PIEZOELECTRIC ELEMENT AND ACTUATOR
    1.
    发明公开

    公开(公告)号:US20240114797A1

    公开(公告)日:2024-04-04

    申请号:US18454073

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate, a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode, in which both the first piezoelectric film and the second piezoelectric film have spontaneous polarizations aligned in a film thickness direction and directions of the spontaneous polarizations are the same, and in a case where in a hysteresis curve of one piezoelectric film, a coercive voltage Vcf+, a coercive voltage Vcf−, |Vcf+−Vcf−|=ΔVcf, and the larger of an absolute value of Vcf+ and an absolute value of Vcf− is denoted by Vcf, and in a hysteresis curve of the other piezoelectric film, a coercive voltage Vcr+, a coercive voltage Vcr−, |Vcr+−Vcr−|=ΔVcr, and the larger of an absolute value of Vcr+ and an absolute value Vcr− is denoted by Vcr, ΔVcr

    PIEZOELECTRIC ELEMENT AND ACTUATOR
    2.
    发明公开

    公开(公告)号:US20240114796A1

    公开(公告)日:2024-04-04

    申请号:US18454072

    申请日:2023-08-23

    CPC classification number: H10N30/50 H10N30/206 H10N30/802 H10N30/8554

    Abstract: A piezoelectric element includes a substrate; and a first electrode, a first piezoelectric film, a second electrode, a second piezoelectric film, and a third electrode which are provided on the substrate in this order, in which both the first piezoelectric film and the second piezoelectric film contain a perovskite-type oxide containing Pb Zr, Ti, and M, as a main component, Pb composition ratios in the perovskite-type oxides contained in the first piezoelectric film and the second piezoelectric film are different from each other, and polarization-electric field hysteresis measured for the first piezoelectric film with the first electrode grounded and the second electrode as a drive electrode, and polarization-electric field hysteresis measured for the second piezoelectric film with the second electrode grounded and the third electrode as a drive electrode are shifted in the same electric field direction with respect to origins thereof.

    PIEZOELECTRIC ELEMENT AND MANUFACTURING METHOD FOR PIEZOELECTRIC ELEMENT

    公开(公告)号:US20240023453A1

    公开(公告)日:2024-01-18

    申请号:US18472170

    申请日:2023-09-21

    CPC classification number: H10N30/877 H10N30/06

    Abstract: The piezoelectric element is a piezoelectric element including, on a substrate in the following order, a lower electrode layer, a piezoelectric film containing a perovskite-type oxide as a main component, and an upper electrode layer, in which at least a region of the upper electrode layer closest to a side of the piezoelectric film is composed of an oxide conductive layer containing In, and regarding an interface region between the piezoelectric film and the oxide conductive layer of the upper electrode layer, in an intensity profile of binding energy, which is acquired by an X-ray photoelectron spectroscopy measurement, a peak intensity ratio γ/α satisfies γ/α≤0.25, wherein a is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to oxygen, and γ is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to an OH group.

    METHOD FOR PRODUCING TRANSPARENT OPTICAL FILM AND METHOD FOR PRODUCING TRANSPARENT MULTILAYER FILM

    公开(公告)号:US20200002804A1

    公开(公告)日:2020-01-02

    申请号:US16568905

    申请日:2019-09-12

    Abstract: This method for producing a transparent optical film includes a film formation step of forming a silver layer and a high standard electrode potential metal layer so as to be laminated on a substrate, the film formation step including a silver deposition step of forming the silver layer, at a thickness of 6 nm or less by vacuum deposition, and a high standard electrode potential metal deposition step of forming the high standard electrode potential metal layer formed of a high standard electrode potential metal having a higher standard electrode potential than that of silver by vacuum deposition, and an alloying step of forming a silver alloy layer by diffusing the high standard electrode potential metal within the silver layer by performing a heating treatment at a temperature of 50° C. or higher and 400° C. or lower.

    PIEZOELECTRIC LAMINATE AND PIEZOELECTRIC ELEMENT

    公开(公告)号:US20230301193A1

    公开(公告)日:2023-09-21

    申请号:US18184045

    申请日:2023-03-15

    Inventor: Seigo NAKAMURA

    Abstract: There are provided a piezoelectric laminate, which include, on a substrate in the following order, a lower electrode layer and a piezoelectric film, in which the piezoelectric film contains a perovskite-type oxide, the piezoelectric film includes a first region in which the perovskite-type oxide contains, as a main component, a first perovskite crystal in which a first angle formed by a (100) plane orientation or a (001) plane orientation and a normal direction of a surface of the substrate is 5°˜30°, and includes a second region provided between the first region and the lower electrode layer, in which the perovskite-type oxide contains, as a main component, a second perovskite crystal in which a second angle formed by the (100) plane orientation or the (001) plane orientation and the normal direction is less than 5°, and a thickness of the second region is 30 nm or more.

    LAMINATED FILM AND METHOD FOR PRODUCING LAMINATED FILM

    公开(公告)号:US20200209433A1

    公开(公告)日:2020-07-02

    申请号:US16799782

    申请日:2020-02-24

    Abstract: In a laminated film, a resin substrate, an organic/inorganic multilayer, and a silver-containing metal layer having a thickness of 20 nm or less are laminated in this order, an anchor metal diffusion control layer having a Hamaker constant of 7.3×10−20 J or more is provided on the surface of the inorganic layer, an anchor region containing an oxide of an anchor metal having a surface energy which has a smaller difference with a surface energy of the silver-containing metal layer than a surface energy of the anchor metal diffusion control layer is provided between the anchor metal diffusion control layer and the silver-containing metal layer, and a cap region containing an oxide of the anchor metal is provided on a surface of the silver-containing metal layer that is opposite from a surface on a side closer to the anchor metal diffusion control layer.

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