公开(公告)号：US08064233B2

公开(公告)日：2011-11-22

申请号：US11660357

申请日：2005-08-12

申请人： Hideo Ishizu ,  Masayuki Suzuki

发明人： Hideo Ishizu ,  Masayuki Suzuki

IPC分类号： H02M7/5383 ,  H02M7/5387 ,  H02M7/53846 ,  H02M7/5395

CPC分类号： H01L21/67248 ,  H02M7/53871 ,  H02M2001/0019 ,  H02M2001/0022 ,  H05B1/0233

摘要： A supplying power adjusting apparatus has excellent temperature response and excellent stabilities to power supply change and load change. The apparatus is provided with a semiconductor inverter for high-speed switching power control, which converts a direct current rectified by a rectifying circuit (10) into alternating current power in response to a control signal and supplies a heater (7) with the power; a temperature change detecting circuit (24) for detecting the temperature change of the heater (7); a power supply change detecting circuit (22) for detecting the power change of the rectifying circuit (10); a load change detecting circuit (23) for detecting the change of the alternating current power supplied to the heater (7); and a power control signal generating circuit (15) which calculates a power quantity to be supplied to the heater (7) and controls the frequency or duty ratio of a control signal to be added to the power controlling semiconductor inverter in response to the calculated results.

摘要翻译： 供电调整装置具有优异的温度响应和对电源变化和负载变化的良好稳定性。 该装置设置有用于高速开关功率控制的半导体逆变器，其根据控制信号将由整流电路（10）整流的直流电转换为交流电力，并向加热器（7）提供电力; 用于检测加热器（7）的温度变化的温度变化检测电路（24）; 用于检测整流电路（10）的功率变化的电源变化检测电路（22）。 负载变化检测电路（23），用于检测提供给加热器（7）的交流电力的变化; 以及功率控制信号发生电路（15），其计算要供给到所述加热器（7）的功率量，并且响应于所述计算结果来控制要添加到所述功率控制半导体逆变器的控制信号的频率或占空比 。

公开(公告)号：US07002113B2

公开(公告)日：2006-02-21

申请号：US10670337

申请日：2003-09-26

申请人： Masayuki Suzuki ,  Hideo Ishizu

发明人： Masayuki Suzuki ,  Hideo Ishizu

IPC分类号： B23K13/08

CPC分类号： H05B1/0233 ,  F27D19/00 ,  F27D21/0014 ,  H01L21/67248

摘要： A heater inspection apparatus including an applying unit, a current detector, a voltage detector, a temperature detector, a memory, a first calculating unit, a second calculating unit and a finding unit is provided. The applying unit applies an electrical power to a heater based on an AC power source. The current detector detects a current flowing through the heater. The voltage detector detects a voltage applied to the heater. The temperature detector detects a temperature of the heater. A temperature coefficient of resistance is stored in advance on the memory. The first calculating unit and the second calculating unit respectively calculate a resistance of the heater at an inspection time and a reference time. The finding unit finds a deterioration degree of the heater based on results of the first and second calculating units.

摘要翻译： 提供一种加热器检查装置，其包括施加单元，电流检测器，电压检测器，温度检测器，存储器，第一计算单元，第二计算单元和查找单元。 施加单元基于AC电源向加热器施加电力。 电流检测器检测流过加热器的电流。 电压检测器检测施加到加热器的电压。 温度检测器检测加热器的温度。 电阻的温度系数预先存储在存储器中。 第一计算单元和第二计算单元分别在检查时间和基准时间计算加热器的电阻。 发现单元基于第一和第二计算单元的结果来发现加热器的劣化程度。

公开(公告)号：US20110318489A1

公开(公告)日：2011-12-29

申请号：US13201510

申请日：2010-02-08

申请人： Hideo Ishizu ,  Masayuki Suzuki

发明人： Hideo Ishizu ,  Masayuki Suzuki

IPC分类号： C23C16/458 ,  B25B11/00 ,  C23C16/455

CPC分类号： H01L21/67313 ,  C23C16/4409 ,  H01J37/32779 ,  H01L21/67126 ,  H01L21/67754

摘要： There is provided a substrate processing apparatus, including: a substrate holder that holds a plurality of substrates (wafers) in a state of being arranged in a lateral direction (approximately in a horizontal direction) approximately in a vertical posture; a processing tube that houses the substrate holder; a throat side sealing part (throat side mechanical flange part) that air-tightly closes an opening part of the processing tube; a rotation part that rotates the substrate holder in a peripheral direction of the substrates, with an arrangement direction (a direction in which the substrates are held) of the plurality of substrates as a rotation axis, wherein the substrate holder includes a fixing part (movable holding part) and a fixture holding part for fixing the substrates approximately in a vertical posture.

