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    Solid state force transducer and method of making same
    1.
    再颁专利
    Solid state force transducer and method of making same 失效
    固态力传感器及其制作方法

    公开(公告)号：USRE31459E

    公开(公告)日：1983-12-06

    申请号：US115610

    申请日：1980-01-28

    Applicant: Barry Block

    Inventor： Barry Block

    IPC: H01L29/84 ,  G01P15/08 ,  G01P15/12 ,  H01L41/02 ,  H04R23/00

    CPC classification number: H04R23/006 ,  G01P15/0802 ,  G01P15/123 ,  H01L29/84 ,  Y10T29/49002 ,  Y10T29/49103

    Abstract: Solid state folded leaf spring force transducers are fabricated by batch photolithographic and etching techniques from a monocrystalline material, such as silicon. The folded leaf spring structure includes elongated gaps separating adjacent leaf spring leg portions, such elongated gaps being oriented parallel to a crystallographic axis of the monocrystalline material. In a preferred embodiment the monocrystalline material is of diamond cubic type and the leaf spring gaps extend in mutually orthogonal directions parallel to the and crystallographic axes, respectively. In a preferred method of fabricating the spring structure, the structure is etched from a monocrystalline wafer by means of an anisotropic etchant so as to more precisely define angles and dimensions of the resultant spring structure. In one embodiment, the gaps between adjacent leg portions of the spring structure are sealed in a fluid tight manner by means of oxide membranes left intact upon etching of the spring structure. In an accelerometer embodiment, sensing masses of equal weight are affixed to opposite sides of the spring structure for dynamically balancing same. .Iadd.

    Infrared laser detector employing a pressure controlled differential optoacoustic detector
    2.
    发明授权
    Infrared laser detector employing a pressure controlled differential optoacoustic detector 失效
    红外激光探测器采用压力差分光电探测器

    公开(公告)号：US4019056A

    公开(公告)日：1977-04-19

    申请号：US572013

    申请日：1975-04-28

    Applicant: Barry Block ,  Harry E. Aine

    Inventor： Barry Block ,  Harry E. Aine

    IPC: G01N21/17 ,  G01J3/42

    CPC classification number: G01N21/1702

    Abstract: An infrared laser absorption spectrometer is disclosed wherein a pair of detector cells are disposed serially along the laser beam path. The laser beam is modulated to produce a modulation of the absorption by the sample materials in the two cells. Modulated absorption by the samples produces an acoustic wave in each cell which is detected by a suitable microphone and subtracted so as to produce a difference signal corresponding to the difference in infrared absorption between the two cells so that undesired background effects common to both cells are cancelled. A pressure controller, which is responsive to the pressure difference between the sample pressure in the two cells at a frequency substantially below the beam modulation frequency is employed for controlling the pressure differential. In one embodiment the pressure controller includes a compliant membrane partitioning the two cells so that the membrane may move so as to equalize the pressures. In a second embodiment, deflection of the diaphragm of a differential microphone coupled into both cells is employed to derive an output utilized to control either the flow through the cells and/or the volume of the respective cells to control the pressure difference between the cells.

    Abstract translation: 公开了一种红外激光吸收光谱仪，其中一对检测器单元沿着激光束路径串联布置。 调制激光束以产生两个单元中的样品材料的吸收的调制。 样本的调制吸收在每个单元中产生声波，由合适的麦克风检测并减去，以产生对应于两个单元之间的红外吸收差的差信号，从而消除两个单元共同的不期望的背景效应 。 采用压力控制器，该压力控制器以基本上低于束调制频率的频率响应两个单元中的样品压力之间的压力差来控制压力差。 在一个实施例中，压力控制器包括分隔两个电池的顺应膜，使得膜可以移动以便均衡压力。 在第二实施例中，使用耦合到两个单元中的差分麦克风的隔膜的偏转来导出用于控制通过单元的流量和/或各个单元的体积以控制单元之间的压力差的输出。

    Dual focus lens with extended depth of focus
    4.
    发明授权
    Dual focus lens with extended depth of focus 失效
    双焦距镜头，具有更高的焦距

