公开(公告)号：US08928042B2

公开(公告)日：2015-01-06

申请号：US12935270

申请日：2009-05-29

Applicant: Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

Inventor： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC: H01L29/84 ,  B81B3/00

CPC classification number: B81B3/0086 ,  B81B2207/07

Abstract: A structure having a plurality of conductive regions insulated electrically from each other comprises a movable piece supported movably above the upper face of the conductive region, the movable piece having an electrode in opposition to the conductive region, the structure being constructed to be capable of emitting and receiving electric signals through the lower face of the conductive region, the plural conductive regions being insulated by sequentially connected oxidized regions formed from an oxide of a material having through-holes or grooves.

Abstract translation: 具有彼此电绝缘的多个导电区域的结构包括可移动件，其被可移动地支撑在导电区域的上表面上方，所述可移动件具有与导电区域相对的电极，该结构被构造为能够发射 并且通过导电区域的下表面接收电信号，多个导电区域通过由具有通孔或凹槽的材料的氧化物形成的顺序连接的氧化区域而被绝缘。

公开(公告)号：US08371018B2

公开(公告)日：2013-02-12

申请号：US12678365

申请日：2008-09-19

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H04R31/00 ,  H02N1/00

CPC classification number: B06B1/0292 ,  Y10T29/49005

Abstract: In an electromechanical transducer which includes a vibration membrane provided with an upper electrode, a substrate provided with a lower electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate with these electrodes being arranged in opposition to each other, it is constructed such that a part of the vibration membrane and a region of the substrate are kept in contact with each other without application of an external force, and a remaining region of the vibration membrane other than its region in which the contact state is kept is able to vibrate.

Abstract translation: 在包括设置有上电极的振动膜的机电换能器中，设置有下电极的基板和适于以振动膜和基板之间形成间隙的方式支撑振动膜的支撑构件， 这些电极彼此相对布置，其构造使得振动膜的一部分和基板的区域在不施加外力的情况下保持彼此接触，并且其余的区域的振动膜其他 比其保持接触状态的区域能够振动。

公开(公告)号：US20090313809A1

公开(公告)日：2009-12-24

申请号：US12489315

申请日：2009-06-22

Applicant: Ayako Kato ,  Chienliu Chang

Inventor： Ayako Kato ,  Chienliu Chang

IPC: H04R31/00

CPC classification number: H04R31/00 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49137 ,  Y10T29/49155

Abstract: A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.

Abstract translation: 制备处理构件，其提供能够承受对由具有由基板和膜构成的元件的基板的后续后处理的通道，并且处理构件固定到基板，使得元件内的至少一部分为 由处理构件支撑。 这提供了一种制造方法，其中在制造机电换能装置时元件的物理强度得到加强，并且处理构件在元件处理后的短时间内容易地分离。

公开(公告)号：US08410659B2

公开(公告)日：2013-04-02

申请号：US12673232

申请日：2008-09-19

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H02N1/00 ,  H04R31/00

CPC classification number: B06B1/0292 ,  Y10T29/49005

Abstract: An electromechanical transducer includes a vibration membrane provided with a first electrode, a substrate provided with a second electrode, and a support member adapted to support the vibration membrane in such a manner that a gap is formed between the vibration membrane and the substrate, with the first and second electrodes being arranged in opposition to each other, wherein a part of the vibration membrane and a part of the substrate are in contact with each other at a contact region, and another region of the vibration membrane other than the contact region is able to vibrate; an overlap region is provided between the first electrode and second electrode in the contact region, and at least one of these electrodes has a through portion formed therethrough in at least a part of the overlap region, and a plurality of protrusions formed within the gap and on at least one of the vibration member and the support member, wherein the contact region is surrounded by the plurality of protrusions.