摘要翻译： 提供了一种基板处理装置，包括：基板保持件，其以大致垂直姿势沿横向（大致水平方向）布置的状态保持多个基板（晶片）; 容纳所述基板支架的处理管; 气密地封闭处理管的开口部的喉侧密封部（喉侧机械凸缘部） 旋转部，其沿着所述基板的周向使所述基板保持件沿所述多个基板的排列方向（所述基板的保持方向）旋转为旋转轴，所述基板保持具包括固定部（可动 保持部）和用于大致垂直姿势地固定基板的夹具保持部。

公开(公告)号：US20050056635A1

公开(公告)日：2005-03-17

申请号：US10670337

申请日：2003-09-26

申请人： Masayuki Suzuki ,  Hideo Ishizu

发明人： Masayuki Suzuki ,  Hideo Ishizu

IPC分类号： H05B3/00 ,  F27D19/00 ,  F27D21/00 ,  H01L21/00 ,  H01L21/205 ,  H01L21/324 ,  H05B1/02

CPC分类号： H05B1/0233 ,  F27D19/00 ,  F27D21/0014 ,  H01L21/67248

摘要： To find the deterioration degree of a heater that heats a furnace. The present invention includes: a current detector 21 that detects a level of a current flowing through a heater 7 that is heated based on a commercial power source 1; a voltage detector 20 that detects a level of a voltage applied to the heater 7; a temperature detector 22 that detects a temperature of the heater 7; a table memory 14 on which a temperature coefficient of resistance for use in calculation of a resistance of the heater 7 at a time of manufacture is stored; and a CPU 17A that calculates a resistance of the heater 7 at an inspection time based on respective detection results by the voltage detector 20 and the current detector 21 and calculates the resistance of the heater 7 at a reference time based on a detection result by the temperature detector 22 and the temperature coefficient of resistance stored on the table memory 14, thereby finding the deterioration degree of the heater 7 based on the resistance of the heater 7 at the inspection time and the resistance of the heater 7 at the reference time.

摘要翻译： 找到加热炉的加热器的劣化程度。 本发明包括：电流检测器21，其检测流过基于商用电源1加热的加热器7的电流的电平; 检测施加到加热器7的电压的电平的电压检测器20; 温度检测器22，其检测加热器7的温度; 存储用于计算制造时的加热器7的电阻的电阻的温度系数的表存储器14; 以及CPU 17A，其基于电压检测器20和电流检测器21的各检测结果，在检查时刻计算加热器7的电阻，并基于检测结果由基准时间计算加热器7的电阻 温度检测器22和存储在台式存储器14上的电阻温度系数，从而基于加热器7在检查时的电阻和加热器7在参考时间的电阻而发现加热器7的劣化程度。

公开(公告)号：US09117862B2

公开(公告)日：2015-08-25

申请号：US13201510

申请日：2010-02-08

申请人： Hideo Ishizu ,  Masayuki Suzuki

发明人： Hideo Ishizu ,  Masayuki Suzuki

IPC分类号： C23C16/455 ,  C23C16/458 ,  B25B11/00 ,  H01L21/673 ,  H01L21/67 ,  H01L21/677 ,  H01J37/32 ,  C23C16/44

CPC分类号： H01L21/67313 ,  C23C16/4409 ,  H01J37/32779 ,  H01L21/67126 ,  H01L21/67754

摘要： There is provided a substrate processing apparatus 101, comprising: a substrate holder 217 that holds a plurality of substrates (wafers) 200 in a state of being arranged in a lateral direction (approximately in a horizontal direction) approximately in a vertical posture; a processing tube 205 that houses the substrate holder 217; a throat side sealing part (throat side mechanical flange part) 2190 that air-tightly closes an opening part of the processing tube 205; a rotation part 255 that rotates the substrate holder 217 in a peripheral direction of the substrates, with an arrangement direction (a direction in which the substrates 200 are held) of the plurality of substrates 200 as a rotation axis, wherein the substrate holder 217 includes a fixing part (movable holding part 217c) and a fixture holding part 217a for fixing the substrates 200 approximately in a vertical posture.

