-
公开(公告)号：US10126659B2
公开(公告)日：2018-11-13
申请号：US15286319
申请日：2016-10-05
Applicant: ASML NETHERLANDS B.V.
Inventor： Ferry Zijp , Sietse Thijmen Van Der Post , Fanhe Kong , Duygu Akbulut
IPC: G03B27/68 , G03F7/20 , G02B21/24 , G01N21/956
Abstract: A method including obtaining a plurality of radiation distributions of measurement radiation redirected by the target, each of the plurality of radiation distributions obtained at a different gap distance between the target and an optical element of a measurement apparatus, the optical element being the nearest optical element to the target used to provide the measurement radiation to the target, and determining a parameter related to the target using data of the plurality of radiation distributions in conjunction with a mathematical model describing the measurement target.
-
公开(公告)号：US09927722B2
公开(公告)日：2018-03-27
申请号：US15052201
申请日：2016-02-24
Applicant: ASML NETHERLANDS B.V.
Inventor： Koos Van Berkel , Duygu Akbulut , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
IPC: G03F7/20 , G03F9/00 , G02B21/00 , G01N21/956
CPC classification number: G03F7/70775 , G01N21/956 , G02B21/0016 , G03F7/70625 , G03F7/70633 , G03F9/7019
Abstract: A method and apparatus for position control of a component relative to a surface is disclosed. The method may include calculating an estimated effect of, or derived from, Casimir force acting between the component and the surface, and compensating positioning of the component relative to the surface using the estimated effect.
-
公开(公告)号：US11145428B2
公开(公告)日：2021-10-12
申请号：US16440099
申请日：2019-06-13
Applicant: ASML Netherlands B.V.
Inventor： Ferry Zijp
Abstract: Some embodiment describe a reflector comprising a hollow body having an interior surface defining a passage. The interior surface has an optical surface part configured to reflect radiation and a supporter surface part. The optical surface part has a predetermined optical power and the supporter surface part does not. The reflector can be made by providing an axially symmetric mandrel, shaping a part of the circumferential surface of the mandrel to form an inverse optical surface part that is not rotationally symmetric about the axis of the mandrel, forming a reflector body around the mandrel and releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.
-
公开(公告)号：US20190384184A1
公开(公告)日：2019-12-19
申请号：US16431833
申请日：2019-06-05
Applicant: ASML Netherlands B.V.
Inventor： Nitesh Pandey , Arie Jeffrey Den Boef , Duygu Akbulut , Marinus Johannes Maria Van Dam , Hans Butler , Hugo Augustinus Joseph Cramer , Engelbertus Antonius Fransiscu Van Der Pasch , Ferry Zijp , Jeroen Arnoldus Leonardus Raaymakers , Marinus Petrus Reijnders
IPC: G03F7/20 , G01N21/956
Abstract: A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.
-
公开(公告)号：US20160266503A1
公开(公告)日：2016-09-15
申请号：US15065674
申请日：2016-03-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Peter Danny Van Voorst , Duygu Akbulut , Koos Van Berkel , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
CPC classification number: G03F7/70483 , G01B11/00 , G01N21/956 , G02B21/0016 , G02B21/33 , G02B27/0988 , G03F7/70625 , G03F7/70633
Abstract: A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.
Abstract translation: 公开了一种光学部件相对于表面的位置控制的方法。 该方法可以包括：通过第一位置测量处理获得第一信号; 使用所述第一信号来控制所述光学部件和所述表面之间的第一运动范围的相对运动; 通过与第一位置测量处理不同的第二位置测量处理获得第二信号; 以及使用所述第二信号来控制所述光学部件和所述表面之间的相对运动的第二运动范围，所述第二运动范围比所述第一运动范围更靠近所述表面。
-
Patent Agency Ranking
公开(公告)号：US12086973B2
公开(公告)日：2024-09-10
申请号：US17608015
申请日：2020-04-02
Applicant: ASML Netherlands B.V.
Inventor： Teunis Willem Tukker , Arie Jeffrey Den Boef , Nitesh Pandey , Marinus Petrus Reijnders , Ferry Zijp
CPC classification number: G06T7/0004 , G01N21/4788 , G02B5/3083 , G02B27/283 , G02B27/4205 , G03F7/70616 , G03F7/706851 , G06T2207/10148 , G06T2207/30148
Abstract: Disclosed is a detection apparatus for simultaneous acquisition of multiple images of an object at a plurality of different focus levels; comprising: a modulator for obtaining multiple beam copies of an incoming beam; and a detector operable to capture said multiple beam copies, such that at two of said multiple beam copies are captured at different focus levels. Also disclosed is an inspection apparatus comprising such a detection system.
