FABRICATION OF UNDOPED HFO2 FERROELECTRIC LAYER USING PVD

    公开(公告)号:US20200066511A1

    公开(公告)日:2020-02-27

    申请号:US16113159

    申请日:2018-08-27

    Abstract: Embodiments disclosed herein comprise a ferroelectric material layer and methods of forming such materials. In an embodiment, the ferroelectric material layer comprises hafnium oxide with an orthorhombic phase. In an embodiment, the ferroelectric material layer may also comprise trace elements of a working gas. Additional embodiments may comprise: a semiconductor channel, a source region on a first end of the semiconductor channel, a drain region on a second end of the semiconductor channel, a gate electrode over the semiconductor channel, and a gate dielectric between the gate electrode and the semiconductor channel. In an embodiment, the gate dielectric includes a ferroelectric hafnium oxide. In an embodiment, the hafnium oxide is substantially free from dopants.

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