摘要翻译： 提供了一种基板处理装置101，包括：基本保持器217，其以大致垂直姿势沿横向（大致水平方向）布置的状态保持多个基板（晶片）200; 容纳衬底保持器217的处理管205; 气密地封闭处理管205的开口部的喉侧密封部（喉侧机械凸缘部）2190; 旋转部255，其使基板保持部217沿着基板的圆周方向以多个基板200的排列方向（保持基板200的方向）为旋转轴旋转，其中，基板保持部217包括： 固定部（活动保持部217c）和用于将基板200大致垂直地固定的固定部保持部217a。

公开(公告)号：US20070287201A1

公开(公告)日：2007-12-13

申请号：US11660357

申请日：2005-08-12

申请人： Hideo Ishizu ,  Masayuki Suzuki

发明人： Hideo Ishizu ,  Masayuki Suzuki

IPC分类号： H01L21/02

CPC分类号： H01L21/67248 ,  H02M7/53871 ,  H02M2001/0019 ,  H02M2001/0022 ,  H05B1/0233

摘要： A supplying power adjusting apparatus has excellent temperature response and excellent stabilities to power supply change and load change. The apparatus is provided with a semiconductor inverter for high-speed switching power control, which converts a direct current rectified by a rectifying circuit (10) into alternating current power in response to a control signal and supplies a heater (7) with the power; a temperature change detecting circuit (24) for detecting the temperature change of the heater (7); a power supply change detecting circuit (22) for detecting the power change of the rectifying circuit (10); a load change detecting circuit (23) for detecting the change of the alternating current power supplied to the heater (7); and a power control signal generating circuit (15) which calculates a power quantity to be supplied to the heater (7) and controls the frequency or duty ratio of a control signal to be added to the power controlling semiconductor inverter in response to the calculated results.

摘要翻译： 供电调整装置具有优异的温度响应和对电源变化和负载变化的良好稳定性。 该装置设置有用于高速开关功率控制的半导体逆变器，其根据控制信号将由整流电路（10）整流的直流电转换为交流电力，并向加热器（7）提供电力; 用于检测加热器（7）的温度变化的温度变化检测电路（24）; 用于检测整流电路（10）的功率变化的电源变化检测电路（22）。 负载变化检测电路（23），用于检测提供给加热器（7）的交流电力的变化; 以及功率控制信号发生电路（15），其计算要供给到所述加热器（7）的功率量，并且响应于所述计算结果来控制要添加到所述功率控制半导体逆变器的控制信号的频率或占空比 。

公开(公告)号：US09844837B2

公开(公告)日：2017-12-19

申请号：US14006538

申请日：2012-03-23

申请人： Masato Shimamura ,  Tsukasa Ohnishi ,  Mitsuhiro Kosai ,  Kazuyori Takagi ,  Tomoko Nonaka ,  Masayuki Suzuki ,  Toru Hayashida ,  Seiko Ishibashi ,  Shunsaku Yoshikawa ,  Yoshie Yamanaka

发明人： Masato Shimamura ,  Tsukasa Ohnishi ,  Mitsuhiro Kosai ,  Kazuyori Takagi ,  Tomoko Nonaka ,  Masayuki Suzuki ,  Toru Hayashida ,  Seiko Ishibashi ,  Shunsaku Yoshikawa ,  Yoshie Yamanaka

IPC分类号： B23K35/26 ,  B23K35/02 ,  B23K35/36 ,  C22F1/16 ,  C22C13/00 ,  C22C13/02

CPC分类号： B23K35/262 ,  B23K35/0227 ,  B23K35/0244 ,  B23K35/025 ,  B23K35/26 ,  B23K35/3618 ,  C22C13/00 ,  C22C13/02 ,  C22F1/16 ,  H01L2924/00013 ,  H01L2924/014 ,  Y10T428/12222 ,  H01L2924/01029 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01083 ,  H01L2224/13099 ,  H01L2224/13599 ,  H01L2224/05599 ,  H01L2224/05099 ,  H01L2224/29099 ,  H01L2224/29599

摘要： By using a solder alloy consisting essentially of 0.2-1.2 mass % of Ag, 0.6-0.9 mass % of Cu, 1.2-3.0 mass % of Bi, 0.02-1.0 mass % of Sb, 0.01-2.0 mass % of In, and a remainder of Sn, it is possible to obtain portable devices having excellent resistance to drop impact and excellent heat cycle properties without developing thermal fatigue even when used in a high-temperature environment such as inside a vehicle heated by the sun or in a low-temperature environment such as outdoors in snowy weather.