    公开(公告)号：US06330118B1

    公开(公告)日：2001-12-11

    申请号：US09288269

    申请日：1999-04-08

    Applicant: Walter Daschner ,  Barry Block ,  Arnold Thornton ,  Bernard Kress

    Inventor： Walter Daschner ,  Barry Block ,  Arnold Thornton ,  Bernard Kress

    IPC: G02B310

    CPC classification number: G11B7/1365 ,  G02B5/1876 ,  G02B5/188 ,  G11B7/0908 ,  G11B7/1353 ,  G11B7/1374 ,  G11B7/13922 ,  G11B2007/0006

    Abstract: A magneto optic or optical disk drive comprises a laser source for providing laser beam, and a lens or compound lens for focussing the laser onto a currently inserted recording disk with specific overcoat thickness. In one embodiment, the lens is a compound lens that can focus aberration-free spots on different types of disk media having recording layers located under overcoats of different thicknesses. When a specific disk is inserted, only one spot in focussed onto the current recording layer. Furthermore, if the disk spins rapidly, it can wobble. The lens or compound lens comprises different regions where the focal length may vary slightly and continuously or discretely. Because of this, as the disk wobbles, the lens can nonetheless continue to focus laser light onto a small spot on the recording media, providing increased depth of focus in the vicinity of the currently inserted recording media. Furthermore, the increased depth of focus will also remedy problems related to the change in focal length of the lens with changes in wavelength of the laser source. Because some of these changes in wavelength occur abruptly, this is also a case in which the limited performance of the auto-focus tracking system would be overly burdened.

    Abstract translation: 磁光盘或光盘驱动器包括用于提供激光束的激光源和用于将激光聚焦到具有特定外涂层厚度的当前插入的记录盘上的透镜或复合透镜。 在一个实施例中，透镜是可以将像差自由点聚焦在具有位于不同厚度的外涂层下的记录层的不同类型的盘介质上的复合透镜。 当插入特定盘时，只有一个点集中在当前记录层上。 此外，如果磁盘快速旋转，则可能会摆动。 透镜或复合透镜包括不同的区域，其中焦距可以稍微和连续地或离散地变化。 正因为如此，随着磁盘的摆动，透镜可以继续将激光聚焦到记录介质上的一个小点上，从而在当前插入的记录介质附近提供增加的焦点深度。 此外，增加的焦深也将补救与激光源的波长变化相关的透镜焦距变化的问题。 因为这些波长的一些变化突然发生，所以这也是自动对焦跟踪系统的有限性能过度负担的情况。

    Chemical etching of a semiconductive wafer by undercutting an etch stopped layer
    5.
    发明授权
    Chemical etching of a semiconductive wafer by undercutting an etch stopped layer 失效
    通过底切蚀刻停止层对半导体晶片进行化学蚀刻

    公开(公告)号：US4597003A

    公开(公告)日：1986-06-24

    申请号：US556832

    申请日：1983-12-01

    Applicant: Harry E. Aine ,  Barry Block

    Inventor： Harry E. Aine ,  Barry Block

    IPC: H01L21/306 ,  H01L21/308 ,  G01L1/22

    CPC classification number: H01L21/3086 ,  H01L21/30608 ,  H01L21/3081 ,  Y10T29/49103

    Abstract: Three dimensional single crystalline structures, such as folded cantilever beams supported from a frame and supporting a central structure free to move relative to the frame, are fabricated by anisotropically etching through openings in etch stop layers on opposite sides of the substrate wafer. The openings are patterned and aligned so that the etch stop layers are undercut to define etch stop portions interconnected by unetched substrate material.

    Abstract translation: 通过各向异性蚀刻穿过衬底晶片的相对侧上的蚀刻停止层中的开口，制造三维单晶结构，例如从框架支撑并支撑相对于框架自由移动的中心结构的折叠悬臂梁。 开口被图案化和对准，使得蚀刻停止层被底切以限定通过未蚀刻的衬底材料互连的蚀刻停止部分。

    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass
    7.
    发明授权
    Gray scale mask and depth pattern transfer technique using inorganic chalcogenide glass 失效
    使用无机硫族化物玻璃的灰度掩模和深度图案转移技术