Abstract translation: 机电换能器包括设置有第一电极的振动膜，设置有第二电极的基板和适于以振动膜和基板之间形成间隙的方式支撑振动膜的支撑构件， 第一电极和第二电极彼此相对布置，其中振动膜的一部分和基板的一部分在接触区域彼此接触，并且除了接触区域之外的振动膜的另一区域能够 振动; 在接触区域中的第一电极和第二电极之间设置重叠区域，并且这些电极中的至少一个具有在重叠区域的至少一部分中穿过其形成的通孔部分，以及形成在间隙内的多个突起， 在所述振动构件和所述支撑构件中的至少一个上，其中所述接触区域被所述多个突起围绕。

公开(公告)号：US20120058587A1

公开(公告)日：2012-03-08

申请号：US13319970

申请日：2010-05-13

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L21/02

CPC classification number: B06B1/0292 ,  B81B2201/0271 ,  B81B2203/0127 ,  B81C1/00476 ,  B81C2201/0139

Abstract: A capacitive electromechanical transducer includes a substrate, a cavity formed by a vibrating membrane held above the substrate with a certain distance between the vibrating membrane and the substrate by supporting portions arranged on the substrate, a first electrode whose surface is exposed to the cavity, and a second electrode whose surface facing the cavity is covered with an insulating film, wherein the first electrode is provided on a surface of the substrate or a lower surface of the vibrating membrane and the second electrode is provided on a surface of the vibrating membrane or a surface of the substrate so as to face the first electrode. In this transducer, fine particles composed of an oxide film of a substance constituting the first electrode are arranged on the surface of the first electrode, and the diameter of the fine particles is 2 to 200 nm.

Abstract translation: 一种电容式机电换能器，包括基板，由振动膜形成的空腔，该振动膜通过支撑布置在基板上的部分而在振动膜和基板之间具有一定距离而保持在基板上方，其表面暴露于空腔中的第一电极， 面向空腔的表面的第二电极被绝缘膜覆盖，其中第一电极设置在基板的表面或振动膜的下表面上，第二电极设置在振动膜的表面上或 基板的表面以面对第一电极。 在该换能器中，由构成第一电极的物质的氧化物膜构成的微粒子配置在第一电极的表面上，微粒的直径为2〜200nm。

公开(公告)号：US08039836B2

公开(公告)日：2011-10-18

申请号：US12948683

申请日：2010-11-17

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L29/10

CPC classification number: H01L29/7869 ,  H01L27/1296 ,  H01L29/78603

Abstract: In the present invention, a thin film transistor is formed on a plastic film substrate (1) having anisotropy of thermal shrinkage rate or coefficient of thermal expansion in in-plane directions of the substrate. A channel is formed such that the direction (7) in which the thermal shrinkage rate or the coefficient of thermal expansion of the substrate is largest is nonparallel to the direction (8) of a current flowing through the channel of the thin film transistor. Then, a thin film transistor having stable and uniform electrical characteristics, which is formed on the plastic film substrate, is provided.

Abstract translation: 在本发明中，在具有基板的面内方向的热收缩率或热膨胀系数的各向异性的塑料薄膜基板（1）上形成薄膜晶体管。 形成通道，使得其中热收缩率或基板的热膨胀系数最大的方向（7）与流过薄膜晶体管的沟道的电流的方向（8）不平行。 然后，提供形成在塑料薄膜基板上的具有稳定均匀电特性的薄膜晶体管。

公开(公告)号：US20100327380A1

公开(公告)日：2010-12-30

申请号：US12918660

申请日：2009-04-28

Applicant: Chienliu Chang

Inventor： Chienliu Chang

IPC: H01L29/84 ,  H01L21/30

CPC classification number: B06B1/0292 ,  B81B2201/038 ,  B81B2203/0127 ,  B81B2203/0315 ,  B81B2203/04 ,  B81C1/00476 ,  B81C2201/0114

Abstract: In a method of manufacturing a capacitive electromechanical transducer, a first electrode (8) is formed on a substrate (4), an insulating layer (9) which has an opening (6) leading to the first electrode is formed on the first electrode (8), and a sacrificial layer is formed on the insulating layer. A membrane (3) having a second electrode (1) is formed on the sacrificial layer, and an aperture is provided as an etchant inlet in the membrane. The sacrificial layer is etched to form a cavity (10), and then the aperture serving as an etchant inlet is sealed. The etching is executed by electrolytic etching in which a current is caused to flow between the first electrode (8) and an externally placed counter electrode through the opening (6) and the aperture of the membrane.