公开(公告)号：US09110274B2

公开(公告)日：2015-08-18

申请号：US13579100

申请日：2011-04-20

申请人： Kazuhiko Kajiyama ,  Masayuki Suzuki ,  Yuji Katashiba

发明人： Kazuhiko Kajiyama ,  Masayuki Suzuki ,  Yuji Katashiba

IPC分类号： G02B17/08

CPC分类号： G02B17/0808 ,  G02B17/0856

摘要： A catadioptric optical system of the present invention includes a catadioptric unit configured to condense light fluxes from an object and to form an intermediate image of the object, a field lens disposed at a position where the intermediate image are formed, and a dioptric unit configured to form the intermediate image on an image surface, and when νcat denotes a smallest Abbe number in Abbe numbers of materials of the first and second optical elements configuring the catadioptric unit and νdio denotes a smallest Abbe number in Abbe numbers of materials of a plurality of dioptric optical elements configuring the dioptric unit, νdio

摘要翻译： 本发明的反折射光学系统包括：折反射单元，被配置为使来自物体的光束冷凝并形成物体的中间像;设置在形成中间像的位置的场透镜;以及折射单元，被配置为 在图像表面上形成中间图像，并且当＆ngr; cat表示构成反射折射单元的第一和第二光学元件的材料的阿贝数中的最小阿贝数时，dio表示阿贝的最小阿贝数 配置多个度数光学元件，构成度数单元，满足目标。

公开(公告)号：US20140135436A1

公开(公告)日：2014-05-15

申请号：US14122123

申请日：2012-07-23

申请人： Masayuki Suzuki

发明人： Masayuki Suzuki

IPC分类号： C08G18/83 ,  C08L33/00

CPC分类号： C08G18/831 ,  C08G18/12 ,  C08G18/482 ,  C08G18/4841 ,  C08G18/5021 ,  C08G18/7621 ,  C08G2190/00 ,  C08L33/00 ,  C08G18/286 ,  C08G18/60

摘要： The invention generally relates to blocked prepolymers. More specifically, the invention generally relates to plastisol compositions comprising the blocked prepolymers. The blocked prepolymer is the reaction product of at least an isocyanate terminated prepolymer and a blocking agent, wherein the blocking agent is a nitrogen containing blocking agent. The isocyanate terminated prepolymer is the reaction product of at least one or more polyols comprising at least one polyol having an amine initiator and a stoichiometric excess of one or more organic polyisocyanate components.

摘要翻译： 本发明一般涉及封端的预聚物。 更具体地，本发明一般涉及包含封端预聚物的增塑溶胶组合物。 封端预聚物是至少异氰酸酯封端的预聚物和封闭剂的反应产物，其中封闭剂是含氮封闭剂。 异氰酸酯封端的预聚物是至少一种或多种包含至少一种具有胺引发剂和化学计量过量的一种或多种有机多异氰酸酯组分的多元醇的多元醇的反应产物。

公开(公告)号：US20120314052A1

公开(公告)日：2012-12-13

申请号：US13579100

申请日：2011-04-20

申请人： Kazuhiko Kajiyama ,  Masayuki Suzuki ,  Yuji Katashiba

发明人： Kazuhiko Kajiyama ,  Masayuki Suzuki ,  Yuji Katashiba

IPC分类号： G02B17/08 ,  H04N7/18

CPC分类号： G02B17/0808 ,  G02B17/0856

摘要： A catadioptric optical system of the present invention includes a catadioptric unit configured to condense light fluxes from an object and to form an intermediate image of the object, a field lens disposed at a position where the intermediate image are formed, and a dioptric unit configured to form the intermediate image on an image surface, and when νcat denotes a smallest Abbe number in Abbe numbers of materials of the first and second optical elements configuring the catadioptric unit and νdio denotes a smallest Abbe number in Abbe numbers of materials of a plurality of dioptric optical elements configuring the dioptric unit, νdio

摘要翻译： 本发明的反折射光学系统包括：折反射单元，被配置为使来自物体的光束冷凝并形成物体的中间像;设置在形成中间像的位置的场透镜;以及折射单元，被配置为 在图像表面上形成中间图像，并且当＆ngr; cat表示构成反射折射单元的第一和第二光学元件的材料的阿贝数中的最小阿贝数时，dio表示阿贝的最小阿贝数 配置多个度数光学元件，构成度数单元，满足目标。