-
公开(公告)号：US11940739B2
公开(公告)日：2024-03-26
申请号：US17562446
申请日：2021-12-27
Applicant: ASML Netherlands B.V.
Inventor： Nitesh Pandey , Arie Jeffrey Den Boef , Duygu Akbulut , Marinus Johannes Maria Van Dam , Hans Butler , Hugo Augustinus Joseph Cramer , Engelbertus Antonius Fransiscus Van Der Pasch , Ferry Zijp , Jeroen Arnoldus Leonardus Johannes Raaymakers , Marinus Petrus Reijnders
IPC: G03F7/20 , G01N21/956 , G03F7/00
CPC classification number: G03F7/70625 , G01N21/956 , G03F7/7015 , G03F7/70633
Abstract: A metrology tool for determining a parameter of interest of a structure fabricated on a substrate, the metrology tool comprising: an illumination optical system for illuminating the structure with illumination radiation under a non-zero angle of incidence; a detection optical system comprising a detection optical sensor and at least one lens for capturing a portion of illumination radiation scattered by the structure and transmitting the captured radiation towards the detection optical sensor, wherein the illumination optical system and the detection optical system do not share an optical element.
-
公开(公告)号：US11694821B2
公开(公告)日：2023-07-04
申请号：US17409213
申请日：2021-08-23
Applicant: ASML Netherlands B.V.
Inventor： Ferry Zijp
CPC classification number: G21K1/06 , B24C1/08 , G21K1/067 , G21K2201/064 , G21K2201/067
Abstract: A reflector comprising a hollow body having an interior surface defining a passage through the hollow body, the interior surface having at least one optical surface part configured to reflect radiation and a supporter surface part, wherein the optical surface part has a predetermined optical power and the supporter surface part does not have the predetermined optical power. The reflector is made by providing an axially symmetric mandrel;
shaping a part of the circumferential surface of the mandrel to form at least one inverse optical surface part that is not rotationally symmetric about the axis of the mandrel;
forming a reflector body around the mandrel; and
releasing the reflector body from the mandrel whereby the reflector body has an optical surface defined by the inverse optical surface part and a supporter surface part defined by the rest of the outer surface of the mandrel.-
公开(公告)号：US11237484B2
公开(公告)日：2022-02-01
申请号：US16875012
申请日：2020-05-15
Applicant: ASML Netherlands B.V.
Inventor： Ferry Zijp
IPC: H01L21/027 , G03F7/20 , G01N21/956
Abstract: A metrology tool, an aplanatic singlet lens, and a method of designing an aplanatic singlet lens are provided. The metrology tool is for determining a characteristic of a structure on a substrate. The metrology tool comprises an optical detection system for detecting radiation over a wavelength range. The optical detection system comprises an aplanatic singlet lens for focusing the radiation on to a detector. The aplanatic singlet lens has a n aplanatic wavelength which is within the wavelength range.
-
公开(公告)号：US09811001B2
公开(公告)日：2017-11-07
申请号：US15065674
申请日：2016-03-09
Applicant: ASML NETHERLANDS B.V.
Inventor： Peter Danny Van Voorst , Duygu Akbulut , Koos Van Berkel , Jeroen Johan Maarten Van De Wijdeven , Ferry Zijp
IPC: G01B11/04 , G02B7/02 , G03B27/32 , G03B27/74 , G03F7/20 , G02B21/00 , G01N21/956 , G01B11/00 , G02B27/09
CPC classification number: G03F7/70483 , G01B11/00 , G01N21/956 , G02B21/0016 , G02B21/33 , G02B27/0988 , G03F7/70625 , G03F7/70633
Abstract: A method of position control of an optical component relative to a surface is disclosed. The method may include: obtaining a first signal by a first position measurement process; controlling relative movement between the optical component and the surface for a first range of motion using the first signal; obtaining a second signal by a second position measurement process different than the first position measurement process; and controlling relative movement between the optical component and the surface for a second range of motion using the second signal, the second range of motion being nearer the surface than the first range of motion.
-
-
-
-
-
-
-
-
-
Search Results
16
records
(took 0.032 seconds)
