摘要:
An apparatus for performing continuous treatment in vacuum including an inlet chamber, a first intermediate chamber, at least one vacuum treating chamber, a second intermediate chamber and a withdrawing chamber arranged in the indicated order in a direction in which base plates are successively transferred. An opening device normally closed and opened when a base plate is transferred therethrough is mounted on a wall at the inlet of the inlet chamber, between the adjacent chambers and on a wall at the outlet side of the withdrawing chamber. A conveyor device for conveying each base plate in a horizontal direction through the opening device is mounted in each of the chambers, and an evacuating device is also mounted in each chamber. A base plate storing device for storing a plurality of base plates in a magazine is mounted in the first and second intermediate chambers. At least one vacuum treating device is mounted in the vacuum treating chamber.
摘要:
In a sputtering apparatus comprising a main chamber for carrying out sputtering and a preliminary chamber for preliminarily processing a substrate prior to sputtering, a gate valve interposed between the chambers is opened with the pressure in the preliminary chamber is reduced lower than that in the main chamber after completion of the preliminary processing. The pressure reduction is carried out by reducing supply of a gas into the preliminary chamber by the use of a pressure control system coupled to the preliminary chamber. Preferably, the supply of the gas is bypassed through a valve to an exhausting system for the preliminary chamber. Alternatively, the pressure in the main chamber is made higher than that in the preliminary chamber after completion of the preliminary processing by squeezing an evacuation system for the main chamber to reduce the rate of evacuation. Supply of the gas into the preliminary chamber and evacuation of the main chamber may be simultaneously reduced.
摘要:
In an automatic loader for automatically loading a flat unprocessed substrate to a substrate processing apparatus for processing the flat substrate and automatically unloading a processed substrate, the automatic loader has: a plurality of cassette stages for vertically moving cassettes having a plurality of substrates held horizontally and parallel to each other; a first substrate convey mechanism contacting a single door of the substrate processing apparatus and forming a common conveyance path of all substrates; a single substrate posture control stage arranged in contact with the first convey mechanism to correct a posture of the substrate to be fed in the substrate processing apparatus; second substrate convey mechanisms for forming at least one conveyance path between the plurality of cassette stages and the substrate posture control stage and exchanging and conveying the substrate; and substrate counters arranged in the respective conveyance paths of the second substrate convey mechanisms. The processed substrates are returned to the original cassette.
摘要:
In a substrate processing apparatus, a substrate is processed to form a thin film thereon while it is maintained in the vertical direction, Furthermore, the rear surface of the substrate is cooled by a substrate cooling mechanism which contacts the rear surface thereof. The substrate cooling mechanism moves in a reciprocating fashion, whereas a substrate holder for holding the substrate moves both in horizontal and vertical directions.
摘要:
A collision determination device includes a target cell designation unit that designates a target cell for a voxel model which represents the shape of a first object. A determination test point generation unit generates determination test points for the target cell. A spatial curve creation unit creates a spatial curve as the trajectory curve of a determination test point. A curve intersecting determination unit determines whether or not each boundary element of a boundary representation model representing the shape of a second object is intersecting the spatial curve. A distance computation unit computes the closest distance from the spatial curve to the boundary surface of the boundary representation model. A collision determination unit determines, based on the determination result and the computation result, whether there is a possibility of collision between both objects.
摘要:
A premixed material is obtained by tempering a castable refractory powder composition comprising refractory aggregate, fine refractory powder, alumina cement, a dispersing agent and an alumina cement hydration stopper with water. The hydration stopper is acidic in a state of an aqueous solution. The amount of the hydration stopper is controlled such that the premixed material has a pH of 2 to 7. Immediately after adding and mixing an alumina cement hydration starter to the premixed material, the resultant mixture is cast into a mold. The addition of the hydration starter can be carried out 5 days or more after the production of the premixed material.
摘要:
There is provided a high-pressure fuel pump drive circuit for manipulating the electric current to be passed to a solenoid coil for controlling a high-pressure pump. This circuit is characterized in that a first switching element, the solenoid coil and a second switching element are connected in series with each other in a rout from a source voltage side to the ground side, that a flywheel diode for passing electric current to a power source is disposed parallel with the solenoid and with the first switching element, and that a Zener diode connected with the power source is disposed parallel with the second switching element, wherein a counter electromotive force to be developed at the opposite ends of solenoid coil on the occasion when the second switching element is changed from ON to OFF is consumed by the flywheel diode provided that the first switching element is in a state of ON, and the counter electromotive force is more rapidly consumed by the Zener diode provided that the first switching element is turned OFF.
摘要:
A cable extends from a ceiling section of a unit body to a bottom section of the unit body, is wound around a lower half circumference of a pulley, and extends to the ceiling section of the unit body. A fixed end as one end of the cable is fixed to the ceiling section of the unit body. A handy scanner is connected to a free end as the other end of the cable. The ceiling section of the unit body has a passing section through which the cable passes. The pulley rotates and rises and falls between the bottom section and the ceiling section along the longitudinal direction of the unit body.
摘要:
A vehicle suspension structure includes a frame member having a first side portion and a bottom portion. The bottom portion extends in a first direction relative to the first side portion. The structure also includes a suspension mounting member attached to the first side portion of the frame member. The suspension mounting member extends in a second direction that is opposite of the first direction. The structure also includes a support bracket attached to the bottom portion of the frame member and the suspension mounting member. The structure further includes a suspension member rotatably coupled to the suspension mounting member and supporting a vehicle wheel.
摘要:
In a terminal of an electric motor, a branch projects from a terminal connection on a side opposite from an extension. A projecting end side of the branch extends in an installation direction of the terminal, which is a direction for installing the terminal to a housing. The terminal is tiltable about a portion of the extension, which serves as a fulcrum, to cause abutment of the branch against a wall surface of the housing when the terminal connection receives a force in a direction opposite from the installation direction.