Abstract translation: 在制造电容式机电换能器的方法中，在基板（4）上形成第一电极（8），在第一电极上形成具有通向第一电极的开口（6）的绝缘层（9） 8），并且在绝缘层上形成牺牲层。 在牺牲层上形成具有第二电极（1）的膜（3），并且在膜中设置有作为蚀刻剂入口的孔。 蚀刻牺牲层以形成空腔（10），然后密封用作蚀刻剂入口的孔。 蚀刻通过电解蚀刻进行，其中使电流通过开口（6）和膜的孔径在第一电极（8）和外部放置的对电极之间流动。

公开(公告)号：US20100213791A1

公开(公告)日：2010-08-26

申请号：US12599688

申请日：2008-06-30

Applicant: Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

Inventor： Atsushi Kandori ,  Chienliu Chang ,  Makoto Takagi

IPC: H02N1/00 ,  H03B1/00

CPC classification number: B81B3/0086 ,  B81B2201/0242 ,  B81B2201/033 ,  B81B2203/058 ,  G01C19/5719

Abstract: An oscillator device that includes a movable body oscillatably supported about a rotation axis, wherein the movable body is separated into plural electrically separated conductive regions in the thickness direction, and at least one of the plural electrically separated conductive regions in the thickness direction further has plural electrically separated conductive regions.

Abstract translation: 一种振荡器装置，包括围绕旋转轴可摆动地支撑的可移动体，其中所述可移动体在所述厚度方向上被分离为多个分离的导电区域，并且所述多个电分离的导电区域中的至少一个在所述厚度方向上还具有多个 电分离的导电区域。

公开(公告)号：US20090313808A1

公开(公告)日：2009-12-24

申请号：US12488588

申请日：2009-06-22

Applicant: Ayako Kato ,  Chienliu Chang

Inventor： Ayako Kato ,  Chienliu Chang

IPC: H04R31/00

CPC classification number: H04R31/00 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908

Abstract: A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Abstract translation: 沟槽形成在处理构件上，待固定在元件上的表面上，沟槽构成固定在元件上的外部通道的一部分。 在基板和处理构件的定影处理中，处理构件被固定成使得振动膜支撑部分的边缘方向和处理构件的槽的边缘方向相交。 因此，减少在处理或处理衬底期间膜会破裂的可能性，并且处理构件可以快速地从衬底移除。

公开(公告)号：US20080289182A1

公开(公告)日：2008-11-27

申请号：US12061512

申请日：2008-04-02

Applicant: Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima

Inventor： Yoshitaka Zaitsu ,  Chienliu Chang ,  Masao Majima

IPC: B23P13/00

CPC classification number: G02B26/0841 ,  B81C1/00634 ,  B81C2201/0101 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49124 ,  Y10T29/49165 ,  Y10T29/49609

Abstract: A structure fabricating method plastically deforms a target portion of a substrate, to thereby fabricate a structure having an inclined segment that is inclined relative to a principal surface of the substrate. The method includes forming a projection on the target portion to project from the principal surface of the substrate or from an opposing surface of the substrate on the side opposite to the principal surface, and applying a force to the projection to plastically deform the target portion such that the target portion is bent in a direction from one surface of the substrate on the side where the projection is formed, toward another surface on the side opposite to the one surface.

Abstract translation: 结构制造方法使基板的目标部分塑性变形，从而制造具有相对于基板的主表面倾斜的倾斜段的结构。 所述方法包括在所述目标部分上形成突出部，从所述基板的主表面或与所述基板的与所述主表面相反的一侧的相对表面突出，并且向所述突起施加力以使所述目标部分塑性变形 目标部分沿着从形成有突起的一侧的基板的一个表面朝向与该一个表面相对的一侧的另一表面的方向弯曲。