    公开(公告)号：US6033766A

    公开(公告)日：2000-03-07

    申请号：US228910

    申请日：1999-01-11

    Applicant: Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

    Inventor： Barry Block ,  Arnold O. Thornton ,  Jan Ingwersen ,  Walter Daschner

    IPC: B81B1/00 ,  B81C1/00 ,  G03F1/00 ,  G03F1/54 ,  G03F7/00 ,  G03F7/004 ,  B32B3/00 ,  B32B15/00 ,  G03F9/00

    CPC classification number: G03F1/54 ,  G03F1/50 ,  G03F7/0007 ,  G03F7/001 ,  G03F7/0043 ,  Y10T428/24926

    Abstract: A method of producing a high resolution expanded analog gray scale mask is described. Using an inorganic chalcogenide glass, such as a selenium germanium, coated with a thin layer of silver, a gray scale mask may be produced with accurate control of the size, uniformity and variance of the pixels. The selenium germanium glass is composed of column structures arranged perpendicularly to the substrate giving a possible edge precision of 100 .ANG.. The column structures also prevent undercutting during the etching process, thus permitting pixels to be placed close together. Accordingly, selenium germanium may be used as a high resolution gray scale mask with an expanded analog gray scale. The gray scale mask may be used to impress information as a modulated thickness on a selenium germanium photoresist layer on an inorganic substrate. The selenium germanium photoresist layer may then transfer the gray scale to the substrate.

    Abstract translation: 描述了一种制造高分辨率扩展模拟灰度掩模的方法。 使用涂覆有薄银层的无机硫族化物玻璃（例如硒锗）可以通过精确控制像素的尺寸，均匀性和方差来生产灰度掩模。 硒锗玻璃由垂直于衬底排列的柱结构组成，给出了100 ANGSTROM的边缘精度。 柱结构还防止在蚀刻工艺期间的底切，从而允许像素靠近放置在一起。 因此，硒锗可以用作具有扩展的模拟灰度级的高分辨率灰度级掩模。 灰度掩模可用于将无机基底上的硒锗光致抗蚀剂层上的信息作为调制厚度印记。 然后，硒锗光致抗蚀剂层可以将灰度级转移到衬底。

    Thermal fluid flow sensing method and apparatus for sensing flow over a wide range of flow rates
    8.
    发明授权
    Thermal fluid flow sensing method and apparatus for sensing flow over a wide range of flow rates 失效
    热流体流量检测方法和装置，用于检测大范围流量的流量

    公开(公告)号：US4733559A

    公开(公告)日：1988-03-29

    申请号：US892111

    申请日：1986-08-04

    Applicant: Harry E. Aine ,  Barry Block

    Inventor： Harry E. Aine ,  Barry Block

    IPC: G01F1/684 ,  G01F1/696 ,  G01F7/00 ,  G01F1/68

    CPC classification number: G01F1/696 ,  G01F1/684 ,  G01F1/6845 ,  G01F1/6847 ,  G01F7/00

    Abstract: Miniature thermal fluid flow sensors of the airfoil type are made in batch form by forming the thermal fluid flow sensors on a thin sheet of material and bonding the sheet over an array of duct structures and dicing the individual sensors and duct structures apart. In one thermal flow sensor configuration, a flow heater is dispsoed inbetween first and second thermal flow sensors in heat exchanging relation therewith. A third thermal flow sensor is disposed upstream of the others out of heat exchanging relation with the heater for operation of the heater at a certain temperature above that sensed by the third sensor. In the low flow regime, flow is measured by the difference between the outputs of the first and second sensors, whereas in the high flow regime, the power required to maintain the temperature of the heater serves as a measure of the flow.

    Abstract translation: 通过在薄片材料上形成热流体流量传感器并将片材粘合在管道结构阵列上并将各个传感器和管道结构分开切割，从而以分批形式制造翼型的微型热流体流量传感器。 在一个热流传感器配置中，流动加热器分布在与其交换热交换的第一和第二热流传感器之间。 第三热流传感器设置在与加热器的热交换关系之外的其他热流传感器的上游，以在高于由第三传感器感测的温度的一定温度下操作加热器。 在低流量状态下，通过第一和第二传感器的输出之间的差异测量流量，而在高流量状态下，维持加热器温度所需的功率用作流量的度量。

    Method for producing a mask for use in X-ray photolithography and resulting structure
    9.
    发明授权
    Method for producing a mask for use in X-ray photolithography and resulting structure 失效
    用于生产用于X射线光刻及其结构的掩模的方法

