract: An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.

Abstract translation: 一种用于使用来自两个或更多个电磁束的光束特性的值估计感兴趣参数的装置和方法，所述两个或更多个电磁束通过光学位移装置的至少一部分。 该装置可以包括法布里 - 珀罗干涉仪，准直光源和检测阵列。 干涉仪的至少一个反射镜可以可操作地耦合到接收诸如压力，力和/或加速度的外部刺激的元件。 该方法包括使用该装置。

公开(公告)号：US20120212745A1

公开(公告)日：2012-08-23

申请号：US13398333

申请日：2012-02-16

Applicant: Carl M. Edwards ,  Dustin W. Carr ,  Steven R. Patterson

Inventor： Carl M. Edwards ,  Dustin W. Carr ,  Steven R. Patterson

IPC: G01B11/02

CPC classification number: G01V8/02

Abstract: An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus.

Abstract translation: 一种用于使用来自两个或更多个电磁束的光束特性的值估计感兴趣参数的装置和方法，所述两个或更多个电磁束通过光学位移装置的至少一部分。 该装置可以包括法布里 - 珀罗干涉仪，准直光源和检测阵列。 干涉仪的至少一个反射镜可以可操作地耦合到接收诸如压力，力和/或加速度的外部刺激的元件。 该方法包括使用该装置。

公开(公告)号：US07239397B2

公开(公告)日：2007-07-03

申请号：US10900484

申请日：2004-07-27

Applicant: Vivek G. Badami ,  Steven R. Patterson

Inventor： Vivek G. Badami ,  Steven R. Patterson

IPC: G01B9/02

CPC classification number: G01B9/02003 ,  G01B9/02021 ,  G01B9/02027 ,  G01B11/161 ,  G01B2290/45 ,  G01B2290/70 ,  G01N25/16

Abstract: Thermal expansion characteristics of test materials of ultra-low thermal expansion material are measured with a test beam that is split into a test material-measuring portion and an instrument-measuring portion. Both measuring portions propagate through common portions of a test arm. The test material-measuring portion encounters a test material, but the instrument-measuring portion does not. Thermal expansion characteristics of the test material are measured to high accuracy by manipulating the measures to distinguish displacements associated with the test material from displacements associated with the instrument structure.

Abstract translation: 使用被分割成测试材料测量部分和仪器测量部分的测试光束来测量超低热膨胀材料的测试材料的热膨胀特性。 两个测量部分都通过测试臂的公共部分传播。 测试材料测量部分遇到测试材料，但仪器测量部分没有。 通过操纵与测试材料相关的位移与与仪器结构相关的位移的措施来测量测试材料的热膨胀特性以获得高精度。

公开(公告)号：US06181420B2

公开(公告)日：2001-01-30

申请号：US09168200

申请日：1998-10-06

Applicant: Vivek G. Badami ,  Steven R. Patterson ,  Carl A. Zanoni

Inventor： Vivek G. Badami ,  Steven R. Patterson ,  Carl A. Zanoni

IPC: G01B902

CPC classification number: G01B9/02087 ,  G01B9/02007 ,  G01B2290/45 ,  G01B2290/70 ,  G03F7/70775

Abstract: The invention features a phase measurement system for minimizing cyclic errors in a relative phase between exit reference and measurement beams emerging from an interferometer. The phase measurement system includes: a first optical processing channel including a first polarizer and a first detector, wherein during operation a first portion of the exit reference and measurement beams pass through the first polarizer to produce a first mixed beam and wherein the first detector measures an intensity of the first mixed beam; a second optical processing channel including a quarter wave retarder, a second polarizer, and a second detector, wherein during operation a second portion of the exit reference and measurement beams passes through the retarder and then the second polarizer to produce a second mixed beam and wherein the second detector measures an intensity of the second mixed beam; and a signal processor which during operation receives signals from the first and second detectors indicative of the intensities of the first and second mixed beams and processes the signals to determine, and minimize cyclic errors in, the relative phase between the exit reference and measurement beams. The invention also features interferometry, lithography, and beam writing systems that include the phase measurement system to improve the accuracy of interferometric distance measurements.

Abstract translation: 本发明的特征在于一种相位测量系统，用于最小化从干涉仪出射的出射基准和测量光束之间的相对相位中的循环误差。 相位测量系统包括：包括第一偏振器和第一检测器的第一光学处理通道，其中在操作期间，出射基准和测量光束的第一部分通过第一偏振器以产生第一混合光束，并且其中第一检测器测量 第一混合梁的强度; 第二光学处理通道，包括四分之一波长延迟器，第二偏振器和第二检测器，其中在操作期间，出射基准和测量光束的第二部分穿过延迟器，然后穿过第二偏振器，以产生第二混合光束，并且其中 第二检测器测量第二混合光束的强度; 以及信号处理器，其在操作期间接收来自第一和第二检测器的信号，指示第一和第二混合光束的强度，并处理信号以确定出口参考和测量光束之间的相对相位中的循环误差。 本发明还具有干涉测量，光刻和波束写入系统，其包括相位测量系统以提高干涉距离测量的精度。