    公开(公告)号：US4680243A

    公开(公告)日：1987-07-14

    申请号：US761993

    申请日：1985-08-02

    Applicant: Alexander R. Shimkunas ,  Barry Block

    Inventor： Alexander R. Shimkunas ,  Barry Block

    IPC: G03F1/22 ,  H01L21/027 ,  G21K5/00 ,  B44C1/22 ,  C23F1/02 ,  G03F9/00

    CPC classification number: G03F1/22

    Abstract: A method for manufacturing a mask (100) for use in x-ray photolithographic processes includes the step of coating a silicon wafer (10) with a layer of boron nitride (12). A masking substance (14) is used to coat one side of the boron nitride coated wafer, and the boron nitride is etched off of the other side of the wafer. The wafer (10) is then bonded to a pyrex ring (16) using a field assisted thermal bonding process. During the field assisted thermal bonding process, the silicon (11) is bonded directly to the pyrex (16). Then, a zirconium layer (24) is used to cover the mask and is selectively etched where it is desired to remove a circular portion of the silicon. Thereafter the silicon is subjected to a semianisotropic etch. The remaining structure includes a pyrex ring bonded to a silicon ring across which a layer of boron nitride is stretched. The layer of boron nitride is subjected to an annealing process and is then coated with an x-ray opaque material.

    Abstract translation: 制造用于x射线光刻工艺的掩模（100）的方法包括用氮化硼层（12）涂覆硅晶片（10）的步骤。 掩模物质（14）用于涂覆氮化硼涂覆的晶片的一侧，氮化硼从晶片的另一侧蚀刻掉。 然后使用场辅助热粘合工艺将晶片（10）结合到焦耳环（16）。 在场辅助热粘合过程中，硅（11）直接键合到发烟（16）。 然后，使用锆层（24）覆盖掩模，并且在需要去除硅的圆形部分的情况下被选择性地蚀刻。 此后，将硅进行半等向各向异性蚀刻。 剩余的结构包括结合到硅环上的发烟环，氮化硼层被拉伸通过该硅环。 对氮化硼层进行退火处理，然后用X射线不透明材料涂覆。

    Miniature valve and method of making same
    10.
    发明授权
    Miniature valve and method of making same 失效
    微型阀及其制作方法

    公开(公告)号：US4585209A

    公开(公告)日：1986-04-29

    申请号：US545907

    申请日：1983-10-27

    Applicant: Harry E. Aine ,  Barry Block

    Inventor： Harry E. Aine ,  Barry Block

    IPC: F15C5/00 ,  F16K31/02 ,  F16K99/00 ,  G05D7/06

    CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K31/02 ,  F16K99/0007 ,  F16K99/0051 ,  F16K99/0057 ,  G05D7/0694 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K99/0034 ,  Y10T137/7891

    Abstract: In a miniature valve, a valve seat is formed by aperturing a plate. A cantilever leaf spring is disposed overlying the apertured plate for controlling the flow of fluid therethrough. An electrostatic potential applied between the cantilever leaf spring and the valve plate pulls the leaf spring over the apertured plate for variably controlling flow through the valve in accordance with the magnitude of the applied potential. In a preferred embodiment, the cantilever leaf springs are made in batch form by etching a silicon wafer. A flow controller is provided by measuring the electrical capacitance of the valve, comparing it with a reference voltage and deriving a feedback voltage applied to the valve for controlling flow therethrough. In one embodiment, the width of the cantilever leaf spring valve member is narrowed toward its free end for finer control of flow.

    Abstract translation: 在微型阀中，通过打开板形成阀座。 悬臂板簧设置在多孔板上，用于控制流体的流动。 施加在悬臂板弹簧和阀板之间的静电势将片簧拉动在孔板上，用于根据施加电位的大小可变地控制通过阀的流量。 在优选实施例中，悬臂板弹簧通过蚀刻硅晶片而成批制成。 通过测量阀的电容量来提供流量控制器，将其与参考电压进行比较，并得出施加到阀门的反馈电压，以控制流过其中的流量。 在一个实施例中，悬臂弹簧阀构件的宽度朝向其自由端变窄以更精细地控制流量。

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